TWI551415B - Apparatus and method for clipping film sheet - Google Patents

Description

Film sheet cutting device and cutting method

The present invention relates to an apparatus for removing a release film sheet from a long belt film and a method thereof, which are used for encapsulating an electronic component such as a semiconductor wafer, particularly for compression molding, in the form of pellets, powders, and pastes. A resin material (hereinafter, simply referred to as "resin material" as such) is used for supply to a molding die cavity.

With the thinning of electronic parts, compression molding has recently been used. In the compression molding, a resin material is supplied to a cavity of the film member coated with the release film sheet, and the resin material is heated and melted, and the substrate mounted on the upper mold and equipped with the electronic component is immersed in the melting. After the resin, the resin is compressed and formed by a closed film of the lower mold and the upper mold. In such compression molding, in order to perform molding without defects on all of the large substrates, it is important to supply the resin in a predetermined amount in the cavity in a uniform and unobscured manner.

In Patent Document 1, a method of supplying the particulate resin R in a uniform thickness and an appropriate amount in a cavity is as follows (see FIG. 1). First, the lower portion of the frame 11 having the opening corresponding to the opening shape of the cavity 18a of the lower mold 8 is covered by the release film sheet 12, and is adsorbed to the lower surface of the frame 11 to form the concave receiving portion 13(a). The concave accommodating portion 13 is placed on the mounting table 14, and the granular resin R is supplied from the feeder 15 to the release film sheet so as to have a uniform thickness (b). Thereafter, the concave accommodating portion 13 of the particulate resin R is accommodated to be framed by the frame 11. The portion of the surrounding release film sheet 12 is placed directly above the cavity 18a and placed on the mold surface (c) of the lower mold 18, and after the adsorption of the release film sheet 12 on the lower surface of the frame 11 is released, The release film sheet 12 is attracted into the cavity 18a together with the particulate resin R above it and pulled in (d). Thereby, the uniform thickness of the particulate resin R is supplied into the cavity 18a. Thereafter, the particulate resin R is heated and melted (e), and the molten resin Rm is contained in the lower mold 18 in the cavity 18a, and the substrate 21 on which the electronic component 20 is mounted, with the mounting surface facing downward and assembled The mold 19 is closed, whereby the electronic component 20 is immersed in the molten resin R, and the molten resin Rm is pressed (f) by the cavity bottom surface member 18b for resin pressurization. After the molten resin is cured, the upper mold 19 and the lower mold 18 are opened to obtain a resin-molded article (g) of the electronic component 20.

When the substrate to be resin-molded is in the form of a disk such as a wafer, the circular release film sheet used in the above method is sequentially cut and formed by a long-distance release film drawn from a supply roller. . Specifically, as shown in FIG. 2, the release film F taken up from the supply roller 27 is conveyed to the cutting base 23 by the conveying mechanism 22, and the conveying mechanism 22 comes to the cutting base 23. At that point, the release film is stopped, and by rotating the cutting blade 25, the release film is cut in a circular shape. The cut-away film sheet to be cut is lowered by the sheet lowering stage 24 provided on the cutting base 23, and is removed from the cutting base 23. Then, the transport mechanism 22 is actuated, and the release film F of the removed residual portion is transported from the cutting base 23 to the take-up roller 26, and the next cut portion is placed on the cutting base 23. In this way, the take-up roll 26 is wound in a roll shape by a circularly cut release film (residual film).

Patent Document 1 Japanese Patent Laid-Open Publication No. 2010-036542

According to the above-mentioned prior art, the long strip residue after the release film sheet is cut off In the case where the film is wound up in a roll shape, the release film is surely wound up at both side end portions of the wound roll, but the cut portion is tied to the central portion which is loosely overlapped, and the release film gradually becomes Huge, resulting in failure to properly roll. Further, the influence also affects the release film which is pulled out and placed on the abutting base, and the release film becomes distorted and wrinkled. As a result, distortion occurs in the cut release film sheet, which causes a problem that the correct shape cannot be removed. Such a problem is not limited to the release film for a resin-packaged compression molding apparatus, and the film is cut from a long-length film.

The problem to be solved by the present invention is to provide a residual film which is obtained by appropriately processing a film from a long strip film, and to cut the film at an appropriate state, thereby obtaining a distortion-free and correct shape. Film sheet cutting device and cutting method for film sheet.

A film sheet cutting device according to the present invention, which is provided by the present invention, is characterized in that: a) a film for cutting a long film, a) a base for cutting, and b) a first conveying means for conveying a long belt a film and a portion of a predetermined length of one end thereof is placed on the abutting base; c) a cutting means for cutting the film sheet from the portion of the long strip film; d) cutting means, the film sheet is cut off The long strip film is cut from the boundary of the portion; e) the second transport means transports the residual film which is the long strip film which has been cut and cut, in a direction opposite to the first transport means, and from the cutting base And the f) suction accommodating portion includes a residual portion film that is taken out from the cutting base and has A wide-width banner corresponding to the residual film and a narrow vertical receiving opening and suction device.

The film sheet cutting device of the present invention performs the following operations. First, by the first transport means, a predetermined length portion of one end of the long-belt film (of course, this portion is larger than the film sheet to be cut) is placed on the abutting base. Further, on the abutting base, the film sheet is cut by a cutting means. Regardless of the method and means, the cutting can be performed by a cutter, and can also be cut by punching. The cut film sheet is taken out from the abutting base by means of another means.

The next cutting means is to cut the long film of the target film sheet from the boundary between the aforementioned portion and the next portion. Since the aforementioned portion is placed on the portion for cutting the abutment, the boundary is the end of the abutment or slightly outside. In the second transport means, the long-belt film (residual film) which has been cut, cut, and shortened is transported in a direction opposite to the first transport means (that is, in the return direction), and is taken out from the abutting base. The remaining portion of the film is taken out, and the cut end portion is formed by a cutting means at the beginning. The residual film layer enters the receiving port of the suction accommodating portion from the cut end portion. However, since the suction accommodating portion is provided with the suction device, the remaining portion film is formed by suction by the narrow receiving port of the vertical width. The air laminar flow smoothly enters the suction accommodating portion without contacting the wall surface of the receiving port or the like. The thin film is made to generate static electricity due to friction during transportation due to the material. If it is intended to enter from the narrow opening, the wall surface of the thin film is clogged and the clogging occurs. However, in the film sheet cutting device of the present invention, The suction accommodating portion sucks air from the receiving port and receives the residual film, and prevents it from adhering to the wall surface by the above-described air laminar flow, so that it can be smoothly received.

In the film sheet cutting device of the present invention, the first conveying means is capable of gripping the front end of the long film and pulling the jig on the cutting base, and the second conveying means is The residual portion film can be sandwiched between the two rolls and transported as a pair of conveying rollers in the opposite direction to the jig. Here, in the pair of conveyance rollers of the second conveyance means, when the upper roller is conveyed by the jig of the first conveyance means, the long film is conveyed, and the upper roller can be moved upward without being hindered.

In the upper roller of the transport roller pair of the second transport means, when the residual film is transported and lowered downward, the front end of the residual film (that is, the cut end) smoothly enters the receiving port. Preferably, a film guide (upper film guide) is provided.

Similarly, the lower roller among the pair of conveying rollers of the second conveying means is preferably provided so as not to excessively wind the leading end film (the cutting end portion) when entering the receiving port. Film guide for the lower roller (lower film guide).

The inside of the suction accommodating portion is provided with a accommodating portion for accommodating a plurality of residual film layers under the receiving port, and preferably, the suction device is disposed above the accommodating portion and does not interfere with the receiving port. The position of the drop path of the falling residual film.

The film sheet cutting method of the present invention, which is a method of resolving the above-mentioned problem, is characterized in that: a) a first film transfer step, a long film is conveyed, and one end of the film is fixed. a portion of the length is placed on the abutting base; b) a cutting step to cut the film sheet from the portion of the long strip film; c) a cutting step, the long strip film after the film sheet is cut from the aforementioned portion d) the second transport step, the residual film of the long strip film that has been cut and cut is transported in a direction opposite to the first transport step and taken out from the abutting base; and e) waste material a housing step of removing a residual film from the abutting abutment There is a wide banner of the residual film and a receiving portion of the narrow vertical frame and the suction receiving portion of the suction device.

In the film sheet cutting method of the present invention, the cutting step is performed after the cutting step, and when the film sheet is cut, the correct cutting can be performed by applying the tension to the long strip film, but if the cutting step is taken, The measures (for example, the long strip film is adsorbed to the abutment base when cutting), etc., the steps are reversed.

In the film sheet cutting device and the film sheet cutting method of the present invention, the film of the correct shape can be cut off without causing a problem that the film is twisted during cutting in a conventional method of winding the residual film in the original state. material.

Further, when the residual film is cut from the long film, and the film is to be treated in a short state, the residual film is adhered to the portion where the film is adhered due to static electricity generated in the film, which causes difficulty in mounting, but the device of the present invention and In the method, the problem is solved by using the suction accommodating portion having a new structure, and the residual portion film is appropriately treated, which does not affect the overall operation of the film sheet cutting device.

30‧‧‧film sheet cutting device

40‧‧‧ Film Supply Department

41‧‧‧ Roll Holder

42‧‧‧ fixture

43‧‧‧Jig moving mechanism

50‧‧‧film sheet cutting section

51‧‧‧Abutment abutment

52‧‧‧ slots

53‧‧‧Sheel lowered

54‧‧‧Removal guides

55‧‧‧Removal mechanism

56‧‧‧Rotary axis

57‧‧‧arm

58‧‧‧Rotary cutter

60‧‧‧ Residual Department Transport Department

61‧‧‧Transport roller pair

61a‧‧‧Upper roll

61b‧‧‧ lower roll

62‧‧‧ cutting blade

63‧‧‧ Cutting drive mechanism

64‧‧‧Motor

65‧‧‧ Roller lifting mechanism

66‧‧‧Upper sheet guide

67‧‧‧Under sheet guide

70‧‧‧Attracting the Department of Housing

71‧‧‧Storage box

72‧‧‧ attracting mouth

73‧‧‧vacuum pump

74‧‧‧Introduction

75‧‧‧ receiving port

76‧‧‧Isolation board

77‧‧‧through holes

80‧‧‧Control Department

F‧‧‧ release film

Fr‧‧‧ Residual film

Figure 1 is a schematic view showing the sequence of conventional compression forming

Fig. 2 is a schematic structural view (a) and a schematic sectional view (b) of a conventional film sheet cutting device.

Fig. 3 is a schematic block diagram of a film sheet cutting device according to an embodiment of the present invention.

Fig. 4 is a schematic view showing a state in which the residual film is taken out from the absorbing and accommodating portion of the same embodiment.

Fig. 5 is a flow chart showing the film removing method of the film sheet cutting device of the same embodiment.

A film sheet cutting device of the present invention for producing a circular release film sheet which is used in a resin-package compression molding apparatus having a film having a circular cavity can be described with reference to FIGS. 3 and 4 (hereinafter, only An embodiment of what is referred to as a "cutting device" 30.

The cutting device 30 of the present embodiment includes a film supply unit 40 that holds the release film F wound in a roll shape and feeds the front end thereof forward (that is, in the direction of the film cut portion 50); In the portion 50, the circular release film F is cut off from the release film F, and the residual portion transfer portion 60 cuts off the full-length film F from which the release film sheet is cut, and is used as a residual portion. The film Fr is conveyed rearward, and the suction receiving portion 70 sucks and houses the remaining portion film Fr that is transported rearward, and the control unit 80 controls the respective portions.

The film supply unit 40 includes a roll holding unit 41 that holds the long tape release film F that is wound in a roll shape, and a jig 42 that grips the front end (front end) of the release film F that is pulled out from the roll. The jig moving mechanism 43 moves the jig 42 forward and backward at a position where the surface of the cutting base 51 of the film cutting portion 50 is slightly raised.

The film cutting unit 50 includes a cutting base 51, a cutting mechanism 55 provided above the cutting base 51, and a cutting guide 54 formed between the surface of the cutting base 51 and the upper surface thereof. move up and down. The cutting mechanism 55 includes a rotating shaft 56 that vertically descends from above to the cutting base 51 and is movable up and down; the arm portion 57 extends perpendicularly from the rotating shaft (ie, parallel to the cutting base 51); The knife 58 is mounted downward perpendicular to the arm portion 57. A circular groove 52 having the same diameter as the produced release film F and having a width only on both sides is provided on the upper surface of the cutting base 51, and the rotating shaft 56 is disposed in the circular groove 52. Center vertical line. Further, the length of the arm portion 57 is equal to the radius of the circle. A portion of the abutting base 51 that is located inside the center line of the groove 52 is formed to remove the sheet of the removed release film sheet. 53. The cutting guide 54 is formed by a double concentric circle presser that sandwiches the inside and the outside of the circular groove 52 of the cutting base 51.

The remaining portion conveying unit 60 includes a cutting blade 62 that is disposed immediately behind the conveying roller pair 61 (that is, the roller holding unit), except for the conveying roller pair 61 that conveys the remaining two sheets Fr to the rear. The portion 41 side); the cutting drive mechanism 63 drives the cutting edge 62. The lower roller 61b of the transport roller pair 61 has an upper portion substantially the same height as the upper surface of the cutting base 51, and is driven by a motor 64. The upper roller 61a is lifted and lowered by the roller elevating mechanism 65, and is lowered to bring it into rotation when it comes into contact with the residual portion film Fr on the lower roller 61b. The upper roller 61a is provided with an L-shaped upper film guide 66 that presses the end portion of the residual portion film Fr downward and is bent downward to the receiving port 75 of the accommodating portion. Further, the lower roller 61b is provided with the end portion of the residual portion film Fr along with the rotation of the roller 61b, and is not wound around the roller 61b, and is accurately guided to enter the film guide 67 below the receiving port 75.

The suction accommodating portion 70 is provided with a storage box 77 which is provided behind the lower roller 61b and which is lower than the upper surface of the cutting base 51, and accommodates the cut residual film Fr; the vacuum pump 73 accommodates the housing The air in the tank 71 is sucked; the introduction path 74 extends upward from the upper portion of the storage box 71. The introduction path 74 has a banner that is slightly open below the lower roller 61b and has a width that is slightly larger than the width of the residual film Fr (that is, the width of the release film F) and a narrow vertical receiving port 75. Below the accommodating portion 71, the accumulated residual portion film can be taken out and removed. A suction port 72 is provided above the side surface of the accommodating portion 71, and the vacuum pump is connected to the suction port 72. The suction port 72 is surrounded by the partition plate 76 having a plurality of through holes 77 in the storage box 71, and is isolated from the accommodating portion 78 (the dotted line portion in Fig. 4) which is a portion in which the residual portion film Fr is accommodated. Further, the detachable portion or the upper portion thereof may be provided to confirm the residual portion film Fr. Confirmation window of containment status.

The control unit 80 cuts off the circular release film sheet from the long tape release film F, and performs the cutting process continuously and stably by appropriately recovering the residual portion film Fr. The sequence control of the flow chart of Figure 5. Furthermore, the processing of the flow chart of Fig. 5 is repeated for the continuous long strip release film F.

First, the jig moving mechanism 43 moves the jig 42 to the roller holding portion 41, and the jig 42 grips the end portion of the long tape release film F. Then, the jig moving mechanism 43 pulls the release film F from the roll by moving the jig 42 to the side of the cutting base 51. At the time when the square end of the release film F reaches the rear end of the cutting base 51 (the end opposite to the roller holding portion 41), the jig 42 is stopped, and the release film F is placed on the cutting base 51 (step S11).

Next, the control unit 80 lowers the cutting guide 54 to the cutting base 51 to press the release film F. Then, the rotating shaft 56 is lowered until the front end of the rotary cutter 58 pierces the release film F, and the rotary shaft 56 is rotated once. Thereby, the release film F on the cutting base 51 is circularly cut, and a circular release film sheet is produced (step S12).

Thereafter, the sheet lowering stage 53 at the center of the cutting base 51 is lowered downward. The release film sheet is taken out from the cutting base 51 by a device (not shown) or by an operator (step S13).

The control unit 80 then cuts the long-band release film F by the cutting drive mechanism 63 (step 14). At this time, in order to fix the release film F to the cutting machine by the cutting guide 54, the cutting blade 62 is surely cut. Thereafter, the control unit 80 raises the cutting guide 54 to the upper side. As a result, the release film sheet is cut, and the release film F (residual portion film Fr) of the waste material cut at a shorter length is released from the cutting base and is in a free state (step S15).

Thereafter, the control unit 80 first activates the vacuum pump 73 that sucks the storage unit 70 (step S16). Furthermore, the activation of the vacuum pump 73 can also be driven simultaneously with the motor 64 below. Alternatively, the vacuum pump can be operated continuously without restarting and stopping.

Next, the control unit 80 lowers the upper roller 61a to the roller 61b by the roller elevating mechanism 65. Thereby, the cut portion end side of the residual portion film Fr is sandwiched between the pair of conveying rollers 61. Next, the lower roller 61b is rotationally driven by the motor 61, and the upper roller 61a is also rotated by the lower roller 61. Thereby, the residual portion film Fr is pulled out from the cutting base 51 and conveyed rearward (step S17, FIG. 4). At this time, the jig moving mechanism 43 grips the front end side of the remaining portion film Fr gradually upward by the jig 42 and moves rearward together with the rotation of the conveying roller pair 61. Thereby, the residual portion film Fr is smoothly conveyed rearward. When there is no such conveyance assistance by the jig 42, the residual portion Fr generates static electricity due to sliding on the cutting base 51 during transportation, and adheres to the cutting base 51 or other portions and cannot be smoothly performed. The possibility of moving. The jig moving mechanism 43 releases the jig 42 that grips the front end of the residual portion film Fr when the jig 42 comes to the transport roller pair 61.

When the residual film Fr is conveyed rearward by the conveyance roller pair 61, the cutting end of the residual portion film Fr is sucked and received by the film guide provided on the upper roll 61a and the film guide provided under the lower roll 61b. The receiving port 45 of the introduction path 74 of the portion 70 is smoothly introduced.

In the suction accommodating portion 70, air is sucked into the storage box 71 through the introduction path 74 through the introduction port 75 of the introduction path 74 by the vacuum pump 73. Since the longitudinal width of the receiving port 75 is narrow, a laminar air flow is generated therein, and the residual film Fr is smoothly introduced into the introduction path 74 by the air layer flow which does not adhere to the upper wall surface of the receiving port 75.

The suction port 72 coupled to the vacuum pump 71 is disposed above the side of the storage box 71, and is isolated A large through hole 77 is provided above the plate 76, and the air is relatively strongly attracted above the storage box 71 from the outlet of the introduction path 74. As a result, the introduction path 74 sucks the removed residual portion film Fr into the storage case 71 with a strong force. On the other hand, since the through hole 77 provided under the partition plate 76 is small, the suction of the air from the suction port 72 below the remote storage box 71 becomes stable, and the residual film Fr sucked into the storage case 71 is used by Its own weight falls below the containment box 71 (Fig. 4).

The residual portion film Fr that has fallen below the storage box 71 is slightly attracted by the suction port 71, and the partition plate 76 is formed between the bottom of the storage box 71 and the suction port 72, and the residual portion film Fr is sucked into the suction port 72. And don't stop attracting.

The control unit 80 stops the motor 64 only after the lower roller 61b is rotated by a predetermined number of turns. Thereby, the residual portion film Fr as a whole passes through the transport roller pair 61 and is housed in the storage case of the suction accommodating portion 70. Further, the vacuum pump 73 is stopped, and the upper roller 61a is raised by the roller elevating mechanism 65 (step S18). As described above, the waste material, that is, the residual portion film Fr, is removed from the cutting base 51.

Thereafter, the process returns to step S11, and steps S11 to S18 are repeated. As described above, the circular release film sheet is continuously and stably produced.

Thus, by the film sheet cutting device 30 of the present embodiment, the residual portion film Fr (waste material) generated for each of the release film sheets is cut from the long tape release film F and the self-cutting abutment 51 is cut. The unloading, because the long release film F is reconfigured by the jig 42, does not cause distortion or wrinkles which are caused by the condition of the winding in the past. Further, in the recovery of the residual portion film Fr, a laminar flow formed by suction by air can prevent the adhesion of the residual portion film Fr to the introduction path 74 by static electricity.

30‧‧‧film sheet cutting device

40‧‧‧ Film Supply Department

41‧‧‧ Roll Holder

42‧‧‧ fixture

43‧‧‧Jig moving mechanism

50‧‧‧film sheet cutting section

51‧‧‧Abutment abutment

52‧‧‧ slots

53‧‧‧Sheel lowered

54‧‧‧Removal guides

55‧‧‧Removal mechanism

56‧‧‧Rotary axis

57‧‧‧arm

58‧‧‧Rotary cutter

60‧‧‧ Residual Department Transport Department

61‧‧‧Transport roller pair

61a‧‧‧Upper roll

61b‧‧‧ lower roll

62‧‧‧ cutting blade

63‧‧‧ Cutting drive mechanism

64‧‧‧Motor

65‧‧‧ Roller lifting mechanism

66‧‧‧Upper sheet guide

67‧‧‧Under sheet guide

70‧‧‧Attracting the Department of Housing

71‧‧‧Storage box

72‧‧‧ attracting mouth

73‧‧‧vacuum pump

74‧‧‧Introduction

75‧‧‧ receiving port

76‧‧‧Isolation board

77‧‧‧through holes

78‧‧‧ Housing Department

80‧‧‧Control Department

F‧‧‧ release film

Claims (8)

A film sheet cutting device comprising: a) a cutting base; b) a first conveying means, conveying the long film and carrying a predetermined length of one end thereof Placed on the abutting abutment; c) a cutting means for cutting the film sheet from the portion of the long strip film; d) cutting means, cutting the long strip film after the film sheet is cut from the boundary of the portion (e) the second transport means, the residual film which is the long strip film which is cut and cut, is transported in a direction opposite to the first transport means and taken out from the abutting base; and f) the suction receiving portion is provided The residual film obtained from the cutting base is received, and has a wide banner corresponding to the residual film and a narrow vertical receiving opening, and a suction device. The film sheet cutting device according to the first aspect of the invention, wherein the first conveying means is a jig that grips the front end of the long film and pulls the cutting base. The film sheet cutting device according to the first or second aspect of the invention, wherein the second conveying means holds the remaining portion film by two rolls and conveys the pair of conveying rollers opposite to the first conveying means. Further, the upper roller of the pair of conveying rollers can move upward. The film sheet cutting device according to claim 3, wherein the upper roller of the pair of conveying rollers is provided with a film guide for guiding the cutting end portion of the remaining portion film to the receiving port. The film sheet cutting device of claim 3, wherein the conveying roller The middle and lower rollers are provided with a film guide for winding the lower end of the residual film at the front end, that is, the cut end, into the lower receiving roll without excessively winding it. . The film sheet cutting device of claim 4, wherein the lower middle roller of the pair of conveying rollers is provided with a film guide for entering the cut end portion of the front end film. When the receiving port is received, it is wound around the lower roller and is not excessively wound. The film sheet cutting device according to the first aspect of the invention, wherein the suction receiving portion is provided with a plurality of accommodating portions for accommodating the remaining portion film under the receiving opening, and the suction device is provided The position of the drop path of the residual film which is above the accommodating portion and does not interfere with the drop from the receiving port. A film sheet cutting method, comprising: a) a first transporting step of transporting a long strip film and placing a portion of one end of a predetermined length on a cutting abutment. ; b) a cutting step of cutting the film sheet from the portion of the long strip film; c) a cutting step of cutting the long strip film after the film sheet is cut from the boundary of the portion; d) the second transport step And removing the residual film of the long strip film that has been cut and cut, and transporting it from the abutting base in a direction opposite to the first transport step; and e) removing the waste material from the abutting base The residual portion film is received by a suction accommodating portion having a receiving port having a wide width corresponding to the remaining portion film and a narrow vertical width and a suction device.