TWI525844B - Screen and solar cell manufacturing methods - Google Patents
Screen and solar cell manufacturing methods Download PDFInfo
- Publication number
- TWI525844B TWI525844B TW101105683A TW101105683A TWI525844B TW I525844 B TWI525844 B TW I525844B TW 101105683 A TW101105683 A TW 101105683A TW 101105683 A TW101105683 A TW 101105683A TW I525844 B TWI525844 B TW I525844B
- Authority
- TW
- Taiwan
- Prior art keywords
- sub
- gate electrode
- electrode
- screen
- thickness
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 68
- 229910052709 silver Inorganic materials 0.000 claims description 68
- 239000004332 silver Substances 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 54
- 239000000839 emulsion Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 35
- 239000011888 foil Substances 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000007639 printing Methods 0.000 description 28
- 230000000052 comparative effect Effects 0.000 description 26
- 238000007747 plating Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 22
- 238000007650 screen-printing Methods 0.000 description 20
- 229910052732 germanium Inorganic materials 0.000 description 15
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 15
- 238000013459 approach Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 9
- 229910052707 ruthenium Inorganic materials 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000002087 whitening effect Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000000227 grinding Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022433—Particular geometry of the grid contacts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/34—Screens, Frames; Holders therefor
- B41F15/36—Screens, Frames; Holders therefor flat
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09145—Edge details
- H05K2201/09154—Bevelled, chamferred or tapered edge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10143—Solar cell
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
- H05K3/1225—Screens or stencils; Holders therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Sustainable Energy (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Photovoltaic Devices (AREA)
- Structure Of Printed Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Printing Plates And Materials Therefor (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011034488 | 2011-02-21 | ||
| JP2012002828 | 2012-01-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201242043A TW201242043A (en) | 2012-10-16 |
| TWI525844B true TWI525844B (zh) | 2016-03-11 |
Family
ID=46720787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101105683A TWI525844B (zh) | 2011-02-21 | 2012-02-21 | Screen and solar cell manufacturing methods |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2012115006A1 (fr) |
| TW (1) | TWI525844B (fr) |
| WO (1) | WO2012115006A1 (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5903550B2 (ja) * | 2011-07-28 | 2016-04-13 | パナソニックＩｐマネジメント株式会社 | 太陽電池、太陽電池モジュール、太陽電池の製造方法 |
| WO2014073223A1 (fr) * | 2012-11-12 | 2014-05-15 | 三菱電機株式会社 | Cellule solaire ainsi que procédé de fabrication de celle-ci, module de cellules solaires, et masque d'impression |
| JP5977166B2 (ja) * | 2012-12-25 | 2016-08-24 | 京セラ株式会社 | 光電変換素子 |
| TWI483416B (zh) * | 2013-09-30 | 2015-05-01 | Motech Ind Inc | 印刷用網版及以網版製作太陽能電池電極的方法 |
| WO2015172823A1 (fr) * | 2014-05-14 | 2015-11-19 | Applied Materials Italia S.R.L. | Dispositif de cellule solaire et procédé de fabrication de dispositif de cellule solaire |
| JP7075217B2 (ja) * | 2017-03-27 | 2022-05-25 | 太陽誘電株式会社 | スクリーン印刷版、ならびに、電子部品の製造方法 |
| US10933679B2 (en) * | 2017-03-27 | 2021-03-02 | Taiyo Yuden Co., Ltd. | Screen printing plate and manufacturing method of electronic component |
| CN108807590B (zh) * | 2018-04-24 | 2019-08-30 | 昆山赛阳电子材料有限公司 | 太阳能电池网版生产工艺 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311608A (en) * | 1976-07-19 | 1978-02-02 | Hitachi Ltd | Printing method of pasty substance |
| JPH01101843U (fr) * | 1987-12-25 | 1989-07-10 | ||
| JPH06283736A (ja) * | 1993-03-29 | 1994-10-07 | Sharp Corp | 太陽電池 |
| JP4074763B2 (ja) * | 2002-01-22 | 2008-04-09 | シャープ株式会社 | 太陽電池の製造方法 |
| JP4322082B2 (ja) * | 2003-10-02 | 2009-08-26 | シャープ株式会社 | 太陽電池の製造方法 |
| EP1870942B1 (fr) * | 2005-11-28 | 2016-08-24 | Mitsubishi Electric Corporation | Cellule solaire |
| JP4842655B2 (ja) * | 2006-02-10 | 2011-12-21 | シャープ株式会社 | 太陽電池製造用スクリーンマスク |
| JP2007265776A (ja) * | 2006-03-28 | 2007-10-11 | Nippon Oil Corp | フレキシブル色素増感型太陽電池 |
| JP4825785B2 (ja) * | 2007-12-20 | 2011-11-30 | 三菱製紙株式会社 | 段差付きスクリーン印刷用マスクの作製方法 |
| JP2009272405A (ja) * | 2008-05-02 | 2009-11-19 | Mitsubishi Electric Corp | 太陽電池素子およびその製造方法 |
| WO2013042241A1 (fr) * | 2011-09-22 | 2013-03-28 | 三洋電機株式会社 | Procédé de fabrication d'un dispositif photovoltaïque |
-
2012
- 2012-02-17 WO PCT/JP2012/053821 patent/WO2012115006A1/fr active Application Filing
- 2012-02-17 JP JP2013501007A patent/JPWO2012115006A1/ja active Pending
- 2012-02-21 TW TW101105683A patent/TWI525844B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012115006A1 (fr) | 2012-08-30 |
| TW201242043A (en) | 2012-10-16 |
| JPWO2012115006A1 (ja) | 2014-07-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |