CN103623972A

CN103623972A - Fluid coater

Info

Publication number: CN103623972A
Application number: CN201310368612.1A
Authority: CN
Inventors: 大谷义和
Original assignee: Shin Etsu Engineering Co Ltd
Current assignee: Shin Etsu Chemical Co Ltd; Shin Etsu Engineering Co Ltd
Priority date: 2012-08-22
Filing date: 2013-08-22
Publication date: 2014-03-12
Anticipated expiration: 2033-08-22
Also published as: CN103623972B; KR20140025277A; TW201408382A; TWI587929B; JP2014039913A; JP5114606B1

Abstract

The present invention provides a fluid coater, SIMM is simply detached and attached to a first division head and a second division head, and an object of the present invention is to carry out alignment with high precision and to attach. The present invention which has the characteristics mentioned above is in the state in which the first division head (1) and the second division head (2) are carrying out separation movement so that insertion space (S) may become wider than the thickness of SIMM (3), at the same time it is put without rear surface both sides (3a, 3b) of SIMM (3) contacting the opposed face of the first division head (1) and the second division head (2) by inserting SIMM (3) towards insertion space (S). At the same time, a first stopper (5) provided by SIMM (3) in either one of the first division head (1) or the second division head (2) by or the thing to dash against both, to the path of insertion of SIMM (3), it is positioned by the concave part (3c) and after insertion of SIMM (3), by carrying out approach movement of the first division head (1) and the second division head (2) so that insertion space (S) may serve as thickness of SIMM (3), and the dimension, the opposed face (1a, 2a) of the first division head (1) and the second division head (2) is close to rear surface both sides (3a, 3b) of SIMM (3), respectively, and SIMM (3) is positioned to the thickness direction.

Description

Fluid coating device

Technical field

The present invention relates to a kind of being used to and when 3D material, film or glass substrate etc. being bonded in as the displays such as smart mobile phone, semiconductor substrate or crystal liquid substrate etc., the coating fluids such as binding liquid or resist are become to the planar fluid coating device (apparatus for coating) of homogeneous film thickness along its surface-coated.

Background technology

In the past, as this fluid coating device, have for following dispense tip, with respect to moving coating mechanism portion freely along the surface of coating object, possessing 2 cuts apart head and is sandwiched this 2 pads of cutting apart between head, cut apart the liquid injection port that is formed with coating fluid on head for one therein, and be formed with the cavity portion that the coating fluid for making to be injected into from liquid injection port spreads to width, pad has the recess of コ font, pad is sandwiched 2 while cutting apart between head, at these 2, cut apart the slit that forms slit-shaped between head, the thickness of pad determines the size in slit gap, the length of recess determines that coating width that length of slit determine coating fluid (for example, refer to Patent Document 1).

Patent documentation 1: Japanese Patent Publication 2003-211053 communique

In this fluid coating device in the past, whenever the coating width of coating fluid and the gap of slit along with become coating object workpiece dimension modifying etc. and while being changed, need to be replaced by pad or the different pad of thickness of the recess with the width corresponding from it.

Yet, pad is held under the arm 2 and is cut apart between head, by bolt, will cut apart secured to one another, even so that the injection of coating fluid press and highlyer also do not leak, while therefore changing pad, first by 2, cutting apart head decomposes completely with pad, and to after cutting apart of being decomposed, the pad changing first watch carried out contraposition accurately respectively, they must be installed as to one, there is the replacing spended time of changing the loaded down with trivial details and pad of operation, running rate declines, the problem that productivity is poor.

Summary of the invention

The present invention is usingd and is addressed this is that as problem, and its object is that with respect to first, cutting apart head and second cuts apart head and load and unload like a cork pad and carry out contraposition and installation etc. accurately.

In order to reach this object, the invention is characterized in to possess: first cuts apart head, there is the supply road of coating fluid, second cuts apart head, be configured to cut apart opposed and move back and forth freely to separated and approaching direction with described first, and and described first cut apart between head and be formed with and insert space, and multiple pad, be configured to towards described insertion space and along described first cut apart head and described second cut apart head opposed faces pick and place freely, and have for cutting apart described first the recess that head and described second is cut apart the slit of the described coating fluid that between head, formation is communicated with described supply road, on described pad, be provided with the first stop, this first stop is cut apart head or the described second any one party or both sides of cutting apart in head with respect to described first, direction of insertion butt to described pad with respect to described insertion space, the interval in described insertion space is set as when inserting described pad wider than the thickness of described pad, and be set as becoming same size with the thickness of described pad after inserting described pad.

There is the present invention of aforementioned feature, first cut apart head and second cut apart a separate mobile in case insertion space than the wider state of the thickness of pad under, towards inserting space, insert pad, the table of pad back of the body two sides does not cut apart with first that head and second cuts apart that the opposed faces of head contacts and when being sandwiched thus, the first stop and first that makes to be arranged at pad cuts apart head or the second any one party or both sides of cutting apart in head contact, recess is positioned to the direction of insertion of pad thus, and after insertion pad, make first to cut apart head and second and cut apart head and approach and mobilely to insert the thickness of space and pad, to become same size, make thus first to cut apart head and second and cut apart the opposed faces of head and connect airtight with the table back of the body two sides of pad respectively, pad is positioned to its thickness direction.

Therefore, can cut apart head and second with respect to first cuts apart head and loads and unloads like a cork pad and carry out contraposition accurately and install.

Its result, with in the past corresponding to the dimension modifying etc. that becomes the workpiece of coating object, while changing pad need to 2 cut apart that head decomposes with pad and the pad that makes to be replaced with cut apart head and carry out accurately installing and comparing after contraposition, can significantly shorten the replacing time of pad, and can follow like a cork the gap size of slit and the change operation of coating width of the change of size, can also correspondingly improve running rate, productivity is excellent.

In addition, along with the replacing of pad, the table of pad back of the body two sides is not cut apart head and second and is cut apart the opposed faces of head and contact with first, so can prevent from being attached to the generation of the rubbish such as coating fluid of pad, can also alleviate the washing and cleaning operation accompanying therewith.

Accompanying drawing explanation

Fig. 1 means the integrally-built key diagram of the fluid coating device that embodiments of the present invention are related, is (a) the partial cut-out front view while inserting pad, is (b) the longitudinal section side view while inserting pad.

Fig. 2 is exploded perspective view.

Fig. 3 means the key diagram inserting after pad, (a) is partial cut-out front view, is (b) that partial cut-out is amplified longitudinal section side view.

Fig. 4 is the stereogram inserting after pad.

1-first is cut apart head, 1a-opposed faces, and 1b-supplies with road, and 2-second is cut apart head, 2a-opposed faces, 3-pad, 3c-recess, 3d, 3e-width end, 3f-handle, 5-the first stop, 6-the second stop, 7-elastomeric element, 8-holding member, S-inserts space, T-slit.

The specific embodiment

Below, with reference to the accompanying drawings embodiments of the present invention are elaborated.

The related fluid coating device A of embodiments of the present invention is for following (slit) apparatus for coating, with respect to the surface opposed apparatus main body (not shown) being adapted to becoming the workpiece of coating object, be installed to be one, and itself and described apparatus main body are together relatively moved with the surface of described workpiece, therefrom for the coating fluids such as binding liquid or resist are coated with into the planar of homogeneous film thickness.

If be elaborated, as shown in Figure 1 to 4, the fluid coating device A that embodiments of the present invention are related, possesses as main composition important document: first cuts apart 1, is installed into respect to described apparatus main body handling freely; Second cuts apart 2, be configured to first cut apart 1 opposed and move back and forth freely to separated and approaching direction; And multiple pad 3, being configured to cut apart 1 and second along first and cutting apart an opposed faces 1a of 2,2a picks and places freely.

First cuts apart 1 forms its width dimensions than the essentially rectangular of the more microscler shape of length dimension with its quadrature, and in one side, has and form the supply road 1b of cutting apart a 2 opposed level and smooth opposed faces 1a and coating fluid (not shown) with aftermentioned second.

Supply with that road 1b has the inlet 1b1 of the supply source that is connected to coating fluid and for the coating fluid that makes to be supplied to from inlet 1b1 to the first 1b2 of cavity portion of cutting apart a width diffusion of 1, the 1b2 of cavity portion is cut apart an opposed faces 1a opening of 1 along first.

In example as shown in Figure 1 to 4, the inlet 1b1 of coating fluid is opened in first end face of cutting apart in 1 with the length direction of its width quadrature.

Second cuts apart 2 and first cuts apart 1 and is identically formed as its width dimensions is than the essentially rectangular of the more microscler shape of length dimension with its quadrature, and in one side, has with first and cut apart the opposed level and smooth opposed faces 2a of opposed faces 1a of 1.

First cuts apart 1 and second cuts apart 2 and is supported to and by guide member 4, to first, cuts apart 1 and second and cut apart that a thickness direction of 2 is separated from each other with

opposed faces

1a, 2a separately and approaching mode moves back and forth freely.

In the example shown in Fig. 1～Fig. 4, concrete example as guide member 4, first, cut apart an opposed faces 1a of 1 and project cramp bar 4a, second, cut apart an opposed faces 2a of 2 and be arranged with chimeric with cramp bar 4a sliding freely recess 4b, the slip by cramp bar 4a and recess 4b moves back and forth freely supports.

And, though not shown as other examples, but as guide member 4, also can cut apart an opposed faces 2a of 2 second and project cramp bar 4a, and first, cut apart an opposed faces 1a of 1 and be arranged with recess 4b, or the supporting structure of setting and cramp bar 4a and recess 4b different structure, or be set up in parallel the drive sources such as driver and mechanically make first to cut apart 1 and second and cut apart 2 and move back and forth to separated and approaching direction.

In addition, first, cutting apart 1 and second cuts apart between opposed faces 1a, a 2a of 2 and divides and be formed with the insertion space S of inserting freely aftermentioned pad 3 for picking and placeing.

The insertion space S of aftermentioned pad 3 forms to be cut apart 1 and second first and spreads all in cutting apart 2 and their the length direction total length of width quadrature, in the example shown in Fig. 1～Fig. 4, from offering a distolateral insertion aftermentioned pad 3 of length direction of the inlet 1b1 of coating fluid.

Pad 3 forms its width dimensions and than first, cuts apart 1 and second and cut apart the rectangle that a width dimensions of 2 is less and have the tabular of level and smooth surperficial 3a and back side 3b, towards being formed at first, cutting apart an opposed faces 1a and second of 1 and cut apart the insertion space S between an opposed faces 2a of 2, to first, cut apart 1 and second and cut apart a short side direction of 2 and manually or mechanically insert, be configured to be thus clamped into first and cut apart 1 and second and cut apart between opposed faces 1a, a 2a of 2.

In pad 3, be inserted into the end of the front of inserting space S and be formed with recess 3c in width central authorities.

Recess 3c is communicated with being inserted under the state that inserts space S with the 1b2 of cavity portion of the supply road 1b of coating fluid, and first, cuts apart 1 and second and cut apart the slit T that forms slit-shaped between opposed faces 1a, a 2a of 2.

Slit T along first cut apart 1 and second cut apart 2 in they width quadrature length direction outstanding tapering 1c, the 2b forming of the other end and form.

The width length dimension of recess 3c determines that the length of slit T is the coating width of coating fluid.

The gauge of pad 3 determines that the size in the gap of aftermentioned slit T is the coating thickness (thickness) of coating fluid.

Therefore, prepare respectively the different multiple pad 3 multiple pads 3 different with gauge of width length dimension of recess 3c.When change becomes the size etc. of workpiece of coating object, select the recess 3c with the width size corresponding with the coating width of coating fluid pad 3 and with the pad 3 of gauge corresponding to the expectation thickness (thickness) of coating fluid, and be replaced by this pad, with this, meet the change of workpiece size.

And these multiple pads 3 are irrelevant with the width length dimension of recess 3c and the variation of gauge, all outer shape all form same size.

In addition, at the opposition side of pad 3 center dant 3c, be provided with and with respect to first, cut apart 1 or second any one party or first in cutting apart 2 and cut apart 1 and second and cut apart 2 both sides, to the first stop 5 of the direction of insertion butt of pad 3.While inserting pad 3 to inserting space S, make the first stop 5 and first cut apart 1 or second any one party or both sides of cutting apart in 2 and contact, recess 3c is positioned to the direction of insertion of pad 3 thus.

In example shown in Fig. 1～Fig. 4, concrete example as the first stop 5, opposition side end at pad 3 center dant 3c is provided with the wall thickness 5a larger than the gauge of pad 3, and the surperficial 3a of pad 3 between be formed with second and cut apart the length direction one end opposed positioning step of face portion of 2.As shown in Figures 3 and 4, after pad 3 is inserted to space S, and then make the positioning step portion and second of wall thickness 5a cut apart length direction one end contact of 2.

And, though not shown as other examples, but as the first stop 5, can between wall thickness 5a and the back side 3b of pad 3, form the positioning step portion of cutting apart length direction one end contact of 1 with first, or between the surperficial 3a of wall thickness 5a and pad 3 and back side 3b, form respectively with first and cut apart 1 and second and cut apart the positioning step portion of 2 length direction one end contact, or replace the positioning step portion of illustrated wall thickness 5a and the positioning element of other structures such as projection is set.

In addition, preferably first, cutting apart 1 or second any one party or first in cutting apart 2 cuts apart 1 and second and cuts apart 2 both sides, any one party in width end 3d, the 3e of setting and pad 3 or the second stop 6 of both sides' butt, while inserting pad 3 to inserting space S, any one party or both sides in width end 3d, the 3e of pad 3 are contacted with the second stop 6, to its width, pad 3 and recess 3c are positioned thus.

In example shown in Fig. 1～Fig. 4, as the concrete example of the second stop 6, second, cut apart length direction one end face of 2, to project positioning convex portion 6a with the mode of the width both ends butt of the wall thickness 5a of pad 3 respectively.As shown in Figures 3 and 4, when the major part of pad 3 is inserted to space S, the width both ends of the wall thickness 5a of pad 3 contact with positioning convex portion 6a respectively.

In addition, though not shown as other examples, but as the second stop 6, can cut apart length direction one end face of 1 to project positioning convex portion 6a with the mode of the width both ends butt of the wall thickness 5a of pad 3 respectively first, or the width both ends of the wall thickness 5a of replacement pad 3, with the width end 3d with pad 3, the mode of the direct butt of 3e projects positioning convex portion 6a towards inserting space S, make thus the width end 3d of pad 3, when contacting with positioning convex portion 6a, inserts 3e, with width one end of the wall thickness 5a of pad 3 or only with the width end 3d of pad 3, the mode of any one party butt in 3e projects positioning convex portion 6a, or replace illustrated positioning convex portion 6a that the positioning element of other structures is set.

And, when inserting space S and insert pad 3 and after inserting pad 3, the interval of inserting space S is to be separated from each other and approaching mode manually or mechanically mobile first is cut apart 1 or second and cut apart an any one party or first in 2 and cut apart 1 and second and cut apart 2 both sides and be configured to respectively the size of regulation.

; be configured to as shown in the double dot dash line of Fig. 1 (b) and Fig. 2; when inserting pad 3; the interval of inserting space S is set for wider than the gauge of the thickest pad 3, thereby make the table back of the body two sides 3a, the 3b and first of the pad 3 that inserting cut apart 1 and second, cut apart opposed faces 1a, a 2a of 2 and do not contact respectively.

And, be configured to as shown in Fig. 3 (b) and Fig. 4, after inserting pad 3, the interval of inserting space S is set for the gauge of pad 3 and become same size, thereby the table back of the body two sides 3a, the 3b that make inserted pad 3 are cut apart 1 and second and cut apart opposed faces 1a, a 2a of 2 and connect airtight with first respectively.

And, preferably first, cutting apart 1 and second cuts apart 2 elastomeric element 7 and holding member 8 is set, the mode at interval when described elastomeric element becomes insertion pad 3 to insert space S is pressed to detaching direction, or the mode that becomes insertion pad 3 interval afterwards to insert space S is pressed to direction of closing, described holding member becomes the mode of inserting the interval after pad 3 and keeps to insert space S, or the mode that becomes the interval while inserting pad 3 to insert space S keeps.

In the example shown in Fig. 1～Fig. 4, as elastomeric element 7, by for becoming to insert space S, the mode at the interval while inserting pad 3 presses to detaching direction, the spring material 7a being formed by helical spring etc., spreading all over first cuts apart 1 and second and cuts apart an opposed faces 1a of 2, 2a and arranging, as holding member 8, for the mode to clamp pad 3, in conjunction with first, cutting apart 1 and second cuts apart 2 connecting member 8a is set each other, by removing the connecting member 8a of holding member 8, thereby with elastomeric element 7(spring material 7a) pressing force make to insert space S interval automatically separate mobile to the desired location wider than the gauge of pad 3.As connecting member 8a, use bolt, second cut apart 2 and pad 3 on dig through hole 8b, the 8c that has bolt to run through, first, cut apart and on 1, dig the screw 8d that has the threaded portion with bolt to screw togather.

And, though not shown as other examples, as connecting member 8a, also can replace with other connecting structures and replace bolt.

In addition, as elastomeric element 7, setting becomes and inserts the spring material that the mode at the interval after pad 3 is pressed to direction of closing to insert space S, as holding member 8, the liner that the mode at interval when setting becomes insertion pad 3 to insert space S keeps, also can be by removing the liner of holding member 8, with the pressing force of elastomeric element (spring material) 7, make the interval of inserting space S automatically approach and move to the desired location that becomes same size with the gauge of pad 3.

The fluid coating device A related according to this embodiments of the present invention, first, cut apart 1 and second and cut apart 2 separate mobile to insert under space S becomes than the wider state of the thickness of pad 3, towards inserting space S, insert pad 3, the table of pad 3 back of the body two

sides

3a, 3b are not cut apart 1 and second and are cut apart opposed faces 1a, a 2a of 2 and contact and sandwiched with first thus.

Meanwhile, the first stop 5 and first that makes to be arranged at pad 3 is cut apart 1 or second and is cut apart an any one party or first in 2 and cut apart 1 and second and cut apart 2 both sides and contact, and recess 3c is positioned to the direction of insertion of pad 3 thus.

In addition, after inserting pad 3, make first to cut apart 1 and second and cut apart 2 and approach and mobilely to insert the thickness of space S and pad 3, become same size, first cuts apart 1 and second and cuts apart opposed faces 1a, a 2a of 2 and connect airtight with the table back of the body two sides 3a, the 3b of pad 3 respectively thus, and pad 3 is positioned to its thickness direction.

Therefore, can cut apart 1 and second to first cuts apart 2 and loads and unloads like a cork pad 3 and carry out contraposition accurately and install.

Its result, can significantly shorten replacing time of pad 3, can carry out like a cork the gap size of slit T and the change operation of coating width (change to produce and adjust operation) of accompanying with dimension modifying, and running rate correspondingly improves, and productivity is excellent.

In addition, replacing along with pad 3, the table back of the body two sides 3a, the 3b of pad 3 do not cut apart 1 and second and cut apart opposed faces 1a, a 2a of 2 and contact with first, so can prevent from being attached to the generation of the rubbish such as coating fluid of pad 3, can also alleviate the washing and cleaning operation accompanying therewith.

Yet, when changing pad 3, by very heavy first, cut apart 1 and second and cut apart 2 from apparatus main body, to remove and decompose be dangerous.

To this, related according to the embodiment of the present invention fluid coating device A, cuts apart 1 and second and cuts apart 2 and just can carry out the replacing of pad 3 without remove first from apparatus main body, can improve workability and the security of changing pad 3.

Especially, first, cut apart 1 or second any one party in cutting apart 2 or both sides arrange with the width end 3d of pad 3, during the second stop 6 of 3e butt, when insertion space S is inserted to pad 3, width end 3d, the 3e of pad 3 are contacted with the second stop 6, and pad 3 and recess 3c are cut apart 1 and second with respect to first and are cut apart 2 and be positioned to its width thus.

Therefore, 3 pairs first, pad can be cut apart to 1 and second cuts apart 2 and to width, carries out contraposition accurately and install like a cork.

Its result, can further improve installation accuracy.

And, first, cut apart 1 and second and cut apart 2 when elastomeric element 7 and holding member 8 are set, by cutting apart 1 and second from first, cut apart 2 and remove holding member 8, thereby the interval of inserting space S with the pressing force of elastomeric element 7 automatically separate mobile to the desired location wider than the gauge of pad 3, or automatically approach and move to the desired location that becomes same size with the gauge of pad 3, wherein, the mode at interval when described elastomeric element becomes insertion pad 3 to insert space S is pressed to detaching direction, or the mode that becomes insertion pad 3 interval afterwards to insert space S is pressed to direction of closing, described holding member becomes the mode of inserting the interval after pad 3 and keeps to insert space S, or the mode that becomes the interval while inserting pad 3 to insert space S keeps.

Therefore, can make the replacing operation of pad 3 become and more easily and further shorten the replacing time of pad 3.

Its result, has realized the further raising of running rate.

Then, with reference to the accompanying drawings one embodiment of the invention are described.

[embodiment]

As shown in Figure 1 to 4, this embodiment is illustrated in pad 3, in a side contrary with recess 3c, handle 3f is set, and operator holds handle 3f and to inserting space S, manually carries out the situation about picking and placeing of pad 3.

In the example shown in Fig. 1～Fig. 4, in pad 3, be connected with on the wall thickness 5a of the opposition side end of recess 3c and be equipped with a plurality of handle 3f.

And, though not shown as other examples, also can replace with and in the end of pad 3, be integrally formed the illustrated example such as handle 3f mounting structure in addition.

The fluid coating device A related according to this embodiments of the invention 1, holds handle 3f by operator, and pad 3 integral body do not contact with recess 3c just and can pick and place with respect to inserting space S.

Therefore, can be easily and contamination-freely manually to carry out the replacing of pad 3.

Its result, can follow the gap size of slit T and the change operation of coating width (change to produce and adjust operation) of the dimension modifying based on manual like a cork, has running rate and correspondingly improves, the advantage of productivity excellence.

In addition, front showing in embodiment, showing the handle 3f that operator holds pad 3 and manually carry out the situation about picking and placeing of pad 3 with respect to inserting space S, but be not limited to this, also can utilize robot etc. mechanically to carry out picking and placeing of pad 3 with respect to inserting space S.

Claims

1. a fluid coating device, is characterized in that, possesses:

First cuts apart head, has the supply road of coating fluid;

Second cuts apart head, be configured to cut apart opposed and move back and forth freely to separated and approaching direction with described first, and and described first cut apart between head and be formed with and insert space; And

Multiple pad, be configured to towards described insertion space and along described first cut apart head and described second cut apart head opposed faces pick and place freely, and have for cutting apart described first the recess that head and described second is cut apart the slit of the described coating fluid that between head, formation is communicated with described supply road

On described pad, be provided with the first stop, this first stop is cut apart head or the described second any one party or both sides of cutting apart in head with respect to described first, the direction of insertion butt to described pad with respect to described insertion space,

The interval in described insertion space is set as when inserting described pad wider than the thickness of described pad, and is set as becoming same size with the thickness of described pad after inserting described pad.

2. fluid coating device according to claim 1, is characterized in that,

Described first, cutting apart head or described second cuts apart any one party in head or both sides the second stop with the width end butt of described pad is set.

3. fluid coating device according to claim 1, is characterized in that,

Described first, cutting apart head and described second cuts apart elastomeric element and holding member is set, the mode that described elastomeric element becomes the interval while inserting described pad with described insertion space is pressed to detaching direction, or with described insertion space, becomes the mode of inserting the interval after described pad and press to direction of closing; Described holding member becomes with described insertion space the mode of inserting the interval after described pad and keeps, or keeps in the mode that described insertion space becomes the interval while inserting described pad.

4. fluid coating device according to claim 2, is characterized in that,

5. according to the fluid coating device described in any one in claim 1～4, it is characterized in that,

In described pad, in a side contrary with described recess, be provided with handle.