TWI573660B - 基板拋光模組以及基板拋光的方法 - Google Patents

基板拋光模組以及基板拋光的方法 Download PDF

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Publication number
TWI573660B
TWI573660B TW102113641A TW102113641A TWI573660B TW I573660 B TWI573660 B TW I573660B TW 102113641 A TW102113641 A TW 102113641A TW 102113641 A TW102113641 A TW 102113641A TW I573660 B TWI573660 B TW I573660B
Authority
TW
Taiwan
Prior art keywords
substrate
pad assembly
polishing pad
polishing
rotating
Prior art date
Application number
TW102113641A
Other languages
English (en)
Chinese (zh)
Other versions
TW201402273A (zh
Inventor
陳輝
陳宏
艾特金森吉姆
德安柏亞倫Ｌ
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201402273A publication Critical patent/TW201402273A/zh
Application granted granted Critical
Publication of TWI573660B publication Critical patent/TWI573660B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/068—Table-like supports for panels, sheets or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW102113641A 2012-04-28 2013-04-17 基板拋光模組以及基板拋光的方法 TWI573660B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/459,177 US8968055B2 (en) 2012-04-28 2012-04-28 Methods and apparatus for pre-chemical mechanical planarization buffing module

Publications (2)

Publication Number Publication Date
TW201402273A TW201402273A (zh) 2014-01-16
TWI573660B true TWI573660B (zh) 2017-03-11

Family

ID=49477715

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102113641A TWI573660B (zh) 2012-04-28 2013-04-17 基板拋光模組以及基板拋光的方法

Country Status (6)

Country Link
US (1) US8968055B2 (enExample)
JP (1) JP2015517923A (enExample)
KR (1) KR102128393B1 (enExample)
CN (1) CN104303272B (enExample)
TW (1) TWI573660B (enExample)
WO (1) WO2013162950A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMO20130231A1 (it) * 2013-08-06 2015-02-07 Cms Spa Attrezzatura per tenere un pezzo
JP6721967B2 (ja) 2015-11-17 2020-07-15 株式会社荏原製作所 バフ処理装置および基板処理装置
KR102698836B1 (ko) * 2016-03-25 2024-08-27 어플라이드 머티어리얼스, 인코포레이티드 국부 영역 속도 제어 및 진동 모드를 갖는 연마 시스템
CN109155249B (zh) * 2016-03-25 2023-06-23 应用材料公司 局部区域研磨系统以及用于研磨系统的研磨垫组件
CN107520717A (zh) * 2017-08-11 2017-12-29 王臻 一种风能发电叶片用打磨装置
CN109702625A (zh) * 2018-12-28 2019-05-03 天津洙诺科技有限公司 一种硅片单面抛光装置及其方法
CN110977680B (zh) * 2019-12-24 2021-04-16 丹阳广丰光学器材有限公司 一种光学镜片加工用抛光装置
US20210323117A1 (en) 2020-04-16 2021-10-21 Applied Materials, Inc. High throughput polishing modules and modular polishing systems
US11705354B2 (en) 2020-07-10 2023-07-18 Applied Materials, Inc. Substrate handling systems
US12198944B2 (en) 2020-11-11 2025-01-14 Applied Materials, Inc. Substrate handling in a modular polishing system with single substrate cleaning chambers
US12224186B2 (en) 2023-04-03 2025-02-11 Applied Materials, Inc. Apparatus and method of brush cleaning using periodic chemical treatments

Citations (3)

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US5762544A (en) * 1995-10-27 1998-06-09 Applied Materials, Inc. Carrier head design for a chemical mechanical polishing apparatus
US6095905A (en) * 1998-07-01 2000-08-01 Molecular Optoelectronics Corporation Polishing fixture and method
US6857950B2 (en) * 2000-09-21 2005-02-22 Nikon Corporation Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method

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US5738574A (en) * 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
US5804507A (en) 1995-10-27 1998-09-08 Applied Materials, Inc. Radially oscillating carousel processing system for chemical mechanical polishing
JPH09168968A (ja) * 1995-10-27 1997-06-30 Applied Materials Inc ケミカルメカニカルポリシング装置のキャリアヘッドのデザイン
JPH10329011A (ja) * 1997-03-21 1998-12-15 Canon Inc 精密研磨装置及び方法
JPH11291166A (ja) * 1998-04-07 1999-10-26 Nikon Corp 研磨装置及び研磨方法
US6296557B1 (en) 1999-04-02 2001-10-02 Micron Technology, Inc. Method and apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies
JP2001044157A (ja) 1999-07-16 2001-02-16 Promos Technol Inc 化学機械研磨終点を検出する方法と装置
US6435941B1 (en) 2000-05-12 2002-08-20 Appllied Materials, Inc. Apparatus and method for chemical mechanical planarization
US6585572B1 (en) 2000-08-22 2003-07-01 Lam Research Corporation Subaperture chemical mechanical polishing system
US6913528B2 (en) * 2001-03-19 2005-07-05 Speedfam-Ipec Corporation Low amplitude, high speed polisher and method
JP2004148479A (ja) * 2002-11-01 2004-05-27 Fuji Seiki Seisakusho:Kk 研磨装置
WO2005016595A1 (ja) * 2003-08-19 2005-02-24 Nikon Corporation 研磨装置、これを用いた半導体デバイス製造方法およびこの方法により製造される半導体デバイス
KR100568258B1 (ko) * 2004-07-01 2006-04-07 삼성전자주식회사 화학적 기계적 연마용 연마 패드 및 이를 이용하는 화학적기계적 연마 장치
US8524035B2 (en) * 2009-11-30 2013-09-03 Corning Incorporated Method and apparatus for conformable polishing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5762544A (en) * 1995-10-27 1998-06-09 Applied Materials, Inc. Carrier head design for a chemical mechanical polishing apparatus
US6095905A (en) * 1998-07-01 2000-08-01 Molecular Optoelectronics Corporation Polishing fixture and method
US6857950B2 (en) * 2000-09-21 2005-02-22 Nikon Corporation Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method

Also Published As

Publication number Publication date
KR20150005680A (ko) 2015-01-14
WO2013162950A1 (en) 2013-10-31
KR102128393B1 (ko) 2020-06-30
TW201402273A (zh) 2014-01-16
CN104303272A (zh) 2015-01-21
CN104303272B (zh) 2017-06-16
US20130288578A1 (en) 2013-10-31
US8968055B2 (en) 2015-03-03
JP2015517923A (ja) 2015-06-25

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