TWI571620B - A template type vacuum absorbing device, and a material sheet detecting apparatus, a material sheet transfer apparatus comprising the same - Google Patents

Description

Template vacuum suction device and material detecting device and material transfer device Prepare

The invention relates to a vacuum suction device, in particular to a vacuum suction device for controlling the area of an adsorption area by a template.

Automated Optical Inspection (AOI) refers to the use of machine vision as the detection standard technology, which has the advantages of high speed and high precision compared with the conventional human eye detection. The application level can cover the research and development, manufacturing quality management of high-tech industries, as well as national defense, people's livelihood, medical care, environmental protection, electric power... or other related fields.

In the field of automatic optical inspection, in order to detect the web, a common method is to mount the material on the stage by vacuuming the negative pressure on the stage by means of vacuuming. The air holes adsorb the web on the stage. However, after the material of some special materials is sucked through the air hole, the problem of warpage often occurs at the edge of the material, which causes the image of the film taken during image detection to be often distorted.

Therefore, in order to solve the above problem, the Patent No. M449343 of the Republic of China discloses a vacuum suction device for flattening a web, the vacuum suction device mainly comprising a gas chamber, a stage, and a shadowing jig. The gas chamber includes a gas guiding surface and a vacuum suction unit, the stage comprising a plurality of first suction holes. The carrier is disposed on the air chamber adjacent to the gas guiding surface, and the first suction hole is connected to the gas guiding surface. The shielding fixture comprises a carrying area. The shielding fixture is disposed on the stage, and the carrying area is disposed corresponding to the area of the web to support the web. The shielding fixture shields a portion of the first suction hole, the bearing area includes a plurality of second suction holes, and the second suction hole corresponds to the first suction hole of the other portion and communicates with the gas guiding surface, and the vacuum suction unit controls the gas guide The flow surface is evacuated while holding the web on the load bearing area. With the above configuration, the effect of the flattening web of the vacuum adsorption device can be enhanced, and the problem that the edge of the web is warped is easily solved.

However, the above-mentioned vacuum suction device can effectively solve the problem of warpage of the edge of the web. However, the shielding jig is often required to be customized for different sizes of the blank, and the shielding fixture is opened. In the upper hole position, the hole position must correspond exactly to the above-mentioned partial first suction hole, otherwise the ability to cause vacuum adsorption will be weakened, thereby causing the material to be effectively adsorbed.

The object of the present invention is to solve the problem that the vacuum suction device of the prior art often has a hole position which cannot be aligned, resulting in poor adsorption capacity.

In order to solve the above problems, the present invention provides a template vacuum suction device for adsorbing and leveling a web. The vacuum suction device comprises an adsorption stage, a vacuum chamber, and a template mechanism. The adsorption stage has a stage main body, a vacuum adsorption plane disposed on one side of the stage main body, and a plurality of suction holes disposed on the vacuum adsorption plane. The vacuum chamber has a set in the adsorption load a pedestal on the other side of the vacuum adsorption plane, a gas flow guiding surface adjacent to the suction hole side of the adsorption stage, and one or more of the gas conducting flow disposed on the side of the susceptor The surface provides a vacuum suction unit with a negative pressure. The stencil mechanism is disposed on a side of the adsorption stage corresponding to the gas flow guiding surface. The stencil mechanism has a plurality of thimbles respectively corresponding to the suction holes, and a graphic template disposed on one side of the ejector pins. The graphic template has a main body portion and a first stage plane and a second stage plane disposed on the main body portion. The first stage plane is attached to a side of a portion of the plurality of thimbles to cover the ejector pins on a portion of the suction holes to define a web adsorption area.

Further, a plurality of the ejector pins pass through the pedestal of the vacuum plenum to respectively correspond to a plurality of the suction holes corresponding to one side of the gas guiding surface.

Further, the second stage plane is provided with one or a plurality of magnetic units that adsorb the thimble.

Further, the ejector pin includes a flat portion slightly larger than the aperture of the suction hole, and a cylindrical body disposed on one side of the flat portion and at one end against the plane of the first stage.

Further, the suction holes are arranged at equal intervals with each other, and the suction holes are extended from the two sides and are slightly elongated.

Another object of the present invention is to provide a web detecting apparatus which is provided with a vacuum applicator as described above, the web detecting apparatus comprising a feeding track and an image capturing device. The conveying track is transmitted through a rotating roller for moving the web along a conveying path, and a plurality of guiding winds are formed on the surface of the conveying crawler hole. The image capturing device is located on one side of the conveying track, and an image capturing area is determined on the conveying track for capturing the piece on the image capturing area. The vacuum flattening device is configured to suck the web for the image capturing device to shoot when the web is moved to the image capturing area through the feeding track.

Further, the rotating roller includes a roller for winding the feeding track, a pivot disposed in the roller to drive the roller to rotate, and a driving device disposed on one side of the pivot to drive the pivoting Device.

Further, the area of the suction hole is larger than the area of the air guiding hole; wherein the two sides of the suction hole extend in the direction of the conveying path and are slightly elongated.

Further, the distance between the center positions of the suction holes is equal to the distance between the center positions of the air guiding holes.

Another object of the present invention is to provide a web transfer apparatus which is provided with a vacuum applicator as described above. The web transfer device comprises a base, a plurality of connecting arms, and a driving device. The connecting arm is coupled to the base by a pivoting means, a multi-axis moving means or a horizontal moving means. The driving device is coupled to the pivoting means, the multi-axis moving means or the horizontal moving means to operate the connecting arm to move along at least one of the conveying paths. The vacuum suction device is disposed on the connecting arm for adsorbing the web, and the driving device drives the connecting arm to transfer the web along the conveying path to a target position.

Therefore, the present invention has the following advantageous effects over the prior art:

1. The present invention can increase the vacuum degree of the gas chamber cavity by using the graphic template and the ejector pin sorted according to the array, thereby effectively adsorbing the material piece.

2. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, and the suction hole has a narrow design so that the suction hole and the air guiding hole overlap each other.

100‧‧‧Vacuum suction device

10‧‧‧Adsorption platform

11‧‧‧The main body of the stage

12‧‧‧ suction holes

20‧‧‧vacuum chamber

21‧‧‧Base

22‧‧‧vacuum area

23‧‧‧vacuum suction unit

30‧‧‧Template agency

31‧‧‧ thimble

311‧‧‧Flat Department

312‧‧‧Cylinder body

32‧‧‧ graphic template

321‧‧‧ Main body

322‧‧‧Magnetic unit

K1‧‧‧ first stage plane

K2‧‧‧ second stage plane

T1‧‧‧ vacuum adsorption plane

T2‧‧‧ gas guiding surface

P‧‧‧ piece

R‧‧‧Material adsorption area

32a‧‧‧ graphic template

P1‧‧‧ piece

OL‧‧‧ piece opening area

Kr‧‧‧ raised area

32b‧‧‧graphic template

P2‧‧‧ material

Jr‧‧‧ aperture spacing

200‧‧‧Material testing equipment

40‧‧‧Feed track

41‧‧‧Rotating roller

411‧‧‧Roller

412‧‧‧ pivot

413‧‧‧ drive

42‧‧‧wind guide hole

50‧‧‧Image capture device

A1‧‧‧ transmission path

B‧‧‧Image capture area

300‧‧‧Material transfer equipment

60‧‧‧ machine base

61‧‧‧Connecting arm

62‧‧‧ drive

63‧‧‧ Vacuuming device

64‧‧‧Air passage

65‧‧‧ pivot

A2‧‧‧ transmission path

Figure 1 is a schematic top view of a vacuum applicator of the present invention (I).

Figure 2 is a cross-sectional view (I) of the vacuum suction device of the present invention.

Figure 3 is a schematic view of the upper side of the vacuum applicator of the present invention (2).

Figure 4 is a cross-sectional view (2) of the vacuum applicator of the present invention.

Figure 5 is a schematic top view of the vacuum applicator of the present invention (3).

Figure 6 is a cross-sectional view (3) of the vacuum suction device of the present invention.

Fig. 7 is a top plan view showing a first embodiment of the present invention.

Figure 8 is a side elevational view of a first embodiment of the present invention.

Figure 9 is a top plan view of a second embodiment of the present invention.

Figure 10 is a side elevational view of a second embodiment of the present invention.

For a better description of the structural features and operation methods of this case, and with the illustrations, please refer to it later.

For convenience of explanation, terms used herein such as "above", "below", "left side", and "right side" are defined relative to the upper, lower, left, and right directions of the horizontal plane in the drawing.

The invention provides a template vacuum suction device 100 for adsorbing and leveling the web P. The vacuum applicator 100 can be applied to automatic optical inspection (Automated Optical Inspection, AOI), with the transmission track and image capture device, or can be applied to the transfer device of the material P, for absorbing the material P and transferring the material P to different On the platform, the manner in which the vacuum applicator 100 is applied is not intended to be limited in the present invention. The vacuum applanation device 100 is preferably used to adsorb soft materials in general industry, such as: Flexible Print Circuit (FPC), Flexible Displays, Polarizers or other softness. Industrial webs are not intended to be limiting in the present invention. Hereinafter, the structure of the vacuum suction device of the present invention will be described in detail: the structure and detailed technical features of the present invention will be described in detail. Please refer to FIG. 1 to FIG. 2 , which are schematic diagrams of the upper side and a cross-sectional view of the vacuum suction device of the present invention. As shown in the figure, the vacuum suction device 100 of the present invention mainly comprises an adsorption stage 10 and a setting. A vacuum chamber 20 on the side of the adsorption stage 10 and a template mechanism 30 disposed on the side of the adsorption stage 10.

The adsorption stage 10 mainly includes a stage main body 11, a vacuum adsorption plane T1 disposed on a surface of one side of the stage main body 11, and a plurality of suction holes 12 disposed on the stage main body 11, and distributed. On the vacuum adsorption plane T1.

The vacuum chamber 20 is disposed on one side of the adsorption stage 10 for supplying the vacuum suction force required for the adsorption stage 10. The vacuum chamber 20 mainly includes a base 21, an evacuated region 22 disposed in the base 21, and a vacuum suction disposed on the side of the base 21 to apply a negative pressure to the evacuated region 22. Unit 23. The base 21 is disposed on the adsorption stage 10 relative to the true The other side of the empty adsorption plane T1 has a gas guiding surface T2 on the side adjacent to the suction hole 22 adjacent to the suction hole 12 of the adsorption stage 10, and the vacuum suction unit 23 is connected to the wind drum (Fig. The vacuum pumping region 22 is subjected to a negative pressure by the air pumping, so that the vacuuming region 22 approaches a vacuum state, whereby the suction hole 12 can correspond to the gas guiding surface. A negative pressure is applied to one side of T2, and the web P (or workpiece) is adsorbed to the vacuum adsorption plane T1 through the suction hole 12. In a preferred embodiment, the suction holes 12 are arranged at equal intervals with each other so that the suction holes 12 are evenly distributed on the vacuum adsorption plane T1, thereby preventing the edge of the web P from warping.

The template mechanism 30 is disposed on a side of the adsorption stage 10 corresponding to the gas guiding surface T2. The stencil mechanism 30 includes a plurality of ejector pins 31 respectively corresponding to the suction holes 12, and a graphic template 32 disposed on one side of the ejector pins 31. The ejector pin 31 includes a flat portion 311 slightly larger than the aperture of the suction hole 12, and a cylindrical body 312 disposed on one side of the flat portion 311 and abutting against the graphic template 32 at one end. In the embodiment, the plurality of thimbles 31 are disposed on the base 21 of the vacuum chamber 20 and pass through the base 21, and the flat portion 311 at one end of the ejector pin 31 faces the gas guiding surface. On one side of the T2, the cylindrical body 312 at the other end of the ejector pin 31 faces the side of the graphic template 32, and the end portion of the cylindrical body 312 of the ejector pin 31 is in contact with the graphic template 32 to push the thimble 31 to partially The thimble 31 covers the side of the suction hole 12 close to the gas guiding surface T2 to lock the suction hole 12.

The graphic template 32 includes a main body portion 321 and a first stage plane K1 and a second stage disposed on the main body portion 321 with a step difference therebetween a plane K2, the first stage plane K1 is attached to a side of the plurality of the ejector pins 31 such that the thimble 31 covers a portion of the suction holes 12, so that the shielded portion of the suction holes 12 and the vacuuming area 22, the unshielded suction holes 12 will continue to provide vacuum attraction, and the area formed by the unshielded suction holes 12 constitutes a web adsorption region R. The unshielded suction holes 12 correspond to the pattern on the graphic template 32 (second stage plane K2), thereby defining the above-mentioned web adsorption region R.

Please refer to FIG. 3 to FIG. 6 together. According to the shape of the web, the template can be selected according to the shape of the web. The template is preferably adapted to the size and shape of the web to open the mold (or mill). Required material adsorption area.

Please refer to "Fig. 3" and "Fig. 4" first. The template can be formed on the second stage plane K2 of the template by the mold opening (or milling) to correspond to the shape and size of the material P1. A pattern, for example, a projection area Kr corresponding to the opening area OL of the web (equivalent to the first stage plane K1) is formed on the plane of the web adsorption region R, and the graphic template 32a is disposed under the ejector 31. The protruding region Kr will abut the partial ejector pin 31, and the thimble 31 disposed above the protruding region Kr is moved upward to cover the suction hole 12 on the opening area OL of the tablet adsorption region R, thereby avoiding The gas is introduced from the suction holes 12 in the opening area OL of the web to reduce the effect of vacuum adsorption.

For the irregularly shaped web P2, please refer to "Fig. 5" and "Fig. 6". If the shape and size of the web P2 are irregular, the graphic template 32b must correspond to the web. P2 shape and size configuration. Since the irregularly shaped web P2 is placed in the web adsorption region R, it is easy to form between the edge and the suction hole 12. The gap causes the gas to be introduced through the gap described above. Therefore, in order to avoid the above situation, the graphic template 32b must capture at least a threshold corresponding to the size of the web P2, and the size of the web P2 must be reduced from the edge to the size of the web P2 by approximately one aperture. The spacing Jr is sized to ensure that no gap is formed between each of the suction holes 12 and the web P2. In another preferred embodiment, the graphic template 32b can be aligned with the suction holes 12 at the above position by comparing the shape and size of the material P2 with the suction holes 12 covered by the material P2. The mode of the second stage plane K2 is opened (or milled) so that no gap is formed between the suction hole 12 and the web P2 and the adsorption force is increased.

In a preferred embodiment, the second stage plane K2 (or its peripheral side) is provided with one or more magnetic units 322 for attracting and fixing the ejector pins 31, so that the vacuum suction can be used in the present invention. When the flat device 100 is inverted, the ejector pin 31 corresponding to the suction region R of the web is fixed so as not to fall and cover the suction hole 12, ensuring that the suction hole 12 corresponding to the suction region R of the web is unblocked. The magnetic unit 322 can be a magnetic metal substance or an electromagnetic device that generates magnetic energy by electrical energy. However, the above-described magnetic unit is optionally provided on the vacuum suction device of the present invention, and the present invention is not intended to be limited to the above embodiments.

In another preferred embodiment, the template mechanism 30 can be disposed inside the vacuum chamber 20. The thimble 31 can be additionally fixed in the vacuuming region 22 by a thimble bracket (not shown), and the ejector pins 31 respectively correspond to a plurality of the suction holes 12 corresponding to one side of the gas guiding surface T2. The graphic template 32 is disposed in the vacuuming area 22 below the thimble holder to push the thimble 31 to A portion of the ejector pin 31 covers a side of the suction hole 12 adjacent to the gas guiding surface T2. The present invention is not intended to limit the corresponding arrangement relationship between the stencil mechanism 30 and the vacuum plenum 20, and will be described first.

Please refer to FIG. 7 and FIG. 8 for an upper side view and a side view of the first embodiment of the present invention. As shown in the figure, in the embodiment, the vacuum suction device 100 is configurable. The material detecting device 200 is configured to adsorb and level the web P for the image capturing device 50 to take an image of the web to detect the surface of the web P. The web detecting device 200 mainly comprises a conveying crawler 40, an image capturing device 50, and the aforementioned vacuum suction device 100.

The conveying track 40 is for the material P to be placed and the material P to be moved along a conveying path A1. The vacuum suction device 100 is disposed on the lower side of the delivery crawler 40, and the image capturing device 50 is disposed on the upper side of the delivery crawler 40 (the other of the delivery crawler 40 is opposite to the vacuum suction device 100) The image capturing area B corresponding to the surface of the feeding track 40 is determined by the vacuum suction device 100. The image capturing device 50 is disposed above or on one side of the image capturing area B. Thereby, a surface image of the flattened web P on the image capturing area B is taken.

The conveying crawler 40 has a rotating roller 41 disposed on one or both sides of the conveying crawler 40 to drive the feeding crawler 40, and a plurality of air guiding holes 42 are disposed on the surface of the conveying crawler 40. . The rotating roller 41 includes a roller 411 for the feeding track 40, a pivot 412 disposed in the roller 411 to drive the roller 411 to rotate, and a side disposed on the pivot 412 to drive the roller 411. Pivot 412 rotating drive 413. The driving device 413 described herein may be a synchronous motor, an induction motor, a reversible motor, a stepping motor, a servo motor, a linear motor ( Linear motor) or the like is not intended to limit the type of the driving device in the present invention.

The vacuum suction device 100 is disposed on the other side of the delivery crawler 40 relative to the image capturing area B. The web P obtained by the front side processing equipment will be sent to the delivery crawler 40 through the transfer equipment or the operator, and transported along the transport path A1 by the transport crawler 40, thereby moving the web P to The image capturing area B. When the web P is moved to the image capturing area B, the vacuuming device 100 is activated and the sheet P is leveled on the image capturing area B by a plurality of suction holes 12 to make the material The surface of the sheet P tends to be flat to facilitate the image capturing device 50 on the other side to take an image.

After the detection is completed, a transfer device (not shown) may be disposed at the other end of the delivery crawler 40 to classify the detected web P. For example, the material is transferred to the OK category, the repairable category, the NG category, and the like.

In order to avoid the problem of tolerances caused by the assembly, the process, or the long-term use, the air guiding hole 42 and the suction hole 12 fail to overlap. In this embodiment, the area of the suction hole 12 is larger than The area of the air guiding hole 42. In another preferred embodiment, in order to prevent the gap between the air guiding hole 42 and the air guiding hole 42 from overlapping with the suction hole 12, the suction hole 12 is blocked, and the two sides of the suction hole 12 are along the conveying path A1. The direction of the extension is slightly elongated, thereby shortening the gap between the suction hole 12 and the suction hole 12. gap. The spacing between the center positions of the suction holes 12 is equal to the distance between the center positions of the air guiding holes 42 so that each of the air guiding holes 42 in the same area can correspond to a suction hole 12.

Please refer to FIG. 9 and FIG. 10 together, which are schematic side views of a second embodiment of the present invention. As shown in the figure, in the embodiment, the vacuum suction device 100 can be configured. A piece of material is transferred to the device 300. The web transfer device 300 includes a base 60, one or a plurality of connecting arms 61, a driving device 62 disposed on the housing 60, and the aforementioned vacuum drying device 100. The connecting arm 61 is coupled to the base 60 by a pivoting means, a multi-axis moving means or a horizontal moving means. The vacuuming device 100 is disposed on the connecting arm 61 for adsorbing the material piece, and the driving device is driven by the pivoting means, the multi-axis moving means or the horizontal moving means when the material P is adsorbed. The 62 series can drive the connecting arm 61 to transfer the web P along the transport path A2 to the target position.

The pivoting means described above may be, but is not limited to, a pivot for fixing the connecting arm and pivoting by the driving means. The above multi-axis moving means may be, but not limited to, a multi-axis robot arm, for example. The horizontal moving means described above may be, but not limited to, a pulley having a rail, a conveyor belt, or the like.

In the embodiment, the connecting arm 61 is provided with an air flow passage 64. An evacuation device 63 connected to the air flow passage 64 is provided on the base 60 for connecting to the vacuum suction unit 23 on the vacuum suction device 100, and the vacuum suction device 100 is transmitted through the air flow passage 64. Adsorption platform 10 For negative pressure. In another preferred embodiment, the vacuum suction unit 23 and the vacuuming device 63 on the base 60 can be connected through an external line. Thereby, the web can be moved from the first position to the second position.

In the present embodiment, the connecting arm 61 and the base 60 are connected by a pivot 65. The driving device 62 is disposed on one side of the pivot 65. When the driving device 62 is activated, the driving device 62 drives the connecting arm 61 to rotate around the pivot 65 through the pivot 65 to control the connecting arm 61 to move along the conveying path A2, wherein the vacuum suction The flat device 100 is disposed on the connecting arm 61 for adsorbing the web P to fix the web P to the vacuum flat device 100. When the web P is transferred to the target position via the transport path A2, the vacuuming device 63 can close the air valve to release the adsorption state of the web P.

In summary, the present invention can improve the vacuum degree of the air chamber cavity by using the graphic template and the ejector pin sorted according to the array, thereby effectively adsorbing the material piece. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, and the suction hole has an elongated design so that the suction hole and the air guiding hole overlap each other.

The present invention has been described in more detail with reference to the preferred embodiments described above, but the present invention is not limited to the embodiments described above, and various changes and modifications may be made to the structures within the scope of the technical idea disclosed herein. Such changes and modifications are still within the scope of the invention.

100‧‧‧Vacuum suction device

10‧‧‧Adsorption platform

11‧‧‧The main body of the stage

12‧‧‧ suction holes

20‧‧‧vacuum chamber

21‧‧‧Base

22‧‧‧vacuum area

23‧‧‧vacuum suction unit

30‧‧‧Template agency

31‧‧‧ thimble

311‧‧‧Flat Department

312‧‧‧Cylinder body

32‧‧‧ graphic template

321‧‧‧ Main body

322‧‧‧Magnetic unit

K1‧‧‧ first stage plane

K2‧‧‧ second stage plane

T1‧‧‧ vacuum adsorption plane

T2‧‧‧ gas guiding surface

P‧‧‧ piece

R‧‧‧Material adsorption area

Claims (10)

A template type vacuum suction device for adsorbing and leveling a web, the vacuum suction device comprising: an adsorption stage having a stage main body, a vacuum adsorption plane disposed on a side of the stage main body, And a plurality of suction holes disposed on the vacuum adsorption plane; a vacuum chamber having a base disposed on the other side of the adsorption stage opposite to the vacuum adsorption plane, and a suction adjacent to the adsorption stage a gas guiding surface on one side of the hole, and one or a plurality of vacuum suction units provided on the side of the base to provide a negative pressure to the gas guiding surface; and a template mechanism disposed on the adsorption stage corresponding to the One side of the gas guiding surface, the template mechanism has a plurality of thimbles respectively corresponding to the suction holes, and a graphic template disposed on one side of the thimble, wherein the graphic template has a main body portion and is disposed on the main body portion And a first stage plane and a second stage plane, the first stage plane is attached to a side of the plurality of the thimbles to cover the thimbles on a portion of the suction holes to define a web adsorption area. The vacuum suction device of claim 1, wherein the plurality of thimbles pass through the base of the vacuum chamber to correspond to a plurality of sides of the suction hole corresponding to the gas guiding surface, respectively . The vacuum applicator of claim 1, wherein the second stage plane is provided with one or a plurality of magnetic units that adsorb the thimble. The vacuum suction device according to claim 1, wherein the ejector pin comprises a flat portion slightly larger than an aperture of the suction hole, and a flat portion disposed on the flat portion The side and the one end of the tubular body opposite to the first stage plane. The vacuum suction device according to claim 1, wherein the suction holes are arranged at equal intervals with each other, and the suction holes are formed by two sides and are slightly elongated. A material sheet detecting device, which is provided with the vacuum leveling device according to any one of the above-mentioned items, wherein the material detecting device comprises: a conveying crawler through a rotating roller; Moving the web along a conveying path, and forming a plurality of air guiding holes on the surface of the conveying track; and an image capturing device located on one side of the conveying track and determining on the conveying track An image capturing area for capturing the web on the image capturing area; wherein the vacuum suction device sucks when the web moves through the feeding track to the image capturing area The web is flattened for photographing by the image capturing device. The tablet detecting device of claim 6, wherein the rotating roller comprises a roller for winding the feeding track, a pivot disposed in the roller to drive the roller to rotate, and a pivoting One side of the pivot is a driving device that drives the pivot. The tablet detecting device according to claim 6, wherein the area of the suction hole is larger than the area of the air guiding hole; wherein the two sides of the suction hole extend in the direction of the conveying path and are slightly elongated . The web detecting device according to claim 6, wherein the distance between the center positions of the suction holes is equal to the distance between the center positions of the air guiding holes. A material transfer device is configured as in the first to fifth items of the patent application scope The vacuum suction device according to any one of the preceding claims, wherein the material transfer device comprises: a base; one or a plurality of connecting arms, which are combined by a pivoting means, a multi-axis moving means or a horizontal moving means And a driving device connected to the pivoting means, the multi-axis moving means or the horizontal moving means for operating the connecting arm to move along at least one conveying path; wherein the vacuum suctioning device is arranged The connecting arm is configured to adsorb the web, and the driving device drives the connecting arm to transfer the web along the conveying path to a target position.