KR102163631B1 - Adsorbed pad for vacuum chuck - Google Patents

Abstract

The present invention relates to an adsorption pad for a vacuum chuck, and more specifically, to an adsorption pad for a vacuum chuck, which does not require an installation operation of a sealing member, is configured to prevent a change in the position of a workpiece and enable vacuum adsorption to be maintained even when the change in the position of the workpiece occurs, and is provided to enable an operation of completely drilling upper and lower holes of the workpiece on the vacuum chuck. To this end, the adsorption pad (20) for a vacuum chuck comprises: a plurality of suction holes (11) vertically formed in an upper end surface; and a suction passage (12) formed therein and connected with the suction holes (11). The adsorption pad (20) for a vacuum chuck is disposed on an upper plate (10) provided to suck in air of the suction passage (12) by means of a vacuum pump so as to support a workpiece (30). The adsorption pad (20) has a uniform thickness, and is provided with a lower groove (21) recessed upward from a lower end surface thereof in a position corresponding to the suction holes (11) and an upper groove (22) recessed downward from an upper end surface thereof. A barrier wall (23) having a thickness smaller than the thickness of the adsorption pad (20) is formed between the lower groove (21) and the upper groove (22) such that, when air is sucked into the suction passage (12), an upper space (25) of the barrier wall (23) expands so as to fix the workpiece (30).

Description

Suction pad of vacuum chuck {ADSORBED PAD FOR VACUUM CHUCK}

The present invention relates to a suction pad of a vacuum chuck, and more specifically, to a suction pad of a vacuum chuck that is placed on a vacuum chuck for fixing a workpiece by using a vacuum suction force provided from a vacuum pump to adsorb and fix the workpiece. About.

In general, a vacuum chuck has an intake passage that induces vacuum inside, and the air existing in the intake passage is sucked with a vacuum pump while the intake hole is perforated perpendicular to the upper plate on which the workpiece is placed, thereby reducing the atmospheric pressure. It refers to a device that fixes the workpiece by means of.

In such a vacuum chuck, a linear sealing member is installed to form a vacuum suction force between the workpiece and the upper plate. More specifically, the linear sealing member is made of a soft material such as silicone or rubber, and the vacuum pump is operated when the workpiece is placed on the top of the sealing member while being inserted and fixed in an arbitrary position of the lattice-shaped groove formed on the top of the top plate. When made, a vacuum is formed between the workpiece and the upper plate by the sealing member.

Regarding such a vacuum chuck and a linear sealing member, the'vacuum clamping device' of Korean Utility Model No. 20-0412828 (Patent Document 1), and the'Vacuum chuck for fixing workpieces' of Korean Patent Publication No. 10-2009-0107260 (Patent Document 2) And'vacuum contact pad for vacuum chuck' (Patent Document 3) of Korean Patent No. 10-1133295.

However, the vacuum chuck such as Patent Documents 1 to 3 has good installation workability of the linear sealing member because several linear sealing members must be installed in the grooves of the upper plate according to the size (area) or processing range of the workpiece. There is a problem that it takes a lot of time without.

In addition, when the workpiece is cut with a tool, the workpiece may rotate or move due to the pushing cutting force of the tool, and the position may change. Accordingly, when the workpiece is outside the sealing range of the linear sealing member, the vacuum suction force is released. There is a problem such as a state in which processing is impossible.

Moreover, in the case where a hole is formed by passing a part of the work piece through top to bottom by design, there is a problem that the vacuum suction force is immediately released when a hole is formed in the work piece with a vacuum formed part on the upper plate of the vacuum chuck by a linear sealing member. .

Therefore, conventionally, when a hole is formed in a workpiece, post-work is required, such as leaving only the bottom portion of a thin thickness, and then turning the workpiece over and punching the remaining thickness. There is a problem such as lowering the quality of the product is low.

Republic of Korea Utility Model Registration No. 20-0412828 (announced on March 4, 2006) Republic of Korea Patent Publication No. 10-2009-0107260 (published on October 13, 2009) Korean Patent Registration No. 10-1133295 (announced on April 4, 2012)

The present invention for solving the problems implied by the prior art is, it is not necessary to install a linear sealing member on the upper plate, and at the same time, the position change of the workpiece is prevented, and the vacuum suction force is maintained as it is, even if the position change occurs. It is an object of the present invention to provide a suction pad of a vacuum chuck that enables the operation of completely drilling the upper and lower holes of a workpiece on the chuck.

In the present invention for achieving the above object, a plurality of intake holes are perforated vertically on the top surface, an intake passage connected to the intake holes is formed therein, and on an upper plate provided to suck the air in the intake passage by a vacuum pump. As a suction pad of a vacuum chuck that is placed and supports the workpiece,

The adsorption pad has a uniform thickness, a lower groove recessed upward from a lower surface at a position corresponding to the intake hole, and an upper groove recessed downward from the upper surface, and the lower groove and A soft partition wall thinner than the thickness of the suction pad is formed between the upper grooves, so that when air is sucked in the intake passage, the partition wall is sucked toward the intake hole, and the upper space of the partition wall expands to allow the workpiece to be adsorbed. To do.

To this end, the adsorption pad and the partition wall are preferably formed integrally through a single molding process, and may be a material having softness and flexibility.

In addition, the partition wall may have a uniform thickness as a whole, or may be formed gradually thinner toward the center to increase flexibility.

In addition, at least one annular sealing protrusion may be provided around the upper groove of the upper end surface of the suction pad to improve airtightness with the workpiece.

Moreover, by forming a round or chamfer at the edge where the edge of the partition wall and the lower groove wall meet, and the edge where the edge of the partition wall and the upper groove wall meet, a round or chamfer is formed. It is also possible to increase the durability against stretching.

According to the suction pad of the vacuum chuck of the present invention, the size (area) of the work piece needs to be considered because an adsorption pad for adsorbing and fixing the work piece is installed on the entire surface of the top plate of the vacuum chuck or at least the entire surface in contact with the bottom of the work piece. There is no need to install the linear sealing member one by one, so it is possible to improve workability.

In addition, since the vacuum suction force at the bottom of the workpiece is large, a change in the position of the workpiece can be prevented, and even if the position changes, the vacuum suction force is not released, so that the workpiece can be stably processed.

Moreover, since the vacuum suction force is not released even when drilling the upper and lower holes in the workpiece, the work process can be simplified, as well as precise work is possible, thereby improving workability and quality.

1 is a perspective view showing a suction pad of a vacuum chuck according to a first embodiment of the present invention.
2 is a perspective view showing a state of use of the suction pad of the vacuum chuck according to the first embodiment of the present invention.
3 is an enlarged cross-sectional view taken along line AA of FIG. 2.
4 is an enlarged cross-sectional view taken along line AA of FIG. 2 showing a vacuum suction state of the suction pad of the vacuum chuck according to the first embodiment of the present invention.
5 is an enlarged cross-sectional view taken along line AA of FIG. 2 showing the suction pad of the vacuum chuck according to the second embodiment of the present invention.
6 is an enlarged cross-sectional view taken along line AA of FIG. 2 showing the suction pad of the vacuum chuck according to the third embodiment of the present invention.

The present invention can be modified in various ways and has various embodiments. Hereinafter, preferred embodiments of the present invention are illustrated, and the present invention will be described in detail based on this. However, this is not intended to limit the present invention only to the illustrated embodiments, and the spirit and scope of the present invention should be understood to include conventional modifications or equivalents to substitutes of the illustrated forms.

In addition, in the entire specification, the term'connected' to another part includes the case of being'directly connected' or'indirectly connected' with a certain element, and'including' a certain element is a particularly opposite description. Unless there is no other component, it means that other components can be added.

1 is a perspective view showing a suction pad of a vacuum chuck according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a state of use of the suction pad of the vacuum chuck according to the first embodiment of the present invention, and FIG. 3 is FIG. FIG. 4 is an enlarged cross-sectional view taken along line AA of FIG. 4, and FIG. 4 is an enlarged cross-sectional view taken along line AA of FIG. 2 showing a vacuum suction state of the suction pad of the vacuum chuck according to the first embodiment of the present invention.

1 and 2, the suction pad 20 of the vacuum chuck of the present invention is mounted on the upper plate 10 of the vacuum chuck.

The top plate 10 has a plurality of intake holes 11 perforated perpendicular to the top surface, and an intake passage 12 interconnected with the plurality of intake holes 11 is formed inside the top plate 10, and the intake The passage 12 is connected to a vacuum pump (not shown).

Accordingly, when the vacuum pump is operated, the air in the intake passage 12 is sucked, and accordingly, the internal space of the intake passage 12 is in a vacuum state, so that the workpiece placed on the upper plate 10 is transferred through the intake hole 11. It is suction-fixed to the upper plate 10, and processed by a cutting tool or the like in such a fixed state.

Since the detailed structure of the vacuum chuck including the upper plate 10 is already known in the art, including Patent Documents 1 to 3, detailed descriptions thereof will be omitted.

The adsorption pad 20 of the present invention is an element placed on the upper plate 10 to support the workpiece 30 (see FIG. 3 ), and has a uniform thickness as a whole.

2 and 3, the suction pad 20 is provided with a lower groove 21, which is grooved upwardly from the lower surface thereof, at a position corresponding to the intake hole 11 of the upper plate 10. An upper groove 22 with a groove downward from the top surface is provided, and between the lower groove 21 and the upper groove 22, a soft partition wall 23 having a thickness thinner than the total thickness of the suction pad 20 Is formed.

The adsorption pad 20 and the partition wall 23 may be a material having softness and flexibility, such as silicone, rubber, or urethane foam, and the adsorption pad 20 and the partition wall 23 are formed through a single molding process. At the same time, they can be molded to form one body.

As shown in FIG. 3, when the suction pad 20 is sequentially stacked on the upper plate 10 and the workpiece 30 is sequentially stacked on the suction pad 20, the lower space 24 located under the partition wall 23 is The remaining surfaces except for the intake hole 11 are closed, and the entire surface of the upper space 25 located above the partition wall 23 is closed to form a closed space.

In this state, when the vacuum pump (not shown) operates, the air in the intake passage 12 moves to the vacuum pump side as shown in FIG. 4, and the air in the lower space 24 located under the partition wall 23 is also It moves to the vacuum pump side through the intake hole 11, at this time, since the lower space 24 is closed on the other surfaces except for the intake hole 11, the relatively thin partition wall 23 is moved toward the intake hole 11 As it is deformed, the lower space 24 is reduced, and the upper space 25 above the partition wall 23 expands and becomes close to vacuum, so that the workpiece 30 can be adsorbed and fixed.

Since the bottom surface of the workpiece 30 is in contact with the plurality of intake holes 11, it can be fixed with a strong adsorption force in a state in contact with the plurality of upper spaces 25.

As described above, since the adsorption pad 20 of the present invention has an area corresponding to the entire area of the upper plate 10 or at least the bottom surface of the workpiece 30, a plurality of linear sealing members are used as in the conventional lattice groove of the upper plate 10. There is no need to install the linear sealing member in a position corresponding to the shape of the bottom surface of the workpiece 30, and if only one suction pad 20 is placed on the top plate 10, the workpiece ( 30) can be adsorbed and fixed, so workability for sealing can be greatly improved.

In addition, since the workpiece 30 is adsorbed by a plurality of upper spaces 25, even if a hole is drilled in an up-down direction in an arbitrary part of the workpiece 30, the vacuum chuck maintains the suction and fixed state of the workpiece 30. It is possible to drill the upper and lower holes of the workpiece 30 from above.

On the other hand, in order to fix the workpiece 30 with a stronger vacuum suction force, the expansion rate of the lower space 24 under the partition wall 23 is increased and the degree of expansion of the upper space 25 above the partition wall 23 is increased. It is desirable to increase the value.

To this end, it is good to make the lower space 24 a larger volume than the upper space 25 by making the depth of the lower groove 21 larger than the depth of the upper groove 22 as shown in FIG. 3, for example, When the total thickness of the suction pad 20 is 4 mm and the thickness of the partition wall 23 is 1 mm, the depth of the lower groove 21 may be 2 mm and the depth of the upper groove 22 may be designed as 1 mm. Of course, it should be noted in advance that these numerical values are merely exemplary and that such exemplary numerical values do not limit the scope of the present invention.

5 is an enlarged cross-sectional view taken along line A-A of FIG. 2 showing the suction pad of the vacuum chuck according to the second embodiment of the present invention.

As shown in FIG. 5, an annular sealing protrusion 26 may be installed around the upper groove 22 of the upper surface of the suction pad 20, and one or more sealing protrusions 26 Dogs can be installed in layers.

When the sealing protrusion 26 is provided in this way, since the upper surface of the suction pad 20 and the bottom surface of the workpiece 30 are not in contact with each other, the sealing protrusion 26 makes contact in a linear form. It is possible to increase the airtightness between 20) and the workpiece 30.

6 is an enlarged cross-sectional view taken along line A-A of FIG. 2 showing the suction pad of the vacuum chuck according to the third embodiment of the present invention.

The cross-sectional shape of the partition wall 23 may have a uniform thickness as illustrated in FIG. 3, or may be formed gradually thinner toward the center of the partition wall 23 as shown in FIG. 6. In this case, it is possible to increase the flexibility and elasticity of the partition wall 23, thereby increasing the expansion rate of the upper space 25.

In addition, as shown in FIG. 6, a round or chamfer is formed on an edge portion where the edge of the partition wall 23 and the wall surface of the lower groove 21 meet, as well as an edge portion where the edge of the partition wall 23 and the wall surface of the upper groove 22 meet. When) is formed, it is possible to minimize a phenomenon in which cracks are formed or cut in the edge portion as the shape of the partition wall 23 is repeatedly deformed, thereby increasing durability.

As described above, although the above description has been described according to a limited embodiment showing the technical idea of the present invention, the present invention is not limited to a specific embodiment, shape, and value, and some of the components of the embodiments are changed, mixed, etc. Various modifications and variations can be made by those of ordinary skill in the technical field to which the present invention pertains without departing from the gist of the invention, and such modifications and variations should not be individually understood from the technical spirit or prospect of the present invention. Will be

10... top
11... intake hole
12... intake passage
20... adsorption pad
21... lower groove
22... upper groove
23... bulkhead
24... lower space
25... upper space
26... sealing projection
30... workpiece

Claims (5)

A plurality of intake holes are perforated perpendicular to the top surface, an intake passage connected to the intake holes is formed therein, and an adsorption pad of a vacuum chuck that supports a workpiece by placing on an upper plate provided to suck air in the intake passage by a vacuum pump,
The adsorption pad includes a lower groove recessed upward from a lower surface at a position corresponding to the intake hole, and an upper groove recessed downward from an upper surface, and between the lower groove and the upper groove. A soft partition wall that is thinner than the thickness of the adsorption pad is formed so that when air is sucked in the intake passage, the upper space of the partition wall expands to allow the workpiece to be fixed,
The adsorption pad and the partition wall are made integrally, and are a material having softness and flexibility.
The partition wall has an entire surface closed so that the intake passage and the upper space are separated, and the depth of the lower groove is formed larger than the depth of the upper groove, so that the volume of the upper space is made smaller than that of the lower space. The suction pad of the vacuum chuck, characterized in that the expansion volume is increased.
delete The method according to claim 1,
The partition wall is an adsorption pad of a vacuum chuck, characterized in that the whole is made of a uniform thickness or is formed gradually thinner to the center.
The method according to claim 1,
A suction pad of a vacuum chuck, wherein at least one annular sealing protrusion is provided around the upper groove of the upper end surface of the suction pad.
The method according to claim 1,
A suction pad of a vacuum chuck, wherein a round or chamfer is formed at an edge portion where the edge of the partition wall and the wall surface of the lower groove meet, and an edge portion where the edge of the partition wall and the wall surface of the upper groove meet.

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