TWI522554B - Groove seal - Google Patents

Groove seal Download PDF

Info

Publication number
TWI522554B
TWI522554B TW100107934A TW100107934A TWI522554B TW I522554 B TWI522554 B TW I522554B TW 100107934 A TW100107934 A TW 100107934A TW 100107934 A TW100107934 A TW 100107934A TW I522554 B TWI522554 B TW I522554B
Authority
TW
Taiwan
Prior art keywords
convex portion
groove
sealing material
space
cross
Prior art date
Application number
TW100107934A
Other languages
English (en)
Chinese (zh)
Other versions
TW201207275A (en
Inventor
Seiji Okabe
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201207275A publication Critical patent/TW201207275A/zh
Application granted granted Critical
Publication of TWI522554B publication Critical patent/TWI522554B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/061—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with positioning means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Sealing Devices (AREA)
TW100107934A 2010-03-10 2011-03-09 Groove seal TWI522554B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010052974A JP5551947B2 (ja) 2010-03-10 2010-03-10 溝用シール材

Publications (2)

Publication Number Publication Date
TW201207275A TW201207275A (en) 2012-02-16
TWI522554B true TWI522554B (zh) 2016-02-21

Family

ID=44600968

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100107934A TWI522554B (zh) 2010-03-10 2011-03-09 Groove seal

Country Status (4)

Country Link
JP (1) JP5551947B2 (ja)
KR (1) KR101335102B1 (ja)
CN (1) CN102192326B (ja)
TW (1) TWI522554B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012072863A (ja) * 2010-09-29 2012-04-12 Nippon Valqua Ind Ltd 環状シール材
JP5780730B2 (ja) * 2010-09-29 2015-09-16 日本バルカー工業株式会社 環状シール材
JP2013197513A (ja) * 2012-03-22 2013-09-30 Tosoh Corp 電子材料の保管・運搬用ケース
JP5240594B1 (ja) * 2012-04-12 2013-07-17 Ｎｏｋ株式会社 ガスケット
WO2020018226A1 (en) * 2018-07-19 2020-01-23 Applied Materials, Inc. Multinode multi-use o-ring and method for making a seal
CN109373109A (zh) * 2018-12-10 2019-02-22 广西玉柴机器股份有限公司 飞轮壳储胶槽结构

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743053A (en) * 1980-08-26 1982-03-10 Seiko Epson Corp Water tight packing
JPH10311430A (ja) * 1997-05-08 1998-11-24 Yagi Antenna Co Ltd 気密ケース用パッキング
TW417013B (en) * 1999-04-12 2001-01-01 Mitsubishi Cable Ind Ltd Low-loading seal
JP3349132B2 (ja) * 1999-04-12 2002-11-20 三菱電線工業株式会社 低荷重シール
JP2002295683A (ja) * 2001-03-28 2002-10-09 Nok Corp あり溝用シール
JP4765200B2 (ja) * 2001-06-04 2011-09-07 Ｎｏｋ株式会社 ガスケット
JP3946466B2 (ja) * 2001-07-03 2007-07-18 日本バルカー工業株式会社 蟻溝用シール材
JP3943433B2 (ja) 2002-04-26 2007-07-11 三菱電線工業株式会社 密封構造体
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
JP2008249139A (ja) 2007-03-02 2008-10-16 Nok Corp 電子機器の防水構造
WO2009107495A1 (ja) * 2008-02-29 2009-09-03 日本バルカー工業株式会社 シール材およびシール材が装着されたゲートバルブ

Also Published As

Publication number Publication date
KR20110102166A (ko) 2011-09-16
CN102192326B (zh) 2015-08-05
CN102192326A (zh) 2011-09-21
KR101335102B1 (ko) 2013-12-03
JP5551947B2 (ja) 2014-07-16
JP2011185394A (ja) 2011-09-22
TW201207275A (en) 2012-02-16

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