TWI560300B - Film forming device and film forming method - Google Patents
Film forming device and film forming methodInfo
- Publication number
- TWI560300B TWI560300B TW103128367A TW103128367A TWI560300B TW I560300 B TWI560300 B TW I560300B TW 103128367 A TW103128367 A TW 103128367A TW 103128367 A TW103128367 A TW 103128367A TW I560300 B TWI560300 B TW I560300B
- Authority
- TW
- Taiwan
- Prior art keywords
- film forming
- forming method
- forming device
- film
- forming
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013187429 | 2013-09-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201510263A TW201510263A (zh) | 2015-03-16 |
TWI560300B true TWI560300B (en) | 2016-12-01 |
Family
ID=52665438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103128367A TWI560300B (en) | 2013-09-10 | 2014-08-19 | Film forming device and film forming method |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6202098B2 (ja) |
CN (1) | CN105555995B (ja) |
TW (1) | TWI560300B (ja) |
WO (1) | WO2015037315A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6477221B2 (ja) * | 2015-05-12 | 2019-03-06 | 株式会社島津製作所 | 成膜方法 |
JP6555078B2 (ja) * | 2015-10-29 | 2019-08-07 | 株式会社島津製作所 | 成膜方法 |
JP7094154B2 (ja) * | 2018-06-13 | 2022-07-01 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
JP7188281B2 (ja) * | 2019-06-05 | 2022-12-13 | 株式会社島津製作所 | 成膜方法、樹脂製品の製造方法および成膜装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002088472A (ja) * | 2000-04-11 | 2002-03-27 | Applied Materials Inc | プラズマ波を励起可能なイオン化金属堆積のための高密度プラズマ源 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0371600A (ja) * | 1989-08-09 | 1991-03-27 | Sumitomo Metal Ind Ltd | プラズマ装置および該装置の使用方法 |
JP3091326B2 (ja) * | 1992-08-25 | 2000-09-25 | 松下電工株式会社 | 成膜方法 |
JP3071600B2 (ja) * | 1993-02-26 | 2000-07-31 | 日本電気株式会社 | 半導体記憶装置 |
JP2003306771A (ja) * | 2002-04-17 | 2003-10-31 | Ulvac Japan Ltd | グローブボックス付き成膜装置 |
JP2007188707A (ja) * | 2006-01-12 | 2007-07-26 | Sony Corp | 透明導電膜及びその製造方法、並びにタッチパネル |
CA2660085C (en) * | 2006-07-13 | 2016-02-09 | Teer Coatings Limited | Coating apparatus and method |
GB0613877D0 (en) * | 2006-07-13 | 2006-08-23 | Teer Coatings Ltd | Coating apparatus and coating for an article |
JP2010047783A (ja) * | 2008-08-19 | 2010-03-04 | Toppan Printing Co Ltd | 真空成膜装置およびそのメンテナンス方法 |
JP2010163662A (ja) * | 2009-01-16 | 2010-07-29 | National Institute For Materials Science | ドライプロセス装置 |
US20120097527A1 (en) * | 2009-07-17 | 2012-04-26 | Ulvac, Inc. | Film formation apparatus and film forming method |
JP2011058048A (ja) * | 2009-09-10 | 2011-03-24 | Nikuni:Kk | 真空成膜方法およびその装置 |
JP2011091242A (ja) * | 2009-10-23 | 2011-05-06 | Elpida Memory Inc | 半導体装置の製造方法 |
JP2012177191A (ja) * | 2011-02-03 | 2012-09-13 | Canon Inc | 成膜装置及び成膜方法 |
JP5405549B2 (ja) * | 2011-10-20 | 2014-02-05 | 株式会社日本製鋼所 | 真空成膜方法および真空成膜装置 |
JP6042196B2 (ja) * | 2011-12-22 | 2016-12-14 | キヤノンアネルバ株式会社 | スパッタ装置、スパッタ装置の制御装置、および成膜方法 |
JP5871055B2 (ja) * | 2012-03-16 | 2016-03-01 | 株式会社島津製作所 | 成膜装置 |
-
2014
- 2014-07-08 JP JP2015536469A patent/JP6202098B2/ja active Active
- 2014-07-08 CN CN201480043229.1A patent/CN105555995B/zh active Active
- 2014-07-08 WO PCT/JP2014/068183 patent/WO2015037315A1/ja active Application Filing
- 2014-08-19 TW TW103128367A patent/TWI560300B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002088472A (ja) * | 2000-04-11 | 2002-03-27 | Applied Materials Inc | プラズマ波を励起可能なイオン化金属堆積のための高密度プラズマ源 |
Also Published As
Publication number | Publication date |
---|---|
WO2015037315A1 (ja) | 2015-03-19 |
CN105555995A (zh) | 2016-05-04 |
JP6202098B2 (ja) | 2017-09-27 |
CN105555995B (zh) | 2017-11-07 |
JPWO2015037315A1 (ja) | 2017-03-02 |
TW201510263A (zh) | 2015-03-16 |
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