JP2003211053A - Maintenance mechanism for coating head in liquid coater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a maintenance mechanism facilitating the maintenance work of a coating head even for a large-sized coating head in a fluid coater. <P>SOLUTION: In the fluid coater 1, the coating head 20 having a slot in a thin and long slit shape in a width direction is provided, and the maintenance mechanism 40 of the coating head 20 is provided with: a slider 41 provided inside the fluid coater 1 and capable of being mounted with the coating head 20 and being pulled out to outside the fluid coater 1; and an elevating and lowering means 42 for elevating and lowering the slider 41. Also, it is further provided with a plurality of detection means for respectively detecting at least the return limit of the slider 41, the elevating limit of the elevating and lowering means 42, the lowering limit of the elevating and lowering means 42 and the presence of the coating head 20 mounted on the slider 41. The slider 41 is provided with the positioning means of a slider movable part 48. A safety device to allow advance to the next operation on condition that the detection means detect each detection item is provided. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating head of a slot type liquid coating apparatus for coating a coating liquid such as a resist with a uniform film thickness on the surface of a coating object such as a semiconductor substrate or a liquid crystal substrate. The present invention relates to a maintenance mechanism, and more particularly to a maintenance mechanism for a coating head in a liquid coating device that facilitates maintenance work for a large coating head.

[0002]

2. Description of the Related Art Conventionally, a slot type liquid coating device (slot coater) is used for coating a coating liquid such as a resist on a coating target such as a semiconductor substrate or a liquid crystal substrate, particularly a rectangular coating target. Is used. Compared with a spin coater, this type of liquid coating device has the advantages that it consumes less coating liquid and is less expensive.

By the way, in recent years, in the slot type liquid coating apparatus, the object to be coated has become large (for example, in the case of a rectangular substrate, 680 mm × 880 mm, 1000 mm × 12).
(For example, 00 mm), the coating head becomes large, the manufacturing cost of the coating head rises, and the coating head becomes expensive.

In a manufacturing apparatus for a semiconductor device or a liquid crystal display device, in the step of applying a liquid to a substrate, application is performed in order to maintain a constant coating film quality or to cope with changes in the type of liquid used, the size of the substrate, etc. Removing the head, cleaning the tip of the coating head, replacing the shims to change the thickness and width of the coating head slot (coating width), replacing the coating head itself, constant temperature circulating water heater (water jacket)
It becomes necessary to carry out maintenance work such as cleaning and replacement. In such a case, if the coating head is large, it is not easy for a worker to attach and detach the coating head to perform necessary maintenance work.

Thus, as the coating head becomes larger,
Since the maintenance of the coating head is no longer easy, it has become difficult to keep the coating quality constant and improve the product yield. In particular, in the case of a large-sized coating head, it is not easy to easily modify an expensive coating head in order to handle a large number of types of coating objects and a large number of types of coating liquids.

In the conventional maintenance of a small-sized coating head, an operator removes fasteners (bolts) of the coating head, carries the coating head out of the liquid coating apparatus, cleans the tip of the coating head, and cleans the coating head. Necessary maintenance work such as replacement was carried out. There, the coating head itself has been modified in order to deal with a wide variety of coating objects and a wide variety of coating liquids. However, in order to cope with the recent increase in the size of the coating head by such a conventional maintenance method, the work must be extremely difficult and costly.

[0007]

SUMMARY OF THE INVENTION The invention of the present application solves the above-mentioned problems associated with the maintenance of the coating head in the conventional slot type liquid coating apparatus, so that even in the case of a large coating head, the work can be performed. It is possible to reduce the burden of maintenance work on the coating head by a person, improve workability, and easily handle a wide variety of coating objects and coating liquids. A maintenance mechanism for a coating head in a liquid coating apparatus, which can simplify the work, can be carried out at a low cost, and can regularly maintain the coating quality to improve the product yield. The challenge is to provide.

[0008]

The invention of the present application relates to a maintenance mechanism of a coating head in a liquid coating apparatus which solves the above-mentioned problems, and the invention described in claim 1 thereof is in the width direction. A coating head having an elongated slit-shaped slot is provided, while the coating liquid is discharged downward from the opening of the slot, the coating head is moved in a horizontal direction relative to a coating object below,
A maintenance mechanism of a coating head in a liquid coating device configured to form a coating film on the coating object is provided in the liquid coating device, the coating head is placed, and the coating head is mounted on the liquid. A maintenance mechanism for a coating head in a liquid coating apparatus, comprising: a slider that can be pulled out of the coating apparatus; and an elevating means for elevating the slider.

Since the invention described in claim 1 is configured as described above, the following effects can be obtained. The elevating means is moved up to a position where the slider can mount the coating head, and then the coating head is detached from the liquid coating device, mounted on the slider, and the slider is slid to slide the coating head. It can be pulled out of the device. The reverse operation may be performed to attach the coating head to the liquid coating device. Finally, the elevating means can be lowered to move the coating head to the next step.

Therefore, the application head is semi-automatically attached to and detached from the liquid application device, and can be easily performed. Therefore, even if the application head is large, the operator pulls out the application head from the liquid application device to perform application. The burden of maintenance work on the head is reduced, and the workability can be improved. In addition, the coating head itself must be replaced in order to handle a wide variety of coating objects and coating liquids.
Even when the parts of the coating head are replaced or modified, the coating head can be easily pulled out from the liquid coating device, which facilitates the work and makes it possible to apply various types of coating objects and coating liquids. Correspondence becomes easy. As a result, the maintenance work of the coating head is facilitated and can be carried out at a low cost. By regularly performing maintenance, the coating quality can be kept constant and the product yield can be improved. .

The invention described in claim 2 is
The maintenance mechanism of the coating head in the liquid coating apparatus according to claim 1, further comprising at least a return limit of the slider, a rising limit of the elevating means, a lowering limit of the elevating means, and the coating head mounted on the slider. Is a maintenance mechanism for a coating head in a liquid coating apparatus, the maintenance mechanism including a plurality of detection means for detecting the presence of each of the seats.

Since the invention described in claim 2 is configured as described above, the following effects can be obtained. It is confirmed that the slider has risen to a position where the coating head can be mounted by the operation of the detecting means for detecting the ascent limit of the elevating means, and then the coating head is removed from the liquid coating device and attached to the slider. When the detecting means for detecting the presence of the application head mounted and mounted on the slider is activated, the slider can be slid so that the application head can be pulled out of the liquid application apparatus.
To attach the coating head to the liquid coating device, confirm the operation of the detection means for detecting the return limit of the slider and the stop of the operation of the detection means for detecting the seating of the coating head mounted on the slider. However, the reverse operation may be performed. Then, finally, the operation of the detecting means for detecting the lower limit of the elevating means can be confirmed, and the coating head can be moved to the next step.

Therefore, the mounting and removal of the coating head from the liquid coating device is further semi-automated and can be performed very easily. Even if the coating head is large, the operator pulls the coating head out of the liquid coating device. The load of maintenance work of the coating head to be performed is reduced, and the workability thereof can be improved. In addition, it is easy to pull out the coating head from the liquid coating device even when the coating head itself is replaced, or the components of the coating head are replaced or modified in order to handle a wide variety of coating objects and coating liquids. Since it can be performed, these operations are extremely easy, and it is easy to deal with a wide variety of coating objects and coating liquids. As a result, the maintenance work of the coating head is facilitated and can be carried out at a low cost. By regularly performing maintenance, the coating quality can be kept constant and the product yield can be improved. .

According to the invention of claim 1 or 2, the slider comprises a slider movable part and a slider fixed part.
Positioning means for the slider movable part is provided.

As a result, it is possible to improve the accuracy of the operation of the slider, such as returning the slider to the return limit position and pulling it out to the pulling-out position, and to ensure the safety of maintenance work.

According to the invention as set forth in claim 3, the positioning means is provided with an elastically projecting and retractable protrusion provided in the slider fixing portion or the slider moving portion. The positioning plate is provided on the slider movable portion or the slider fixing portion and has a recessed portion that engages with the protrusion.

As a result, the means for positioning the slider movable portion can be obtained with an extremely simple structure.

Further, as described in claim 5, claim 2
According to the invention as set forth in any one of claims 4 to 4, the plurality of detecting means are provided with a plurality of detecting means, ie, a return limit of the slider, an ascent limit of the ascending / descending means, a descending limit of the ascending / descending means and the presence of the coating head mounted on the slider. On the condition that each of the above is detected, a safety device is provided that allows the next operation to proceed.

As a result, it is possible to confirm a series of maintenance operations performed by the coating head, the slider, and the elevating means, and to proceed to the next operation.
In addition, it can be executed safely, and the safety of maintenance work can be achieved.

Further, by constructing the invention according to any one of claims 1 to 5 as described in claim 6, the coating head has a width in which the coating solution injected from the solution injection port is retained. A first split head having a reservoir extending in the direction, a second split head, and a slit elongated slot in the width direction that is sandwiched between the split heads and communicates with the reservoir between the split heads. The maintenance of the coating head using a maintenance mechanism includes a work of pulling the coating head out of the liquid coating apparatus and replacing the shim.

As a result, even when the coating width and thickness of the slot are changed in accordance with various types of coating objects and coating liquids, the coating head pulled out of the liquid coating apparatus is disassembled and the internal shims are properly adjusted. It is possible to easily deal with the problem by simply replacing the coating head with a different one, and it is not necessary to prepare a number of expensive coating heads, nor is it necessary to modify the coating heads. As a result, it becomes easier to handle a wide variety of coating objects and coating liquids, the maintenance work is further facilitated, and the cost can be reduced.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the invention described in claims 1 to 6 of the present application shown in FIGS. 1 to 13 will be described. FIG. 1 is a schematic perspective view of a liquid coating apparatus according to the present embodiment, FIG. 2 is a schematic front view of a maintenance mechanism of a coating head used in the liquid coating apparatus, and FIG. 3 is a left end of a maintenance mechanism section of FIG. FIG. 4 is an enlarged front view of an essential part, FIG. 4 is an enlarged side view of the same, FIG. 5 is an enlarged front view of an essential part of the right end of the maintenance mechanism part of FIG. 2, FIG. 6 is an enlarged side view of the same, and FIG. FIG. 8 is a plan view, FIG. 8 is a schematic enlarged side view of a right end main part of the maintenance mechanism section of FIG. 2 including a lifting cylinder section, FIG. 9 is a side view showing a mounting state of a coating head to a liquid coating apparatus, and FIG. FIG. 11 is a plan view of a slider fixing part which constitutes a maintenance mechanism. FIG. 11 is a plan view of a slider in which the slider fixing part is combined with a slider moving part. FIG. 12 is a series of drawings in which a coating head is pulled out of a liquid coating device. FIG. 13 shows a process, and FIG. 13 shows application. Tsu is an exploded perspective view of the de.

The liquid coating apparatus according to the present embodiment is a liquid or liquid material such as a resist or a chrome coating liquid having a uniform film thickness on the surface of a coating object such as a semiconductor substrate or a liquid crystal substrate (hereinafter, these are collectively referred to as ""Coatingliquid" or "liquid"). The overall structure is
Schematically, as shown in FIG. 1, a table 3 is installed near the center of a base 2 of a liquid coating apparatus 1, and a substrate 4 to be coated is placed on the upper surface of the table 3. ing. On both side edges of the base 2, side walls 2a erected at right angles,
2b are formed respectively, and these side walls 2a, 2
Rails 5a and 5b are laid on the upper surface of b, and while being guided by these rails 5a and 5b, the coating mechanism unit 10
Running, the coating liquid ejected from the lower end nozzle portion of the coating head 20 provided to the coating mechanism section 10 so as to be able to move up and down, as the coating mechanism section 10 and the coating head 20 travel,
The coating is applied on the substrate 4 with a uniform film thickness from the coating start end to the terminal end.

The lower end nozzle portion of the coating head 20 is an elongated nozzle portion having a length exceeding the width of the substrate 4 (the length of the substrate 4 in the direction orthogonal to the running direction of the coating head 20). The coating liquid is uniformly discharged from the. The structure of the coating head 20 will be described in detail later.

The coating mechanism section 10 comprises a pair of left and right moving bases 11a,
11b, a head holding frame 12 is bridged between the moving bases 11a and 11b so as to be able to move up and down, and the coating head 20 is attached to the head holding frame 12. The attached state is shown in FIG. Brackets 29 are fixed to the top surface of the coating head 20 at two points in the lengthwise direction (see FIG. 2).
The application head 20 is attached to the head holding frame 12 by being screwed to the head holding frame 12 with a bolt 30. Further, on the top surface of the coating head 20, grips 31 are attached at two positions in the length direction. Further, constant temperature circulating water heaters (water jackets) 28a and 28b for keeping the temperature of the coating liquid in the coating head 20 constant are attached to both left and right side surfaces of the coating head 20.

Therefore, the coating head 20 moves up and down integrally with the head holding frame 12 when the head holding frame 12 moves up and down. Head holding frame 12
Is a lifting cylinder 13a fixed to the moving bases 11a and 11b,
These lifting cylinders 13a, 13
It goes up and down as b goes up and down.

Linear drive parts 14a and 14b are attached to the lower parts of the movable tables 11a and 11b (linear drive part 14a).
Is not shown). Electric power is supplied to these linear drive units 14a and 14b through a movable cable 15. Therefore, when electric power is now supplied to the linear drive units 14a and 14b through the movable cable 15, it is excited by electromagnetic coils provided in the linear drive units 14a and 14b, although not shown in detail. Both sides 2a, 2a of the electromagnet and the base 2
An attraction and repulsion action is generated between the rails 5a and 5b and the permanent magnets 16a and 16b laid in parallel with the rails 5a and 5b, so that the moving table is moved.
The propulsive forces of 11a and 11b are formed, and the movable bases 11a and 11b are
While being guided by the rails 5a and 5b, the vehicle starts traveling in either the front or rear direction depending on the direction of the exciting current. Mobile platform
Linear bushes 17a and 17b are fixed to the lower surfaces of 11a and 11b. These linear bushes 17a and 17b are fitted on the rails 5a and 5b and slide to move the movable tables 11a and 11b to the rail 5a. Drive while being guided by 5b.

The coating head 20 is provided on the base 2 in front of the table 3 (lower left in FIG. 1).
Pull out to replace the coating head 20 or the coating head 20
A maintenance mechanism 40 used when performing maintenance work such as cleaning of the lower end nozzle portion is installed.
The maintenance mechanism 40 will be described in detail later. Furthermore, in the front part of the maintenance mechanism 40,
A self-cleaning device 18 used when performing work such as cleaning the lower end nozzle portion of the coating head 20 or draining the liquid while the coating head 20 is attached to the head holding frame 12 is installed.

Next, the structure of the coating head 20 will be described in detail. As shown in FIG. 13, the coating head 20 is composed of two divided heads 21, 22 and a shim 23. Then, a shim 23 is sandwiched between these two divided heads 21 and 22 to be formed. Two split heads 2
Reference numerals 1 and 22 are each made of a metal (stainless steel) block having an elongated rectangular parallelepiped shape, and tooth tips 21a 1 and 22a 2 that project in an acute angle are formed at lower portions near side surfaces facing each other.

The shim 23 is made of a thin plate punched in a U-shape, and the U-shaped recess 23a has two parts when the shim 23 is sandwiched between the two divided heads 21 and 22.
Slit-shaped slot 27 between two split heads 21, 22
(See FIG. 4). The thickness of the shim 23 determines the size of the gap between the slots 27. The length of the recess 23a determines the length of the slot 27, and the length of the slot 27 determines the coating width of the coating liquid on the substrate 4 (coating length in the width direction of the substrate 4).

A liquid injection port 24 for injecting a coating liquid is formed at the center of the lengthwise direction (widthwise direction of the coating head 20) on the upper part of one of the divided heads 21. Air vents 31 are formed near both ends.
Similarly, a cavity 26 for diffusing the liquid injected from the liquid injection port 24 in the width direction is formed in the middle of one of the divided heads 21. The cavity 26 is open on the side surface of the one divided head 21 facing the other divided head 22. Further, three through holes 25 are formed to connect the liquid inlet 24, the air vent 31 and the cavity 26. The cavity 26 communicates with the slot 27, and the liquid in the cavity 26 is made to have a constant thickness by the slot 27 and is discharged from the tip opening below the slot 27. The tip opening of the slot 27 forms a nozzle opening of the lower end nozzle portion of the coating head 20.

Next, the liquid coating device 1 in this embodiment
The operation of will be described. At the start of liquid application to the substrate 4, the application head 20 is set at a predetermined height position above the front end (lower left end in FIG. 1) of the substrate 4. In this state, when a liquid (coating liquid) is supplied to the coating head 20 from a liquid supply source (not shown), the liquid is guided from the liquid injection port 24 through the through hole 25 to the cavity 26, and then,
It is made to have a constant thickness by the slot 27, and is discharged from the tip opening below the slot 27. At the same time, linear drive
14a and 14b operate and the coating mechanism unit 10 starts running. As a result, the coating head 20 moves in the horizontal direction relative to the substrate 4, and the coating liquid ejected from the tip opening portion thereof is deposited on the substrate 4 from the coating start end portion to the coating end portion. While coating evenly, the substrate 4 runs toward the rear end (upper right end in FIG. 1). In this way, a coating film having a uniform film thickness is formed on the substrate 4.

When the coating process of coating the coating liquid on one substrate 4 is completed in this way, the coating head 20 is conveyed to the self-cleaning device 18, where the lower end nozzle portion is cleaned and drained. Work is carried out. In this way, the next step of applying the application liquid to the substrate 4 is prepared. Further, for large-scale maintenance that is regularly performed, the coating head 20 is conveyed onto the maintenance mechanism 40, where a slider 41 described later is provided.
It is placed on the top and is pulled out of the liquid application apparatus 1 by the operator.

Next, the liquid coating device 1 in this embodiment
The structure of the maintenance mechanism 40 of the coating head 20 used for will be described in detail. As described above, the maintenance mechanism 40 is installed in a portion in front of the table 3 on the base 2, and the main components thereof are such that the application head 20 is placed thereon as shown in FIG. The coating head 20
41 for pulling the liquid out of the liquid application device 1
An elevating cylinder (elevating means) 42 for elevating the slider 41, a return limit of the slider 41, an ascending limit of the elevating cylinder 42, a descending limit of the elevating cylinder 42, and a coating head 20 mounted on the slider 41. It is composed of a plurality of sensors (detection means) for detecting the presence of each passenger and a safety device.

The elevating cylinder 42 is mounted on the base 2 while being supported by the support column 43 and the support plate 44. The elevating cylinders 42 are provided at two locations near both ends of the slider 41 in the longitudinal direction and are connected to an air pressure source (not shown). The slider 41 attached is moved up and down.

Immediately next to the lifting cylinder 42, a lifting guide means 45 for guiding the lifting movement of the lifting cylinder 42.
Is also supported by the column 43 and the support plate 44,
It is installed on the base 2. Although not shown in detail, the elevating / lowering guide means 45 includes a guide cylinder fixed to the support column 43 and the support plate 44, and a rod connected to the slider 41 to reciprocate in the guide cylinder.

Further, on the support plate 44, as shown in FIG. 8, an upper limit sensor 46 for detecting the upper limit of the lifting cylinder 42 and a lower limit sensor 47 for detecting the lower limit of the lifting cylinder 42. And are mounted via a common mounting column. The lower limit position of the elevating cylinder 42 is the standby position of the elevating cylinder 42, and the upper limit position of the elevating cylinder 42 is such that the slider 41 mounted on the elevating cylinder 42 is conveyed to just above it. head
It is the position to go to pick up 20.

As shown in FIGS. 2 and 4, the slider 41 is composed of main components of a slider movable portion 48 and a slider fixed portion 49, and between the slider movable portion 48 and the slider fixed portion 49. A well-known slide pack 50 is provided. The slide pack 50 is capable of expanding and contracting in two stages, and the slider movable portion 48 is the slide pack.
Two-step expansion and contraction of 50 to 2
Can be expanded and contracted in stages. And the slider movable part
Positioning means for defining the position where the slider 48 is extended to the slider fixed portion 49 (that is, pulled out to the maximum), and the slider movable portion 48 is reduced to the maximum (that is, returned to the return limit). Positioning means for determining the position are provided.

FIG. 10 is a plan view of the slider fixing portion 49. As is apparent from FIGS. 10 and 4, the slider fixing portion 49 has a slender rail shape having an inverted T-shaped cross section. It consists of a metal member. Then, on one side (upper side in FIG. 10) of the vertical plate portion 52 on the horizontal plate portion 51 forming the lower side of the inverted T-shape, a length of approximately one third of the total length from the left end in FIG. In place, the stopper plate member
53 is fixed by screws. The stopper plate member 53 determines the limit position when the slider movable part 48 is pulled out to the maximum with respect to the slider fixing part 49.

Further, the protrusion 56 appears and disappears at a position just corresponding to the position where the stopper plate member 53 on the other side (the lower side in FIG. 10) is provided on the vertical plate portion 52 on the horizontal plate portion 51. A plate member 54 that is embedded as much as possible is fixed by screws. The protrusion 56 is a recess of a positioning plate 61, which will be described later, fixed to the outer surface of the right end of the side plate 48b (see FIG. 11) of the slider movable part 48 when the slider movable part 48 reaches the limit position. Slider movable part 48
Position it in that position. With respect to the protrusion 56 and the positioning plate 61, the slider movable portion 48 is the slider fixed portion 49.
Locating means for defining a maximally extended (maximally withdrawn) position relative to. The protrusion 56 is composed of a ball plunger, but is not necessarily limited to this.
Any material can be used as long as it can elastically appear and disappear.

Further, on the same side as the plate member 54 is provided with respect to the vertical plate portion 52 on the horizontal plate portion 51, a protrusion 57 is embedded at the right end position in FIG. The plate member 55 is fixed by screwing. This protrusion 57
When the slider movable portion 48 reaches the return limit position, the slider movable portion 48 is fitted into the recessed portion 62 of the positioning plate 61 described later to position the slider movable portion 48 at that position. This protrusion
The 57 and the positioning plate 61 constitute a positioning means that determines the position where the slider movable portion 48 is contracted to the maximum (returned to the return limit). The protrusion 57 has the same structure as the protrusion 56, and the plate member 55 has the same structure as the plate member 54.

A slider fixing portion having the above structure
The slider movable part 48 is mounted on the 49. As shown in FIG. 4 to FIG. 7 and FIG. 11, the slider movable portion 48 has two elongated flat plate side plates 48a and 48b bolted at both ends via connecting pins 58 and connecting plates 59, respectively. Are connected together to form an integral structure. The slide pack 50 is interposed between the two side plates 48a and 48b and the vertical plate portion 52 of the slider fixing portion 49.

The slide pack 50 is composed of three slender, relatively slidable plate-shaped members which are slidable relative to each other, and the innermost bent plate-shaped member is fixed to a slider. The vertical plate portion 52 of the portion 49 is screwed and fixed to the vertical plate portion 52. The outermost bent plate member is a side plate 48a of the slider movable portion 48.
, 48b are fixed with screws. Therefore, the slider movable part 48 can expand and contract in two steps with respect to the slider fixing part 49 by the sliding movement of the three bent plate members relative to each other and the expansion and contraction of the slide pack 50.

A collision plate block 60 is screwed and fixed to the outer surface of the right end of the side plate 48a on one side (the upper side in FIG. 11) of the slider movable portion 48. Similarly, the side plate 48 on the other side (lower side in FIG. 11) of the slider movable portion 48.
A positioning plate 61 is screwed and fixed to the outer surface of the right end of b. This positioning plate 61
A concave portion 62 (see FIGS. 4 and 5) into which the protrusions 56 and 57 can be fitted is formed in the central portion of the lower end surface of the concave portion.

Although not shown in FIG. 10, the right end surface of the vertical plate portion 52 of the slider fixing portion 49 in FIG.
As shown in FIGS. 5 to 7 and 11, the L-shaped block piece 63 in plan view is fixed together with the sensor mounting piece 65 by two bolts 64 (see FIG. 6). A stopper bolt 66 is screwed onto the L-shaped bent end of the block piece 63. The tip of the stopper bolt 66 is attached to the side plate of the slider movable portion 48.
Colliding against the end face of the collision plate block 60 provided on the 48a,
The return limit of the slider movable part 48 is determined.

A return limit sensor 67 for detecting the return limit of the slider movable portion 48 is attached to the upper end of the sensor mounting piece 65. The return limit sensor 67 includes an L-shaped bent piece 68 (see FIGS. 5 to 5) fixed to the outer end surface of a connecting plate 59 that connects the two side plates 48a and 48b of the slider movable portion 48 at the right end of FIG. By detecting the bent tip portion (see FIGS. 7 and 11), it is detected that the slider movable portion 48 has returned to the return limit position.

Although not shown in FIG. 10, the left end surface of the vertical plate portion 52 of the slider fixing portion 49 in FIG.
As shown in FIGS. 2, 3 and 11, the slider
A seat sensor 69 for detecting the presence of the coating head 20 placed on 41 is attached. This presence sensor 69
Is the sensor mounting piece 70 fixed to the left end face of the vertical plate 52.
It is attached to the left end surface of the vertical plate portion 52 via. The coating head 20 is designed to be mounted on the slider 41 via a cushioning holder 71 (see FIGS. 2 to 4) made of a relatively soft resin material. Damage to the lower end is prevented.

Further, in the maintenance mechanism 40 of the coating head 20 used in the liquid coating apparatus 1 in this embodiment, the return limit sensor 67 for detecting the return limit of the slider movable portion 48 and the lift limit of the lift cylinder 42. The upper limit sensor 46 for detecting the lower limit, the lower limit sensor 47 for detecting the lower limit of the elevating cylinder 42, and the presence sensor 69 for detecting the presence of the coating head 20 mounted on the slider 41 are respectively detected. A safety device is provided that allows the next operation to be performed on condition that the object is detected. For example, if the presence sensor 69 detects the presence of the coating head 20 on the slider 41, the protrusion 57 and the protrusion 57 are provided so that the operator can pull the coating head 20 out of the liquid coating apparatus 1. The positioning means including the positioning plate 61 is provided with an interlock mechanism for releasing the engagement between the protrusion 57 and the recess 62 of the positioning plate 61 after receiving the seating detection signal from the seating sensor 69. It is built-in.

Next, the liquid coating apparatus 1 according to this embodiment.
The operation of the maintenance mechanism 40 of the coating head 20 used for will be described in detail. First, the coating head 20 which has finished the coating process of the coating liquid on the substrate 4 is conveyed to just above the maintenance mechanism 40 installed on the base 2 for maintenance (FIG. 12A). reference). Then, when the arrival is confirmed by the operator, the lifting cylinder 42 is unlocked at the lower limit position (standby position) and ascends together with the slider 41 to the upper limit position. The lift of the lift cylinder 42 to the lift limit position is detected by the upper limit sensor 46. At the same time, the lifting cylinder 42
Are locked in this position (see FIG. 12 (b)).

When the upper limit sensor 46 detects the lift of the lift cylinder 42 to the lift limit position, at this time, the upper end surface of the slider 41 (more accurately, the upper end surface of the slider movable portion 48 constituting the slider 41). Is in contact with the lower end surface of the coating head 20 via the cushioning holder 71, so that the coating head 20 can be gently placed on the slider 41. Therefore, the maintenance operation panel (not shown)
Since the removal permission of the coating head 20 is displayed, the operator confirms the permission display and then the bolt 30 (see FIG. 9).
Is loosened and the coating head 20 is removed from the head holding frame 12. The permission / non-permission display of various operations on the maintenance operation panel may be replaced by a voice signal, or these may be used together. A cushioning holder 71 interposed between the slider 41 and the coating head 20.
Are omitted in FIG.

In this way, when the coating head 20 is removed from the head holding frame 12, the coating head 20 is completely placed on the slider 41. This state is detected by the seat sensor 69. Therefore, when the presence sensor 69 detects that the coating head 20 is placed on the slider 41,
On the maintenance operation panel, an indication that the application head 20 can be pulled out is displayed, and the interlock mechanism incorporated in the positioning means including the protrusion 57 and the positioning plate 61 is unlocked. After confirming the permission display on the maintenance operation panel, move the slider
Is drawn out of the liquid application apparatus 1 together with the application head 20 placed thereon (see FIGS. 2 and 12C).

In this way, in the slider movable portion 48 and the coating head 20 pulled out by the operator to the outside of the liquid coating apparatus 1, the collision plate block 60 fixed to the side plate 48a of the slider movable portion 48 is fixed to the slider. The plate member fixed to the horizontal plate part 51 of the horizontal plate part 51 while being stopped by colliding with the stopper plate member 53 fixed to the horizontal plate part 51 of the part 49.
The protrusion 56 embedded in the slider 54 is embedded in the slider movable portion 48.
By being fitted in the recessed portion 62 formed in the positioning plate 61 fixed to the side plate 48b, the positioning is performed there.

In this way, the operator performs predetermined maintenance on the coating head 20 that is pulled out of the liquid coating apparatus 1 and positioned at a predetermined position.
For this maintenance, cleaning the tip of the coating head 20,
A coating head depending on the type of liquid used, the size of the substrate 4, etc.
Maintenance work such as replacement of shim 23 for changing thickness and width (application width) of slot 27 of 20, application head 20 itself, cleaning / replacement of constant temperature circulating water heaters (water jackets) 28a, 28b, etc. Be done.

When the predetermined maintenance for the coating head 20 is completed in this way, the operator then moves the slider movable portion 48 together with the coating head 20 placed on the slider movable portion 48 to the inside of the liquid coating apparatus 1. Return to the return limit position (see FIG. 12 (b)). At this time, in the slider movable portion 48 and the coating head 20, the collision plate block 60 fixed to the side plate 48a of the slider movable portion 48 is the vertical plate portion 52 of the slider fixing portion 49.
It stops by colliding with the stopper bolt 66 fixed to the right end surface of the slider via the block piece 63, and the protrusion embedded in the plate member 55 fixed on the horizontal plate portion 51 of the slider fixing portion 49 so as to be retractable. The child 57 is a side plate of the slider movable portion 48.
By being fitted in the concave portion 62 formed in the positioning plate 61 fixed to the 48b, the positioning is performed there.
Return of the slider movable portion 48 and the coating head 20 to the return limit position is detected by the return limit sensor 67. At the same time, the interlock mechanism built in this positioning means is locked.

In this manner, when the return of the slider movable portion 48 and the coating head 20 to the return limit position is detected by the return limit sensor 67, then the maintenance operation panel is
Since the installation permission of the coating head 20 is displayed, the operator confirms the permission display and tightens the bolt 30 to
The coating head 20 is attached to the head holding frame 12. The attachment of the coating head 20 to the head holding frame 12 is
It is detected when the seat sensor 69 is turned off.

When the attachment of the coating head 20 to the head holding frame 12 is detected by the OFF operation of the seat sensor 69, the lifting cylinder 42 is then attached to the maintenance operation panel.
As the display of permission to descend from the ascending limit position to the descending limit position is displayed, and the lock of the lifting cylinder 42 at the rising limit position is unlocked, the operator confirms the permission display and then lifts the lifting cylinder 42. Along with the slider 41, it is lowered to the lower limit position. The lowering of the lifting cylinder 42 and the slider 41 to the lower limit position (standby position) is detected by the lower limit sensor 47. At the same time, the lifting cylinder 42 is locked in this position.

In this way, when the lower limit sensor 47 detects the lowering of the elevating cylinder 42 and the slider 41 to the lowering limit position (standby position), the maintenance operation panel then proceeds to the next step of the coating head 20. As the movement permission of the coating head is displayed, the operator confirms this display and then
Is moved to a predetermined next step.

An interlock mechanism built in the positioning means (consisting of the protrusion 57 and the positioning plate 61) for positioning the slider movable portion 48 at the return limit position, the elevating cylinder 42 for the lower limit position (standby position) and the ascending position. The interlock mechanism that locks at the limit position and the maintenance operation panel that displays permission / non-permission of various operations of the coating head 20, slider 41, lifting cylinder 42, etc. ensure the safety of the operation of the maintenance mechanism 40 of the coating head 20. The safety device is configured.

Since the maintenance mechanism 40 of the coating head 20 used in the liquid coating apparatus 1 of this embodiment is constructed as described above, the following effects can be obtained. By using the lifting cylinder 42 and the slider 41, the application head 20 is attached to the liquid application device 1,
Since the removal is semi-automated and can be easily performed, even if the coating head 20 is large, the burden of maintenance work of the coating head 20 performed by the operator pulling the coating head 20 out of the liquid coating device is reduced, The workability can be improved. Further, in order to deal with various kinds of coating objects and coating liquids, the coating head 20 itself can be replaced, parts of the coating head 20 can be replaced or modified, etc.
Since the 20 can be easily pulled out from the liquid coating apparatus 1, the operations thereof are facilitated and it is easy to deal with a wide variety of coating objects and coating liquids. As a result, the maintenance work of the coating head 20 is facilitated and can be carried out at low cost, and by regularly performing the maintenance, the coating quality can be kept constant and the product yield can be improved. it can.

In particular, the slider 41 mounts the coating head 20 by the operation of the upper limit sensor 46 for detecting the rising limit of the lifting cylinder 42 using a plurality of sensors 46, 47, 67, 69. It is confirmed that the coating head 20 is lifted to the position where the coating head 20 can be moved, and then the coating head 20 is detached from the liquid coating apparatus 1 and placed on the slider 41 to detect the presence of the coating head 20 placed on the slider 41. When the seat sensor 69 is activated, the slider 41 can be slid so that the coating head 20 can be pulled out of the liquid coating apparatus 1. Also, the coating head
20 is attached to the liquid coating apparatus 1 by operating the return limit sensor 67 for detecting the return limit of the slider 41, and the presence sensor for detecting the presence of the coating head 20 placed on the slider 41. The reverse operation may be performed while confirming the stop (OFF operation) of the operation of 69. Then, after confirming the operation of the lower limit sensor 47 for detecting the lower limit of the lifting cylinder 42, the coating head 20 can be moved to the next step.

Therefore, since the attachment and detachment of the coating head 20 with respect to the liquid coating apparatus 1 is further semi-automated and can be performed very easily, the large coating head 20 can be used.
However, the burden of the maintenance work of the coating head 20 performed by the operator pulling the coating head 20 out of the liquid coating apparatus 1 is reduced, and the workability thereof can be improved. In addition, in order to handle a wide variety of coating objects and coating liquids, the coating head 20 itself can be replaced with liquid even when the coating head 20 itself is replaced, parts (such as the shim 23) of the coating head 20 are replaced or modified. Since it can be easily pulled out from the coating apparatus 1, these operations are extremely easy, and it is easy to deal with a wide variety of coating objects and coating liquids. As a result, the maintenance work of the coating head 20 is facilitated and can be carried out at low cost, and by regularly performing the maintenance, the coating quality can be kept constant and the product yield can be improved. it can.

Further, the slider 41 is composed of the main constituent elements of the slider movable portion 48 and the slider fixing portion 49, and is provided with the positioning means for the slider movable portion 48, so that the slider 41 returns to the return limit position, The accuracy of the operation of the slider 41 such as pulling the slider 41 to the pulling position can be improved, and the safety of maintenance work can be improved.

Moreover, the positioning means is provided with elastically projecting and retracting protrusions 56, 57 provided on the slider fixing portion 49.
And a positioning plate 61 provided on the slider movable portion 48 and having a recess 62 that engages with the protrusions 56 and 57, the positioning means for the slider movable portion 48 is of a very simple structure. Can be obtained by

Further, the return limit sensor 67 sets the return limit of the slider 41, the upper limit sensor 46 sets the upper limit of the lift cylinder 42, the lower limit sensor 47 sets the lower limit of the lift cylinder 42, and the seat sensor 69.
Is provided with a safety device (interlock mechanism, maintenance operation panel) that allows the process to proceed to the next operation, provided that the presence of the coating head 20 placed on the slider 41 is detected. After confirming a series of maintenance operations performed by the coating head 20, the slider 41, and the lifting cylinder 42, the next operation can be performed, and those operations can be performed reliably and safely. Further safety can be achieved.

Further, the coating head 20 has a first divided head 21 having a reservoir 26 extending in the width direction in which the coating liquid injected from the liquid injection port 24 stays, a second divided head 22,
The maintenance mechanism 40 includes a shim 23 that is sandwiched between the two divided heads 21 and 22 and that forms a slit-shaped slot 27 that is elongated in the width direction and communicates with the reservoir 26 between the divided heads 21 and 22. Since the maintenance of the coating head 20 using the tool includes the work of pulling the coating head 20 out of the liquid coating apparatus 1 and replacing the shim 23, a slot suitable for a wide variety of coating objects and coating liquids. Even if you change the coating width and thickness of 27, you can easily deal with it by simply disassembling the coating head 20 and replacing the internal shim 23 with an appropriate one. There is no need to prepare and no modification of the coating head 20 is required.
As a result, it becomes easier to handle a wide variety of coating objects and coating liquids, the maintenance work is further facilitated, and the cost can be reduced.

Further, the slider movable portion 48 constituting the slider 41 is composed of two elongated flat plate side plates 48a and 48b.
The one-piece structure, and the cushioning receiver on top of it
Since the coating head 20 is mounted via 71, the elongated nozzle portion (tooth tip portion 21a,
It can be successfully mounted and moved on without damage to the coating head 20 (comprising 22a).

In this embodiment, the protrusions 56 and 57 that form the positioning means are provided on the slider fixing portion 49, and the positioning plate 61 having the recess 62 that forms the positioning means is provided on the slider movable portion 48. However, the present invention is not limited to this, and the protrusions 56 and 57 may be provided on the slider movable portion 48, and the positioning plate 61 may be provided on the slider fixing portion 49, respectively. Further, although the lifting cylinder 42 is used as the lifting means, the lifting means is not limited to this, and may be a motor-driven lifting means. In addition, various modifications can be made without departing from the scope of the invention of the present application.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a liquid application device according to an embodiment of the invention described in claims 1 to 6 of the present application.

FIG. 2 is a schematic front view of a maintenance mechanism of a coating head used in the liquid coating apparatus.

FIG. 3 is an enlarged front view of a left end main part of the maintenance mechanism section of FIG.

FIG. 4 is an enlarged side view of the same.

5 is an enlarged front view of a right end main part of the maintenance mechanism part of FIG. 2. FIG.

FIG. 6 is an enlarged side view of the same.

FIG. 7 is an enlarged plan view of the same.

8 is a schematic enlarged side view of a right end main part of the maintenance mechanism part of FIG. 2 including a lifting cylinder part.

FIG. 9 is a side view showing a state in which the coating head is attached to the liquid coating device.

FIG. 10 is a plan view of a slider fixing portion that constitutes a maintenance mechanism.

FIG. 11 is a plan view of a slider in which a slider movable portion is combined with the slider fixed portion.

FIG. 12 is a diagram showing a series of steps in which the coating head is pulled out of the liquid coating apparatus.

FIG. 13 is an exploded perspective view of a coating head.

[Explanation of symbols]

1 ... Liquid coating device, 2 ... Base, 2a, 2b ... Base side wall,
3 ... Table, 4 ... Substrate, 5a, 5b ... Rail, 10 ... Coating mechanism section, 11a, 11b ... Moving base, 12 ... Head holding frame, 13a, 13b ... Elevating cylinder, 14a, 14b ... Linear drive section, 15 ... Movable cable, 16a, 16b ... Permanent magnet, 17a
, 17b ... Linear bushing, 18 ... Self-cleaning device, 20 ... Application head, 21 ... Dividing head, 21a ... Tooth tip,
22 ... Dividing head, 22a ... Tip portion, 23 ... Shim, 23a ... Recess, 24 ... Liquid injection port, 25 ... Through hole, 26 ... Hollow part, 27 ... Slot, 28a, 28b ... Constant temperature circulating water heater (water jacket) ), 29 ... Bracket, 30 ... Bolt, 31 ... Grip, 32 ...
Air vent, 40 ... Maintenance mechanism, 41 ... Slider, 42
… Lifting cylinder, 43… Strut, 44… Support plate, 45… Lifting guide means, 46… Upper limit sensor, 47… Lower limit sensor, 48…
Slider movable part, 48a, 48b ... Side plate, 49 ... Slider fixing part, 50 ... Slide pack, 51 ... Horizontal plate part, 52 ... Vertical plate part, 53 ... Stopper plate member, 54, 55 ... Plate member, 56, 57 ...
Projector, 58 ... Connection pin, 59 ... Connection plate, 60 ... Collision plate block, 61 ... Positioning plate, 62 ... Recess, 63 ... Block piece, 64 ... Bolt, 65 ... Sensor mounting piece, 66 ... Stopper bolt, 67 … Return limit sensor, 68… L-shaped bent piece, 69… Attendance sensor, 70… Sensor mounting piece, 71… Cushion receiver.

Claims (6)

[Claims] 1. A coating head having a slot having an elongated slit in the width direction is provided, and the coating head is relatively horizontal with respect to a coating object below while discharging the coating liquid downward from the opening of the slot. Direction, the maintenance mechanism of the coating head in the liquid coating apparatus configured to form a coating film on the coating object, provided in the liquid coating apparatus, the coating head is placed, A maintenance mechanism for a coating head in a liquid coating apparatus, comprising: a slider that can pull the coating head out of the liquid coating apparatus; and an elevating means for raising and lowering the slider. 2. The maintenance mechanism for the coating head in the liquid coating apparatus according to claim 1, further comprising: a return limit of the slider, a lift limit of the elevating means, a descent limit of the elevating means, and a mounting position on the slider. A maintenance mechanism for a coating head in a liquid coating apparatus, comprising a plurality of detecting means for detecting the presence of each of the coating heads. 3. The liquid coating apparatus according to claim 1, wherein the slider comprises a slider movable portion and a slider fixing portion, and a positioning means for the slider movable portion is provided. Maintenance mechanism for coating head. 4. The positioning means is provided on the slider fixing portion or the slider moving portion and is elastically retractable, and the slider moving portion or the slider fixing portion, and is engaged with the protrusion. 4. A maintenance mechanism for a coating head in a liquid coating apparatus according to claim 3, wherein the positioning mechanism has a positioning plate having a matching recess. 5. The plurality of detecting means respectively detect the return limit of the slider, the upper limit of the elevating means, the lower limit of the elevating means and the presence of the coating head mounted on the slider. The maintenance mechanism for the coating head in the liquid coating apparatus according to any one of claims 2 to 4, characterized in that a safety device is provided which allows the next operation to proceed. 6. The coating head comprises a first divided head having a reservoir extending in the width direction in which the coating liquid injected from the liquid injection port is retained, a second divided head, and between these divided heads. A shim that is sandwiched between these divided heads and that forms a slit-shaped slot that is elongated in the width direction and that communicates with the reservoir, and is used for maintenance of the coating head using the maintenance mechanism. The maintenance mechanism of the coating head in the liquid coating apparatus according to any one of claims 1 to 5, further comprising a work of pulling out an outside of the liquid coating apparatus to replace the shim.