TWI607247B - Optical element and its manufacturing method - Google Patents

Optical element and its manufacturing method Download PDF

Info

Publication number
TWI607247B
TWI607247B TW102127855A TW102127855A TWI607247B TW I607247 B TWI607247 B TW I607247B TW 102127855 A TW102127855 A TW 102127855A TW 102127855 A TW102127855 A TW 102127855A TW I607247 B TWI607247 B TW I607247B
Authority
TW
Taiwan
Prior art keywords
concave portion
substrate
concave
optical
molding
Prior art date
Application number
TW102127855A
Other languages
English (en)
Chinese (zh)
Other versions
TW201411199A (zh
Inventor
Katsumi Shibayama
Takafumi Yokino
Katsuhiko Kato
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW201411199A publication Critical patent/TW201411199A/zh
Application granted granted Critical
Publication of TWI607247B publication Critical patent/TWI607247B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C39/10—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/54—Compensating volume change, e.g. retraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/189—Structurally combined with optical elements not having diffractive power
    • G02B5/1895—Structurally combined with optical elements not having diffractive power such optical elements having dioptric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
    • B29C2043/3615—Forming elements, e.g. mandrels or rams or stampers or pistons or plungers or punching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0083—Reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
TW102127855A 2012-08-06 2013-08-02 Optical element and its manufacturing method TWI607247B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012174324A JP6234667B2 (ja) 2012-08-06 2012-08-06 光学素子及びその製造方法

Publications (2)

Publication Number Publication Date
TW201411199A TW201411199A (zh) 2014-03-16
TWI607247B true TWI607247B (zh) 2017-12-01

Family

ID=50067807

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102127855A TWI607247B (zh) 2012-08-06 2013-08-02 Optical element and its manufacturing method

Country Status (6)

Country Link
US (2) US9594197B2 (enExample)
EP (1) EP2881768B1 (enExample)
JP (1) JP6234667B2 (enExample)
CN (1) CN104508519B (enExample)
TW (1) TWI607247B (enExample)
WO (1) WO2014024565A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6188743B2 (ja) 2014-06-19 2017-08-30 キヤノン株式会社 複数の光学機能面を有する光学素子、分光装置およびその製造方法
EP3009875B1 (en) * 2014-10-13 2020-04-01 Delta Electronics, Inc. Optical wavelength-converting device and illumination system using same
CN113777677B (zh) * 2015-11-16 2024-03-08 迪睿合株式会社 光学体、原盘、以及光学体的制造方法
CN112789538B (zh) * 2018-10-11 2022-12-06 三菱电机株式会社 光合波分波器
CN109852930B (zh) * 2019-03-29 2021-06-15 中国科学院上海技术物理研究所 一种补偿中口径介质膜平面反射镜镀膜形变的方法
CN110927835A (zh) * 2019-12-31 2020-03-27 上海理工大学 利用应变调制自组装制作光栅微透镜阵列的方法及产品
CN114274544A (zh) * 2021-12-24 2022-04-05 中国科学院长春光学精密机械与物理研究所 一种采用可变曲率模具制备复合材料反射镜的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006177994A (ja) * 2004-12-20 2006-07-06 Shimadzu Corp レプリカ光学素子
JP2007199540A (ja) * 2006-01-30 2007-08-09 Shimadzu Corp 反射型レプリカ光学素子
TW201109743A (en) * 2009-06-18 2011-03-16 Toppan Printing Co Ltd Optical element and method for preparing it
JP2012063764A (ja) * 2010-08-20 2012-03-29 Citizen Holdings Co Ltd 光学構造を備えた基板及びそれを用いた光学素子

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4012843A (en) * 1973-04-25 1977-03-22 Hitachi, Ltd. Concave diffraction grating and a manufacturing method thereof
FI54029C (fi) * 1974-06-04 1978-09-11 Nils Allan Danielsson Saett vid aostadkommande av stigmatisk avbildning vid spektralanalys med ett konkavgitter
US4192994A (en) * 1978-09-18 1980-03-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Diffractoid grating configuration for X-ray and ultraviolet focusing
JPS55136918A (en) * 1979-04-13 1980-10-25 Hitachi Ltd Aberration correcting recess diffraction grating
US4798446A (en) * 1987-09-14 1989-01-17 The United States Of America As Represented By The United States Department Of Energy Aplanatic and quasi-aplanatic diffraction gratings
JP3409383B2 (ja) * 1993-09-06 2003-05-26 株式会社ニコン 非球面光学素子の製造方法
US5543966A (en) * 1993-12-29 1996-08-06 Eastman Kodak Company Hybrid refractive/diffractive achromatic camera lens
DE4434814A1 (de) * 1994-09-29 1996-04-04 Microparts Gmbh Infrarotspektrometrischer Sensor für Gase
AU5913698A (en) * 1997-01-17 1998-08-07 Cymer, Inc. Reflective overcoat for replicated diffraction gratings
EP2261920A3 (en) * 1998-02-23 2011-03-09 Kabushiki Kaisha Toshiba Information storage medium, information playback method and apparatus and information recording method
JP3865516B2 (ja) * 1998-10-23 2007-01-10 ソニー株式会社 全方位撮像装置
KR100853132B1 (ko) * 1999-07-23 2008-08-20 가부시키가이샤 니콘 수지 접합형 광학소자, 그 제조방법 및 광학물품
US6473232B2 (en) * 2000-03-08 2002-10-29 Canon Kabushiki Kaisha Optical system having a diffractive optical element, and optical apparatus
JP4587418B2 (ja) * 2000-09-27 2010-11-24 キヤノン株式会社 回折光学素子及び該回折光学素子を有する光学系
US20020163688A1 (en) * 2001-03-26 2002-11-07 Zuhua Zhu Optical communications system and vertical cavity surface emitting laser therefor
US6534903B1 (en) * 2002-02-25 2003-03-18 General Electric Company Broad spectrum reflective coating for an electric lamp
JP2003266450A (ja) * 2002-03-18 2003-09-24 Canon Inc 光学素子及びその製造方法
DE60326724D1 (de) 2002-05-30 2009-04-30 Ibm Strukturierungsverfahren
WO2004049027A1 (ja) * 2002-11-26 2004-06-10 Fujitsu Limited 光合分波器
US7054065B2 (en) * 2003-03-27 2006-05-30 The Regents Of The University Of California Durable silver thin film coating for diffraction gratings
KR100624414B1 (ko) * 2003-12-06 2006-09-18 삼성전자주식회사 회절 렌즈 어레이 몰드의 제조 방법 및 ｕｖ 디스펜서
JP4387855B2 (ja) * 2004-04-01 2009-12-24 キヤノン株式会社 光学系
US20050286570A1 (en) * 2004-06-29 2005-12-29 Lian-Qin Xiang Tunable laser with a concave diffraction grating
US9146155B2 (en) * 2007-03-15 2015-09-29 Oto Photonics, Inc. Optical system and manufacturing method thereof
US7656585B1 (en) * 2008-08-19 2010-02-02 Microvision, Inc. Embedded relay lens for head-up displays or the like
JP5415060B2 (ja) * 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
JP5205241B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5207938B2 (ja) * 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5205239B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5205242B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器の製造方法
TWI425203B (zh) * 2008-09-03 2014-02-01 Univ Nat Central 高頻譜掃描裝置及其方法
FR2945159B1 (fr) * 2009-04-29 2016-04-01 Horiba Jobin Yvon Sas Reseau de diffraction metallique en reflexion a haute tenue au flux en regime femtoseconde, systeme comprenant un tel reseau et procede d'amelioration du seuil d'endommagement d'un reseau de diffraction metallique
JP5411778B2 (ja) * 2009-04-30 2014-02-12 キヤノン株式会社 分光測色装置、およびそれを用いた画像形成装置
JP5421684B2 (ja) * 2009-07-29 2014-02-19 キヤノン株式会社 回折光学素子、それを用いた分光測色装置および画像形成装置
JP5592089B2 (ja) * 2009-08-19 2014-09-17 浜松ホトニクス株式会社 分光モジュール及びその製造方法
DE102009046831B4 (de) * 2009-11-18 2015-02-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP2012013530A (ja) * 2010-06-30 2012-01-19 Fujifilm Corp 回折格子及びその製造方法、並びに放射線撮影装置
JP5996440B2 (ja) * 2011-02-08 2016-09-21 浜松ホトニクス株式会社 光学素子及びその製造方法
JP5767882B2 (ja) * 2011-07-26 2015-08-26 浜松ホトニクス株式会社 分光器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006177994A (ja) * 2004-12-20 2006-07-06 Shimadzu Corp レプリカ光学素子
JP2007199540A (ja) * 2006-01-30 2007-08-09 Shimadzu Corp 反射型レプリカ光学素子
TW201109743A (en) * 2009-06-18 2011-03-16 Toppan Printing Co Ltd Optical element and method for preparing it
JP2012063764A (ja) * 2010-08-20 2012-03-29 Citizen Holdings Co Ltd 光学構造を備えた基板及びそれを用いた光学素子

Also Published As

Publication number Publication date
CN104508519A (zh) 2015-04-08
US20170160449A1 (en) 2017-06-08
JP2014032368A (ja) 2014-02-20
TW201411199A (zh) 2014-03-16
US10386552B2 (en) 2019-08-20
CN104508519B (zh) 2018-04-03
WO2014024565A1 (ja) 2014-02-13
EP2881768A4 (en) 2016-04-06
JP6234667B2 (ja) 2017-11-22
EP2881768A1 (en) 2015-06-10
US9594197B2 (en) 2017-03-14
EP2881768B1 (en) 2024-08-14
US20150205017A1 (en) 2015-07-23

Similar Documents

Publication Publication Date Title
TWI607247B (zh) Optical element and its manufacturing method
JP5024047B2 (ja) 微小構造体の製造方法
JP5996440B2 (ja) 光学素子及びその製造方法
WO2009139327A1 (ja) 分光器の製造方法
JP2009028952A (ja) 光学素子の製造方法
US20230375748A1 (en) Optical elements that include a metasurface
WO2021233831A1 (en) Optical devices including metastructures and methods for fabricating the optical devices
US8154794B2 (en) Imaging lens and method of manufacturing the same
JP2002071923A (ja) 回折光学素子の製造方法及び回折光学素子、並びに該回折光学素子を有する光学系、該光学系を有する撮影装置と観察装置
JP2006106229A (ja) 透過型光学素子の製造方法および透過型光学素子
TWI402162B (zh) 複合微透鏡及複合微透鏡陣列
JP2003262713A (ja) 回折光学素子及び回折光学素子の製造方法
JP2017211466A (ja) 回折光学素子
EP3926372B1 (en) Optical component
JP2009092687A (ja) レプリカ回折格子
JP2007283581A (ja) 表面に微細な凹凸構造を有する構造体の製造方法
US10175462B2 (en) Wafer level lens system and method of fabricating the same
JPWO2008001935A1 (ja) 反射防止構造体及びその製造方法
JP2001147309A (ja) 回折格子及びその製造方法、並びに複合光学素子の製造方法
JPH11295511A (ja) 回折光学素子
TWI398670B (zh) 鏡片陣列製造方法
JP2008129229A (ja) 複合光学素子および複合光学素子の製造方法
JP2011191395A (ja) 光学素子
WO2022078894A1 (en) Microwave treatment of replicated optical structures
WO2017195879A1 (ja) 樹脂成形品の成形方法及び樹脂成形品