CN103623972B

CN103623972B - Fluid coater

Info

Publication number: CN103623972B
Application number: CN201310368612.1A
Authority: CN
Inventors: 大谷义和
Original assignee: Shin Etsu Engineering Co Ltd
Current assignee: Shin Etsu Engineering Co Ltd
Priority date: 2012-08-22
Filing date: 2013-08-22
Publication date: 2016-08-17
Anticipated expiration: 2033-08-22
Also published as: KR20140025277A; TW201408382A; TWI587929B; JP2014039913A; CN103623972A; JP5114606B1

Abstract

The present invention provides a kind of Fluid coater, and it can easily load and unload pad relative to the first segmentation head and the second segmentation head and carry out para-position accurately and install.The Fluid coater of the present invention splits head (2) separate mobile in the first segmentation head (1) and second to insert space (S) ratio under the broader state of thickness of pad (3), inserting pad (3) towards inserting space (S), thus table back of the body two sides (3a, 3b) of pad (3) does not contacts with the first segmentation head (1) and the second opposed faces (1a, 2a) splitting head (2) and is sandwiched into.Meanwhile, making the first stop (5) being arranged on pad (3) contact with any one party in the first segmentation head (1) or the second segmentation head (2) or both sides, thus recess (3c) is positioned to the direction of insertion of pad (3).And after inserting pad (3), make the first segmentation head (1) and the second segmentation head (2) close to mobile so that the thickness inserting space (S) and pad (3) becomes same size, the opposed faces (1a, 2a) thus making the first segmentation head (1) and the second segmentation head (2) carries on the back two sides (3a, 3b) contiguity respectively with the table of pad (3), and pad (3) is positioned to its thickness direction.

Description

Fluid coater

Technical field

The present invention relates to one be used for such as 3D material, thin film or glass substrate etc. being bondd When such as the display such as smart mobile phone, semiconductor substrate or crystal liquid substrate etc., by binding liquid or anti- The coating fluids such as erosion agent are coated into the Fluid coater (coating of the planar of homogeneous film thickness along its surface Device).

Background technology

In the past, have for following coating head as this Fluid coater, i.e. relative to edge Coating mechanism portion freely is moved on the surface of coating object, possesses 2 segmentation heads and is sandwiched into Pad between these 2 segmentation heads, is formed with the liquid of coating fluid wherein on a segmentation head Inlet, and be formed for making the coating fluid being injected into from liquid injection port to width The cavity portion of diffusion, pad has the recess of U-shaped, and pad is sandwiched between 2 segmentation heads Time, between these 2 segmentation heads, forming the slit of slit-shaped, the thickness of pad determines between slit The size of gap, the length of recess determines that the length of slit i.e. determines the coating width (example of coating fluid As, referenced patent document 1).

Patent documentation 1: Japanese Patent Publication 2003-211053 publication

In this conventional Fluid coater, whenever the coating width of coating fluid and slit When gap is changed along with the dimension modifying etc. of workpiece becoming coating object, need to change For having the pad of the recess of corresponding width or the pad that thickness is different.

But, pad is held under the arm between 2 segmentation heads, by bolt by secured to one another for segmentation, Even if not leaking so that the injection pressure of coating fluid is higher, when therefore changing pad, first by 2 Individual segmentation head decomposes completely with pad, and enters the pad with the segmentation head replacing being decomposed respectively Row is accurately after para-position, it is necessary to they are installed as one, exist replacing operation loaded down with trivial details and The replacing of pad spends the time, and running rate declines, the problem of productivity difference.

Summary of the invention

The present invention, using this problem of solution as problem, its object is to relative to the first segmentation head And second segmentation head easily load and unload pad and carry out para-position accurately and installation etc..

In order to reach this purpose, it is a feature of the present invention that and possess: the first segmentation head, tool There is the supply road of coating fluid；Second segmentation head, is configured to opposed also with described first segmentation Move back and forth freely to separation and close direction, and split formation between head described first There is insertion space；And multiple pad, it is configured to towards described insertion space and along described first The opposed faces of segmentation head and described second segmentation head picks and places freely, and has for described the Form, between one segmentation head and described second segmentation head, the described coating fluid connected with described supply road The recess of slit, described pad is provided with the first stop, this first stop is relative Any one party in head or described second segmentation head or both sides is split, to described in described first Pad abuts relative to the direction of insertion in described insertion space, is set at the interval in described insertion space It is set to when inserting described pad more wider than the thickness of described pad, and is set as inserting institute After stating pad, the thickness with described pad becomes same size.

There is the present invention of preceding feature, first segmentation head and second segmentation head separate mobile with Just insert under the state more broader than the thickness of pad of space, insert pad towards inserting space, by The table back of the body two sides of this pad does not contacts with the first segmentation head and the second opposed faces splitting head and is pressed from both sides While entering, make to be arranged at the first stop of pad and the first segmentation head or the second segmentation head In any one party or both sides contact, thus recess is positioned to the direction of insertion of pad, and And after insertion pad, make the first segmentation head and the second segmentation head close to mobile to insert space Become same size with the thickness of pad, thus make the first segmentation head and second split the opposed of head Two sides contiguity is carried on the back in face respectively with the table of pad, and pad is positioned to its thickness direction.

Therefore, it is possible to easily load and unload pad and height relative to the first segmentation head and the second segmentation head Carry out para-position and install to precision.

Its result, and in the past corresponding to becoming the dimension modifying etc. of the workpiece of coating object, more Need when changing pad 2 segmentation heads are decomposed with pad and make pad and the segmentation being replaced Head is installed after carrying out para-position accurately and is compared, it is possible to significantly shorten the replacing construction of pad, And can easily carry out gap size and the change of coating width of the slit of the change with size More operation, additionally it is possible to correspondingly improve running rate, productivity is excellent.

It addition, along with the replacing of pad, head and second is not split with first in the table back of the body two sides of pad The opposed faces contact of segmentation head, therefore, it is possible to prevent from being attached to the product of the rubbish such as the coating fluid of pad Raw, additionally it is possible to alleviate and this washing and cleaning operation together.

Accompanying drawing explanation

Fig. 1 is the overall structure representing the Fluid coater involved by embodiments of the present invention Explanatory diagram, (a) be insert pad time partial cut-out front view, (b) be insert pad time Longitudinal section side view.

Fig. 2 is exploded perspective view.

Fig. 3 is to represent the explanatory diagram after inserting pad, and (a) is partial cut-out front view, (b) It is that partial cut-out amplifies longitudinal section side view.

Fig. 4 is the axonometric chart after inserting pad.

1-first splits head, 1a-opposed faces, and 1b-supplies road, and 2-second splits head, and 2a-is opposed Face, 3-pad, 3c-recess, 3d, 3e-width end, 3f-handle, 5-the first stop, 6-the second stop, 7-elastomeric element, 8-holding member, S-inserts space, T-slit.

Detailed description of the invention

Hereinafter, with reference to the accompanying drawings embodiments of the present invention are described in detail.

Fluid coater A involved by embodiments of the present invention is for for following (slit) Apparatus for coating, i.e. relative to the dress of the opposing surface being arranged to and become the workpiece being coated with object Put main body (not shown) and be installed to be one, and make it with described apparatus main body together with described The surface relative movement of workpiece, therefrom for being become by the coating solution such as binding liquid or resist The planar of homogeneous film thickness.

If being described in detail, as shown in Figure 1 to 4, involved by embodiments of the present invention Fluid coater A, possess as main composition important document: the first segmentation 1, mounted Become and load and unload freely relative to described apparatus main body；Second segmentation 2, is configured to and first point Cut 1 opposed and to separating and close direction moves back and forth freely；And multiple pad 3, quilt Being arranged to along the first segmentation 1 and opposed faces 1a of the second segmentation 2,2a picks and places freely.

First segmentation 1 is formed as its width dimensions than the orthogonal to that longer shape of length dimension Substantially rectangular, and have at its one side and be formed as and that aftermentioned second segmentation 2 is opposed is flat Sliding opposed faces 1a and the supply road 1b of coating fluid (not shown).

Supply road 1b has the inlet 1b1 of the supply source being connected to coating fluid and for making The coating fluid being supplied to from inlet 1b1 is to the cavity of the width diffusion of the first segmentation 1 Portion 1b2, cavity portion 1b2 is along the opposed faces 1a opening of the first segmentation 1.

In example as shown in Figure 1 to 4, the inlet 1b1 of coating fluid is opened in The end face of length direction orthogonal with its width in one segmentation 1.

Second segmentation 2 and the first segmentation 1 into its width dimensions ratio with it are just identically formed The longer shape of length dimension substantially rectangular handed over, and have and the first segmentation head at its one side Smooth opposed faces 2a that opposed faces 1a of 1 is opposed.

First segmentation 1 and the second segmentation 2 are supported to by guide member 4 to first point Cut 1 and second the thickness direction of segmentation 2 be separated from each other with respective opposed faces 1a, 2a and Close mode moves back and forth freely.

In the example shown in Fig. 1～Fig. 4, as the concrete example of guide member 4, first Opposed faces 1a of segmentation 1 projects support rod 4a, recessed in opposed faces 2a of the second segmentation 2 If recess 4b chimeric with support rod 4a sliding freely, by support rod 4a and recess 4b Slip move back and forth and support freely.

Further, as other examples although not shown, but as guide member 4, it is also possible to Opposed faces 2a of two segmentations 2 projects support rod 4a, and in the opposed faces of the first segmentation 1 1a recessed recess 4b, or arrange and support rod 4a and the supporting structure of recess 4b different structure, Or be set up in parallel the driving sources such as driver and mechanically make the first segmentation 1 and the second segmentation 2 Move back and forth to separation and close direction.

It addition, divide between the first segmentation 1 and opposed faces 1a of the second segmentation 2,2a It is formed for picking and placeing the insertion space S inserting aftermentioned pad 3 freely.

The insertion space S of aftermentioned pad 3 is formed as in the first segmentation 1 and the second segmentation 2 In throughout the length direction total length orthogonal with their width, shown in Fig. 1～Fig. 4 In example, insert aftermentioned from the end side of the length direction of the inlet 1b1 offering coating fluid Pad 3.

Pad 3 is formed as its width dimensions than the first segmentation 1 and width of the second segmentation 2 Smaller rectangle and there is smooth surface 3a and the tabular of back side 3b, towards being formed at Insertion between opposed faces 1a and opposed faces 2a of the second segmentation 2 of the first segmentation 1 is empty Between S, the short side direction to the first segmentation 1 and the second segmentation 2 manually or mechanically inserts, It is thereby configured to be clamped into the first segmentation 1 and opposed faces 1a of the second segmentation 2,2a Between.

The end of the front inserting space S it is inserted into and in width central authorities in pad 3 It is formed with recess 3c.

Recess 3c when be inserted into insert space S with the sky of the supply road 1b of coating fluid Chamber portion 1b2 connects, and at the first segmentation 1 and opposed faces 1a of the second segmentation 2,2a Between form the slit T of slit-shaped.

Slit T along in the first segmentation 1 and the second segmentation 2 with their width just The other end of the length direction handed over highlights tapering 1c, 2b of formation and is formed.

The width length dimension of recess 3c determines the length i.e. coating of coating fluid of slit T Width.

The gauge of pad 3 determines the size i.e. coating of coating fluid in the gap of aftermentioned slit T Thickness (thickness).

Therefore, the multiple pad 3 that the width length dimension of recess 3c is different is prepared respectively The multiple pad 3 different with gauge.When change becomes the size of the workpiece of coating object Deng time, select the recess 3c with the width size corresponding with the coating width of coating fluid Pad 3 and the pad 3 of the gauge corresponding with the expectation thickness (thickness) of coating fluid, And it is replaced by this pad, meet the change of workpiece size with this.

Further, the width length dimension of these multiple pads 3 and recess 3c and gauge Change unrelated, all outer shape are all formed as same size.

It addition, be provided with in the opposition side of pad 3 center dant 3c relative to the first segmentation 1 Or second any one party in segmentation 2 or the first segmentation 1 and the second segmentation 2 both sides, The first stop 5 abutted to the direction of insertion of pad 3.Pad 3 is inserted to inserting space S Time, make any one party in the first stop 5 and the first segmentation 1 or the second segmentation 2 or Person both sides contact, and thus recess 3c is positioned to the direction of insertion of pad 3.

In example shown in Fig. 1～Fig. 4, as the concrete example of the first stop 5, at pad 3 The end, opposition side of center dant 3c is provided with wall thickness 5a bigger than the gauge of pad 3, It is formed between the surface 3a of pad 3 and the length direction end face pair of the second segmentation 2 The positioning step portion put.As shown in Figures 3 and 4, after pad 3 is inserted space S, And then the positioning step portion of wall thickness 5a is made to connect with the length direction end face of the second segmentation 2 Touch.

Further, as other examples although not shown, but as the first stop 5, can be at wall Formed between the back side 3b of thickness portion 5a and pad 3 and length direction one end of the first segmentation 1 The positioning step portion of face contact, or the surface 3a and back side 3b in wall thickness 5a Yu pad 3 Between form length direction end face with the first segmentation 1 and the second segmentation 2 respectively and contact Positioning step portion, or replace the positioning step portion of wall thickness 5a of diagram that projection etc. is set The positioning element of other structures.

Additionally, it is preferred that any one party in the first segmentation 1 or the second segmentation 2 or the One segmentation 1 and the second segmentation 2 both sides, arrange the width end 3d with pad 3, The second stop 6 that either or both in 3e abuts, inserts pad to inserting space S When 3, make the either or both in width end 3d, 3e of pad 3 and the second limit Position device 6 contacts, and thus positions pad 3 and recess 3c to its width.

In example shown in Fig. 1～Fig. 4, as the concrete example of the second stop 6, second The length direction end face of segmentation 2, with respectively with the width of wall thickness 5a of pad 3 The mode that both ends abut projects positioning convex portion 6a.As shown in Figures 3 and 4, by pad 3 When major part inserts space S, the width both ends of wall thickness 5a of pad 3 are respectively Contact with positioning convex portion 6a.

It addition, as other examples although not shown, but as the second stop 6, can be The length direction end face of one segmentation 1 with respectively with the width of wall thickness 5a of pad 3 The mode that both ends abut projects positioning convex portion 6a, or replaces the width of wall thickness 5a of pad 3 Degree both ends, direction, court in the way of directly abutting with width end 3d, 3e of pad 3 To insert space S project positioning convex portion 6a, thus make pad 3 width end 3d, 3e inserts while contacting with positioning convex portion 6a, or the width side of wall thickness 5a with pad 3 To one end or the side that only abuts with any one party in width end 3d, 3e of pad 3 Formula projects positioning convex portion 6a, or replaces positioning convex portion 6a of diagram to arrange the location of other structures Parts.

Further, after to inserting when space S inserts pad 3 and inserting pad 3, sky is inserted Between the interval of S in the way of being separated from each other and be close, manually or mechanically move the first segmentation 1 Or second any one party in segmentation 2 or the first segmentation 1 and the second segmentation 2 both sides And it is configured to the size of regulation respectively.

That is, it is configured to as shown in the double dot dash line of Fig. 1 (b) and Fig. 2, when inserting pad 3, The interval inserting space S is set to more wider than the gauge of the thickest pad 3, so that Table back of the body two sides 3a, 3b and first segmentation 1 of the pad 3 being inserted into and the second segmentation 2 Opposed faces 1a, 2a do not contacts.

Further, it is configured to as shown in Fig. 3 (b) and Fig. 4, after inserting pad 3, will insert The interval entering space S is set to that the gauge with pad 3 becomes same size, so that institute Table back of the body two sides 3a, the 3b of the pad 3 inserted respectively with the first segmentation 1 and the second segmentation 2 Opposed faces 1a, 2a contiguity.

Further, preferably elastomeric element 7 is set in the first segmentation 1 and the second segmentation 2 and protects Holding parts 8, described elastomeric element becomes the side at interval when inserting pad 3 to insert space S Formula presses to detaching direction, or becomes the side at the interval after insertion pad 3 to insert space S Formula presses to direction of closing, after described holding member becomes insertion pad 3 with insertion space S The mode at interval keep, or become interval when inserting pad 3 to insert space S Mode keeps.

In the example shown in Fig. 1～Fig. 4, as elastomeric element 7, will be used for inserting space That the mode at interval when S becomes insertion pad 3 presses to detaching direction, by helical spring etc. The spring material 7a constituted, throughout the first segmentation 1 and opposed faces 1a of the second segmentation 2, 2a and arrange, as holding member 8, in order to combine the first segmentation in the way of clamping pad 3 1 and second segmentation 2 connecting member 8a is set each other, by removing holding member 8 Connecting member 8a, thus with elastomeric element 7(spring material 7a) make insertion space by pressure The interval of S automatically separates mobile to setting position more broader than the gauge of pad 3.Make Using bolt for connecting member 8a, digging in the second segmentation 2 and pad 3 has bolt to be passed through Through hole 8b, the 8c worn, digs, in the first segmentation 1, the spiral shell having the threaded portion with bolt to screw togather Hole 8d.

Further, as other examples although not shown, but as connecting member 8a, it is also possible to replace Bolt is replaced for other connecting structures.

It addition, as elastomeric element 7, arrange after becoming insertion pad 3 with insertion space S The spring material that presses to direction of closing of the mode at interval, as holding member 8, arrange with Insert space S and become the liner that the mode at interval when inserting pad 3 keeps, it is also possible to pass through Remove the liner of holding member 8, make insertion with elastomeric element (spring material) 7 by pressure The interval of space S automatically becomes same size close to the gauge moved to pad 3 Setting position.

According to Fluid coater A involved by this embodiments of the present invention, at first point Cut 1 and second segmentation 2 separate mobile become the thickness than pad 3 to insert space S Under broader state, insert pad 3, thus the table back of the body two sides of pad 3 towards inserting space S 3a, 3b do not contact and quilt with the first segmentation 1 and opposed faces 1a of the second segmentation 2,2a Sandwich.

Meanwhile, make to be arranged at the first stop 5 of pad 3 and the first segmentation 1 or Any one party in second segmentation 2 or the first segmentation 1 and second segmentation 2 both sides connect Touching, thus recess 3c is positioned to the direction of insertion of pad 3.

It addition, after inserting pad 3, make the first segmentation 1 and the second segmentation 2 close to moving Dynamic so that the thickness inserting space S and pad 3 becomes same size, thus the first segmentation 1 And second opposed faces 1a of segmentation 2,2a are close with the table of pad 3 back of the body two sides 3a, 3b respectively Connecing, pad 3 is positioned to its thickness direction.

Therefore, it is possible to the first segmentation 1 and the second segmentation 2 easily handling pad 3 and Carry out para-position accurately and install.

It is as a result, it is possible to significantly shorten the replacing construction of pad 3, it is possible to easily carry out and chi The gap size of very little change slit T together and the change operation of coating width (are changed product and are adjusted work Industry), running rate correspondingly improves, and productivity is excellent.

It addition, along with the replacing of pad 3, the table back of the body two sides 3a, 3b of pad 3 not with first point Cut 1 and second opposed faces 1a of segmentation 2,2a contact, therefore, it is possible to prevent from being attached to pad The generation of the rubbish such as the coating fluid of sheet 3, additionally it is possible to alleviate and this washing and cleaning operation together.

But, when changing pad 3, by the first segmentation 1 and the second segmentation head of very weight 2 to remove from apparatus main body and carry out decomposing be dangerous.

To this, Fluid coater A involved according to the embodiment of the present invention, it is not necessary to from Apparatus main body removes the first segmentation 1 and the second segmentation 2 just can carry out the replacing of pad 3, Workability and the safety changing pad 3 can be improved.

Especially, any one party in the first segmentation 1 or the second segmentation 2 or both sides set When putting the second stop 6 that width end 3d, 3e with pad 3 abut, to insertion When space S inserts pad 3, make width end 3d, 3e and second stop of pad 3 6 contacts, thus pad 3 and recess 3c relative to the first segmentation 1 and the second segmentation 2 to Its width is positioned.

Therefore, it is possible to by pad 3 to the first segmentation 1 and the second segmentation 2 easily to width Degree direction carries out para-position accurately and installs.

It is as a result, it is possible to improve further and install degree of accuracy.

Further, elastomeric element 7 and maintaining part are set in the first segmentation 1 and the second segmentation 2 During part 8, by removing holding member 8 from the first segmentation 1 and the second segmentation 2, thus Automatically separate mobile to than pad 3 with the interval by pressure insertion space S of elastomeric element 7 The broader setting position of gauge, or automatically close to mobile to the thickness with pad 3 Size becomes the setting position of same size, and wherein, described elastomeric element becomes to insert space S The mode at interval during for inserting pad 3 presses to detaching direction, or becomes to insert space S The mode inserting the interval after pad 3 presses to direction of closing；Described holding member is to insert Space S becomes the mode at the interval after inserting pad 3 and keeps, or to insert space S The mode becoming interval when inserting pad 3 keeps.

Therefore, it is possible to make the replacing operation of pad 3 become more easily and further to shorten pad 3 Replacing construction.

Its result, it is achieved that the further raising of running rate.

Then, with reference to the accompanying drawings one embodiment of the invention is illustrated.

[embodiment]

As shown in Figure 1 to 4, this embodiment represents in pad 3 contrary with recess 3c Side arranges handle 3f, and operator holds handle 3f and manually carries out taking of pad 3 to inserting space S Situation about putting.

In the example shown in Fig. 1～Fig. 4, be connected with in recess 3c in pad 3 is contrary Multiple handle 3f it is equipped with in wall thickness 5a of side end.

Further, as other examples although not shown but it also may replace with the end at pad 3 It is integrally formed the mounting structure beyond the illustrated examples such as handle 3f.

According to Fluid coater A involved by this embodiments of the invention 1, by operation Person holds handle 3f, and pad 3 entirety does not contact with recess 3c just can be relative to inserting space S Pick and place.

Therefore, it is possible to easily and contamination-freely manually to carry out the replacing of pad 3.

It is as a result, it is possible to easily carry out with between slit T based on manual dimension modifying The change operation (change product and adjust operation) of gap size and coating width, has running rate and correspondingly carries Height, the advantage that productivity is excellent.

It addition, show in embodiment front, it is shown that operator hold the handle 3f of pad 3 relative to Insert space S and manually carry out the situation about picking and placeing of pad 3, but be not limited to this, it is possible in order to Picking and placeing of pad 3 is mechanically carried out relative to insertion space S with robot etc..

Claims

1. a Fluid coater, it is characterised in that possess:

First segmentation head, has the supply road of coating fluid；

Second segmentation head, is configured to opposed with described first segmentation and to separating and close Direction moves back and forth freely, and is formed with insertion space between described first segmentation head；And

Multiple pad, is configured to towards described insertion space and along described first segmentation head and institute The opposed faces stating the second segmentation head picks and places freely, and have for described first split head and Between described second segmentation head, the slit of the described coating fluid that formation connects with described supply road is recessed Portion,

Being provided with the first stop on described pad, this first stop is relative to described first Segmentation head or described second segmentation head in any one party or both sides, to described pad relative to The direction of insertion in described insertion space abuts,

The interval in described insertion space is set as thick than described pad when inserting described pad Spend wider, and be set as after inserting described pad becoming identical chi with the thickness of described pad Very little.

Fluid coater the most according to claim 1, it is characterised in that

Any one party in head or described second segmentation head or both sides' setting is split described first The second stop with the width end abutment of described pad.

Fluid coater the most according to claim 1, it is characterised in that

At described first segmentation head and described second segmentation head, elastomeric element and holding member are set, To dividing in the way of described elastomeric element interval when described insertion space becomes insertion described pad Press from direction, or in the way of the interval that described insertion space becomes after inserting described pad Press to direction of closing；After described holding member becomes the described pad of insertion with described insertion space The mode at interval keep, or become when inserting described pad with described insertion space The mode at interval keeps.

Fluid coater the most according to claim 2, it is characterised in that

5. according to the Fluid coater described in any one in Claims 1 to 4, its feature It is,

In described pad, the side contrary with described recess is provided with handle.