TWI507659B - 三維形狀測量裝置 - Google Patents
三維形狀測量裝置 Download PDFInfo
- Publication number
- TWI507659B TWI507659B TW101136679A TW101136679A TWI507659B TW I507659 B TWI507659 B TW I507659B TW 101136679 A TW101136679 A TW 101136679A TW 101136679 A TW101136679 A TW 101136679A TW I507659 B TWI507659 B TW I507659B
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- Taiwan
- Prior art keywords
- aperture plate
- optical axis
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- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 103
- 238000005259 measurement Methods 0.000 claims description 50
- 238000003384 imaging method Methods 0.000 claims description 46
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 38
- 230000007246 mechanism Effects 0.000 claims description 19
- 230000008859 change Effects 0.000 claims description 16
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 description 30
- 238000012545 processing Methods 0.000 description 23
- 239000000428 dust Substances 0.000 description 21
- 238000009434 installation Methods 0.000 description 8
- 238000004891 communication Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 4
- 101150057091 FP1 gene Proteins 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 229910052804 chromium Inorganic materials 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Health & Medical Sciences (AREA)
- Surgery (AREA)
- Radiology & Medical Imaging (AREA)
- Ophthalmology & Optometry (AREA)
- Health & Medical Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012022189A JP5955574B2 (ja) | 2012-02-03 | 2012-02-03 | 立体形状計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201333420A TW201333420A (zh) | 2013-08-16 |
| TWI507659B true TWI507659B (zh) | 2015-11-11 |
Family
ID=48902626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101136679A TWI507659B (zh) | 2012-02-03 | 2012-10-04 | 三維形狀測量裝置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9041940B2 (https=) |
| JP (1) | JP5955574B2 (https=) |
| KR (1) | KR101409644B1 (https=) |
| CN (1) | CN103245302B (https=) |
| TW (1) | TWI507659B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI622754B (zh) * | 2016-02-12 | 2018-05-01 | Ckd Corp | Three-dimensional measuring device |
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| US9220580B2 (en) | 2012-03-01 | 2015-12-29 | Align Technology, Inc. | Determining a dental treatment difficulty |
| US9414897B2 (en) | 2012-05-22 | 2016-08-16 | Align Technology, Inc. | Adjustment of tooth position in a virtual dental model |
| JP6113021B2 (ja) * | 2013-08-09 | 2017-04-12 | 株式会社キーエンス | 接触式変位計 |
| JP6198312B2 (ja) * | 2013-09-30 | 2017-09-20 | Ｊｕｋｉオートメーションシステムズ株式会社 | ３次元測定装置、３次元測定方法および基板の製造方法 |
| US10772506B2 (en) | 2014-07-07 | 2020-09-15 | Align Technology, Inc. | Apparatus for dental confocal imaging |
| US9693839B2 (en) | 2014-07-17 | 2017-07-04 | Align Technology, Inc. | Probe head and apparatus for intraoral confocal imaging using polarization-retarding coatings |
| US9675430B2 (en) | 2014-08-15 | 2017-06-13 | Align Technology, Inc. | Confocal imaging apparatus with curved focal surface |
| US9610141B2 (en) | 2014-09-19 | 2017-04-04 | Align Technology, Inc. | Arch expanding appliance |
| US10449016B2 (en) | 2014-09-19 | 2019-10-22 | Align Technology, Inc. | Arch adjustment appliance |
| US9744001B2 (en) | 2014-11-13 | 2017-08-29 | Align Technology, Inc. | Dental appliance with cavity for an unerupted or erupting tooth |
| US10504386B2 (en) | 2015-01-27 | 2019-12-10 | Align Technology, Inc. | Training method and system for oral-cavity-imaging-and-modeling equipment |
| JP6342842B2 (ja) * | 2015-04-30 | 2018-06-13 | オリンパス株式会社 | 走査型顕微鏡システム |
| DE102015110795A1 (de) * | 2015-07-03 | 2017-01-05 | Carl Zeiss Microscopy Gmbh | Optikvorrichtung mit einem Optikmodul, das mindestens ein optisches Element aufweist |
| US10248883B2 (en) | 2015-08-20 | 2019-04-02 | Align Technology, Inc. | Photograph-based assessment of dental treatments and procedures |
| US11554000B2 (en) | 2015-11-12 | 2023-01-17 | Align Technology, Inc. | Dental attachment formation structure |
| US11931222B2 (en) | 2015-11-12 | 2024-03-19 | Align Technology, Inc. | Dental attachment formation structures |
| US11103330B2 (en) | 2015-12-09 | 2021-08-31 | Align Technology, Inc. | Dental attachment placement structure |
| US11596502B2 (en) | 2015-12-09 | 2023-03-07 | Align Technology, Inc. | Dental attachment placement structure |
| CN105596088B (zh) * | 2015-12-22 | 2018-05-18 | 吉林亚泰中科医疗器械工程技术研究院股份有限公司 | 基于皮肤共焦系统的可调节三轴成像机构 |
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| WO2017218947A1 (en) | 2016-06-17 | 2017-12-21 | Align Technology, Inc. | Intraoral appliances with sensing |
| DE102016113149A1 (de) * | 2016-07-15 | 2018-01-18 | Triple-In Holding Ag | Aufnahme von Entfernungsprofilen |
| DE102016213237A1 (de) * | 2016-07-20 | 2018-01-25 | Carl Zeiss Smt Gmbh | Messvorrichtung zur interferometrischen Bestimmung einer Form einer optischen Oberfläche |
| US10507087B2 (en) | 2016-07-27 | 2019-12-17 | Align Technology, Inc. | Methods and apparatuses for forming a three-dimensional volumetric model of a subject's teeth |
| ES2843501T3 (es) | 2016-07-27 | 2021-07-19 | Align Technology Inc | Escáner intraoral con capacidades de diagnóstico dental |
| DE102016115827A1 (de) | 2016-08-25 | 2018-03-01 | Nanofocus Ag | Verfahren und Vorrichtung zur optischen Oberflächenmessung mit Hilfe eines chromatisch konfokalen Sensors |
| CN111142251B (zh) * | 2016-10-26 | 2022-03-25 | 合肥百会拓知科技有限公司 | 一种具有三维成像能力的显微镜和成像方法 |
| WO2018085718A2 (en) | 2016-11-04 | 2018-05-11 | Align Technology, Inc. | Methods and apparatuses for dental images |
| WO2018102770A1 (en) | 2016-12-02 | 2018-06-07 | Align Technology, Inc. | Force control, stop mechanism, regulating structure of removable arch adjustment appliance |
| WO2018102811A1 (en) | 2016-12-02 | 2018-06-07 | Align Technology, Inc. | Methods and apparatuses for customizing rapid palatal expanders using digital models |
| US11026831B2 (en) | 2016-12-02 | 2021-06-08 | Align Technology, Inc. | Dental appliance features for speech enhancement |
| EP3824843B1 (en) | 2016-12-02 | 2024-12-25 | Align Technology, Inc. | Series of palatal expanders |
| US10548700B2 (en) | 2016-12-16 | 2020-02-04 | Align Technology, Inc. | Dental appliance etch template |
| US10456043B2 (en) | 2017-01-12 | 2019-10-29 | Align Technology, Inc. | Compact confocal dental scanning apparatus |
| US10779718B2 (en) | 2017-02-13 | 2020-09-22 | Align Technology, Inc. | Cheek retractor and mobile device holder |
| WO2018183358A1 (en) | 2017-03-27 | 2018-10-04 | Align Technology, Inc. | Apparatuses and methods assisting in dental therapies |
| US10613515B2 (en) | 2017-03-31 | 2020-04-07 | Align Technology, Inc. | Orthodontic appliances including at least partially un-erupted teeth and method of forming them |
| US11045283B2 (en) | 2017-06-09 | 2021-06-29 | Align Technology, Inc. | Palatal expander with skeletal anchorage devices |
| WO2018232299A1 (en) | 2017-06-16 | 2018-12-20 | Align Technology, Inc. | Automatic detection of tooth type and eruption status |
| US10639134B2 (en) | 2017-06-26 | 2020-05-05 | Align Technology, Inc. | Biosensor performance indicator for intraoral appliances |
| US10885521B2 (en) | 2017-07-17 | 2021-01-05 | Align Technology, Inc. | Method and apparatuses for interactive ordering of dental aligners |
| WO2019018784A1 (en) | 2017-07-21 | 2019-01-24 | Align Technology, Inc. | ANCHOR OF CONTOUR PALATIN |
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| US12274597B2 (en) * | 2017-08-11 | 2025-04-15 | Align Technology, Inc. | Dental attachment template tray systems |
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| WO2019036677A1 (en) | 2017-08-17 | 2019-02-21 | Align Technology, Inc. | SURVEILLANCE OF CONFORMITY OF DENTAL DEVICE |
| EP3450913B1 (en) * | 2017-08-30 | 2021-06-09 | Hexagon Technology Center GmbH | Surveying instrument for scanning an object and for projection of information |
| WO2019071019A1 (en) | 2017-10-04 | 2019-04-11 | Align Technology, Inc. | INTRAORAL APPARATUS FOR SAMPLING MOUTH TISSUE |
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| US11576752B2 (en) | 2017-10-31 | 2023-02-14 | Align Technology, Inc. | Dental appliance having selective occlusal loading and controlled intercuspation |
| US11096763B2 (en) | 2017-11-01 | 2021-08-24 | Align Technology, Inc. | Automatic treatment planning |
| US11534974B2 (en) | 2017-11-17 | 2022-12-27 | Align Technology, Inc. | Customized fabrication of orthodontic retainers based on patient anatomy |
| US11219506B2 (en) | 2017-11-30 | 2022-01-11 | Align Technology, Inc. | Sensors for monitoring oral appliances |
| WO2019118876A1 (en) | 2017-12-15 | 2019-06-20 | Align Technology, Inc. | Closed loop adaptive orthodontic treatment methods and apparatuses |
| CN112119280B (zh) * | 2017-12-22 | 2023-05-23 | 驱动责任资金投入公司 | 具有双重结构的三维目标、具有该三维目标的光学测量装置和方法 |
| US10980613B2 (en) | 2017-12-29 | 2021-04-20 | Align Technology, Inc. | Augmented reality enhancements for dental practitioners |
| CN114587237B (zh) | 2018-01-26 | 2025-09-30 | 阿莱恩技术有限公司 | 诊断性口内扫描和追踪 |
| US11937991B2 (en) | 2018-03-27 | 2024-03-26 | Align Technology, Inc. | Dental attachment placement structure |
| KR102736991B1 (ko) | 2018-04-11 | 2024-12-03 | 얼라인 테크널러지, 인크. | 해제 가능한 구개 확장기 |
| CN112648926B (zh) * | 2021-01-13 | 2023-03-28 | 宁波五维检测科技有限公司 | 一种线聚焦彩色共焦三维表面高度测量装置及方法 |
| CN114964045B (zh) * | 2022-05-31 | 2025-04-04 | 武汉加特林光学仪器有限公司 | 基于光谱色散的三维测量设备与方法 |
| JP7262693B1 (ja) * | 2022-10-21 | 2023-04-21 | 株式会社東光高岳 | ワーク検査装置 |
| CN115665563B (zh) * | 2022-12-14 | 2023-06-27 | 深圳市中图仪器股份有限公司 | 光学测量系统及基于光学测量系统的成像方法 |
| WO2025249583A1 (ja) * | 2025-08-07 | 2025-12-04 | 株式会社東光高岳 | 立体形状計測装置 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001083426A (ja) * | 1999-07-09 | 2001-03-30 | Olympus Optical Co Ltd | 共焦点顕微鏡 |
| US6496273B1 (en) * | 1999-05-05 | 2002-12-17 | Renishaw Plc | Position determining apparatus for coordinate positioning machine |
| JP2003247817A (ja) * | 2002-02-27 | 2003-09-05 | Takaoka Electric Mfg Co Ltd | リニアスキャン型共焦点表面形状計測装置 |
| EP1482273A1 (en) * | 2002-03-07 | 2004-12-01 | Takaoka Electric Mfg. Co., Ltd. | Polarization bearing detection type two-dimensional light reception timing detecting device and surface shape measuring device using it |
| US20050128896A1 (en) * | 2003-04-25 | 2005-06-16 | Ryuichi Katayama | Optical head device and optical information recording/reproducing apparatus |
| JP2006235250A (ja) * | 2005-02-25 | 2006-09-07 | Nikon Corp | 測定顕微鏡 |
| TW200724969A (en) * | 2005-12-22 | 2007-07-01 | Metal Ind Res & Dev Ct | Co-focal microscopic imaging system with adjustable light source pattern |
| TW200837385A (en) * | 2007-03-14 | 2008-09-16 | Univ Nat Yang Ming | Modulation differential confocal microscopy |
| TW200933123A (en) * | 2008-01-16 | 2009-08-01 | Univ Nat Taipei Technology | Apparatus and method for simulataneous confocal full-field micro surface profilometry |
| TW201200901A (en) * | 2010-06-18 | 2012-01-01 | Univ Nat Taiwan | 3D Optical Coherent Tomography with confocal imaging apparatus |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183305A (ja) * | 1983-04-01 | 1984-10-18 | Ricoh Co Ltd | 位置検出装置 |
| JPS6022633A (ja) * | 1983-07-18 | 1985-02-05 | Nec Corp | フ−リエ分光器の高速ミラ−走査機構 |
| US4748335A (en) * | 1985-04-19 | 1988-05-31 | Siscan Systems, Inc. | Method and aparatus for determining surface profiles |
| JP3350918B2 (ja) * | 1996-03-26 | 2002-11-25 | 株式会社高岳製作所 | ２次元配列型共焦点光学装置 |
| JP3306858B2 (ja) | 1995-11-02 | 2002-07-24 | 株式会社高岳製作所 | 立体形状計測装置 |
| JPH0996512A (ja) * | 1995-09-29 | 1997-04-08 | Takaoka Electric Mfg Co Ltd | 立体形状計測装置 |
| JPH09127420A (ja) * | 1995-11-02 | 1997-05-16 | Takaoka Electric Mfg Co Ltd | 共焦点走査顕微鏡の走査装置 |
| JP3509088B2 (ja) * | 1997-02-25 | 2004-03-22 | 株式会社高岳製作所 | ３次元形状計測用光学装置 |
| US5959427A (en) * | 1998-03-04 | 1999-09-28 | Nikon Corporation | Method and apparatus for compensating for reaction forces in a stage assembly |
| JP3610569B2 (ja) * | 1999-03-23 | 2005-01-12 | 株式会社高岳製作所 | 能動共焦点撮像装置とそれを用いた三次元計測方法 |
| TW498152B (en) * | 2000-09-11 | 2002-08-11 | Olympus Optical Co | Confocal microscope |
| JP2005265640A (ja) * | 2004-03-18 | 2005-09-29 | Sharp Corp | 距離測定装置、距離測定方法、画像読取装置、画像読取方法および画像形成装置 |
| CN100452199C (zh) * | 2004-04-21 | 2009-01-14 | 松下电器产业株式会社 | 共焦光学系统开口位置检测装置、控制装置、及其检测方法、光学头装置及光信息处理装置 |
| US7704402B2 (en) * | 2004-10-27 | 2010-04-27 | Nikon Corporation | Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device |
-
2012
- 2012-02-03 JP JP2012022189A patent/JP5955574B2/ja active Active
- 2012-09-11 US US13/610,052 patent/US9041940B2/en active Active
- 2012-10-04 TW TW101136679A patent/TWI507659B/zh active
- 2012-10-24 KR KR1020120118657A patent/KR101409644B1/ko active Active
- 2012-11-26 CN CN201210487146.4A patent/CN103245302B/zh active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6496273B1 (en) * | 1999-05-05 | 2002-12-17 | Renishaw Plc | Position determining apparatus for coordinate positioning machine |
| JP2001083426A (ja) * | 1999-07-09 | 2001-03-30 | Olympus Optical Co Ltd | 共焦点顕微鏡 |
| JP2003247817A (ja) * | 2002-02-27 | 2003-09-05 | Takaoka Electric Mfg Co Ltd | リニアスキャン型共焦点表面形状計測装置 |
| EP1482273A1 (en) * | 2002-03-07 | 2004-12-01 | Takaoka Electric Mfg. Co., Ltd. | Polarization bearing detection type two-dimensional light reception timing detecting device and surface shape measuring device using it |
| US20050128896A1 (en) * | 2003-04-25 | 2005-06-16 | Ryuichi Katayama | Optical head device and optical information recording/reproducing apparatus |
| JP2006235250A (ja) * | 2005-02-25 | 2006-09-07 | Nikon Corp | 測定顕微鏡 |
| TW200724969A (en) * | 2005-12-22 | 2007-07-01 | Metal Ind Res & Dev Ct | Co-focal microscopic imaging system with adjustable light source pattern |
| TW200837385A (en) * | 2007-03-14 | 2008-09-16 | Univ Nat Yang Ming | Modulation differential confocal microscopy |
| TW200933123A (en) * | 2008-01-16 | 2009-08-01 | Univ Nat Taipei Technology | Apparatus and method for simulataneous confocal full-field micro surface profilometry |
| TW201200901A (en) * | 2010-06-18 | 2012-01-01 | Univ Nat Taiwan | 3D Optical Coherent Tomography with confocal imaging apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI622754B (zh) * | 2016-02-12 | 2018-05-01 | Ckd Corp | Three-dimensional measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013160612A (ja) | 2013-08-19 |
| KR101409644B1 (ko) | 2014-06-18 |
| TW201333420A (zh) | 2013-08-16 |
| CN103245302A (zh) | 2013-08-14 |
| CN103245302B (zh) | 2015-11-25 |
| US9041940B2 (en) | 2015-05-26 |
| US20130201488A1 (en) | 2013-08-08 |
| JP5955574B2 (ja) | 2016-07-20 |
| KR20130090313A (ko) | 2013-08-13 |
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