TWI561657B - - Google Patents
Info
- Publication number
- TWI561657B TWI561657B TW102125929A TW102125929A TWI561657B TW I561657 B TWI561657 B TW I561657B TW 102125929 A TW102125929 A TW 102125929A TW 102125929 A TW102125929 A TW 102125929A TW I561657 B TWI561657 B TW I561657B
- Authority
- TW
- Taiwan
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Thin Film Transistor (AREA)
- Optics & Photonics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012162125A JP6059460B2 (ja) | 2012-07-20 | 2012-07-20 | ターゲット組立体 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201413023A TW201413023A (zh) | 2014-04-01 |
TWI561657B true TWI561657B (zh) | 2016-12-11 |
Family
ID=49948911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102125929A TW201413023A (zh) | 2012-07-20 | 2013-07-19 | 靶材組裝體 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6059460B2 (zh) |
KR (1) | KR101643510B1 (zh) |
CN (1) | CN104379802B (zh) |
TW (1) | TW201413023A (zh) |
WO (1) | WO2014014091A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI813913B (zh) * | 2019-11-01 | 2023-09-01 | 日商三井金屬鑛業股份有限公司 | 間隙配置構件及濺鍍靶 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6359901B2 (ja) * | 2014-07-16 | 2018-07-18 | 三菱マテリアル株式会社 | スパッタリングターゲット |
JP2017014562A (ja) * | 2015-06-30 | 2017-01-19 | 株式会社コベルコ科研 | スパッタリングターゲット組立体 |
JP7311290B2 (ja) * | 2019-03-27 | 2023-07-19 | Jx金属株式会社 | 分割スパッタリングターゲット及びその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201202452A (en) * | 2010-04-07 | 2012-01-16 | Kobe Steel Ltd | Oxide for semiconductor layer of thin film transistor, sputtering target, and thin film transistor |
WO2012063524A1 (ja) * | 2010-11-08 | 2012-05-18 | 三井金属鉱業株式会社 | 分割スパッタリングターゲット及びその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08170170A (ja) * | 1994-12-16 | 1996-07-02 | Tosoh Corp | スパッタリングターゲット |
JPH10121232A (ja) * | 1996-10-14 | 1998-05-12 | Mitsubishi Chem Corp | スパッタリングターゲット |
JP3759673B2 (ja) | 1998-01-12 | 2006-03-29 | 三井金属鉱業株式会社 | スパッタリングターゲットおよびその製造方法 |
DE60329638D1 (de) * | 2002-08-02 | 2009-11-19 | Idemitsu Kosan Co | Sputtertarget, Sinterkörper, unter deren Verwendung gebildeter leitfähiger Film, organische EL-Vorrichtung und für diesen verwendetes Substrat |
JP5244331B2 (ja) * | 2007-03-26 | 2013-07-24 | 出光興産株式会社 | 非晶質酸化物半導体薄膜、その製造方法、薄膜トランジスタの製造方法、電界効果型トランジスタ、発光装置、表示装置及びスパッタリングターゲット |
JP5213458B2 (ja) | 2008-01-08 | 2013-06-19 | キヤノン株式会社 | アモルファス酸化物及び電界効果型トランジスタ |
CN102245532A (zh) * | 2008-12-15 | 2011-11-16 | 出光兴产株式会社 | 复合氧化物烧结体及由其构成的溅射靶 |
JP5377142B2 (ja) * | 2009-07-28 | 2013-12-25 | ソニー株式会社 | ターゲットの製造方法、メモリの製造方法 |
KR20170072965A (ko) * | 2009-11-13 | 2017-06-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링 타겟 및 그 제조방법, 및 트랜지스터 |
-
2012
- 2012-07-20 JP JP2012162125A patent/JP6059460B2/ja not_active Expired - Fee Related
-
2013
- 2013-07-19 WO PCT/JP2013/069670 patent/WO2014014091A1/ja active Application Filing
- 2013-07-19 CN CN201380031944.9A patent/CN104379802B/zh not_active Expired - Fee Related
- 2013-07-19 KR KR1020157001469A patent/KR101643510B1/ko active IP Right Grant
- 2013-07-19 TW TW102125929A patent/TW201413023A/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201202452A (en) * | 2010-04-07 | 2012-01-16 | Kobe Steel Ltd | Oxide for semiconductor layer of thin film transistor, sputtering target, and thin film transistor |
WO2012063524A1 (ja) * | 2010-11-08 | 2012-05-18 | 三井金属鉱業株式会社 | 分割スパッタリングターゲット及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI813913B (zh) * | 2019-11-01 | 2023-09-01 | 日商三井金屬鑛業股份有限公司 | 間隙配置構件及濺鍍靶 |
Also Published As
Publication number | Publication date |
---|---|
WO2014014091A1 (ja) | 2014-01-23 |
JP6059460B2 (ja) | 2017-01-11 |
CN104379802B (zh) | 2017-04-05 |
JP2014019930A (ja) | 2014-02-03 |
KR20150023817A (ko) | 2015-03-05 |
KR101643510B1 (ko) | 2016-07-27 |
CN104379802A (zh) | 2015-02-25 |
TW201413023A (zh) | 2014-04-01 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |