TWI574002B - An adjustable vacuum absorbing device, and a material sheet detecting apparatus, a material sheet transfer apparatus comprising the same - Google Patents

Description

Vacuum suction device capable of adjusting adsorption area and material detecting device thereof Material transfer equipment

The invention relates to a vacuum suction device, in particular to a vacuum suction device for adjusting an adsorption area of an array.

Automated Optical Inspection (AOI) refers to the use of machine vision as the detection standard technology, which has the advantages of high speed and high precision compared with the conventional human eye detection. The application level can cover the research and development, manufacturing quality management of high-tech industries, as well as national defense, people's livelihood, medical care, environmental protection, electric power... or other related fields.

In the field of automatic optical inspection, in order to detect the web, a common method is to mount the material on the stage by vacuuming the negative pressure on the stage by means of vacuuming. The air holes adsorb the web on the stage. However, after the material of some special materials is sucked through the air hole, the problem of warpage often occurs at the edge of the material, which causes the image of the film taken during image detection to be often distorted.

Therefore, in order to solve the above problem, the Patent No. M449343 of the Republic of China discloses a vacuum suction device for flattening a sheet, and the vacuum suction device is mainly It should include a gas chamber, a stage, and a shadowing fixture. The gas chamber comprises a gas guiding surface and a vacuum suction unit, and the stage comprises a plurality of first suction holes. The carrier is disposed on the air chamber adjacent to the gas guiding surface, and the first suction hole is connected to the gas guiding surface. The shielding fixture comprises a carrying area. The shielding fixture is disposed on the stage, and the carrying area is disposed corresponding to the area of the web to support the web. The shielding fixture shields a portion of the first suction hole, the bearing area includes a plurality of second suction holes, and the second suction hole corresponds to the first suction hole of the other portion and communicates with the gas guiding surface, and the vacuum suction unit controls the gas guide The flow surface is evacuated while holding the web on the load bearing area. With the above configuration, the effect of the flattening web of the vacuum adsorption device can be enhanced, and the problem that the edge of the web is warped is easily solved.

However, although the above-mentioned vacuum suction device can effectively solve the problem of warping of the edge of the web, the masking fixture often needs to be customized for different sizes of materials, and is often operated in practice. There is inconvenience.

The object of the present invention is to solve the problem that in the prior art, different masks need to be customized for different masking fixtures, which often causes inconvenience in practical operation.

In order to solve the above problems, the present invention provides a vacuum suction device capable of adjusting an adsorption area for adsorbing and leveling a web, the vacuum suction device comprising an adsorption stage, a vacuum chamber, and an array Adjust the device. The adsorption stage has a vacuum adsorption plane and a plurality of suction holes disposed on the vacuum adsorption plane. The vacuum chamber is disposed on the other side of the adsorption stage opposite to the vacuum adsorption plane, and the vacuum chamber has a gas guide adjacent to the suction hole side of the adsorption stage The flow surface, and one or more vacuum suction units that provide a negative pressure to the gas flow guiding surface. The array type adjusting device is disposed on a side of the adsorption loading platform corresponding to the vacuum adsorption plane or the gas guiding surface, the array adjusting device has a control panel, and is disposed on the control panel and respectively corresponding to the plurality of The plurality of ejector pins of the suction hole, the control disk control portion covers the ejector pin, and the positions of each of the suction holes are respectively set as an array element to define a material adsorption region.

Further, the control panel includes a plurality of ejection mechanisms corresponding to the ejector pin, and the ejection mechanism can push the ejector pin to the suction hole to close the suction hole, or retract the ejector pin to open the suction hole.

Further, the ejector pin includes a flat portion slightly larger than the aperture of the suction hole, and a cylindrical body disposed on one side of the flat portion and coupled to the ejection mechanism.

Further, the suction holes are arranged at equal intervals with each other, and the suction holes are extended from the two sides to be slightly elongated.

Another object of the present invention is to provide a web detecting device which is provided with a vacuum applicator as described above, the web detecting device comprising a feeding track and an image capturing device. The delivery track is configured to move the web along a conveying path, wherein the conveying track has a rotating roller to drive the conveying track to move, and a plurality of air guiding holes disposed on the surface of the conveying track. The image capturing device is located on one side of the conveying track, and an image capturing area is determined on the conveying track for capturing the piece on the image capturing area. Wherein the vacuum suction device is configured when the web is moved to the image capturing area through the feeding track, the vacuum suction device The web is sucked for photographing by the image capturing device.

Further, the rotating roller system comprises a roller for winding the feeding track, a pivot shaft disposed in the roller to drive the roller to rotate, and a pivoting side disposed on the pivoting side to drive the pivoting Drive unit.

Further, the area of the suction hole is larger than the area of the air guiding hole, and the two sides of the suction hole extend in the direction of the conveying path to be slightly elongated.

Further, the distance between the center positions of the suction holes is equal to the distance between the center positions of the air guiding holes.

Another object of the present invention is to provide a tablet transfer device which is provided with a vacuum suction device as described above, the tablet transfer device comprising a base, one or a plurality of connecting arms, and a driving device . The connecting arm is coupled to the base by a pivoting means, a multi-axis moving means or a horizontal moving means. The driving device is coupled to the pivoting means, the multi-axis moving means or the horizontal moving means to operate the connecting arm to move along at least one of the conveying paths. The vacuum suction device is disposed on the connecting arm for adsorbing the web, and the driving device drives the connecting arm to transfer the web along the conveying path to a target position.

Therefore, the present invention has the following advantageous effects over the prior art:

1. The invention can flexibly control the area of the adsorption area of the material by the adjustable jig, and can be adjusted corresponding to the different size pieces, thereby eliminating the inconvenience caused by the customized shielding fixture.

2. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, and the suction hole has a narrow design so that the suction hole can mutually interact with the air guiding hole. coincide.

100‧‧‧Vacuum suction device

10‧‧‧Adsorption platform

11‧‧‧ suction hole

20‧‧‧vacuum chamber

21‧‧‧vacuum suction unit

30‧‧‧Array type adjustment device

31‧‧‧Control panel

32‧‧‧ thimble

321‧‧‧Flat Department

322‧‧‧Cylinder body

33‧‧‧Out of the agency

P‧‧‧ piece

R1‧‧‧Material adsorption area

T1‧‧‧ vacuum adsorption plane

T2‧‧‧ gas guiding surface

TL1‧‧‧ spacing in the length direction

TL2‧‧‧width spacing

X1‧‧‧ Length in the X-axis direction

Y1‧‧‧ width in the Y-axis direction

NL1‧‧‧ radius in the length direction

NL2‧‧‧ radius in the width direction

Su‧‧‧ physical area

Em‧‧‧emptive area

200‧‧‧Material testing equipment

40‧‧‧Feed track

41‧‧‧Rotating roller

411‧‧‧Roller

412‧‧‧ pivot

413‧‧‧ drive

42‧‧‧wind guide hole

50‧‧‧Image capture device

A1‧‧‧ transmission path

B‧‧‧Image capture area

300‧‧‧Material transfer equipment

60‧‧‧ machine base

61‧‧‧Connecting arm

62‧‧‧ drive

63‧‧‧ Vacuuming device

64‧‧‧Air passage

65‧‧‧ pivot

A2‧‧‧ transmission path

Figure 1. Schematic view of the upper side of the vacuum suction device of the present invention.

Figure 2 is a schematic cross-sectional view of a vacuum applicator of the present invention.

Figure 3-1 to Figure 3-2 show the adjustment of the suction area of the web.

Figure 4-1 to Figure 4-2 show the adjustment of the suction area of the web.

Fig. 5 is a top plan view showing a first embodiment of the present invention.

Figure 6 is a side elevational view of a first embodiment of the present invention.

Fig. 7 is a top plan view showing a second embodiment of the present invention.

Figure 8 is a side elevational view of a second embodiment of the present invention.

A more detailed description of the structural features and operational methods of this case is provided, together with the pictorial description, and will be reviewed later.

For convenience of explanation, terms used herein, such as "above", "below", "left", and "right", are defined relative to the horizontal plane in the drawing.

The invention provides a vacuum suction device 100 capable of elastically adjusting an adsorption area for adsorbing and leveling a web P. The vacuum squeezing device 100 can be applied to the field of Automatic Optical Inspection (AOI), with the transmission track and the image capturing device, or can be applied to the transfer device of the material P, for The sheet P is adsorbed and the web P is transferred to a different platform, and the manner in which the vacuum applicator 100 is applied is not intended to be limited in the present invention. The vacuum applicator 100 is preferably used to adsorb soft materials in general industry, such as: Flexible Print Circuit (FPC), Flexible Displays, polarizers, or other soft industrial webs are not intended to be limiting in the present invention. The following is a description of the structure of the vacuum suction device of the present invention: please refer to "FIG. 1" to "FIG. 2", which is a schematic diagram of the upper side of the vacuum suction device of the present invention, and a schematic cross-sectional view, as shown in the drawing: the vacuum of the present invention The suction device 100 elastically adjusts the adsorption area or the shape of the adsorption area corresponding to the size and shape of the web P, and provides an appropriate negative pressure to the adsorption stage 10 for adsorbing and leveling the web P. The vacuum suction device 100 includes an adsorption stage 10, a vacuum chamber 20 disposed on the other side of the adsorption stage 10 with respect to the vacuum adsorption plane T1, and a vacuum chamber 20 disposed on the adsorption stage 10 The array type adjustment device 30 on the other side of the adsorption plane T1. In another preferred embodiment, the array adjustment device 30 can also be disposed on one side of the vacuum adsorption plane 11, which is not limited in the present invention.

The adsorption stage 10 includes the above-mentioned vacuum adsorption plane T1, and a plurality of suction holes 11 disposed on the vacuum adsorption plane T1. The vacuum chamber 20 is disposed on the adsorption stage 10 opposite to the vacuum adsorption plane. The other side of T1 includes a gas guiding surface T2 adjacent to the side of the suction hole 11 of the adsorption stage 10, and one or a plurality of vacuum suction units 21 for supplying a negative pressure to the gas guiding surface T2. The vacuum adsorption plane T1 refers to the side of the adsorption stage 10 corresponding to the position of the web P for adsorbing the web P and for placing the web P thereon. The gas guiding surface T2 refers to another position of the adsorption stage 10 relative to the position of the material P On the side, corresponding to the inner side of the vacuum chamber 20, the vacuum suction unit 21 supplies a negative pressure to the gas guiding surface T2. Thereby, the web P is adsorbed on the vacuum adsorption plane T1 through the plurality of suction holes 11 on the adsorption stage 10. In a preferred embodiment, the suction holes 11 are arranged at equal intervals with each other so that the suction holes 11 are evenly distributed on the vacuum adsorption plane T1.

The array type adjusting device 30 is disposed on a side of the adsorption stage 10 corresponding to the vacuum adsorption plane T1 or the gas flow guiding surface T2. The array adjustment device 30 includes a control panel 31 and a plurality of thimbles 32 disposed on the control panel 31. The thimbles 32 are sorted according to an array and respectively correspond to the plurality of suction holes 11 described above. The control panel 31 has a plurality of ejection mechanisms 33, and the ejection mechanisms 33 are respectively disposed corresponding to the ejector pins 32. The ejecting mechanism 33 includes a closed state that pushes the ejector pin 32 to the suction hole 11 to close the suction hole 11, and an open state in which the ejector pin 32 is retracted to open the suction hole 11. The ejector pin 32 includes a flat portion 321 slightly larger than the aperture of the suction hole 11, and a cylindrical body 322 disposed on one side of the flat portion 321 and coupled to the ejection mechanism 33. When the ejecting mechanism 33 is operated in the closed state, the ejecting mechanism 33 is pushed upward to cover the plane portion 321 of the ejector pin 32 on the side of the suction hole 11 close to the gas guiding surface T2. Thereby, the suction hole 11 and the vacuum chamber 20 are isolated. When the ejecting mechanism 33 is operated in the open state, the ejecting mechanism 33 folds the ejector pin 32 downward, and the suction hole 11 communicates with the gas guiding surface T2 in the vacuum plenum 20, thereby The vacuum adsorption plane T1 provides a negative pressure.

Specifically, it is related to adjusting the adsorption area based on the size of the tablet P or The technique of the shape of the adsorption zone will be described below with reference to a specific embodiment. Please refer to "Fig. 3-1" to "Fig. 3-2", "Fig. 4-1" to "Fig. 4-2". The control panel 31 respectively moves a portion of the ejector pin 32 over the suction hole 11 according to an instruction input by a control unit (for example, a PLC, not shown) to define a web adsorption region R1.

Please refer to "Fig. 3-1" to "Fig. 3-2" first, and the matrix corresponding to the vacuum adsorption plane T1 is preset to be A[N1][N2], and the elements in the matrix correspond to the ejection mechanism 33, respectively. The distance between each of the suction holes 11 in the longitudinal direction is TL1, and the distance between the widths of each of the suction holes 11 is TL2, and the radius of each of the suction holes 11 in the longitudinal direction is NL1, and each of the suction holes 11 is in the width direction. The radius is NL2. The size of the web P is input by a human interface (not shown), wherein the length of the web P in the X-axis direction is X1 and the width in the Y-axis direction of the web is Y1.

After the user inputs the size of the corresponding piece P, the control unit (not shown) connected to the control panel 31 performs the following operation to determine whether the thimble 32 of the corresponding position is operated in an open state or a closed state.

The vacuum suction device 100 first determines the suction hole 11 to be opened at the corresponding position on the adsorption stage 10 from the size of the input web P. The input web P has a length of X1 and a width of Y1, and the length X1 and the width Y1 of the size of the web P are respectively subtracted from the radius NL1 of the suction hole in the longitudinal direction and the radius NL2 of the width direction (for correction), and Dividing the length interval TL1 between each of the suction holes 11 and the width pitch TL2, and adding 1/2 (boundary correction), the adsorption region constants W1=1/2+(X1-NL1)/TL1 and W2= are obtained. 1/2+(Y1-NL2)/TL2, and the obtained adsorption region constants W1 and W2 take the integer part thereof to obtain the adsorption range R(n1, n2), where n1 corresponds to the matrix A[N1][N2] The row value (n1≦(X1-NL1)/TL1), n2 corresponds to the column value of the matrix A[N1][N2] (n2≦(Y1-NL2)/TL2), and the number of the array in the adsorption region is set to 1 (ON state), the rest are set to 0 (off state), and a matrix similar to the following can be obtained (corresponding to Figure 3-1, taking n1=12, n2=6 as an example),

Each of the above-mentioned matrices corresponds to the ejecting mechanism 33 corresponding to each of the suction holes 11, whereby the size of the adsorption region of the web P can be set through the matrix.

Hereinafter, another embodiment will be described. Please refer to "FIG. 4-1" to "FIG. 4-2". In addition to adjusting the size of the web adsorption region by the above-described manner, the corresponding web adsorption region can also be defined for the shape of the web P by means of a dot array.

The upper right corner position is set to the original coordinate O(0, 0), and the matrix A[N1][N2] of the vacuum adsorption plane T1. The position of each of the suction holes 11 is set as an array element, and the length of each unit array element is KR1 (unit is mm), and the width of each unit lattice element is KR2 (unit is mm). The image of the irregular material is captured by the image capturing device, and the size of the irregular material is obtained by binarization processing or by the physical region Su and the empty region Em in the image in the color difference region. . After obtaining the size of the irregular material, the array element occupied by the physical area Su is set to 1 (on state), and the array element occupied by the empty area Em is set to 0 (off state), and the rest is not repeated. The area is set to 0 (off state). A matrix similar to the following can be obtained,

Each of the above-mentioned matrices corresponds to the ejecting mechanism 33 corresponding to each of the suction holes 11, whereby the size of the web adsorption region can be set through the matrix.

In another preferred embodiment, the graphical information can be manually input through the equipment engineer to control the shape and size of the suction region of the web, which is not intended to be limiting in the present invention.

Please refer to FIG. 5 and FIG. 6 for an upper side view and a side view of the first embodiment of the present invention. As shown in the figure, in the embodiment, the vacuum suction device 100 is configurable. The material detecting device 200 is configured to adsorb and level the web P for the image capturing device 50 to take an image of the web to detect the surface of the web P. The tablet detecting device 200 mainly comprises a feeding track 40 and an image capturing device. 50, and the aforementioned vacuum suction device 100.

The conveying track 40 is for the material P to be placed and the material P to be moved along a conveying path A1. The vacuum suction device 100 is disposed on the lower side of the delivery crawler 40, and the image capturing device 50 is disposed on the upper side of the delivery crawler 40 (the other of the delivery crawler 40 is opposite to the vacuum suction device 100) The image capturing area B corresponding to the surface of the feeding track 40 is determined by the vacuum squeezing device 100, and the image capturing device is disposed above or on one side of the image capturing area B. A surface image of the flattened web P on the image capturing area B is taken.

The conveying crawler 40 has a rotating roller 41 disposed on one or both sides of the conveying crawler 40 to drive the feeding crawler 40, and a plurality of air guiding holes 42 are disposed on the surface of the conveying crawler 40. . The rotating roller 41 includes a roller 411 for the feeding track 40, a pivot 412 disposed in the roller 411 to drive the roller 411 to rotate, and a side disposed on the pivot 412 to drive the roller 411. A drive 413 that pivots 412. The driving device 413 described herein may be a synchronous motor, an induction motor, a reversible motor, a stepping motor, a servo motor, a linear motor ( Linear motor) or the like is not intended to limit the type of the driving device in the present invention.

The vacuum suction device 100 is disposed on the other side of the delivery crawler 40 relative to the image capturing area B. The web P obtained by the front side processing equipment will be sent to the delivery crawler 40 through the transfer equipment or the operator, and transported along the transport path A1 by the transport crawler 40, thereby moving the web P to The image capturing area B. when When the web P is moved to the image capturing area B, the vacuuming device 100 is activated and the sheet P is leveled on the image capturing area B by a plurality of suction holes to make the web P The surface tends to be flat to facilitate the image capturing device 50 on the other side to take an image.

After the detection is completed, a transfer device (not shown) may be disposed at the other end of the delivery crawler 40 to classify the detected web P. For example, the material is transferred to the OK category, the repairable category, the NG category, and the like.

In order to avoid the problem of tolerances caused by the assembly, the process, or the long-term use, the air-conducting hole 42 and the suction hole H fail to overlap. In this embodiment, the area of the suction hole H is larger than The area of the air guiding hole 42. In another preferred embodiment, in order to prevent the gap between the air guiding hole 42 and the air guiding hole 42 from overlapping with the suction hole H, the suction hole H is blocked, and the two sides of the suction hole H are along the conveying path A1. The direction is extended to be slightly elongated, thereby shortening the gap between the suction hole H and the suction hole H. The spacing between the center positions of the suction holes H is equal to the distance between the center positions of the air guiding holes 42 so that each of the air guiding holes 42 in the same area can correspond to a suction hole H.

Please refer to FIG. 7 and FIG. 8 for a side view of a second embodiment of the present invention. As shown in the figure, in the embodiment, the vacuum suction device 100 can be configured. A piece of material is transferred to the device 300. The web transfer device 300 includes a base 60, one or a plurality of connecting arms 61, a driving device 62 disposed on the housing 60, and the aforementioned vacuum drying device 100. The connecting arm 61 is coupled to the base 60 by a pivoting means, a multi-axis moving means or a horizontal moving means. Place The vacuum suction device 100 is disposed on the connecting arm 61 for adsorbing the web. When the web P is adsorbed, the driving device 62 is driven by the pivoting means, the multi-axis moving means or the horizontal moving means. The connecting arm 61 can be driven to transfer the web P along the transport path A2 to the target position.

The pivoting means described above may be, but is not limited to, a pivot for fixing the connecting arm and pivoting by the driving means. The above multi-axis moving means may be, but not limited to, a multi-axis robot arm, for example. The horizontal moving means described above may be, but not limited to, a pulley having a rail, a conveyor belt, or the like.

In the embodiment, the connecting arm 61 is provided with an air flow passage 64. An evacuation device 63 connected to the air flow passage 64 is disposed on the base 60 for connecting to the vacuum suction unit 21 on the vacuum suction device 100, and the vacuum suction device 100 is transmitted through the air flow passage 64. The adsorption stage 10 provides a negative pressure. In another preferred embodiment, the vacuum suction unit and the vacuuming device on the base can be connected through an external pipeline. Thereby, the web can be moved from the first position to the second position.

In the present embodiment, the connecting arm 61 and the base 60 are connected by a pivot 65. The driving device 62 is disposed on one side of the pivot 65. When the driving device 62 is activated, the driving device 62 drives the connecting arm 61 to rotate around the pivot 65 through the pivot 65 to control the connecting arm 61 to move along the conveying path A2, wherein the vacuum suction The flat device 100 is disposed on the connecting arm 61 for adsorbing the web P to fix the web P to the vacuum flat device 100. When the tablet P is transferred to the target position via the transport path A2, the vacuuming device 63 The gas valve can be closed to release the adsorption state of the web P.

In summary, the present invention can flexibly control the area of the adsorption area of the material by the adjustable jig, and can be adjusted corresponding to the different sizes of the material, thereby eliminating the inconvenience caused by the customized shielding fixture. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, and the suction hole has an elongated design so that the suction hole and the air guiding hole overlap each other.

The present invention has been described in more detail with reference to the preferred embodiments described above, but the present invention is not limited to the embodiments described above, and various changes and modifications may be made to the structures within the scope of the technical idea disclosed herein. Such changes and modifications are still within the scope of the invention.

100‧‧‧Vacuum suction device

10‧‧‧Adsorption platform

11‧‧‧ suction hole

20‧‧‧vacuum chamber

21‧‧‧vacuum suction unit

30‧‧‧Array type adjustment device

31‧‧‧Control panel

32‧‧‧ thimble

321‧‧‧Flat Department

322‧‧‧Cylinder body

33‧‧‧Out of the agency

T1‧‧‧ vacuum adsorption plane

T2‧‧‧ gas guiding surface

Claims (9)

A vacuum suction device capable of adjusting an adsorption area for adsorbing and leveling a web, the vacuum suction device comprising: an adsorption stage having a vacuum adsorption plane, and a plurality of vacuum adsorption planes disposed on the vacuum adsorption plane a suction chamber; a vacuum chamber disposed on the other side of the adsorption stage opposite to the vacuum adsorption plane, the vacuum chamber having a gas guiding surface adjacent to a suction hole side of the adsorption stage, and One or a plurality of vacuum suction units that provide a negative pressure to the gas guiding surface; and an array adjusting device disposed on a side of the adsorption stage corresponding to the vacuum adsorption plane or the gas guiding surface, the array The adjustment device has a control panel, and a plurality of ejector pins disposed on the control panel and respectively corresponding to the plurality of suction holes, the control panel control portion covering the ejector pins on a portion of the suction holes, The locations are each set to an array of elements to define a web adsorption zone. The vacuum suction device of claim 1, wherein the control panel comprises a plurality of ejection mechanisms corresponding to the ejector pin, and the ejection mechanism can push the ejector pin to the suction hole to make the suction The hole is closed, or the ejector pin is retracted to open the suction hole. The vacuum suction device of claim 2, wherein the ejector pin comprises a flat portion slightly larger than an aperture of the suction hole, and a tube disposed on one side of the flat portion and coupled to the ejection mechanism Shaped body. The vacuum suction device of claim 1, wherein the suction holes are mutually The interstitial lines are arranged at equal intervals, and the suction holes are extended from the two sides and are slightly elongated. A material sheet detecting device, which is provided with a vacuum suction device according to any one of claims 1 to 4, the material sheet detecting device comprising: a material conveying crawler for a transport path moving, wherein the transport track has a rotating roller to drive the transport track to move, and a plurality of air guiding holes disposed on the surface of the conveying track; and an image capturing device is located at the conveying One side of the crawler belt, and an image capturing area is determined on the conveying track for photographing the web on the image capturing area; wherein the vacuum suction device moves to the web through the conveying track to In the image capturing area, the vacuum suction device absorbs the web for the image capturing device to take. The tablet detecting device of claim 5, wherein the rotating roller comprises a roller for winding the feeding track, a pivot disposed in the roller to drive the roller to rotate, and a setting The pivoting drive device is driven on one side of the pivot. The tablet detecting device according to claim 5, wherein the area of the suction hole is larger than the area of the air guiding hole, and the two sides of the suction hole extend in the direction of the conveying path and are slightly elongated. . The tablet detecting device according to claim 5, wherein the distance between the center positions of the suction holes is equal to the distance between the center positions of the air guiding holes. A material transfer device, which is equipped with the vacuum suction device according to any one of the above claims, wherein the material transfer device comprises: a base or a plurality of connecting arms coupled to the base by a pivoting means, a multi-axis moving means or a horizontal moving means; and a driving device coupled to the pivoting means, the plurality The shaft moving means or the horizontal moving means moves the connecting arm to move along the at least one conveying path; wherein the vacuuming device is disposed on the connecting arm for adsorbing the web, and the driving device drives the connection The arm transfers the web along the transport path to a target location.