TW201306152A - Alignment device and alignment method - Google Patents
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Abstract
Description
本發明係關於一種校準裝置及校準方法，更詳細而言，係關於一種具備吸附旋轉手段的校準裝置、及使用吸附旋轉手段的校準方法。 The present invention relates to a calibration apparatus and a calibration method, and more particularly to a calibration apparatus including an adsorption rotation means and a calibration method using an adsorption rotation means.
在對基板等施行精密加工時，於加工前預先進行加工對象的基板等之校準(位置調整)係為有用。例如，專利文獻1所記載針對黏貼有切割膠帶的基板，藉由在切割前進行校準，便可非常成功地進行切割。 When performing precision machining on a substrate or the like, it is useful to perform calibration (position adjustment) of a substrate or the like to be processed in advance before processing. For example, Patent Document 1 discloses that a substrate to which a dicing tape is adhered can be cut very successfully by performing calibration before cutting.
校準用的校準裝置存在有多個種類。其中之一，存在有使校準對象物(例如基板)進行旋轉，檢測旋轉中校準對象物的位置，根據目標位置與所檢測到位置之差而使校準對象物移動，藉此進行校準的校準裝置。 There are several types of calibration devices for calibration. One of the calibration devices is a device that rotates a calibration object (for example, a substrate), detects a position of the calibration object during rotation, and moves the calibration object based on the difference between the target position and the detected position. .
針對上述校準裝置進行詳細地說明。於上述校準裝置中，首先旋轉卡盤吸附基板(校準對象物)的中央附近，並使該基板旋轉。然後，從基板的表面側對上述基板照射光，藉由在背面側檢測光，而判定光所照射的位置是否有基板存在。因為上述基板係進行旋轉，因此藉由持續進行上述光的照射與檢測，便可確認上述基板整體的位置。上述校準裝置係如上述，藉由檢測上述基板的位置，再根據目標位置與所檢測到位置之差而使校準對象物移動，從而進行校準。 The above calibration apparatus will be described in detail. In the above calibration apparatus, first, the vicinity of the center of the chuck suction substrate (alignment object) is rotated, and the substrate is rotated. Then, the substrate is irradiated with light from the surface side of the substrate, and by detecting light on the back side, it is determined whether or not the substrate is present at the position where the light is irradiated. Since the substrate is rotated, the position of the entire substrate can be confirmed by continuously performing the irradiation and detection of the light. As described above, the calibration apparatus performs calibration by detecting the position of the substrate and moving the calibration object based on the difference between the target position and the detected position.
然而，上述校準裝置會有校準精度降低的情況。 However, the above calibration apparatus may have a case where the calibration accuracy is lowered.
即，因為旋轉卡盤通常僅吸附校準對象物的中央附近，因此在校準對象物的外周部分會有因自重而造成曲撓等變形的情況發生。於此情況下，因為隨上述變形會導致校準對象物端部的位置等偏移，因此造成上述校準裝置無法正確地檢測上述基板的位置。因此，校準的精度會降低。 In other words, since the spin chuck normally only attracts the vicinity of the center of the calibration object, the outer peripheral portion of the calibration object may be deformed by bending or the like due to its own weight. In this case, since the position of the end portion of the calibration object is shifted due to the above deformation, the calibration apparatus cannot accurately detect the position of the substrate. Therefore, the accuracy of the calibration will be reduced.
尤其，如專利文獻1所記載之黏貼有切割膠帶的基板，僅由切割膠帶所構成的部分會因自重而容易曲撓，導致此問題趨於明顯。所以，於專利文獻2中提案有設置從從背側支撐切割膠帶外周部的支撐手段。 In particular, as described in Patent Document 1, a substrate having a dicing tape adhered thereto, and only a portion composed of the dicing tape is easily bent by its own weight, and this problem tends to be conspicuous. Therefore, Patent Document 2 proposes a support means for supporting the outer peripheral portion of the dicing tape from the back side.
然而，因為專利文獻2的支撐手段會接觸到切割膠帶的背面，因此在校準對象物進行旋轉時會出現摩擦作用，導致對旋轉卡盤施加負荷，存在有消耗電力變大的問題。 However, since the support means of Patent Document 2 comes into contact with the back surface of the dicing tape, a frictional action occurs when the object to be calibrated is rotated, and a load is applied to the spin chuck, which causes a problem that power consumption increases.
[專利文獻] [Patent Literature]
[專利文獻1]日本專利特開2006-135272號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-135272
[專利文獻2]日本專利特開2011-3837號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2011-3837
本發明係有鑑於上述問題而完成者，目的在於提供一種抑制校準對象物變形、以低負荷進行高精度校準的校準技術。 The present invention has been made in view of the above problems, and it is an object of the invention to provide a calibration technique for suppressing deformation of a calibration object and performing high-precision calibration with a low load.
本發明的校準裝置，具備有吸附旋轉手段與支撐手段。吸附旋轉手段係吸附校準對象物並進行旋轉。支撐手段係在與上述吸附旋轉手段所吸附位置不同的位置噴出惰性氣體，並利用所噴出的上述惰性氣體，支撐進行旋轉的上述校準對象物。 The calibration device of the present invention includes an adsorption rotation means and a support means. The adsorption rotation means adsorbs the calibration object and rotates it. The supporting means discharges the inert gas at a position different from the position where the adsorption rotating means is adsorbed, and supports the object to be calibrated by the inert gas to be ejected.
又，本發明的校準方法包括有吸附步驟、旋轉步驟、位置檢測步驟、位置調整步驟；該吸附步驟係利用吸附旋轉手段吸附校準對象物；該旋轉步驟係藉由使上述吸附旋轉手段旋轉，而使上述校準對象物旋轉；該位置檢測步驟係檢測進行旋轉的上述校準對象物位置；該位置調整步驟係使上述校準對象物移動。而且，本發明的校準方法，其特徵在於在上述旋轉步驟中，在與上述吸附旋轉手段所吸附位置不同的位置噴出惰性氣體，並利用所噴出的惰性氣體支撐上述校準對象物。 Moreover, the calibration method of the present invention includes an adsorption step, a rotation step, a position detection step, and a position adjustment step; the adsorption step is to adsorb the calibration object by the adsorption rotation means; the rotation step is performed by rotating the adsorption rotation means The calibration object is rotated; the position detecting step detects the position of the calibration object to be rotated; and the position adjustment step moves the calibration object. Further, in the calibration method of the present invention, in the rotating step, the inert gas is ejected at a position different from the position where the adsorption/rotation means is adsorbed, and the object to be calibrated is supported by the inert gas to be ejected.
根據本發明，利用支撐手段支撐校準對象物未被吸附旋轉手段所吸附的部分，可抑制該部分發生因校準對象物的自重所造成曲撓等變形。又，由於支撐手段係以利用所噴出的惰性氣體使校準對象物浮起的方式支撐，因此幾乎不會產生作用於校準對象物的摩擦，可減輕對吸附旋轉手段所施加的負荷。又，亦可防止因固形物接觸到校準對象物所造成校準對象物之損傷。 According to the present invention, the portion to which the calibration object is not adsorbed by the adsorption rotating means is supported by the supporting means, and deformation such as bending due to the self-weight of the calibration object can be suppressed. Further, since the supporting means is supported so as to float the object to be calibrated by the inert gas to be ejected, the friction acting on the object to be calibrated is hardly generated, and the load applied to the adsorption rotating means can be reduced. Further, it is possible to prevent damage to the calibration object caused by the solid object contacting the calibration object.
根據本發明，可抑制校準對象物的變形，俾能以低負荷進行高精度的校準。 According to the present invention, it is possible to suppress deformation of the object to be calibrated, and it is possible to perform high-precision calibration with a low load.
針對本發明一實施形態的校準裝置，參照圖1~圖5進行說明。校準裝置100係進行校準對象物10之校準(對位)的裝置。圖1係示意性地表示校準裝置100的概略構造之剖面圖。圖2係示意性地表示本發明一實施形態的校準裝置的概略構造之立體圖。 A calibration apparatus according to an embodiment of the present invention will be described with reference to Figs. 1 to 5 . The calibration device 100 is a device that performs calibration (alignment) of the calibration object 10. FIG. 1 is a cross-sectional view schematically showing a schematic configuration of a calibration apparatus 100. Fig. 2 is a perspective view schematically showing a schematic configuration of a calibration apparatus according to an embodiment of the present invention.
如圖1所示，校準裝置100的框體101具備有吸附校準對象物10並使其旋轉的旋轉卡盤(吸附旋轉手段)110。 As shown in FIG. 1, the housing 101 of the calibration apparatus 100 is provided with a spin chuck (adsorption rotation means) 110 that sucks and rotates the calibration object 10.
在框體101中更設有支撐取像部120之構造體即橋部102。取像部120係構成在框體101內所設置之主控制部150(未圖示)的影像辨識部156之校準對象物10(嚴格而言為基板11)的位置檢測手段。影像辨識部156係辨識取像部120所取像的影像，而檢測校準對象物10的位置。 In the casing 101, a bridge portion 102 that is a structure that supports the image capturing portion 120 is further provided. The image capturing unit 120 is a position detecting means for arranging the object 10 to be calibrated (strictly, the substrate 11) of the image recognition unit 156 of the main control unit 150 (not shown) provided in the casing 101. The image recognition unit 156 recognizes the image captured by the image capturing unit 120 and detects the position of the calibration object 10.
校準裝置100進一步具備有在與旋轉卡盤110所吸附位置不同的位置，利用所噴出的惰性氣體支撐進行旋轉之校準對象物10的支撐部(支撐手段)130。 The calibration apparatus 100 further includes a support portion (support means) 130 for supporting the calibration object 10 that is rotated by the inert gas that is ejected at a position different from the position at which the spin chuck 110 is sucked.
因為校準裝置100具備有此一支撐部130，因此支撐在進行旋轉的校準對象物10中未被旋轉卡盤110所吸附之外周部分，可抑制該部分因校準對象物10的自重而造成曲撓等變形。藉此，校準裝置100可避免因校準對象物的變形所導 致在校準對象物10的位置檢測時的精度降低，俾可進行高精度的校準。 Since the calibration device 100 is provided with the support portion 130, it is supported by the outer peripheral portion of the calibration object 10 that is rotated without being adsorbed by the spin chuck 110, and the portion can be prevented from being bent due to the self-weight of the calibration object 10. And other deformations. Thereby, the calibration device 100 can avoid the deformation of the object to be calibrated. The accuracy at the time of detecting the position of the object to be calibrated 10 is lowered, and high-precision calibration is possible.
如圖1所示，本實施形態的校準對象物10係具有基板11黏貼於較基板11更大的切割膠帶(薄膜)12之構造，切割膠帶12係由外框即切割框13所保持(以上參照圖1與圖2)。因此，如圖2所示，支撐部130較佳為至少支撐在切割膠帶12中沒有黏貼基板11的部分，而切割框13係按押該支撐部分。藉此，可支撐柔軟且容易產生變形的切割膠帶12，從而抑制校準對象物10的變形。 As shown in FIG. 1, the calibration object 10 of the present embodiment has a structure in which the substrate 11 is adhered to a larger dicing tape (film) 12 than the substrate 11, and the dicing tape 12 is held by the outer frame, that is, the dicing frame 13 (above). Refer to Figure 1 and Figure 2). Therefore, as shown in FIG. 2, the support portion 130 preferably supports at least a portion of the dicing tape 12 where the substrate 11 is not adhered, and the cutting frame 13 is pressed against the support portion. Thereby, the dicing tape 12 which is soft and easily deformed can be supported, and deformation of the calibration object 10 can be suppressed.
如上所示，校準裝置100藉由位置檢測手段採用取像部120與影像辨識部156，即便位置檢測對象即基板11之素材為玻璃或矽(依情況亦可為玻璃與矽的積層基板)均可對應。又，由於並非為光學性的位置檢測，因此切割膠帶12亦可為不透光的素材、或顏色。 As described above, the calibration apparatus 100 employs the image capturing unit 120 and the image recognition unit 156 by the position detecting means, and the material of the substrate 11 which is the position detection target is glass or germanium (may be a laminated substrate of glass and germanium, as the case may be). Can correspond. Moreover, since it is not an optical position detection, the dicing tape 12 may be an opaque material or a color.
旋轉卡盤110只要為能利用真空泵等機構真空吸附校準對象物10，並使處於吸附狀態的校準對象物10朝吸附面的面內方向旋轉者即可。例如，可使用由一般的真空吸盤與馬達所構成的旋轉卡盤。 The spin chuck 110 may be configured such that the calibration object 10 can be vacuum-adsorbed by a mechanism such as a vacuum pump, and the calibration target 10 in the adsorbed state can be rotated in the in-plane direction of the adsorption surface. For example, a spin chuck composed of a general vacuum chuck and a motor can be used.
又，校準裝置100具備有使旋轉卡盤110朝上述吸附面的面內方向移動之旋轉卡盤位置調整部111。校準裝置100係根據位置檢測手段所檢測到校準對象物10的位置，利用旋轉卡盤位置調整部111使旋轉卡盤110移動，藉此將校準對 象物10校準至目標的位置。 Further, the calibration apparatus 100 includes a spin chuck position adjusting unit 111 that moves the spin chuck 110 in the in-plane direction of the suction surface. The calibration apparatus 100 detects the position of the calibration object 10 based on the position detecting means, and moves the spin chuck 110 by the spin chuck position adjusting unit 111, thereby aligning the calibration pair The object 10 is calibrated to the position of the target.
支撐部130係在與旋轉卡盤110所吸附位置不同的位置，利用所噴出的惰性氣體支撐進行旋轉之校準對象物10者。 The support portion 130 is a portion of the calibration object 10 that is rotated by the inert gas that is ejected at a position different from the position at which the spin chuck 110 is sucked.
此一支撐部130較佳為例如具備有在上述不同的位置對校準對象物10噴出惰性氣體的噴嘴131，且從噴嘴131噴出惰性氣體的方向係與重力方向為相反方向。如此，支撐部130可對在校準對象物10中未被旋轉卡盤110所吸附的部分，利用從噴嘴131所噴出的惰性氣體施加具有與重力方向為相反方向之向量成分的力，從而抑制該部分因校準對象物10的自重而造成曲撓等的變形。 The support portion 130 preferably includes, for example, a nozzle 131 that discharges an inert gas to the calibration object 10 at the different positions, and the direction in which the inert gas is ejected from the nozzle 131 is opposite to the direction of gravity. In this manner, the support portion 130 can apply a force having a vector component opposite to the direction of gravity by the inert gas ejected from the nozzle 131 in the portion of the calibration object 10 that is not adsorbed by the spin chuck 110, thereby suppressing the Part of the deformation due to the self-weight of the calibration object 10 causes distortion or the like.
上述噴嘴131的形狀並無限定。又，在複數設置噴嘴131的情況時，不限制其數量與配置。於本實施形態中，如圖2所示，噴嘴131係呈箱形狀，且數量為4個。4個噴嘴131係在旋轉卡盤110的外側，於圓周方向上以90°間隔配置。在噴嘴131的上表面，於對應校準對象物10之外周部的部位設有多數個微小的噴出孔。 The shape of the nozzle 131 is not limited. Further, in the case where the plurality of nozzles 131 are provided, the number and arrangement thereof are not limited. In the present embodiment, as shown in FIG. 2, the nozzles 131 have a box shape and the number is four. The four nozzles 131 are disposed outside the spin chuck 110 and are arranged at intervals of 90 in the circumferential direction. On the upper surface of the nozzle 131, a plurality of minute discharge holes are provided in a portion corresponding to the outer peripheral portion of the calibration object 10.
在噴嘴131設有氣體供應部(未圖示)133。氣體供應部133，例如具備有收容惰性氣體的氣體鋼瓶(未圖示)；連接氣體鋼瓶與噴嘴131之間，並將從氣體鋼瓶吐出的惰性氣體供應至噴嘴131的氣體管(未圖示)；以及調整在氣體管中流通的惰性氣體的流量之流量調整器(未圖示)。再者，流量調整器亦可由電磁閥所構成。氣體供應部133係構成為根據氣 體供應控制部151(參照圖5)的指令，將惰性氣體以非常大的流速供應至噴嘴131。 A gas supply unit (not shown) 133 is provided in the nozzle 131. The gas supply unit 133 includes, for example, a gas cylinder (not shown) that accommodates an inert gas, and a gas pipe (not shown) that connects the gas cylinder to the nozzle 131 and supplies the inert gas discharged from the gas cylinder to the nozzle 131. And a flow regulator (not shown) that adjusts the flow rate of the inert gas flowing through the gas pipe. Furthermore, the flow regulator can also be constructed of a solenoid valve. The gas supply unit 133 is configured to be based on gas The body supply control unit 151 (see FIG. 5) instructs the inert gas to be supplied to the nozzle 131 at a very large flow rate.
支撐部130進一步具備有使噴嘴131朝遠離或接近校準對象物10的方向移動之升降平台132。在本實施形態中，因為噴嘴131係設置於升降平台132上，因此隨升降平台132的上下移動，而朝上下方向，換言之即朝遠離或接近校準對象物10的方向移動。升降平台132例如，可由一般的電動平台等所構成。 The support portion 130 further includes an elevation platform 132 that moves the nozzle 131 in a direction away from or in proximity to the calibration object 10. In the present embodiment, since the nozzle 131 is provided on the lifting platform 132, it moves in the vertical direction, in other words, in a direction away from or close to the calibration object 10, as the lifting platform 132 moves up and down. The lifting platform 132 can be constituted by, for example, a general electric platform or the like.
圖3(A)及(B)係示意性地說明升降平台132的動作之剖面圖。對校準裝置100之校準對象物10的搬送係使用機器臂50而進行。機器臂50係利用吸盤等保持校準對象物10邊緣的切割框13部分，將校準對象物10從前一步驟的處理裝置搬送至校準裝置100。 3(A) and (B) are cross-sectional views schematically illustrating the operation of the lifting platform 132. The transport of the calibration object 10 of the calibration apparatus 100 is performed using the robot arm 50. The robot arm 50 holds the portion of the cutting frame 13 at the edge of the calibration object 10 by a suction cup or the like, and transports the calibration object 10 from the processing device of the previous step to the calibration device 100.
此時，如圖3(A)所示，若旋轉卡盤110與校準對象物10所接觸的位置、與噴嘴131的上表面係在同一平面內(相同高度)，則當校準對象物10(的切割膠帶12)因自重而發生曲撓等變形時，會有校準對象物10(的基板11重疊部分)對旋轉卡盤110的載置無法順暢進行的情況，於該情況時無法使校準對象物10成功地吸附於旋轉卡盤110。 At this time, as shown in FIG. 3(A), when the position where the spin chuck 110 is in contact with the calibration object 10 and the upper surface of the nozzle 131 are in the same plane (same height), the object 10 is calibrated ( When the dicing tape 12) is deformed by bending or the like due to its own weight, the mounting object 10 (the overlapping portion of the substrate 11) may not be smoothly placed on the spin chuck 110. In this case, the calibration target cannot be made. The object 10 is successfully adsorbed to the spin chuck 110.
另一方面，如圖3(B)所示，在校準對象物10的搬送前，藉由升降平台132先將噴嘴131朝離開校準對象物10的方向移動，可使校準對象物10(的基板11重疊部分)成功地吸 附於旋轉卡盤110。 On the other hand, as shown in FIG. 3(B), before the transfer of the object 10 to be aligned, the nozzle 131 is moved in the direction away from the object to be aligned 10 by the lifting platform 132, so that the substrate of the calibration object 10 can be obtained. 11 overlapping parts) successfully sucked Attached to the spin chuck 110.
如此，藉由升降平台132將噴嘴131朝遠離或接近校準對象物10的方向移動，便可將校準對象物10成功地搬送至校準裝置100內。 As described above, by moving the nozzle 131 in a direction away from or close to the calibration object 10 by the lifting platform 132, the calibration object 10 can be successfully transported into the calibration apparatus 100.
再者，當校準對象物10搬送至校準裝置100內，且旋轉卡盤110吸附校準對象物10並進行旋轉時，如圖1所示，較佳為以使噴嘴131的上表面，稍微低於旋轉卡盤110與校準對象物10所接觸的位置的方式，由升降平台132使噴嘴131進行移動。其目的在於使因校準對象物10的自重所造成的變形，能利用從噴嘴131所噴出惰性氣體的空氣層而解除，俾將校準對象物10大致水平地保持。 Further, when the calibration object 10 is transported into the calibration apparatus 100, and the spin chuck 110 sucks and rotates the calibration object 10, as shown in FIG. 1, it is preferable that the upper surface of the nozzle 131 is slightly lower than The nozzle 131 is moved by the lifting platform 132 in such a manner that the spin chuck 110 is in contact with the calibration object 10. The purpose of this is to cancel the deformation caused by the self-weight of the object to be calibrated 10, and to release the air layer from which the inert gas is ejected from the nozzle 131, and to hold the object 10 to be aligned substantially horizontally.
圖4係示意性地表示旋轉卡盤位置調整部111的概略構造之俯視圖。作為旋轉卡盤位置調整部111係可列舉例如圖4所示，具備有支撐旋轉卡盤110的托盤115、將托盤115水平地支撐的L形可動板114、使可動板114朝上述吸附面的面內方向(沿紙面的方向)之第1方向(x軸方向)進行直線移動的第1直線移動手段112、以及使可動板114朝第2方向(y軸方向)方向移動的第2直線移動手段113之構成。若依照此一旋轉卡盤位置調整部111，利用第1直線移動手段112與第2直線移動手段113使可動板114朝x軸方向與y軸方向進行直線移動，藉此與可動板114之移動同步地，配合其移動距離使由托盤115所支撐的旋轉卡盤110朝吸附面的面 內方向移動。 FIG. 4 is a plan view schematically showing a schematic configuration of the spin chuck position adjusting unit 111. For example, as shown in FIG. 4, the rotary chuck position adjusting unit 111 includes a tray 115 that supports the spin chuck 110, an L-shaped movable plate 114 that supports the tray 115 horizontally, and a movable plate 114 that faces the suction surface. The first linear moving means 112 that linearly moves in the first direction (the x-axis direction) in the in-plane direction (the direction along the paper surface) and the second linear moving that moves the movable plate 114 in the second direction (y-axis direction) The composition of means 113. According to the rotary chuck position adjusting unit 111, the first linear moving means 112 and the second linear moving means 113 linearly move the movable plate 114 in the x-axis direction and the y-axis direction, thereby moving the movable plate 114. Simultaneously, with the moving distance thereof, the surface of the rotating chuck 110 supported by the tray 115 faces the adsorption surface Move in the inner direction.
如上述，檢測校準對象物10位置的位置檢測手段係含有取像部120與影像辨識部156而構成。取像部120係設置於橋部102，從上方對校準對象物10取像。 As described above, the position detecting means for detecting the position of the calibration target 10 includes the image capturing unit 120 and the image recognition unit 156. The image capturing unit 120 is provided in the bridge portion 102, and images the calibration object 10 from above.
本實施形態中，取像部120係對包含校準對象物10之基板11邊緣的區域取像。又，取像部120係對在基板11上所設置之定向平面等角度檢測用標記取像。影像辨識部156係根據取像部120所取像的影像，計算出校準對象物10的中心、與旋轉中心(即旋轉卡盤110的旋轉中心)之偏移，以及旋轉角度。藉此，可檢測出校準對象物10的位置。 In the present embodiment, the image capturing unit 120 takes an image of a region including the edge of the substrate 11 of the calibration object 10. Further, the image capturing unit 120 picks up an image for detecting an angle such as an orientation flat surface provided on the substrate 11. The image recognition unit 156 calculates the offset between the center of the calibration object 10 and the center of rotation (that is, the rotation center of the spin chuck 110) and the rotation angle based on the image captured by the image capturing unit 120. Thereby, the position of the calibration object 10 can be detected.
以下說明校準裝置100的概略動作。圖5係示意性地說明校準裝置的概略功能之方塊圖。如圖5所示，校準裝置100的主控制部150具備有氣體供應控制部151、升降平台控制部152、旋轉卡盤控制部154及影像辨識部156。 The outline operation of the calibration apparatus 100 will be described below. Figure 5 is a block diagram schematically illustrating the schematic function of the calibration device. As shown in FIG. 5, the main control unit 150 of the calibration apparatus 100 includes a gas supply control unit 151, a lifting platform control unit 152, a spin chuck control unit 154, and an image recognition unit 156.
首先，若將校準對象物10搬入至校準裝置100中，旋轉卡盤控制部154就會使校準對象物10吸附於旋轉卡盤110並進行旋轉。此時，氣體供應控制部151係藉由控制氣體供應部133，如箭頭134(參照圖1)所示將惰性氣體供應至噴嘴131，並從其噴出孔如箭頭135(參照圖1)所示將惰性氣體朝上方噴出。利用所噴出的惰性氣體支撐校準對象物10的外周部，可防止校準對象物10變形。又，因為校準對象物10係以浮起的方式支撐，因此幾乎不會產生作用於校準對象物 10的摩擦，可減輕對旋轉卡盤110所施加的負荷。 First, when the calibration object 10 is carried into the calibration apparatus 100, the spin chuck control unit 154 causes the calibration object 10 to be adsorbed to the spin chuck 110 and rotated. At this time, the gas supply control unit 151 supplies the inert gas to the nozzle 131 by the control gas supply unit 133 as indicated by an arrow 134 (refer to FIG. 1), and the discharge hole is as shown by an arrow 135 (refer to FIG. 1). Spray the inert gas upwards. By supporting the outer peripheral portion of the calibration object 10 by the inert gas that is ejected, it is possible to prevent the calibration object 10 from being deformed. Further, since the object to be calibrated 10 is supported in a floating manner, it hardly acts on the object to be calibrated. The friction of 10 can alleviate the load applied to the spin chuck 110.
接著，影像辨識部156係利用取像部120對基板11進行取像。影像辨識部156係取得取像部120所取像的影像，根據該影像，計算出校準對象物10的位置、與預先輸入主控制部150的校準目標位置之差，並將表示該差的資訊傳送至旋轉卡盤控制部154。旋轉卡盤控制部154係控制旋轉卡盤110與旋轉卡盤位置調整部111，以解除所接收之上述差。藉此，校準裝置100便可進行校準對象物10的校準。 Next, the image recognition unit 156 acquires the substrate 11 by the image capturing unit 120. The image recognition unit 156 acquires an image captured by the image capturing unit 120, and calculates a difference between the position of the calibration object 10 and the calibration target position input to the main control unit 150 in advance based on the image, and displays the information indicating the difference. It is sent to the spin chuck control unit 154. The spin chuck control unit 154 controls the spin chuck 110 and the spin chuck position adjusting unit 111 to cancel the received difference. Thereby, the calibration apparatus 100 can perform calibration of the calibration object 10.
校準裝置100的主控制部150係由硬體邏輯所構成即可。或者，如下述，亦可使用CPU(Central Processing Unit；中央處理單元)並利用軟體實現。 The main control unit 150 of the calibration apparatus 100 may be configured by hardware logic. Alternatively, as described below, a CPU (Central Processing Unit) may be used and implemented by software.
即，主控制部150具備有：執行實現各功能之程式指令的MPU(Micro Processing Unit；微處理單元)等的CPU、儲存此程式的ROM(Read Only Memory；唯讀記憶體)將上述程式展開為可執行之形式的RAM(Random Access Memory；隨機存取記憶體)、以及儲存上述程式與各種資料的記憶體等之記憶裝置(記憶媒體)。 In other words, the main control unit 150 includes a CPU such as an MPU (Micro Processing Unit) that executes a program command for realizing each function, and a ROM (Read Only Memory) that stores the program to expand the program. It is a RAM (Random Access Memory) which is an executable form, and a memory device (memory medium) such as a memory for storing the above program and various materials.
而且，本發明之目的並不僅侷限於固定地載持於主控制部150的程式記憶體中的情況，亦可將記錄有上述程式的程式碼(執行形式程式、中間碼程式、或原始程式)的記錄媒體供應給裝置，由裝置讀取出並執行記錄於上述記錄媒體的上述程式碼而達成。 Furthermore, the object of the present invention is not limited to the case where it is fixedly held in the program memory of the main control unit 150, and the program code (execution format program, intermediate code program, or original program) on which the program is recorded may be recorded. The recording medium is supplied to the device, and is realized by the device reading out and executing the above-described code recorded on the recording medium.
上述實施形態的說明均僅為例示，並應認為非限制本發明者。本發明範圍並非由上述實施形態，而是如申請專利範圍所示。而且，本發明之範圍亦涵蓋與申請專利範圍具均等含義與範圍內的所有變更。 The description of the above embodiments is merely illustrative and is not intended to limit the invention. The scope of the present invention is not limited to the above embodiments, but is as shown in the claims. Moreover, the scope of the invention is intended to cover all modifications and equivalents
10‧‧‧校準對象物 10‧‧‧ Calibration object
11‧‧‧基板 11‧‧‧Substrate
12‧‧‧切割膠帶(薄膜) 12‧‧‧Cut Tape (Film)
13‧‧‧切割框 13‧‧‧cut box
50‧‧‧機器臂 50‧‧‧ machine arm
100‧‧‧校準裝置 100‧‧‧ calibration device
101‧‧‧框體 101‧‧‧ frame
102‧‧‧橋部 102‧‧ ‧Bridge
110‧‧‧旋轉卡盤(吸附旋轉手段) 110‧‧‧Rotary chuck (adsorption rotation means)
111‧‧‧旋轉卡盤位置調整部 111‧‧‧Rotary chuck position adjustment unit
112‧‧‧第1直線移動手段 112‧‧‧1st linear movement means
113‧‧‧第2直線移動手段 113‧‧‧2nd linear moving means
114‧‧‧可動板 114‧‧‧ movable plate
115‧‧‧托盤 115‧‧‧Tray
120‧‧‧取像部 120‧‧‧Image Department
130‧‧‧支撐部(支撐手段) 130‧‧‧Support (support means)
131‧‧‧噴嘴 131‧‧‧Nozzles
132‧‧‧升降平台 132‧‧‧ Lifting platform
133‧‧‧氣體供應部 133‧‧‧Gas Supply Department
134‧‧‧箭頭 134‧‧‧ arrow
135‧‧‧箭頭 135‧‧‧ arrow
150‧‧‧主控制部 150‧‧‧Main Control Department
151‧‧‧氣體供應控制部 151‧‧‧Gas Supply Control Department
152‧‧‧升降平台控制部 152‧‧‧ Lifting Platform Control Department
154‧‧‧旋轉卡盤控制部 154‧‧‧Rotary Chuck Control
156‧‧‧影像辨識部 156‧‧‧Image Identification Department
圖1係示意性地表示本發明一實施形態的校準裝置的概略構造之剖面圖。 Fig. 1 is a cross-sectional view schematically showing a schematic configuration of a calibration apparatus according to an embodiment of the present invention.
圖2係示意性地表示本發明一實施形態的校準裝置的概略構造之立體圖。 Fig. 2 is a perspective view schematically showing a schematic configuration of a calibration apparatus according to an embodiment of the present invention.
圖3(A)及圖3(B)係示意性地表示對本發明一實施形態的校準裝置搬送校準對象物的概略動作之剖面圖。 3(A) and 3(B) are cross-sectional views schematically showing a schematic operation of transporting a calibration object to a calibration apparatus according to an embodiment of the present invention.
圖4係示意性地表示本發明一實施形態的校準裝置的旋轉卡盤位置調整部的概略構造之俯視圖。 FIG. 4 is a plan view schematically showing a schematic configuration of a spin chuck position adjusting unit of the calibration apparatus according to the embodiment of the present invention.
圖5係示意性地說明本發明一實施形態的校準裝置的概略功能之方塊圖。 Fig. 5 is a block diagram schematically showing a schematic function of a calibration apparatus according to an embodiment of the present invention.
10‧‧‧校準對象物 10‧‧‧ Calibration object
11‧‧‧基板 11‧‧‧Substrate
12‧‧‧切割膠帶(薄膜) 12‧‧‧Cut Tape (Film)
13‧‧‧切割框 13‧‧‧cut box
100‧‧‧校準裝置 100‧‧‧ calibration device
101‧‧‧框體 101‧‧‧ frame
102‧‧‧橋部 102‧‧ ‧Bridge
110‧‧‧旋轉卡盤(吸附旋轉手段) 110‧‧‧Rotary chuck (adsorption rotation means)
111‧‧‧旋轉卡盤位置調整部 111‧‧‧Rotary chuck position adjustment unit
120‧‧‧取像部 120‧‧‧Image Department
130‧‧‧支撐部(支撐手段) 130‧‧‧Support (support means)
131‧‧‧噴嘴 131‧‧‧Nozzles
132‧‧‧升降平台 132‧‧‧ Lifting platform
134‧‧‧箭頭 134‧‧‧ arrow
135‧‧‧箭頭 135‧‧‧ arrow
Claims (5)
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| JP2011123892 | 2011-06-02 |
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| TW101118922A TWI479588B (en) | 2011-06-02 | 2012-05-28 | Alignment device |
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| JP (1) | JP5758993B2 (en) |
| KR (1) | KR20140025517A (en) |
| TW (1) | TWI479588B (en) |
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| JP7203575B2 (en) * | 2018-11-08 | 2023-01-13 | 住友重機械工業株式会社 | Wafer alignment system |
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| JP2002329769A (en) * | 2001-04-27 | 2002-11-15 | Lintec Corp | Alignment equipment |
| JP5029486B2 (en) * | 2008-05-13 | 2012-09-19 | 東京エレクトロン株式会社 | Coating apparatus, coating method, and storage medium |
| JP5384220B2 (en) * | 2009-06-22 | 2014-01-08 | 東京応化工業株式会社 | Alignment apparatus and alignment method |
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| JP5758993B2 (en) | 2015-08-05 |
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