TWI569019B - 探針卡及探針卡的製造方法 - Google Patents
探針卡及探針卡的製造方法 Download PDFInfo
- Publication number
- TWI569019B TWI569019B TW102100393A TW102100393A TWI569019B TW I569019 B TWI569019 B TW I569019B TW 102100393 A TW102100393 A TW 102100393A TW 102100393 A TW102100393 A TW 102100393A TW I569019 B TWI569019 B TW I569019B
- Authority
- TW
- Taiwan
- Prior art keywords
- coaxial
- probe
- tube
- covering
- insulator
- Prior art date
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012030326A JP5918561B2 (ja) | 2012-02-15 | 2012-02-15 | プローブカード及びプローブカードの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201346270A TW201346270A (zh) | 2013-11-16 |
TWI569019B true TWI569019B (zh) | 2017-02-01 |
Family
ID=49178016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102100393A TWI569019B (zh) | 2012-02-15 | 2013-01-07 | 探針卡及探針卡的製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5918561B2 (ja) |
TW (1) | TWI569019B (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6156981A (ja) * | 1984-08-27 | 1986-03-22 | Nec Corp | 半導体検査装置 |
JPS63122141A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 半導体素子検査装置 |
JP2002189034A (ja) * | 2000-12-22 | 2002-07-05 | Yokowo Co Ltd | プローブ固定用のソケット |
TW201102659A (en) * | 2009-07-10 | 2011-01-16 | Allstron Corp | Coaxial-cable probe structure |
TW201124731A (en) * | 2009-09-09 | 2011-07-16 | Mitsubishi Cable Ind Ltd | Coaxial probe pin, coaxial cable, and method for manufacturing |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0493779A (ja) * | 1990-08-10 | 1992-03-26 | Fujitsu Ltd | 集積回路特性測定装置 |
JP2563156Y2 (ja) * | 1991-02-06 | 1998-02-18 | 山形日本電気株式会社 | プローブボード |
JP3781480B2 (ja) * | 1996-06-10 | 2006-05-31 | 株式会社日本マイクロニクス | プローブカード |
JP5233380B2 (ja) * | 2008-04-15 | 2013-07-10 | 富士通株式会社 | 電界検知プローブ及びその製造方法 |
-
2012
- 2012-02-15 JP JP2012030326A patent/JP5918561B2/ja active Active
-
2013
- 2013-01-07 TW TW102100393A patent/TWI569019B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6156981A (ja) * | 1984-08-27 | 1986-03-22 | Nec Corp | 半導体検査装置 |
JPS63122141A (ja) * | 1986-11-12 | 1988-05-26 | Hitachi Ltd | 半導体素子検査装置 |
JP2002189034A (ja) * | 2000-12-22 | 2002-07-05 | Yokowo Co Ltd | プローブ固定用のソケット |
TW201102659A (en) * | 2009-07-10 | 2011-01-16 | Allstron Corp | Coaxial-cable probe structure |
TW201124731A (en) * | 2009-09-09 | 2011-07-16 | Mitsubishi Cable Ind Ltd | Coaxial probe pin, coaxial cable, and method for manufacturing |
Also Published As
Publication number | Publication date |
---|---|
JP5918561B2 (ja) | 2016-05-18 |
TW201346270A (zh) | 2013-11-16 |
JP2013167503A (ja) | 2013-08-29 |
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