JP2014039913A - Fluid coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simply attach/detach a shim to/from a first division head and a second division head, and to accurately position the shim to assemble to the first division head and the second division head.SOLUTION: While a first division head 1 and a second division head 2 separately move to make an insertion space S larger than the thickness of a shim 3, by inserting the shim toward the insertion space S, front and back surfaces 3a and 3b of the shim are sandwiched without contacting with opposite surfaces 1a and 2a of the first division head and the second division head. Simultaneously, a first stopper 5 provided on the shim is made to abut on either one or both of the first division head and the second division head, thereby positioning a recessed portion 3c in an insertion direction of the shim. After the insertion of the shim, the first division head and the second division head move closer to each other so as to make the insertion space have the same dimensions as the thickness of the shim, thereby respectively making the opposite surfaces of the first division head and the second division head in close contact with the front and back surfaces of the shim and positioning the shim in the thickness direction.

Description

  In the present invention, for example, when a 3D material, a film, a glass substrate, or the like is bonded to a display body such as a smartphone, a semiconductor substrate, a liquid crystal substrate, or the like, a coating liquid such as an adhesive liquid or a resist is uniformly applied along the surface. The present invention relates to a fluid coating device (coater device) used for coating a film having a film thickness.

  Conventionally, as this type of fluid application apparatus, two division heads and a shim sandwiched between these two division heads are provided for an application mechanism portion that is movable along the surface of an application object. The split head has a liquid injection port for coating liquid and a cavity for diffusing the coating liquid injected from the liquid injection port in the width direction. The shim has a U-shaped concave portion. When a shim is sandwiched between two split heads, a slit-like slot is formed between the two split heads, and the thickness of the shim determines the size of the gap between the slots, There is a coating head whose length determines the length of the slot, that is, the coating width of the coating liquid (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 2003-211053

In such a conventional fluid application apparatus, whenever the application width of the application liquid or the gap between the slots is changed in accordance with the change in the size of the workpiece to be applied, a shim or thickness having a recess having a corresponding width. Need to be replaced with a different shim.
However, since the shim is sandwiched between two split heads and the split heads are fastened with bolts so that they do not leak even if the injection pressure of the coating liquid is high, After completely disassembling the two split heads and shims and aligning the replaced shims with the disassembled split heads with high accuracy, they must be assembled together, making the replacement work cumbersome and difficult. There was a problem that it took time for the replacement, and the operating rate was lowered and the productivity was inferior.

  An object of the present invention is to cope with such a problem, such as simply attaching and detaching a shim to the first divided head and the second divided head and aligning and assembling with high accuracy. It is the purpose.

  In order to achieve such an object, the present invention is provided with a first divided head having a coating liquid supply path, reciprocally movable in a direction of separation and approaching the first divided head, A second split head in which an insertion space is formed between the first split head and the supply, the second split head being provided in the insertion space so as to be freely removable along the opposing surfaces of the first split head and the second split head; A plurality of types of shims having a recess for forming a slot of the coating liquid communicating with a path between the first divided head and the second divided head, and the shim includes the first divided head Alternatively, a first stopper that abuts either or both of the second divided heads in the insertion direction of the shim with respect to the insertion space is provided, and the interval between the insertion spaces is set at the time of insertion of the shim. Set to be wider than the thickness of said shim, characterized in that set in after the insertion of the shim such that the thickness and the dimension of the shim.

In the present invention having the above-described features, the shim is inserted into the insertion space in a state where the first division head and the second division head are moved apart so that the insertion space is wider than the thickness of the shim. The front and back surfaces of the shim are sandwiched without contacting the opposing surfaces of the first divided head and the second divided head, and at the same time, the first stopper provided on the shim is set to either the first divided head or the second divided head. By abutting against one or both, the recess is positioned in the shim insertion direction, and after the shim is inserted, the first split head and the second split head are approached so that the insertion space has the same dimension as the thickness of the shim. By moving, the opposing surfaces of the first and second divided heads are in close contact with the front and back surfaces of the shim, and the shim is positioned in the thickness direction.
Therefore, the shim can be easily attached to and detached from the first divided head and the second divided head, and can be assembled with high accuracy.
As a result, it is necessary to disassemble the two split heads and shims when replacing the shim, and to align the replaced shims and split heads with high precision in response to changing the size of the workpiece that is the application target. Compared to conventional products, the shim replacement time can be greatly shortened, and the slot clearance and application width can be changed easily with the change in size. Excellent productivity.
Furthermore, since both the front and back surfaces of the shim do not come into contact with the opposing surfaces of the first divided head and the second divided head when the shim is replaced, it is possible to prevent the generation of dust such as coating liquid adhering to the shim. Cleaning work can be reduced.

It is explanatory drawing which shows the whole structure of the fluid application | coating apparatus which concerns on embodiment of this invention, (a) is a partially notched front view at the time of shim insertion, (b) is the longitudinal cross-sectional side view. It is a disassembled perspective view. It is explanatory drawing which shows a shim insertion, (a) is a partially notched front view, (b) is the same expanded vertical side view. It is a perspective view after shim insertion.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
A fluid application apparatus A according to an embodiment of the present invention is integrally assembled to an apparatus main body (not shown) disposed so as to face the surface of a work to be applied, and the work together with the apparatus main body. This is a (slot) coater device for applying a coating liquid such as an adhesive liquid or a resist in a uniform film thickness by being moved relative to the surface.
Specifically, as shown in FIGS. 1 to 4, the fluid application apparatus A according to the embodiment of the present invention includes a first divided head 1 that is detachably attached to the apparatus main body, and a first divided head 1. The second divided head 2 provided so as to be reciprocable in the direction of separation and approaching opposite to each other, and the plurality of types provided so as to be freely removable along the opposed surfaces 1a, 2a of the first divided head 1 and the second divided head 2 The shim 3 is provided as a main component.

The first divided head 1 is formed in a substantially rectangular shape whose width dimension is longer than the length dimension orthogonal to the first divided head 1 and is formed on one side surface so as to face a second divided head 2 described later. It has a surface 1a and a supply path 1b for coating liquid (not shown).
The supply path 1b has an inlet 1b1 connected to a supply source of the coating liquid, and a cavity 1b2 for diffusing the coating liquid supplied from the inlet 1b1 in the width direction of the first divided head 1, The part 1b2 is opened along the facing surface 1a of the first divided head 1.
In the case of the example shown in FIGS. 1 to 4, the coating liquid inlet 1 b 1 is provided in one end surface of the first divided head 1 in the length direction orthogonal to the width direction.

Similar to the first divided head 1, the second divided head 2 is formed in a substantially rectangular shape whose width dimension is longer than the length dimension orthogonal to the second divided head 1, and the opposing surface 1a of the first divided head 1 is formed on one side surface thereof. It has the smooth opposing surface 2a so that it may oppose.
The first divided head 1 and the second divided head 2 are reciprocated by the guide member 4 so that the opposing surfaces 1a and 2a are separated from and approach each other in the thickness direction of the first divided head 1 and the second divided head 2. It is supported freely.
As a specific example of the guide member 4, in the example shown in FIGS. 1 to 4, a support rod 4 a is protruded from the facing surface 1 a of the first divided head 1 and supported by the facing surface 2 a of the second divided head 2. A concave portion 4b that is slidably fitted to the rod 4a is provided so as to be reciprocally supported by sliding of the support rod 4a and the concave portion 4b.
Although not shown as another example, as the guide member 4, a support rod 4 a is protruded from the opposing surface 2 a of the second divided head 2, and a concave portion 4 b is provided in the opposing surface 1 a of the first divided head 1. Further, a support structure having a structure different from that of the support rod 4a and the recess 4b is provided, or a drive source such as an actuator is provided to mechanically reciprocate the first divided head 1 and the second divided head 2 in a direction to separate and approach. It is also possible to make it.
Furthermore, an insertion space S for inserting and removing a shim 3 to be described later is freely defined between the opposing surfaces 1a and 2a of the first divided head 1 and the second divided head 2.
In the case of the example shown in FIGS. 1 to 4, the insertion space S of the shim 3 described later is formed over the entire length in the length direction orthogonal to the width direction in the first divided head 1 and the second divided head 2. Inserts a shim 3 to be described later from one end in the length direction where the injection port 1b1 for the coating liquid is opened.

The shim 3 has a rectangular shape whose width dimension is smaller than the width dimension of the first divided head 1 and the second divided head 2 and has a smooth surface 3a and a back surface 3b. By first or manually inserting the first divided head 1 and the second divided head 2 in the short direction toward the insertion space S formed between the surface 1a and the opposing surface 2a of the second divided head 2, It arrange | positions so that it may be pinched | interposed between the opposing surfaces 1a and 2a of the division | segmentation head 1 and the 2nd division | segmentation head 2. FIG.
A recess 3c is formed at the end of the shim 3 on the distal end side that is inserted into the insertion space S and at the center in the width direction.
The recessed portion 3c is inserted into the insertion space S and communicates with the cavity portion 1b2 of the coating liquid supply path 1b, and is slit-shaped between the opposing surfaces 1a and 2a of the first divided head 1 and the second divided head 2. Slot T is formed.
The slot T is formed along tapered portions 1c and 2b that are formed so as to protrude from the other end in the length direction perpendicular to the width direction of the first divided head 1 and the second divided head 2.

The width direction length dimension of the recess 3c determines the length of the slot T, that is, the coating width of the coating liquid.
The thickness dimension of the shim 3 determines the size of the gap of the slot T described later, that is, the coating thickness (film thickness) of the coating liquid.
For this purpose, a plurality of types of shims 3 having different length dimensions in the width direction of the recess 3c and a plurality of types of shims 3 having different thickness dimensions are prepared. When changing the size of a workpiece to be coated, for example, a shim 3 having a recess 3c in the width direction corresponding to the coating width of the coating liquid, or a thickness size corresponding to a desired thickness (film thickness) of the coating liquid. This is done by selecting Sim 3 and replacing it.
In addition, these plural types of shims 3 are all formed in the same dimension regardless of changes in the length direction dimension and thickness dimension of the recess 3c.

Further, on the opposite side of the shim 3 to the recess 3c, either the first divided head 1 or the second divided head 2, or both the first divided head 1 and the second divided head 2, the shim 3 The 1st stopper 5 contact | abutted in the insertion direction is provided. When the shim 3 is inserted into the insertion space S, the concave portion 3c is moved in the insertion direction of the shim 3 by abutting the first stopper 5 against one or both of the first divided head 1 and the second divided head 2. To be positioned.
As a specific example of the first stopper 5, in the case of the example shown in FIGS. 1 to 4, a thick part 5 a larger than the thickness dimension of the shim 3 is continuously provided at the end of the shim 3 opposite to the concave part 3 c. Thus, a positioning step portion is formed between the front surface 3 a of the shim 3 and the one end surface in the length direction of the second divided head 2. As shown in FIGS. 3 and 4, immediately after the shim 3 is inserted into the insertion space S, the positioning step portion of the thick portion 5 a abuts against one end surface in the length direction of the second divided head 2.
Further, although not shown as another example, as the first stopper 5, a positioning step portion that abuts against one end surface in the length direction of the first divided head 1 is formed between the thick portion 5a and the back surface 3b of the shim 3. A positioning step portion is formed between the thick portion 5a and the front surface 3a and the back surface 3b of the shim 3 so as to abut against one end surface in the length direction of the first divided head 1 and the second divided head 2, respectively. It is also possible to provide a positioning member having another structure such as a protrusion in place of the positioning step 5a.

In addition, either one of the first divided head 1 and the second divided head 2, or both the first divided head 1 and the second divided head 2, the width direction end portions 3d and 3e of the shim 3 The second stopper 6 that contacts either or both of them is provided, and when the shim 3 is inserted into the insertion space S, either one or both of the width direction end portions 3d and 3e of the shim 3 are in contact with the second stopper 6. Thus, it is preferable to position the shim 3 and the recess 3c in the width direction.
As a specific example of the second stopper 6, in the example shown in FIGS. 1 to 4, a positioning convex portion 6 a is provided on one end surface in the length direction of the second divided head 2, and the width direction of the thick portion 5 a of the shim 3. Projections are provided so as to abut against both ends. As shown in FIGS. 3 and 4, when most of the shim 3 is inserted into the insertion space S, both end portions in the width direction of the thick portion 5a of the shim 3 are in contact with the positioning convex portions 6a, respectively. .
Although not shown as another example, as the second stopper 6, the positioning projection 6 a is brought into contact with one end surface in the length direction of the first divided head 1 and both end portions in the width direction of the thick portion 5 a of the shim 3. The positioning convex portion 6a protrudes toward the insertion space S so as to directly contact the width direction end portions 3d, 3e of the shim 3 instead of the width direction both ends of the thick portion 5a of the shim 3. By installing, the width direction end portions 3d and 3e of the shim 3 are inserted while being in contact with the positioning convex portion 6a, or the width direction end portion of the thick portion 5a of the shim 3 or the width direction end of the shim 3 It is also possible to project the positioning convex portion 6a so as to contact only one of the portions 3d and 3e, or to provide a positioning member having another structure instead of the positioning convex portion 6a shown in the figure.

The interval of the insertion space S is either the first divided head 1 or the second divided head 2 when the shim 3 is inserted into the insertion space S and after the shim 3 is inserted, or the first divided head 1 and Both of the second divided heads 2 are manually or mechanically moved so as to be separated from each other and approach each other, and are respectively set to predetermined dimensions.
That is, when the shim 3 is inserted, as shown by the two-dot chain line in FIG. 1B and FIG. 2, the interval of the insertion space S is set to be wider than the thickness dimension of the thickest shim 3, The front and back surfaces 3a and 3b of the shim 3 being inserted are configured not to contact the opposing surfaces 1a and 2a of the first divided head 1 and the second divided head 2, respectively.
After the shim 3 is inserted, as shown in FIGS. 3B and 4, the interval between the insertion spaces S is set to be the same as the thickness dimension of the shim 3, and the inserted shim 3 is inserted. The front and back surfaces 3a and 3b are in close contact with the opposing surfaces 1a and 2a of the first divided head 1 and the second divided head 2, respectively.

Further, the first divided head 1 and the second divided head 2 are pressed in the separation direction so that the insertion space S becomes the interval when the shim 3 is inserted, or the insertion space S is the interval after the shim 3 is inserted. The elastic member 7 that is pressed in the approaching direction and the insertion space S are held so as to be spaced after the shim 3 is inserted, or the insertion space S is held so as to be spaced when the shim 3 is inserted. A holding member 8 is preferably provided.
In the example shown in FIGS. 1 to 4, as the elastic member 7, a spring material 7 a made of a coil spring or the like for pressing in the separation direction so that the insertion space S becomes the interval at the time of insertion of the shim 3 is used. Provided across the opposing surfaces 1a, 2a of the one divided head 1 and the second divided head 2 and connected as a holding member 8 to couple the first divided head 1 and the second divided head 2 together so that the shim 3 is sandwiched between them. By providing the member 8a and removing the connecting member 8a of the holding member 8, the pressing space of the elastic member 7 (spring material 7a) automatically pushes the insertion space S to a set position where it becomes wider than the thickness dimension of the shim 3. Is moved away from each other. A bolt is used as the connecting member 8a, and through holes 8b and 8c through which the bolt penetrates are opened in the second divided head 2 and the shim 3, and a screw that is screwed into a screw portion of the bolt in the first divided head 1. A hole 8d is opened.
Further, although not shown as another example, the connecting member 8a can be changed to another connecting structure instead of a bolt.
Further, as the elastic member 7, a spring material is provided that presses in the approaching direction so that the insertion space S becomes the interval after insertion of the shim 3. As the holding member 8, the insertion space S becomes the interval when the shim 3 is inserted. In this way, the spacer of the holding member 8 is removed and the spacer of the holding member 8 is removed to automatically set the interval of the insertion space S to the set position where the thickness of the shim 3 is the same as the pressing force of the elastic member (spring material) 7. It is also possible to move closer.

According to such a fluid application apparatus A according to the embodiment of the present invention, the first divided head 1 and the second divided head 2 are moved away from each other so that the insertion space S is wider than the thickness of the shim 3. By inserting the shim 3 toward the insertion space S, the front and back surfaces 3a, 3b of the shim 3 are sandwiched without contacting the opposing surfaces 1a, 2a of the first divided head 1 and the second divided head 2.
At the same time, the first stopper 5 provided on the shim 3 is abutted against either the first divided head 1 or the second divided head 2 or both the first divided head 1 and the second divided head 2. Thus, the recess 3 c is positioned in the insertion direction of the shim 3.
Further, after the shim 3 is inserted, the first divided head 1 and the second divided head 2 are moved closer to each other so that the insertion space S has the same dimension as the thickness of the shim 3. The facing surfaces 1a and 2a of the divided head 2 are in close contact with the front and back surfaces 3a and 3b of the shim 3, respectively, and the shim 3 is positioned in the thickness direction.
Therefore, the shim 3 can be easily attached to and detached from the first divided head 1 and the second divided head 2 and can be assembled with high accuracy.
As a result, the replacement time of the shim 3 can be significantly shortened, and the slot T gap dimension and coating width change operation (replacement) accompanying the size change can be easily performed, and the operating rate is improved accordingly. And excellent productivity.
Further, since the front and back surfaces 3a and 3b of the shim 3 do not come into contact with the opposing surfaces 1a and 2a of the first divided head 1 and the second divided head 2 due to the replacement of the shim 3, dust such as a coating liquid adhering to the shim 3 is obtained. Can be prevented, and the associated cleaning work can be reduced.
By the way, when the shim 3 is replaced, it is dangerous to remove and disassemble the very heavy first divided head 1 and second divided head 2 from the apparatus main body.
On the other hand, according to the fluid application apparatus A according to the embodiment of the present invention, the shim 3 can be replaced without removing the first divided head 1 and the second divided head 2 from the apparatus main body. And safety can be improved.

In particular, when either one or both of the first divided head 1 and the second divided head 2 is provided with the second stopper 6 that contacts the width direction end portions 3d and 3e of the shim 3, When the shim 3 is inserted, the width direction end portions 3d and 3e of the shim 3 are brought into contact with the second stopper 6 so that the shim 3 and the recessed portion 3c have a width corresponding to the first divided head 1 and the second divided head 2. Positioned in the direction.
Therefore, the shim 3 can be easily aligned with the first divided head 1 and the second divided head 2 with high precision and assembled.
As a result, the assembly accuracy can be further improved.

Further, the first divided head 1 and the second divided head 2 are pressed in the separation direction so that the insertion space S becomes an interval when the shim 3 is inserted, or the insertion space S is separated from the interval after the shim 3 is inserted. The elastic member 7 that presses in the approaching direction and the insertion space S are held at a distance after the shim 3 is inserted, or the insertion space S is held at a distance when the shim 3 is inserted. When the holding member 8 is provided, by removing the holding member 8 from the first divided head 1 and the second divided head 2, the interval of the insertion space S is set to the thickness dimension of the shim 3 by the pressing force of the elastic member 7. It automatically moves to a set position that is wider than that, or automatically approaches to a set position that is the same as the thickness dimension of the shim 3.
Therefore, the replacement work of the shim 3 can be facilitated and the replacement time of the shim 3 can be further shortened.
As a result, the operating rate can be further improved.
Next, an embodiment of the present invention will be described with reference to the drawings.

  In this embodiment, as shown in FIGS. 1 to 4, a handle 3 f is provided on the side of the shim 3 opposite to the recess 3 c, and the operator manually holds the shim 3 in and out of the insertion space S with the handle 3 f. Shows the case.

In the example shown in FIGS. 1 to 4, a plurality of handles 3 f are projected from a thick portion 5 a that is connected to the end portion on the opposite side of the recess 3 c in the shim 3.
Although not shown in the drawings as another example, it is possible to change to a mounting structure other than the example shown in the drawing, such as integrally forming a handle 3f at the end of the shim 3.

According to the fluid application apparatus A according to the first embodiment of the present invention, the operator can hold the handle 3f so that the entire shim 3 can be taken in and out of the insertion space S without touching the recess 3c.
Therefore, the replacement of the shim 3 can be performed manually and easily without getting dirty.
As a result, it is possible to easily change the gap dimension of the slot T and the application width (replacement) associated with the manual size change, and there is an advantage that the operation rate is improved correspondingly and the productivity is excellent.

  In the above-described embodiment, the case where the operator manually holds the shim 3 in and out of the insertion space S with the handle 3f of the shim 3 is not limited to this. The shim 3 may be taken in and out of the space S mechanically.

DESCRIPTION OF SYMBOLS 1 1st division | segmentation head 1a Opposing surface 1b Supply path 2 2nd division | segmentation head 2a Opposing surface 3 Shim 3c Recessed part 3d, 3e Width direction edge part 3f Handle 5 1st stopper 6 2nd stopper 7 Elastic member 8 Holding member S Insertion space T slot

Claims (4)

A first divided head having a coating liquid supply path;
A second divided head provided opposite to the first divided head so as to be able to reciprocate in the direction of separation and approach, and an insertion space is formed between the first divided head;
A slot for the coating liquid, which is provided so as to be able to enter and exit along the opposing surfaces of the first divided head and the second divided head toward the insertion space and communicates with the supply path, is formed in the first divided head and the second divided head. A plurality of types of shims having recesses to be formed between the heads,
The shim is provided with a first stopper that abuts in the insertion direction of the shim with respect to the insertion space with respect to either or both of the first divided head and the second divided head,
The interval between the insertion spaces is set to be larger than the thickness of the shim when the shim is inserted, and is set to have the same dimension as the thickness of the shim after the shim is inserted. Fluid application device.   2. The fluid application device according to claim 1, wherein either one or both of the first divided head and the second divided head is provided with a second stopper that comes into contact with an end portion in the width direction of the shim.   The first split head and the second split head are pressed in the separation direction so that the insertion space is spaced at the time of insertion of the shim, or the insertion space is spaced after insertion of the shim. An elastic member that presses in the approaching direction, and a holding member that holds the insertion space at an interval after insertion of the shim, or holds the insertion space at an interval when the shim is inserted. The fluid application apparatus according to claim 1, wherein the fluid application apparatus is provided.   The fluid application apparatus according to claim 1, 2, or 3, wherein a handle is provided on the side of the shim opposite to the recess.

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