TWI587929B - Fluid coating device - Google Patents

Description

Fluid coating device

The present invention relates to, for example, bonding a 3D material, a film, a glass substrate or the like to a display such as a smart phone, a semiconductor substrate or a liquid crystal substrate, etc., for applying a coating liquid such as a binder or a resist to a uniform film thickness along the surface thereof. A surface coating fluid application device (coating device).

In the fluid application device, the coating mechanism unit that is freely movable along the surface of the object to be coated is provided with two divided heads and a spacer sandwiched between the two divided heads, one of which is The split head is formed with a liquid injection port of the coating liquid, and is formed with a cavity portion for diffusing the coating liquid injected from the liquid injection port into the width direction, and the spacer has a concave portion of the glyph, and when a spacer is sandwiched between the two divided heads, a slit-like slit is formed between the two divided heads, and the thickness of the spacer determines the size of the slit gap, and the recess The length of the slit determines the length of the slit, that is, the coating head for determining the coating width of the coating liquid (for example, see Patent Document 1).

Patent Document 1: Japanese Patent Publication No. 2003-211053

In the conventional fluid application device, when the application width of the coating liquid or the gap of the slit is changed in accordance with the change in the size of the workpiece to be coated, it is necessary to replace the gasket with a recess having a width corresponding thereto. Or gaskets with different thicknesses.

However, the spacer is sandwiched between the two split heads, and the split heads are fastened to each other by bolts so as not to leak even if the injection pressure of the coating liquid is high, so when replacing the gasket, first After the two split heads and the spacers are completely disassembled, and the split split head and the replaced spacer are respectively aligned with high precision, they must be integrally mounted, and there is trouble in replacement work and time for replacement of the gasket. Moreover, the operation rate is lowered and the productivity is low.

The present invention has been made to solve such a problem, and an object thereof is to easily attach and detach a spacer to a first split head and a second split head, and to mount it with high precision.

In order to achieve such a object, the present invention provides a fluid application device comprising: a first split head having a supply path of a coating liquid; and a second split head facing away from the first split head to be separated and approached The direction is reciprocally movable, and an insertion space is formed between the first dividing head and the plurality of spacers, and the plurality of spacers are oriented toward the insertion space to face the opposite surfaces of the first dividing head and the second dividing head Provided to be freely provided, and having a recess for forming a slit of the coating liquid that communicates with the supply path between the first split head and the second split head; and the first spacer is provided with a first portion a brake, wherein the first brake abuts against one or both of the first split head or the second split head in a direction in which the spacer is inserted into the insertion space, and sets an interval of the insertion space to be inserted into the spacer The time is wider than the thickness of the spacer, and is set to be the same size as the thickness of the spacer after inserting the spacer.

According to the invention having the foregoing feature, in a state in which the first split head and the second split head are separated and moved, the spacer is inserted toward the insertion space so that the insertion space becomes wider than the thickness of the spacer, whereby the surface of the spacer The two sides are not in contact with the opposing surfaces of the first dividing head and the second dividing head, and the first brake provided on the spacer is in contact with either or both of the first dividing head or the second dividing head. Thereby, the concave portion is positioned in the insertion direction of the spacer, and after the spacer is inserted, the first split head and the second split head are moved close to each other, so that the insertion space becomes the same size as the thickness of the spacer, thereby the first split The opposing faces of the head and the second dividing head are respectively in close contact with the front and back surfaces of the gasket, and the gasket is positioned in the thickness direction thereof.

Thereby, the spacer can be easily attached and detached with respect to the first split head and the second split head, and can be mounted with high precision alignment.

As a result, in accordance with the conventional need to change the size of the workpiece to be coated, etc., when the gasket is replaced, the two divided heads and the spacer are disassembled and the replaced spacer and the split head are aligned with high precision. In comparison with the method of mounting, the replacement time of the gasket can be greatly shortened, and the gap size and the coating width of the slits with the dimensional change can be easily changed, and the operation rate can be improved accordingly, and the productivity is excellent.

Further, since the front and back surfaces of the spacer are not in contact with the opposing surfaces of the first split head and the second split head in association with the replacement of the spacer, it is possible to prevent generation of garbage such as a coating liquid adhering to the spacer, and it is also possible to reduce the occurrence of waste. Accompanied by cleaning work.

1‧‧‧ first split head

1a‧‧‧ facing

1b‧‧‧Supply road

1b1‧‧‧Injection

1b2‧‧‧Cavity Department

1c‧‧‧ cone

2‧‧‧Second split head

2a‧‧‧ facing

2b‧‧‧ cone

3‧‧‧shims

3a‧‧‧Surface of the gasket

3b‧‧‧ inside the gasket

3c‧‧‧ recess

3d‧‧‧width end of the gasket

3e‧‧‧width end of the gasket

3f‧‧‧Handle

4‧‧‧Guide members

4a‧‧‧Support rod

4b‧‧‧ recess

5‧‧‧First brake

5a‧‧‧ wall thickness

6‧‧‧Second brake

6a‧‧‧ positioning convex

7‧‧‧Flexible components

8‧‧‧Retaining components

8a‧‧‧Connected components

8b‧‧‧through hole

8c‧‧‧through hole

8d‧‧‧ screw hole

A‧‧‧Fluid coating device

S‧‧‧ insertion space

T‧‧ slot

1 is an explanatory view showing an overall configuration of a fluid application device according to an embodiment of the present invention, and (a) is a partial cutaway front view when the gasket is inserted, and (b) is a longitudinal sectional side view when the gasket is inserted.

Fig. 2 is an exploded perspective view.

Fig. 3 is an explanatory view showing the gasket after insertion, and (a) is a partial slit main view, and (b) is a partial slit enlarged longitudinal sectional side view.

Figure 4 is a perspective view of the gasket after insertion.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The fluid application device A according to the embodiment of the present invention is a (slot) coating device that is integrally attached to a device main body (not shown) that is disposed to face a surface of a workpiece to be coated, and The coating liquid such as a binder or a resist is applied to a surface having a uniform film thickness by being moved relative to the surface of the workpiece together with the apparatus main body.

As will be described in detail, as shown in FIGS. 1 to 4, the fluid application device A according to the embodiment of the present invention has the following main components: the first split head 1 is detachably attached to the apparatus main body; The dividing head 2 is disposed to face the first dividing head 1 and reciprocally move in a direction of separation and proximity; a plurality of spacers 3, The opposing faces 1a and 2a of the first dividing head 1 and the second dividing head 2 are detachably provided.

The first dividing head 1 is formed into a substantially rectangular shape having a width dimension longer than a length dimension orthogonal thereto, and has a smooth opposing surface 1a formed on one side thereof so as to oppose a second dividing head 2 to be described later. And a supply path 1b of a coating liquid (not shown).

The supply path 1b has an injection port 1b1 connected to a supply source of the coating liquid, and a cavity portion 1b2 for diffusing the coating liquid supplied from the injection port 1b1 in the width direction of the first dividing head 1, and the cavity The portion 1b2 is opened along the opposing surface 1a of the first dividing head 1.

In the example shown in FIGS. 1 to 4, the injection port 1b1 of the coating liquid is opened in the first dividing head 1 at one end surface in the longitudinal direction orthogonal to the width direction.

The second dividing head 2 is formed in a substantially rectangular shape having a width larger than a length dimension orthogonal thereto, and has a side opposite to the opposing surface 1a of the first dividing head 1 on one side thereof. Smooth opposite surface 2a.

The first dividing head 1 and the second dividing head 2 are supported by the guiding member 4 so as to be separated and approached from each other by the respective opposing faces 1a, 2a in the thickness direction of the first dividing head 1 and the second dividing head 2. Reciprocating movement is freely performed.

In the example shown in FIGS. 1 to 4, as a specific example of the guiding member 4, the support rod 4a is protruded from the opposing surface 1a of the first dividing head 1, and the opposing surface 2a of the second dividing head 2 is present. The recessed portion 4b that is slidably fitted to the support rod 4a is recessed, and is supported by the reciprocating movement of the support rod 4a and the recessed portion 4b.

Further, although not shown in the drawings, the support member 4 may be protruded from the opposing surface 2a of the second split head 2 as the guide member 4, and may be recessed on the opposing surface 1a of the first split head 1. The recessed portion 4b or a support structure having a structure different from that of the support rod 4a and the recessed portion 4b, or a drive source such as a driver arranged in parallel, can mechanically reciprocate the first split head 1 and the second split head 2 in the direction of separation and approach mobile.

Further, the shape is divided between the opposing faces 1a, 2a of the first split head 1 and the second split head 2. An insertion space S for inserting the spacer 3 to be described later is provided.

The insertion space S of the spacer 3 to be described later is formed over the entire lengthwise direction orthogonal to the width direction of the first division head 1 and the second division head 2, and in the examples shown in Figs. 1 to 4, The injection port 1b1 of the coating liquid is inserted into the gasket 3 to be described later on the one end side in the longitudinal direction.

The spacer 3 is formed in a plate shape having a rectangular shape and a smooth surface 3a and a rear surface 3b having a width smaller than that of the first dividing head 1 and the second dividing head 2, and facing the opposing surface of the first dividing head 1. The insertion space S formed between the opposing surface 2a of the first dividing head 2 and the second dividing head 2 is manually or mechanically inserted into the short side direction of the first dividing head 1 and the second dividing head 2, thereby being configured to be sandwiched Between the opposing faces 1a, 2a of the first dividing head 1 and the second dividing head 2.

A recess 3c is formed in the end portion of the spacer 3 before being inserted into the insertion space S, that is, the end portion in the width direction.

The recessed portion 3c communicates with the cavity portion 1b2 of the supply liquid supply path 1b while being inserted into the insertion space S, and forms a narrow gap between the opposing faces 1a and 2a of the first and second divided heads 2, 2a. Slotted slot T.

The slit T is formed along the tapered portions 1c and 2b which are formed at the other end in the longitudinal direction orthogonal to the width direction of the first dividing head 1 and the second dividing head 2.

The length dimension of the recessed portion 3c in the width direction determines the length of the slit T, that is, the coating width of the coating liquid.

The thickness of the spacer 3 determines the size of the gap of the slit T to be described later, that is, the coating thickness (film thickness) of the coating liquid.

Therefore, a plurality of types of spacers 3 having different lengths in the width direction of the concave portion 3c and a plurality of spacers 3 having different thicknesses are prepared. When the size or the like of the workpiece to be coated is changed, the gasket 3 having the concave portion 3c having the width direction corresponding to the coating width of the coating liquid and the thickness corresponding to the desired thickness (film thickness) of the coating liquid are selected. The gasket 3 is replaced by a gasket to satisfy the change in the size of the workpiece.

Further, the plurality of spacers 3 are formed in the same size regardless of the change in the length dimension or the thickness dimension of the recessed portion 3c in the width direction.

Further, in the spacer 3, on the side opposite to the recess 3c, one of the first split head 1 or the second split head 2 or the first split head 1 and the second is provided in the insertion direction of the spacer 3 The first brake 5 of both sides of the head 2 is divided. When the spacer 3 is inserted into the insertion space S, the first stopper 5 is brought into contact with either or both of the first split head 1 or the second split head 2, whereby the recess 3c is positioned in the insertion direction of the spacer 3.

In the example shown in FIGS. 1 to 4, as a specific example of the first brake 5, a thick portion 5a larger than the thickness of the spacer 3 is connected to the opposite end portion of the recess 3c in the spacer 3 A positioning step portion that faces the one end in the longitudinal direction of the second dividing head 2 is formed between the surface 3a of the spacer 3. As shown in FIGS. 3 and 4, after the spacer 3 is inserted into the insertion space S, the positioning step portion of the thick portion 5a is brought into contact with one end surface of the second dividing head 2 in the longitudinal direction.

Further, although not shown in the drawings, as the first brake 5, a positioning step portion that is in contact with the one end surface of the first dividing head 1 in the longitudinal direction may be formed between the thick portion 5a and the inner surface 3b of the spacer 3. Or a positioning step portion that is in contact with the one end surface of the first dividing head 1 and the second dividing head 2 in the longitudinal direction is formed between the wall thickness portion 5a and the surface 3a and the inner surface 3b of the spacer 3, or instead of the illustrated wall The positioning step of the thick portion 5a is provided with a positioning member of another structure such as a projection.

In addition, either one of the first split head 1 or the second split head 2 or both of the first split head 1 and the second split head 2 is provided to one or both of the width direction end portions 3d and 3e of the spacer 3 When the second brake 6 is inserted into the insertion space S, the spacer 3 and the recess are contacted by either or both of the width direction end portions 3d and 3e of the spacer 3 in contact with the second brake 6. It is preferable that 3c is positioned in the width direction thereof.

In the example shown in FIGS. 1 to 4, as a specific example of the second brake 6, the positioning convex portion 6a is formed in the longitudinal direction of the second dividing head 2 in the longitudinal direction of the thickness portion 5a of the spacer 3. The two ends are abutted in abutting manner. As shown in Figure 3 and Figure 4, set to insert When the space S is inserted into most of the spacer 3, both end portions in the width direction of the thick portion 5a of the spacer 3 are brought into contact with the positioning convex portion 6a.

Further, although not shown in the drawings, as the second brake 6, the positioning convex portion 6a may be formed at both ends in the longitudinal direction of the first dividing head 1 and at both ends in the width direction of the thick portion 5a of the spacer 3. The portions are respectively abutted, or instead of the both end portions in the width direction of the thick portion 5a of the spacer 3, the positioning convex portion 6a is directly abutted with the end portions 3d and 3e of the spacer 3 in the width direction. The manner is protruded toward the insertion space S so that the width direction end portions 3d, 3e of the spacer 3 are inserted while being in contact with the positioning convex portion 6a, or at the end portion or the pad only in the width direction of the wall thickness portion 5a of the spacer 3. The positioning convex member 6a is protruded so that either one of the width direction end portions 3d and 3e of the sheet 3 abuts, or a positioning member of another configuration is provided instead of the positioning convex portion 6a shown in the drawing.

Further, when the spacer 3 is inserted into the insertion space S and after the spacer 3 is inserted, the gap between the insertion space S and the first division head 1 or the second division head 2 is manually or mechanically moved apart from each other. Or both of the first divided head 1 and the second divided head 2 are set to a predetermined size.

That is, when the spacer 3 is inserted, as shown by the two-dot chain line in FIG. 1(b) and FIG. 2, the interval between the insertion spaces S is set to be wider than the thickness of the thickest spacer 3. The front and back surfaces 3a, 3b of the spacer 3 being inserted are not in contact with the opposing faces 1a, 2a of the first dividing head 1 and the second dividing head 2, respectively.

Further, as shown in FIG. 3(b) and FIG. 4, after the spacer 3 is inserted, the interval between the insertion spaces S is set to be the same as the thickness dimension of the spacer 3 so that the inserted spacer 3 is provided. The two surfaces 3a and 3b of the front and back surfaces are in close contact with the opposing surfaces 1a and 2a of the first dividing head 1 and the second dividing head 2, respectively.

Further, it is preferable to provide the elastic member 7 and the holding member 8 in the first split head 1 and the second split head 2. The elastic member 7 is in the space of the insertion space S at the time of inserting the spacer 3 The formula is pressed in the separation direction, or the insertion space S is pressed in the approach direction so as to be spaced apart from the insertion of the spacer 3, and the holding member 8 is held such that the insertion space S is spaced after the spacer 3 is inserted, or The insertion space S is held in such a manner as to be spaced apart when the spacer 3 is inserted.

In the example shown in FIG. 1 to FIG. 4, as the elastic member 7, a spring material 7a composed of a coil spring or the like is used to press the insertion space S in the separation direction so as to be spaced apart from the gap 3 when the insertion space S is inserted. The opposing faces 1a and 2a of the first split head 1 and the second split head 2 are provided as the holding member 8, and the first split head 1 and the second split head 2 are coupled to each other so as to sandwich the spacer 3 The joint member 8a is configured to remove the joint member 8a of the retaining member 8 so that the interval of the insertion space S is automatically separated and moved to a wider extent than the thickness of the gasket 3 by the pressing force of the elastic member 7 (spring material 7a). Set the location. A bolt 8 is used as the connecting member 8a, and the through holes 8b and 8c through which the bolts are inserted in the second split head 2 and the spacer 3 are opened. The first split head 1 is provided with a screw hole 8d which is screwed to the screw portion of the bolt. .

Further, although not shown in the drawings, the connecting member 8a may be changed to another connecting member instead of the bolt.

In addition, the elastic member 7 is provided with an elastic material that is pressed in the approaching direction so that the insertion space S becomes an interval after the insertion of the spacer 3, and the holding member 8 is provided with the insertion space S at an interval when the spacer 3 is inserted. The spacer is held in such a manner that the interval of the insertion space S is automatically moved to the same thickness as the spacer 3 by the pressing force of the elastic member (spring material) 7 by removing the spacer of the holding member 8. The setting position of the size.

According to the fluid application device A of the embodiment of the present invention, in a state where the first split head 1 and the second split head 2 are separated and moved, the spacer 3 is inserted toward the insertion space S so that the insertion space S becomes a cushion. The thickness of the sheet 3 is wider, whereby the front and back surfaces 3a, 3b of the spacer 3 can be sandwiched without coming into contact with the opposing faces 1a, 2a of the first dividing head 1 and the second dividing head 2.

At the same time, the first brake 5 provided on the spacer 3 and either the first split head 1 and the second split head 2 or the first split head 1 and the second split head 2 are connected. The contact is made such that the recess 3c is positioned in the insertion direction of the spacer 3.

Further, after the spacer 3 is inserted, the first split head 1 and the second split head 2 are moved close to each other in such a manner that the insertion space S becomes the same size as the thickness of the spacer 3, whereby the first split head 1 and the second The opposing faces 1a, 2a of the split head 2 are in close contact with the front and back faces 3a, 3b of the spacer 3, respectively, and the spacer 3 is positioned in the thickness direction thereof.

Therefore, the spacer 3 can be easily attached and detached with respect to the first split head 1 and the second split head 2, and can be mounted with high precision.

As a result, the replacement time of the gasket 3 can be greatly shortened, and the gap size and the coating width change operation (change adjustment operation) of the slit T with the dimensional change can be easily performed, and the operation rate can be improved accordingly and the productivity can be improved. .

Further, with the replacement of the spacer 3, the front and back surfaces 3a, 3b of the spacer 3 are not in contact with the opposing faces 1a, 2a of the first split head 1 and the second split head 2, so that adhesion to the spacer 3 can be prevented. The generation of waste such as liquid can also reduce the cleaning work associated with it.

However, when the gasket 3 is replaced, it is dangerous to remove and decompose the very heavy first dividing head 1 and the second dividing head 2 from the apparatus main body.

On the other hand, according to the fluid application device A of the embodiment of the present invention, the replacement of the spacer 3 can be performed without removing the first split head 1 and the second split head 2 from the apparatus main body, so that the replacement of the spacer 3 can be improved. Workability and safety.

In particular, when either or both of the first split head 1 or the second split head 2 are provided with the second brake 6 that abuts the width direction end portions 3d and 3e of the spacer 3, the spacer is inserted into the insertion space S. At 3 o'clock, the spacer 3 and the recess 3c are positioned in the width direction with respect to the first division head 1 and the second division head 2 by bringing the width direction end portions 3d, 3e of the spacer 3 into contact with the second stopper 6.

Therefore, the spacer 3 can be easily attached to the first dividing head 1 and the second dividing head 2 with high precision in the width direction.

As a result, the mounting accuracy can be further improved.

Further, when the elastic member 7 and the holding member 8 are provided in the first dividing head 1 and the second dividing head 2, the elastic member 7 is removed by removing the holding member 8 from the first dividing head 1 and the second dividing head 2 The interval of the pressing force insertion space S is automatically separated and moved to a setting position wider than the thickness dimension of the spacer 3 or automatically moved to a set position which becomes the same size as the thickness dimension of the spacer 3, wherein the elasticity The member 7 is pressed in the separation direction so that the insertion space S becomes an interval when the spacer 3 is inserted, or is pressed in the approach direction so that the insertion space S becomes an interval after the spacer 3 is inserted, and the holding member 8 is inserted into the space. S is held in such a manner as to be spaced apart after the spacer 3 is inserted, or is held so that the insertion space S becomes an interval when the spacer 3 is inserted.

Therefore, the replacement work of the gasket 3 becomes easier, and the replacement time of the gasket 3 can be further shortened.

As a result, the operation rate is further improved.

Next, an embodiment of the present invention will be described with reference to the accompanying drawings.

[Examples]

As shown in FIGS. 1 to 4, in this embodiment, a handle 3f is provided on the opposite side of the recess 3c of the spacer 3, and the operator holds the handle 3f to manually take the spacer 3 into the insertion space S.

As shown in FIGS. 1 to 4, a plurality of handles 3f are protruded from the thick portion 5a that is connected to the opposite end portion of the recess 3c on the spacer 3.

Further, although not shown in the drawings, the handle 3f is integrally formed at the end of the spacer 3, and can be changed to a mounting structure other than the illustrated example.

According to the fluid application device A of the first embodiment of the present invention, the operator can hold the insertion space S by holding the handle 3f and the spacer 3 as a whole without coming into contact with the concave portion 3c.

Therefore, the replacement of the gasket 3 can be performed manually and without contamination.

As a result, it is possible to easily perform the change operation (change adjustment operation) of the gap size and the coating width of the slit T which is changed according to the size of the manual, and it is advantageous in that the operation rate can be increased correspondingly and the productivity is excellent.

Further, in the above-described embodiment, the operator manually holds the handle 3 into the insertion space S by holding the handle 3f of the spacer 3, but the present invention is not limited thereto, and mechanical means such as a robot may be prepared. The pick-and-place of the spacer 3 for the insertion space S is performed.

1‧‧‧ first split head

1a‧‧‧ facing

1b‧‧‧Supply road

1b1‧‧‧Injection

1b2‧‧‧Cavity Department

1c‧‧‧ cone

2‧‧‧Second split head

2a‧‧‧ facing

2b‧‧‧ cone

3‧‧‧shims

3a‧‧‧Surface of the gasket

3b‧‧‧ inside the gasket

3c‧‧‧ recess

3d‧‧‧width end of the gasket

3e‧‧‧width end of the gasket

3f‧‧‧Handle

4‧‧‧Guide members

5‧‧‧First brake

5a‧‧‧ wall thickness

6‧‧‧Second brake

6a‧‧‧ positioning convex

7‧‧‧Flexible components

8‧‧‧Retaining components

8a‧‧‧Connected components

8b‧‧‧through hole

8c‧‧‧through hole

8d‧‧‧ screw hole

A‧‧‧Fluid coating device

S‧‧‧ insertion space

T‧‧ slot

Claims (5)

A fluid application device comprising: a first split head having a supply path of a coating liquid; and a second split head disposed opposite the first split head and between the first split head and the first split head Forming an insertion space; the plurality of spacers are disposed to face the insertion space so as to be detachably disposed along the opposite surfaces of the first dividing head and the second dividing head, and have the first dividing head and the foregoing a concave portion forming a slit of the coating liquid that communicates with the supply path between the two divided heads; and a guiding member that is separated from and close to each other in a thickness direction of the first dividing head and the second dividing head, The opposing faces of the first dividing head and the second dividing head are reciprocally supported, and a first brake is provided on the spacer, and the first brake abuts in a direction of the insertion space in which the spacer is inserted In either or both of the first split head or the second split head, the interval between the insertion spaces is set to be wider than the thickness of the spacer when the spacer is inserted, and After insertion of the spacer and the thickness of the gasket becomes the same size. The fluid application device according to claim 1, wherein the second brake that is in contact with the end portion in the width direction of the spacer is provided in either or both of the first split head or the second split head. The fluid application device according to claim 1, wherein the first split head and the second split head are provided with an elastic member and a holding member, and the elastic member is separated in such a manner that the insertion space becomes an interval when the spacer is inserted. Directional pressing, or inserting the aforementioned insertion space into the foregoing The spacer is pressed in the approach direction, and the holding member is held such that the insertion space is spaced apart from the spacer, or the insertion space is held at an interval when the spacer is inserted. The fluid application device according to claim 2, wherein the first split head and the second split head are provided with an elastic member and a holding member, wherein the elastic member is inserted into the spacer when the insertion space is inserted Pressing in the separation direction or pressing the insertion space so as to be spaced apart from the spacer; the holding member is held such that the insertion space is inserted into the spacer, or the insertion space is The interval at which the aforementioned spacer is inserted is maintained. The fluid application device of claim 1, 2, 3 or 4, wherein a handle is provided on the opposite side of the recess on the spacer.