TWI569019B - 探針卡及探針卡的製造方法 - Google Patents

探針卡及探針卡的製造方法 Download PDF

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Publication number
TWI569019B
TWI569019B TW102100393A TW102100393A TWI569019B TW I569019 B TWI569019 B TW I569019B TW 102100393 A TW102100393 A TW 102100393A TW 102100393 A TW102100393 A TW 102100393A TW I569019 B TWI569019 B TW I569019B
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TW
Taiwan
Prior art keywords
coaxial
probe
tube
covering
insulator
Prior art date
Application number
TW102100393A
Other languages
English (en)
Chinese (zh)
Other versions
TW201346270A (zh
Inventor
瀨上恭史
宮本大輔
本田秀和
西嶋輝彥
番家景子
Original Assignee
Ｓｖ探針私人有限公司
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Publication date
Application filed by Ｓｖ探針私人有限公司 filed Critical Ｓｖ探針私人有限公司
Publication of TW201346270A publication Critical patent/TW201346270A/zh
Application granted granted Critical
Publication of TWI569019B publication Critical patent/TWI569019B/zh

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW102100393A 2012-02-15 2013-01-07 探針卡及探針卡的製造方法 TWI569019B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012030326A JP5918561B2 (ja) 2012-02-15 2012-02-15 プローブカード及びプローブカードの製造方法

Publications (2)

Publication Number Publication Date
TW201346270A TW201346270A (zh) 2013-11-16
TWI569019B true TWI569019B (zh) 2017-02-01

Family

ID=49178016

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102100393A TWI569019B (zh) 2012-02-15 2013-01-07 探針卡及探針卡的製造方法

Country Status (2)

Country Link
JP (1) JP5918561B2 (ja)
TW (1) TWI569019B (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156981A (ja) * 1984-08-27 1986-03-22 Nec Corp 半導体検査装置
JPS63122141A (ja) * 1986-11-12 1988-05-26 Hitachi Ltd 半導体素子検査装置
JP2002189034A (ja) * 2000-12-22 2002-07-05 Yokowo Co Ltd プローブ固定用のソケット
TW201102659A (en) * 2009-07-10 2011-01-16 Allstron Corp Coaxial-cable probe structure
TW201124731A (en) * 2009-09-09 2011-07-16 Mitsubishi Cable Ind Ltd Coaxial probe pin, coaxial cable, and method for manufacturing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0493779A (ja) * 1990-08-10 1992-03-26 Fujitsu Ltd 集積回路特性測定装置
JP2563156Y2 (ja) * 1991-02-06 1998-02-18 山形日本電気株式会社 プローブボード
JP3781480B2 (ja) * 1996-06-10 2006-05-31 株式会社日本マイクロニクス プローブカード
JP5233380B2 (ja) * 2008-04-15 2013-07-10 富士通株式会社 電界検知プローブ及びその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156981A (ja) * 1984-08-27 1986-03-22 Nec Corp 半導体検査装置
JPS63122141A (ja) * 1986-11-12 1988-05-26 Hitachi Ltd 半導体素子検査装置
JP2002189034A (ja) * 2000-12-22 2002-07-05 Yokowo Co Ltd プローブ固定用のソケット
TW201102659A (en) * 2009-07-10 2011-01-16 Allstron Corp Coaxial-cable probe structure
TW201124731A (en) * 2009-09-09 2011-07-16 Mitsubishi Cable Ind Ltd Coaxial probe pin, coaxial cable, and method for manufacturing

Also Published As

Publication number Publication date
JP5918561B2 (ja) 2016-05-18
TW201346270A (zh) 2013-11-16
JP2013167503A (ja) 2013-08-29

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