201102659 六、發明說明： • 【發明所屬之技術領域】 本發明係種同軸探針結構，可以高頻率測量積 體電路或其他電子元件之電氣特性。 【先前技術】 至今開發出許多觀測總成，以供量測積體電路或其他形 式的微電子元件，其中代表性總成是使用電路板，上側形成長 Φ 形導線痕跡，作為訊號和地線’探針連接於各訊號痕跡末端， =呈現針尖朝下的徑向延伸_，以供與受職微電子元件之 焊墊（Pad)選擇性連接，此麵針在高頻率之測量時，因高 鮮阻抗不易㈣，故在訊麟輸過程中會發生聽訊號反射 及損失等問題’因此前述傳統之探針已不適合使用在具高頻特 性的電路量測。 因此，陸續又開發出如第4〜6圖之探針結構，其中，第 4圖係為美國專利US4871964號，其纜線a之中心導體b係突 _ 出於;I質材料及外導體之切面di，接地導體c係與位於或鄰 近於該徵線a —端之外部導體d的一部份相結合。惟該結構由 於訊號與接地部份具有不同結構，因此其接觸力不均勻，將使 訊號與接地部份之空間產生變形，而無法良好的控制阻抗。此 外，對於共平面的訊號傳輸線而言，圓形的訊號線設計並不理 想，因為電磁場將會集中於圓形導體之邊緣，增加高頻損失。 第5圖係為美國專利us55〇6515號，其於纜線e 一端，包 括有内部導體g、外部導體h以及内部電介質i係形成有一共 同之切面fl及一半圓柱形的凹陷f ’該凹陷f包括有内部導 201102659 體g、外部導體h以及内部電介質i。第一與第二彈性導體手 指部j、k係分別連接至該内部導體g與外部導體h ;每一手 指部：i、k包括有可自我支撐的懸臂ji、kl部份，該懸臂η、 kl 4伤係延伸穿出該規線e之切面f 1 ’惟其結構缺點在於:a、 於高頻率情況下，内部導體g於切面fl及外部導體h於凹陷 ί的不連續將會造成阻抗之不匹配；B、半圓柱形凹陷係為— 2D的製造流程’其成本較高，且無法簡單地控制凹陷尺寸（例 如深度）’此凹陷尺寸與阻抗匹配高度相關；c、一般同軸電纜， 外部導體之厚度係小於中心導體之直徑，藉由使用相分離的接 地導體，該第二彈性導體與同軸纜線外部導體之連接區係小於 中央體與第-彈性導體，因此第二彈性導體與外部導體之連 接力小於中央導體與第—雜導體，但於測試中，若手指部 Jl、kl非水平放置而是呈現一橫向傾角，則第二彈性導體之 某-手指部kl將需要較高的承受力，但第二彈性導體與外部 導體之連接力卻小於巾央導體鮮—雜導體，故帛二彈 體便容易受損。 。第6圖為美國專利US5853295號所揭之一種呈角度的連接 器m ’用於將—同軸連接器轉變至—平面結構，該同轴侧末端 ，為-個成-角度的平面末端。不過，此連接器並非為市售產 :其於應用上的成本較高，且與同軸規線組件不同的是，在 凡成平面側末端結構前，我們無法如同對於同轴境線-般簡單 έ士子5呈^度的連接器之電性表現力口以測試，同時由於連接器 構不八彈後’我們亦無法如同對於同抽瘦線一般地將呈角度 的連接器加以塑形。 201102659 本發明人不斷的研發與改善，遂有本發明之產 有哪要目的係提供—種低成本、連續接面佳、以及 有效:=雜訊且增強機構強度之同轴探針結構。 - nil㈣W之目的’本發明為—種服魏探針結構，包括 探測件，其中該同軸電_由—内導體經一介201102659 VI. Description of the Invention: • Technical Field to Be Invented The present invention relates to a coaxial probe structure capable of measuring the electrical characteristics of an integrated circuit or other electronic components at a high frequency. [Prior Art] A number of observation assemblies have been developed so far for measuring integrated circuits or other forms of microelectronic components, wherein a representative assembly uses a circuit board and a long Φ-shaped wire trace is formed on the upper side as a signal and ground. 'The probe is connected to the end of each signal trace, = the radial extension of the needle tip downwards _, for selective connection with the pad of the microelectronic component, which is measured at high frequency. High fresh impedance is not easy (4), so there will be problems such as reflection and loss of the signal during the transmission of the signal. Therefore, the aforementioned conventional probe is not suitable for circuit measurement with high frequency characteristics. Therefore, the probe structure as shown in Figs. 4 to 6 has been developed one after another. The fourth figure is U.S. Patent No. 487,1964, the center conductor b of the cable a is _ _ _; I material and outer conductor The face di, the ground conductor c is combined with a portion of the outer conductor d located at or adjacent to the a-end of the line. However, since the structure has a different structure from the ground portion, the contact force is not uniform, which will deform the space between the signal and the ground portion, and the impedance cannot be well controlled. In addition, circular signal lines are not ideal for coplanar signal transmission lines because the electromagnetic field will concentrate on the edges of the circular conductors, increasing high frequency losses. Figure 5 is a U.S. Patent No. 5,551,515, which has an inner conductor g, an outer conductor h, and an inner dielectric i at one end of the cable e to form a common face fl and a semi-cylindrical recess f'. It includes an internal conductor 201102659 body g, an outer conductor h, and an internal dielectric i. The first and second elastic conductor finger portions j, k are respectively connected to the inner conductor g and the outer conductor h; each finger portion: i, k includes a self-supporting cantilever ji, kl portion, the cantilever η, The kl 4 injury extends through the section f 1 ' of the rule line e. However, its structural disadvantages are: a. At high frequencies, the discontinuity of the inner conductor g on the face fl and the outer conductor h in the recess ί will cause impedance. Mismatch; B, semi-cylindrical recess is - 2D manufacturing process 'high cost, and can not simply control the size of the recess (such as depth) 'this recess size is highly correlated with impedance matching; c, general coaxial cable, external The thickness of the conductor is smaller than the diameter of the center conductor. By using the phase-separated ground conductor, the connection area between the second elastic conductor and the outer conductor of the coaxial cable is smaller than the central body and the first-elastic conductor, so the second elastic conductor and the outer portion The connecting force of the conductor is smaller than that of the central conductor and the first-hetero conductor, but in the test, if the finger portions J1, kl are not horizontally placed but exhibit a lateral inclination angle, a certain finger-part k1 of the second elastic conductor will be required. High tolerance, but the elastic force of the second connector and outer conductor of the central conductor but smaller than fresh towel - heteroaryl conductor, so silk two elastomer will be easily damaged. . Figure 6 is an angled connector m' disclosed in U.S. Patent No. 5,853,295 for converting a coaxial connector to a planar structure, the coaxial side end being a - angled planar end. However, this connector is not commercially available: its cost in application is high, and unlike the coaxial gauge assembly, we can't be as simple as the coaxial line before the flat end structure. The gentleman 5 is tested with the electrical performance of the connector, and since the connector is not constructed, we can't shape the angled connector as it is for the same thin wire. 201102659 The present inventors have continuously developed and improved, and the purpose of the present invention is to provide a coaxial probe structure which is low in cost, continuous in good contact, and effective: = noise and enhanced mechanism strength. - nil (four) W's purpose 'The present invention is a kind of Wei probe structure, including a detecting member, wherein the coaxial electric_ by-inner conductor through a medium
Γ—料朗，射綱觀料及外 導體§又有-切面1_體突出於該切面 切削部’該切肖彳部相對於該同軸電= :面’使内導體、介質材料、外導體皆外露於該斜面上，且該 斜面係延輕内賴之末端；魏爾包姉―、第二 探測針體，每一探測針體具有前、後兩介面部，1中第二= 針體之前介面部係與外露於斜面上之内導體電性連接，該突出 於切面之内導體與帛二探晰體電性連接並機_合形成一Γ—Materials, spectroscopy and outer conductors § and – tangential 1_ body protrudes from the cutting portion of the section. The tangential section is opposite to the coaxial electric=: surface' so that the inner conductor, the dielectric material, and the outer conductor are Exposed on the inclined surface, and the inclined surface is extended at the end of the light; Weierbao 姊 ―, the second detecting needle body, each detecting needle body has a front and a back two facial parts, 1 second before the needle body The interfacial portion is electrically connected to the inner conductor exposed on the inclined surface, and the inner conductor protruding from the inner surface of the cut surface is electrically connected with the second detecting body and is combined to form a
有鑑於此， 生。 f發明内容】 懸臂結構，㈣-、三酬舰之齡面料供電性連接於同 2電_外導體上，而每-探測針體之後介面部係供用於接觸 待測7G件之焊墊（pad)。 實施時，該第-及第三探測針體之前介面部係本質上相互 連接，供電性連接於_在第二探崎體前介面部之兩侧 及前侧的夕卜導體上’且第—及第三侧針體間形成—供第二探 測針體容納之空間。 …實施時’該外露於斜面上之㈣體末端部份面積係為經切 削後’形成一拉長狀之橢圓形狀。 201102659 實施時’該第-、第二及第三探測針體之前介面部係設為 平板狀，供結合於於同軸電纜上，而第一、第二及第三探測針 體之後介面部則設為尖狀，用以接觸待測元件之焊墊。 為便於對本發明能有更深入的瞭解’茲藉一實施例詳述於 後· 【實施方式】 請參閱第1〜3 ®，圖式内容為本發明同軸電繼針結構 之一實施例，其係由一同軸電纜丨及一探測件2所組成。 該同軸電纜1係由一内導體11經介質材料12充填固定於 外導體13内，該同軸電纜1介質材料a及外導體ι3設有 -切面ίο，使内導體u突出於切面1Q並形成—末端ιι〇，該 同轴電缓1設有-切削部14，該切削部14相對於該同轴電雙 1係形成一斜面14卜使内導體11、介質材料12、外導體13 皆外露於該斜面141上’且該斜面141係延伸至内導體u之 末端110，而内導體U經切削後，形成一拉長狀之擴圓形狀， 且平坦地外露於該斜面141上。 斤該探測件2包括第一、第二及第三探測針體21、22、23， 每—探測針體具有前、後兩介面部2U、212、22卜以2、”卜 232 ’該第-、第二及第三探測針體2卜22、23之前介面叫、 221、231部係設為平板狀，供電性連接於同轴_丄上，而 第一、第二及第三探測針體2卜22、23之後介面212、您、 2犯部則設為尖狀，用以接觸待測元件之焊墊。其中，冗 測針體22之前介面部221係與外露於斜面141之、’ 2 性連接，該突出於切面Μ之内_ u與第二^電 201102659 性連接並频結合形成―㈣結構，而第一及第 三探測針體 21 23之别介面部211、231係供電性連接於同軸電瘦1的外 導體13上’本實施例將第—及第三探測針體2卜23之前介面 4 211、231設為本質上相互連接，供電性連接於同轴電鐵jIn view of this, born. f invention content] cantilever structure, (four)-, three-return ship age fabric power supply is connected to the same 2 electric_outer conductor, and after each probe body is used to contact the 7G piece of solder to be tested (pad ). In implementation, the first and third probe bodies are substantially interconnected in front of each other, and the power supply is connected to the _ on the two sides of the front surface of the second front and the front side of the second conductor and the first And forming a space between the third side needle body for the second detecting needle body. When applied, the area of the end portion of the body that is exposed on the inclined surface is an elliptical shape that is formed to be elongated after being cut. 201102659 When implemented, the first, second and third probes are formed in a flat shape for the front face, for bonding to the coaxial cable, and the first, second and third detecting needles are arranged on the face. It is pointed and used to contact the pads of the device under test. In order to facilitate a better understanding of the present invention, the following is a detailed description of the embodiments. [Embodiment] Please refer to the first to third embodiments, which are an embodiment of the coaxial electric secondary needle structure of the present invention. It consists of a coaxial cable and a detector 2. The coaxial cable 1 is fixed and fixed in the outer conductor 13 by an inner conductor 11 via a dielectric material 12. The dielectric material a and the outer conductor ι3 of the coaxial cable 1 are provided with a -cut surface ίο such that the inner conductor u protrudes from the slice 1Q and is formed - At the end of the ιι〇, the coaxial electric slow 1 is provided with a cutting portion 14 which forms a slope 14 with respect to the coaxial electric double 1 so that the inner conductor 11, the dielectric material 12 and the outer conductor 13 are exposed. The slope 141 is 'and the slope 141 extends to the end 110 of the inner conductor u, and the inner conductor U is cut to form an elongated circular shape and is flatly exposed on the slope 141. The detecting member 2 includes first, second and third detecting needle bodies 21, 22, 23, each of which has a front and a rear two-face portion 2U, 212, 22 and 2, "Bu 232" -, the second and third detecting needles 2, 22, 23 before the interface called, 221, 231 are set to a flat shape, the power supply is connected to the coaxial _ ,, and the first, second and third detecting needle After the body 2, 22, 23, the interface 212, the 2, and the 2 parts are pointed, and are used to contact the pads of the device to be tested. The redundant body 22 is previously exposed to the inclined surface 141. '2-sexual connection, which protrudes from the inside of the section _ u and the second ^ 201102659 are connected in parallel and form a "(4) structure, while the first and third detecting needles 21 23 are powered by the other parts 211, 231 Connected to the outer conductor 13 of the coaxial electric thin 1 'in this embodiment, the first and third detecting needles 2 before the interface 4 211, 231 are essentially connected to each other, and the power supply is connected to the coaxial electric iron j
在第一探測針體22前介面部221之兩側及前側的外導體U 上，且第-及第二探測針體2卜23 _成一供第二探測針體 22容納之空間3。 因此，實施時，當同軸電規1切削形成切削部後，同軸電 缓1内導體11末端11〇可突出於切面1〇，而内導體U末端 110經切削後，形成一拉長狀之橢圓形狀，对坦地外露於該 斜面141上，又本發明第一、第二及第三探測針體2卜22、 23前介面部21卜22卜231係設成平板狀，使内導體n可完 全與第二探測針體22之前介面部221鋪，第—與第三探測 針體21、23之前介面部2U、231則分別電性連接於第二探測 針體22前介面部221之兩侧及前側的外導體13上。 藉此’本發明之同軸電纜探針結構即可設計安裝在探針站 的支持探針構件上，使可活動至適當位置，第一、第二及第三 探測針體21、22、23之後介面部212、222、232接觸待測元 件如晶圓上個別組件之焊墊。 因此’本發明透過在同軸電纜丨與探測件2所要結合的末 端上有切削部14，並使切削後内導體u末端11〇突出於切面 10 ’外露於斜面141之内導體U與第二探測針體四前介面部 221結合，因此在相同的懸臂長度下，可減少同軸電纜内導體 11破壞面積，進而降低反射雜訊及傳輸損失。另外，外導體 201102659 131與第-及第三探測針體21、23之前介面部⑴、231結合 後’形成更大轉點，同咖外導體131末端直接形成一連續 性接面，與第一及第三探測針體2卜23達到更佳之接觸，降 低電訊上之落差，使阻抗匹配更好，有效降低反射雜訊之問題。 以上所述乃是本發明之具體實施例及所運用之技術手 段’根據本文_露或教導可衍生推導出許多賴更與修正， ，依本發狀構想所作之等效改變，其所產生之制仍未超出 "兒月母及圖式所涵蓋之實質精神時，均應視為在本發明之技術 範1♦之内，合先陳明。 ^依上文所揭示之内容，本發明確可達到發明之預期目的， 提供-種結姻單、可有效降低反射雜之同軸電觀針結 構具有產業利用與實用之價值無疑，麦依法提出發明專利申 【圖式簡單說明】 第1圖係為本發明實施例同轴電_針結構之立體外觀分解 圖。 第2圖係為本發明實施例巾同軸魏之外觀示意圖。 第3圖係林發明實施綱軸f縣針結構之立體外觀示意 圖0 號之結構示意圖 號之結構示意圖 號之結構示意圖 第4圖係為習用技術美國專利US4871964 第5圖係為習用技術美國專利US5506515 第6圖係為習用技術美國專利US5853295 【主要元件符號說明】 10 :切面 1 :同軸電纜 201102659 11 :内導體 110 :末端 12 :介質材料 13 :外導體 14 :切削部 141 :斜面 2 =探測件 21 :第一探測針體 211 :前介面部 212 :後介面部 22 :第二探測針體 221 :前介面部 222 :後介面部 23 :第三探測針體 231 :前介面部 232 :後介面部 3 :空間 8·.缓線 b :中心導線 C:接地導線 d :外部導線 dl :切面 e :繞線 f :凹陷 fl :切面 g :内部導體 h:外部導體 i :内部電介質 j:第一彈性導體手指部 jl :懸臂 k:第二彈性導體手指部 kl :懸臂 m:連接器On the outer conductor U on both sides of the front surface portion 221 of the first detecting needle body 22 and the front side, and the first and second detecting needle bodies 2 are formed into a space 3 for the second detecting needle body 22. Therefore, when the coaxial electric gauge 1 is cut to form the cutting portion, the end 11 〇 of the coaxial electric slow inner conductor 11 can protrude from the cut surface 1 〇, and the inner end U end 110 is cut to form an elongated ellipse. The shape is uniformly exposed on the inclined surface 141, and the first, second and third detecting needle bodies 2, 22, 23 of the present invention are provided in a flat shape, so that the inner conductor n can be The first and second detecting needle bodies 21 and 23 are respectively electrically connected to the second detecting needle body 22 on both sides of the front surface portion 221 of the second detecting needle body 22, respectively. And on the outer conductor 13 on the front side. Thus, the coaxial cable probe structure of the present invention can be designed to be mounted on the support probe member of the probe station so as to be movable to an appropriate position after the first, second and third probe bodies 21, 22, 23 The interface faces 212, 222, 232 contact the pads of the component to be tested, such as individual pads on the wafer. Therefore, the present invention has a cutting portion 14 on the end to which the coaxial cable 丨 and the detecting member 2 are to be joined, and the inner conductor U end 11 〇 protrudes from the cut surface 10 ′ to expose the inner conductor U and the second detecting portion of the inclined surface 141 after cutting. The needle body front surface 221 is combined, so that the same cantilever length can reduce the damage area of the inner conductor 11 of the coaxial cable, thereby reducing reflection noise and transmission loss. In addition, the outer conductor 201102659 131 is combined with the first and third detecting needle bodies 21, 23 to form a larger turning point, and a continuous connecting surface is formed directly with the end of the outer conductor 131. And the third detecting needle body 2 23 achieves better contact, reduces the drop on the telecommunication, makes the impedance matching better, and effectively reduces the problem of reflection noise. The above is a specific embodiment of the present invention and the technical means employed thereof. According to the disclosure or the teachings, a plurality of modifications and corrections can be derived, and equivalent changes are made according to the present invention. The system shall not be considered to be within the technical scope of the invention, and shall be considered in the first place. According to the content disclosed above, the present invention can achieve the intended purpose of the invention, and provides a kind of marriage order, which can effectively reduce the reflection of the coaxial coaxial electric needle structure, and has the value of industrial utilization and practicality. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective exploded view of a coaxial electric _needle structure according to an embodiment of the present invention. Fig. 2 is a schematic view showing the appearance of a coaxial Wei in the embodiment of the present invention. Figure 3 is a schematic view of the structure of the needle structure of the f-axis of the invention. Figure 4 is a schematic view of the structure of the structure No. 0. Figure 4 is a conventional technique. US Pat. No. US 487,1964. Figure 5 is a conventional technique US Patent 5,056,515 Fig. 6 is a conventional technique US Pat. No. 5,853,295 [Description of main component symbols] 10: Cut surface 1: coaxial cable 201102659 11: Inner conductor 110: End 12: Dielectric material 13: Outer conductor 14: Cutting portion 141: Bevel 2 = Detection member 21: First detecting needle body 211: front face portion 212: rear face portion 22: second detecting needle body 221: front face portion 222: rear face portion 23: third detecting needle body 231: front face portion 232: rear interface Part 3: Space 8·. Slow line b: Center wire C: Ground wire d: External wire dl: Tangential plane e: Winding wire f: Depression fl: Tangential surface g: Inner conductor h: External conductor i: Internal dielectric j: First Elastic conductor finger portion jl : cantilever k: second elastic conductor finger portion kl : cantilever m: connector