TWI602331B - 使用外部鐵磁偏壓膜之壓控磁各向異性切換裝置 - Google Patents

使用外部鐵磁偏壓膜之壓控磁各向異性切換裝置 Download PDF

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Publication number
TWI602331B
TWI602331B TW105117430A TW105117430A TWI602331B TW I602331 B TWI602331 B TW I602331B TW 105117430 A TW105117430 A TW 105117430A TW 105117430 A TW105117430 A TW 105117430A TW I602331 B TWI602331 B TW I602331B
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TW
Taiwan
Prior art keywords
layer
ferromagnetic layer
magnet
ferromagnetic
mtj
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TW105117430A
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English (en)
Chinese (zh)
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TW201705568A (zh
Inventor
喬丹 亞設 凱婷
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Hgst荷蘭公司
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Publication of TW201705568A publication Critical patent/TW201705568A/zh
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1673Reading or sensing circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1675Writing or programming circuits or methods
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Materials of the active region

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
TW105117430A 2015-06-02 2016-06-02 使用外部鐵磁偏壓膜之壓控磁各向異性切換裝置 TWI602331B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/728,788 US9620562B2 (en) 2015-06-02 2015-06-02 Voltage-controlled magnetic anisotropy switching device using an external ferromagnetic biasing film

Publications (2)

Publication Number Publication Date
TW201705568A TW201705568A (zh) 2017-02-01
TWI602331B true TWI602331B (zh) 2017-10-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW105117430A TWI602331B (zh) 2015-06-02 2016-06-02 使用外部鐵磁偏壓膜之壓控磁各向異性切換裝置

Country Status (8)

Country Link
US (1) US9620562B2 (OSRAM)
JP (1) JP2016225633A (OSRAM)
KR (1) KR101869149B1 (OSRAM)
CN (1) CN106374035B (OSRAM)
DE (1) DE102016006651A1 (OSRAM)
FR (1) FR3037185B1 (OSRAM)
GB (1) GB2539102B (OSRAM)
TW (1) TWI602331B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI783539B (zh) * 2020-10-02 2022-11-11 美商桑迪士克科技有限責任公司 具有外部磁場程式化輔助的超低電力推理引擎

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10103317B2 (en) 2015-01-05 2018-10-16 Inston, Inc. Systems and methods for implementing efficient magnetoelectric junctions
US10217798B2 (en) 2015-01-13 2019-02-26 Inston, Inc. Systems and methods for implementing select devices constructed from 2D materials
US9978931B2 (en) 2015-02-13 2018-05-22 Inston Inc. Systems and methods for implementing robust magnetoelectric junctions
US20170033281A1 (en) * 2015-07-29 2017-02-02 Inston Inc. Systems and Methods for Implementing Magnetoelectric Junctions Including Integrated Magnetization Components
US10102893B2 (en) 2016-06-28 2018-10-16 Inston Inc. Systems for implementing word line pulse techniques in magnetoelectric junctions
WO2018198713A1 (ja) * 2017-04-28 2018-11-01 国立研究開発法人産業技術総合研究所 磁気素子
US10861527B2 (en) 2017-06-27 2020-12-08 Inston, Inc. Systems and methods for optimizing magnetic torque and pulse shaping for reducing write error rate in magnetoelectric random access memory
WO2019006037A1 (en) 2017-06-27 2019-01-03 Inston, Inc. REDUCTION OF WRITE ERROR RATE IN MAGNETOELECTRIC RAM
JP2019057601A (ja) 2017-09-20 2019-04-11 東芝メモリ株式会社 磁気記憶装置
US10593866B2 (en) * 2018-06-27 2020-03-17 Globalfoundries Singapore Pte. Ltd. Magnetic field assisted MRAM structures, integrated circuits, and methods for fabricating the same
JP7005452B2 (ja) * 2018-07-30 2022-01-21 株式会社東芝 磁気記憶装置
US10636962B2 (en) 2018-08-21 2020-04-28 Qualcomm Incorporated Spin-orbit torque (SOT) magnetic tunnel junction (MTJ) (SOT-MTJ) devices employing perpendicular and in-plane free layer magnetic anisotropy to facilitate perpendicular magnetic orientation switching, suitable for use in memory systems for storing data
US11195991B2 (en) 2018-09-27 2021-12-07 Taiwan Semiconductor Manufacturing Company, Ltd. Magnetic random access memory assisted devices and methods of making
EP3671874B1 (en) 2018-12-21 2022-06-22 IMEC vzw Zero-field switching for sot technology
CN110061127B (zh) * 2019-05-20 2023-08-08 中国科学院微电子研究所 磁隧道结的形成方法及磁阻式随机存储器
CN112310274A (zh) * 2019-07-31 2021-02-02 中电海康集团有限公司 自旋轨道矩磁性存储单元及其制备方法
US11069390B2 (en) * 2019-09-06 2021-07-20 Wisconsin Alumni Research Foundation Spin-orbit torque magnetoresistive random access memory with magnetic field-free current-induced perpendicular magnetization reversal
CN111490156A (zh) * 2020-04-21 2020-08-04 浙江驰拓科技有限公司 自旋轨道力矩磁存储器件及其制备方法
CN114730832B (zh) * 2020-08-27 2026-01-30 桑迪士克科技股份有限公司 多铁辅助电压控制磁各向异性存储器设备及其制造方法
US11276446B1 (en) 2020-08-27 2022-03-15 Western Digital Technologies, Inc. Multiferroic-assisted voltage controlled magnetic anisotropy memory device and methods of manufacturing the same
US11264562B1 (en) 2020-08-27 2022-03-01 Western Digital Technologies, Inc. Multiferroic-assisted voltage controlled magnetic anisotropy memory device and methods of manufacturing the same
US11729996B2 (en) 2021-07-30 2023-08-15 International Business Machines Corporation High retention eMRAM using VCMA-assisted writing
JP2023074096A (ja) * 2021-11-17 2023-05-29 ソニーセミコンダクタソリューションズ株式会社 磁気抵抗効果メモリ、メモリアレイ及びメモリシステム
US12471497B2 (en) 2022-01-25 2025-11-11 International Business Machines Corporation Magnetic tunnel junction device with magnetoelectric assist
US20230298646A1 (en) * 2022-03-21 2023-09-21 International Business Machines Corporation Deterministic voltage-controlled magnetic anisotropy (vcma) mram with spin-transfer torque (stt) mram assistance
WO2025074925A1 (ja) * 2023-10-03 2025-04-10 ソニーセミコンダクタソリューションズ株式会社 記憶装置および電子機器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120002463A1 (en) * 2006-02-25 2012-01-05 Avalanche Technology, Inc. high capacity low cost multi-state magnetic memory
US20120018788A1 (en) * 2008-10-09 2012-01-26 Seagate Technology Llc Magnetic stack with laminated layer
US20140233306A1 (en) * 2003-08-19 2014-08-21 New York University Bipolar spin-transfer switching

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729410A (en) 1996-11-27 1998-03-17 International Business Machines Corporation Magnetic tunnel junction device with longitudinal biasing
US5936293A (en) * 1998-01-23 1999-08-10 International Business Machines Corporation Hard/soft magnetic tunnel junction device with stable hard ferromagnetic layer
US6114719A (en) 1998-05-29 2000-09-05 International Business Machines Corporation Magnetic tunnel junction memory cell with in-stack biasing of the free ferromagnetic layer and memory array using the cell
JP4575136B2 (ja) * 2004-12-20 2010-11-04 株式会社東芝 磁気記録素子、磁気記録装置、および情報の記録方法
US7285836B2 (en) * 2005-03-09 2007-10-23 Maglabs, Inc. Magnetic random access memory with stacked memory cells having oppositely-directed hard-axis biasing
US7230845B1 (en) * 2005-07-29 2007-06-12 Grandis, Inc. Magnetic devices having a hard bias field and magnetic memory devices using the magnetic devices
US7777261B2 (en) 2005-09-20 2010-08-17 Grandis Inc. Magnetic device having stabilized free ferromagnetic layer
JP2008135432A (ja) * 2006-11-27 2008-06-12 Tdk Corp トンネル磁気抵抗効果素子及びその製造方法
JP2008171882A (ja) * 2007-01-09 2008-07-24 Sony Corp 記憶素子及びメモリ
JP4435189B2 (ja) * 2007-02-15 2010-03-17 株式会社東芝 磁気記憶素子及び磁気記憶装置
FR2914482B1 (fr) * 2007-03-29 2009-05-29 Commissariat Energie Atomique Memoire magnetique a jonction tunnel magnetique
EP2015307B8 (en) * 2007-07-13 2013-05-15 Hitachi Ltd. Magnetoresistive device
JP5077019B2 (ja) * 2008-03-31 2012-11-21 Tdk株式会社 磁気記憶装置
US9728240B2 (en) 2009-04-08 2017-08-08 Avalanche Technology, Inc. Pulse programming techniques for voltage-controlled magnetoresistive tunnel junction (MTJ)
US9196332B2 (en) * 2011-02-16 2015-11-24 Avalanche Technology, Inc. Perpendicular magnetic tunnel junction (pMTJ) with in-plane magneto-static switching-enhancing layer
WO2012159078A2 (en) * 2011-05-19 2012-11-22 The Regents Of The University Of California Voltage-controlled magnetic anisotropy (vcma) switch and magneto-electric memory (meram)
US9293694B2 (en) * 2011-11-03 2016-03-22 Ge Yi Magnetoresistive random access memory cell with independently operating read and write components
WO2014022304A1 (en) 2012-07-30 2014-02-06 The Regents Of The University Of California Multiple-bits-per-cell voltage-controlled magnetic memory
KR101649978B1 (ko) 2012-08-06 2016-08-22 코넬 유니버시티 자기 나노구조체들의 스핀 홀 토크 효과들에 기초한 전기적 게이트 3-단자 회로들 및 디바이스들
US8988923B2 (en) 2012-09-11 2015-03-24 The Regents Of The University Of California Nonvolatile magneto-electric random access memory circuit with burst writing and back-to-back reads
US9036407B2 (en) 2012-12-07 2015-05-19 The Regents Of The University Of California Voltage-controlled magnetic memory element with canted magnetization

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140233306A1 (en) * 2003-08-19 2014-08-21 New York University Bipolar spin-transfer switching
US20120002463A1 (en) * 2006-02-25 2012-01-05 Avalanche Technology, Inc. high capacity low cost multi-state magnetic memory
US20120018788A1 (en) * 2008-10-09 2012-01-26 Seagate Technology Llc Magnetic stack with laminated layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI783539B (zh) * 2020-10-02 2022-11-11 美商桑迪士克科技有限責任公司 具有外部磁場程式化輔助的超低電力推理引擎
US12093812B2 (en) 2020-10-02 2024-09-17 Sandisk Technologies Llc Ultralow power inference engine with external magnetic field programming assistance

Also Published As

Publication number Publication date
KR20160142255A (ko) 2016-12-12
US20160358973A1 (en) 2016-12-08
GB201609565D0 (en) 2016-07-13
CN106374035A (zh) 2017-02-01
FR3037185A1 (OSRAM) 2016-12-09
GB2539102B (en) 2019-09-11
CN106374035B (zh) 2019-11-26
DE102016006651A1 (de) 2016-12-08
GB2539102A (en) 2016-12-07
KR101869149B1 (ko) 2018-06-19
US9620562B2 (en) 2017-04-11
TW201705568A (zh) 2017-02-01
JP2016225633A (ja) 2016-12-28
FR3037185B1 (fr) 2019-10-25

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