TWI503916B - Transport mechanism of object to be processed - Google Patents

Description

Transport mechanism of the object to be processed

The present invention relates to a transport mechanism for transporting a target object in a vacuum processing apparatus.

The priority of Japanese Patent Application No. 2011-091409, filed on Apr. 15, 2011, is hereby incorporated by reference.

For example, a large glass substrate for a plasma display or a liquid crystal display requires a heating step of heating to a desired temperature under vacuum; and a processing device such as sputtering, CVD (chemical vapor deposition), or etching. Various film forming steps of the multiple layers of the film.

Various film forming apparatuses have been provided for practical use since the beginning. In the film forming apparatus in which the substrate is formed in a horizontal state, if the substrate is increased in size, there is a problem that the size of the device is also increased. Therefore, in recent years, a film forming apparatus having a vertical type in which a substrate is substantially erected to form a film or the like has been developed.

Figure 17 is a view showing the basic configuration of a conventional film forming apparatus.

The film forming apparatus 100 of the prior art includes a substrate loading and unloading chamber 120, first to third vacuum processing chambers 200, 220, and 240 connected to one straight line, and a substrate for transporting between the atmospheric side and the vacuum processing chambers 200, 220, and 240. L/UL chamber of the bracket (Load/Unload: 140).

Further, a vacuum exhaust device 300 is attached to the L/UL chamber 140. A heating device and a vacuum exhaust device 300 are installed in the heating chamber. Film forming apparatuses 210, 230, and 250 and a vacuum exhausting apparatus 300, such as a sputtering apparatus, are attached to each of the vacuum processing chambers 200, 220, and 240, respectively.

Further, in the L/UL chamber 140 and each of the vacuum processing chambers 200, 220, and 240, a first transport path 160 is provided to transport the substrate holder from the L/UL chamber 140 to each of the vacuum processing chambers 200, The first transport path 160 of the path of 220 and 240; and the second transport path 180 which is a circuit that passes through the heating chambers from the vacuum processing chambers 200, 220, and 240 and is transported to the L/UL chamber 140.

In addition, the third vacuum processing chamber 240 at the rearmost portion of the film forming apparatus 100 includes the substrate holder from the first transport path (outgoing) 160 to the second transport path (loop) 180, and is connected to the two transport paths 160, 180 is a transfer mechanism (not shown) that moves in the lateral direction. The transfer mechanism has a mechanism for temporarily lifting the substrate holder on the first transport path (outgoing) 160 and transferring it to the second transport path (loop) 180.

The first and second transport paths 160 and 180 include a pair of tracks, and the substrate holder moves on the track by a plurality of pairs of wheels provided at the bottom thereof.

Further, a rack is provided on the lower surface of the substrate holder, and a plurality of pinion gears that are rotated by the rotational force of the motor are provided in the substrate loading and unloading chamber 120 and the first to third vacuum processing chambers 200, 220, and 240, respectively. By engaging the pinion gear with the rack, the driving force of the motor is transmitted to the substrate holder, thereby transporting the substrate holder.

The basic operation of the prior film forming apparatus 100 is explained.

When the substrate is placed on the substrate holder in the substrate loading and unloading chamber 120, the substrate holder is transported to the L/UL chamber 140, and the L/UL chamber 140 is evacuated and vacuumed, and then transported. The first transport path 160 is prepared to be in the vacuum processing chamber 200.

While the substrate holder (substrate carrier) is transported in the first transport path (outgoing) 160, the substrates to be placed are subjected to vacuum processing such as heating and film formation in the vacuum processing chambers 200, 220, and 240.

After the substrate is vacuum-processed in the vacuum processing chamber 240, the substrate holder is transferred to the second transfer path 180 which is the circuit by the transfer mechanism (not shown), and the film formation is performed in the vacuum processing chambers 200, 220, and 240, respectively. Wait for vacuum treatment. The substrate holder is unloaded in the substrate loading and unloading chamber 120 through the L/UL chamber 140 while the vacuum-treated substrate is placed.

However, in the above-described conveying mechanism in the form of a rack and pinion, the friction between the rack and the pinion causes particles (dust) due to the loss or wear of the gear, resulting in a decrease in yield. And the main reason for the shortened life of the device.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-340425

The present invention has been made in view of such a conventional situation, and an object of the present invention is to provide a transport mechanism for a target object, which is capable of suppressing generation of fine particles due to abrasion, improving yield, and prolonging the life of the device.

The conveying mechanism of the object to be processed according to the first aspect of the present invention includes: a conveying shaft that has a cylindrical sliding shaft at a lower portion and conveys the object to be processed; and a plurality of the sliding members that are in contact with the sliding shaft and that induces the conveyance a supporting member of the roller of the U-shaped groove portion of the member; and at least one of the sliding shaft and the roller may include a body containing bismuth, aluminum, oxygen, and nitrogen, and the sliding shaft and the roller At least the contact portion of the other side contains stainless steel.

In the first aspect, the body of the object to be processed according to the second aspect of the present invention may further include at least one of barium, calcium, magnesium, lithium, and sodium.

In the first or second aspect, the U-shaped groove portion of the support member may have a radius of curvature R of 15 to 40 mm in the first or second aspect.

In the transport mechanism of the object to be processed according to the fourth aspect of the present invention, in any of the first to third aspects, the transporting speed of the transport member by the support member may be from 1 to 3,000. Within the range of mm/sec.

In the transport mechanism of the fifth object to be processed according to the present invention, in any of the first to fourth aspects, the transporting acceleration of the transport member by the support member may be 1200 mm/acceleration. Sec ² or less; -650 mm/sec ² or less when decelerating.

In the film forming apparatus according to the sixth aspect of the invention, in the first or second aspect, the conveying member may vertically convey the object to be processed.

The conveying mechanism of the aspect of the present invention can suppress the generation of particles caused by abrasion without depending on the use environment under reduced pressure or atmospheric pressure.

According to the conveying mechanism of the object to be processed according to the aspect of the invention, generation of particles due to abrasion can be suppressed. Further, it is possible to provide a transfer mechanism of a target object which can improve the yield and further increase the life of the device.

Hereinafter, the conveying mechanism of the object to be processed according to the embodiment of the present invention will be described.

Fig. 1 is a view schematically showing an example of a configuration of a film forming apparatus including a conveying mechanism of a target object according to an embodiment of the present invention.

The film forming apparatus 1 includes two L/UL chambers (Load/Unload) 10A and 10B, a rack storage chamber 60, a heating chamber 20, a first film forming chamber 30, and a second unit which are disposed in this order. Film forming chamber 40. Further, a substrate loading and unloading chamber 50 is disposed in front of the L/UL chambers 10A and 10B.

The chambers are connected via a valve (omitted from the drawing). Further, in the L/UL chambers 10A and 10B, the heating chamber 20, and the first film forming chamber 30, vacuum exhausting devices 12, 22, and 32 for respectively evacuating the inside of the respective L/UL chambers 10A and 10B are separately provided. .

The substrate loading and unloading chamber 50 is attached to the holder 70 from the substrate 2 (subject to be processed) that is transported from the outside. The holder 70 causes the substrate 2 to be substantially upright and fixedly held, and thereafter, the direction of rotation to the directions of the L/UL chambers 10A and 10B is reversed by the turning mechanism (omitted from the drawing), and carried into the L/UL chambers 10A and 10B in parallel.

Further, as will be described later, in the substrate loading and unloading chamber 50, since the holder 70 on which the vacuum-treated substrate 2 is placed is transported from the L/UL chambers 10A and 10B, the substrate 2 is unloaded from the holder 70. The holder 70 after the substrate 2 is unloaded is used for the conveyance of the next substrate 2.

The L/UL chambers 10A and 10B are loaded and unloaded by the substrate loading and unloading chamber 50 and the holder 70 in a state where the atmospheric pressure is released.

The L/UL chambers 10A and 10B are respectively provided with vacuum exhausting devices 12A and 12B for evacuating the inside thereof.

In general, in the L/UL chambers 10A and 10B, in addition to the loading and unloading of the holder 70, vacuum evacuation and atmospheric pressure are also performed.

In the above-described operation time of the L/UL chambers 10A and 10B, the processing time required for vacuum processing (heating, film formation) in each of the vacuum processing chambers (heating chamber 20 and film forming chambers 30, 40) is greatly long. In other words, when the L/UL chambers 10A and 10B are singular, the loading of the holder 70 into the vacuum processing chamber takes time, and a blank time in which vacuum processing cannot be performed occurs in each vacuum processing chamber, resulting in a problem of reduced production efficiency.

Therefore, in the film forming apparatus, a plurality of (two in the drawing) L/UL chambers 10A and 10B, a holder 70 that is transported to the heating chamber 20 and the film forming chambers 30 and 40, and a temporary storage and transportation are provided. The rack storage compartment 60 of the bracket 70 of the L/UL chambers 10A, 10B. Thereby, the production efficiency can be improved.

The heating device 23 is provided in the heating chamber 20, and the temperature is raised to a temperature suitable for film formation of the substrate 2.

In the heating chamber 20, a vacuum exhausting device 22 for evacuating the inside thereof is provided.

In the film forming chambers 30 and 40, the substrate 2 is subjected to a film forming process by the film forming apparatuses 33 and 43.

The film forming apparatuses 33 and 43 are not particularly limited, and examples thereof include a cathode for sputtering and a parallel plate electrode for CVD.

In the film forming apparatus 1 as described above, the substrate 2 as the object to be processed is subjected to a treatment such as heating or film formation while being conveyed by the conveying member.

The transport member for transporting the substrate 2 includes a holder 70 (carrier) for holding the substrate 2 and a line 80 for transporting the holder 70 holding the substrate 2. Moreover, the conveyance member is the vertical conveyance board|substrate 2.

Here, the purpose of vertically arranging the substrate 2 is mainly because the substrate itself is enlarged and thinned with the spread of large-sized liquid crystal displays and plasma displays, and the flat area of the film forming apparatus itself is flatned. With the increase in size, the vertical type is used to save space. Further, since it is placed horizontally, bending due to the self-weight of the substrate 2 occurs, and it is difficult to maintain flatness, and it is difficult to form a film uniformly.

Further, in the film forming apparatus 1, the first film forming chamber 30 has a line 80 including an outward path and a circuit, and the line 80 is entirely penetrated through the L/UL chambers 10A and 10B, the heating chamber 20, and The film forming chambers 30 and 40 are disposed. The line 80 includes a first line 81 and a second line 82.

Further, the film forming apparatus 1 includes a moving device (not shown) that moves the holder 70 from the first line 81 to the second line 82 (circuit) in the lateral direction with respect to the line. The mobile device has a mechanism for temporarily lifting the bracket 70 on the first line 81 and transferring it to the second line 82.

FIG. 2 is a perspective view showing a schematic configuration of the bracket 70.

As shown in FIG. 2, the bracket 70 is provided with a frame-shaped housing 71 including aluminum or the like; a magnet 72 provided along the upper side of the housing 71; and is disposed along the lower side of the housing 71. a cylindrical sliding shaft 73; a substrate holder 74 for receiving the load of the substrate 2 and maintaining the level of the substrate 2; a jig 75 for holding the substrate 2 on the holder 70; and a non-form for covering the periphery of the substrate 2. A mask 76 of the membrane area.

The line 80 includes a lower support mechanism 84 configured to be capable of supporting the support 70 while supporting the support 70, and an upper support mechanism 88 configured to support the upper portion of the support 70 without contact. The bracket 70 is configured to be movable in a state where the lower support mechanism 84 and the upper support mechanism 88 are kept substantially vertical.

3 and 4 are perspective views showing the configuration of the lower support mechanism 84.

As shown in FIG. 3, the lower support mechanism 84 is provided with the motor 85 and the roller 86. As shown in FIG. 4, the roller 86 is provided with the U-shaped groove part 86a of the induction bracket 70. The configuration is driven by the motor 85 to rotate the roller 86 and to horizontally move the carriage 70 on the roller 86. Specifically, the slide shaft 73 that is disposed at the lower portion of the bracket 70 is engaged with the groove portion 86a of the roller 86, so that the bracket 70 can be horizontally moved.

In the embodiment of the present invention, the slide shaft 73 and the roller 86 constitute a conveying mechanism. By using the shaft and roller method, the amount of wear can be greatly reduced compared to the rack and pinion type conveying mechanism.

Further, in the embodiment of the present invention, since the groove portion 86a of the roller 86 has a U-shape, the conveyance can be smoothly performed, and the abrasion of the slide shaft 73 and the roller 86 can be greatly suppressed, and the dust caused by abrasion can be reduced. Produced.

In addition, FIG. 5 is an explanatory view showing the configuration of the upper support mechanism 88.

As shown in FIG. 5, the upper support mechanism 88 is provided with a plurality of magnets 89. Further, a magnet 72 is attached to the upper side of the holder 70, and the magnet 89 and the magnet 72 are opposed to each other in the vertical direction, and the magnets 89 and 72 are disposed to be attracted to each other.

By adopting such a configuration, the magnets 89, 72 can be attracted to each other, and the holder 70 can be held in a vertical state. In other words, by holding the substrate 2 vertically, it is possible to suppress an increase in the installation area of the film forming apparatus 1 as the size of the substrate 2 is increased, and it is possible to avoid the influence of the bending of the large substrate 2.

Further, in the conveying mechanism of the object to be processed according to the embodiment of the present invention, at least one of the sliding shaft 73 of the carrier 70 or the roller 86 of the lower supporting mechanism 84 includes bismuth (Si), aluminum (Al), The main body of oxygen (O) and nitrogen (N), and at least the contact portion of the other of the sliding shaft 73 or the roller 86 contains stainless steel (SUS).

By forming the contact portion of the slide shaft 73 or the roller 86 with the material as described above, abrasion of the slide shaft 73 and the roller 86 can be suppressed, and generation of dust due to abrasion can be reduced. Thereby, the yield can be improved, and the life of the device can be extended.

The main body including bismuth (Si), aluminum (Al), oxygen (O), and nitrogen (N) is not particularly limited, but is preferably, for example, mechanical strength and thermal shock resistance in a high-temperature environment. SiAlON with excellent wear resistance.

In the conveying mechanism of the object to be processed according to the embodiment of the present invention, it is preferable that the main body further contains at least one of barium, calcium, magnesium, lithium, and sodium.

Further, by using a material containing the element as described above, abrasion of the sliding shaft 73 and the roller 86 can be greatly suppressed, and generation of dust due to abrasion can be reduced.

The U-shaped groove portion of the roller 86 preferably has a radius of curvature R in the range of 20 to 34 mm.

As shown in Fig. 16 which will be described later, the smaller the radius of curvature R with respect to the groove portion, the larger the sliding coefficient, and the lower the internal shear stress tends to be.

In order to reduce the abrasion caused by the sliding, the radius of curvature R is large (the shallow portion is shallow).

On the other hand, in order to prevent cutting due to rotational fatigue, the radius of curvature R is small (ditch portion depth). Considering the sliding coefficient and the internal shear stress, by setting the radius of curvature of the groove portion to a specific range, both the cutting caused by the rotational fatigue and the abrasion caused by the sliding can be suppressed. For example, it is most preferable to set the radius of curvature R of the groove portion to 20 mm ≦ R ≦ 34 mm.

Further, in the transport mechanism of the object to be processed according to the embodiment of the present invention, the transport speed [mm/sec] for moving the holder 70 (transport member) is optimal even under conditions of decompression or atmospheric pressure. It is in the range of 1~3000. Moreover, when the conveyance speed [mm/sec ² ] when the bracket 70 (transport member) is moved is more than 1200 when the bracket 70 is accelerated, the conveyance deviation is not preferable. On the other hand, if the bracket 70 is decelerated to exceed 650, a conveyance deviation may occur, which is not preferable. However, the values are based on the measured data of the case where the weight of the aforementioned bracket 70 is set to 240 kg.

In addition, the film forming apparatus 1 including the transport mechanism of the object to be processed according to the embodiment of the present invention is the substrate 2 (the object to be processed) by the holder 70 (transport member) that moves along the first line 81 (outward path). The L/UL chambers 10A and 10B are transported to the film forming chambers 30 and 40 through the rack storage chamber 60 and the heating chamber 20, and after the film forming chambers 30 and 40 are formed, the substrate 2 is placed and transported. The member is moved inside the film forming chambers 30 and 40, and moves from the first line 81 (outward path) to the second line 82 (loop) by the moving member, and along the second line 82, from the film forming chamber 30, The inside of 40 is transported to the L/UL chambers 10A and 10B through the heating chamber 20 and the rack storage chamber 60.

At this time, in the conveying mechanism according to the embodiment of the present invention, the friction between the sliding shaft and the roller can be reduced by defining the material of the contact portion between the sliding shaft and the roller. Thereby, the generation of dust due to abrasion can be suppressed. As a result, in the conveying mechanism of the object to be processed according to the embodiment of the present invention, the yield can be improved, and the life of the device can be extended.

(Experimental example)

Hereinafter, an experimental example performed to confirm the effects of the embodiment of the present invention will be described.

(evaluation of the transfer method)

First, in the transport path running in the atmosphere, the shaft and roll transfer path (Experimental Example 1) and the rack and pinion transfer path (Experimental Examples 2 and 3) were measured and evaluated for wear. The difference.

For racks, pinions, shafts, and rollers, SUS440C is used for either party. Further, the shape of the groove portion of the roller is U-shaped.

The racks with a load of 260 kg were loaded and operated at a speed of 0.65 m/sec in a transport path of 12 m in length, and the average amount of wear per roll was measured.

Further, in the conveyance path of the rack and pinion type, the case where the operation of the rack and the pinion is completely synchronized (Experimental Example 2) and the case where it is completely out of synchronization (Experimental Example 3) are performed.

Fig. 6 shows the relationship between the number of round trips of the transport path and the average amount of wear powder per roller in Experimental Example 1 to Experimental Example 3. Further, the amount of abrasion powder was measured on a plate placed under a roller and measured by an electronic balance.

As is apparent from Fig. 6, in Experimental Example 1 in which the shaft and the roller were transported, the amount of wear was significantly reduced as compared with Experimental Examples 2 and 3 in which the rack and the pinion were transported.

(Evaluation of roll material and groove shape)

In the following experiment, the material of the roll and the shape of the groove were changed in the transfer path in the form of a shaft and a roll, and an operation test was carried out in the atmosphere to measure and evaluate the difference in the amount of wear. Moreover, the materials of the shaft are all unified into SUS440C.

The rack with a load of 260 kg was loaded and operated at a speed of 0.65 m/sec in a transport path of 12 m in length, and the average total amount of powder consumed per two rolls was measured.

(Experimental Example 4)

The material of the roll was set to Al ₂ O ₃ .

(Experimental Example 5)

The material of the roll was SUS440C (surface roughness Ra: 1.6 μm).

(Experimental Example 6)

The material of the roll was SUS440C (surface roughness Ra<0.4 μm).

(Experimental Example 7)

The material of the roll was set to USR-1 using a ceramic material. Here, "USR-1" is a host containing bismuth (Si), aluminum (Al), oxygen (O), and nitrogen (N), and further contains an element M (germanium, calcium, magnesium, lithium, and sodium). Abbreviation for ceramic materials made of at least one of them. The appropriate combination [mol%] of the ceramic-based material is in the range of 0 < Al < 33, 0 < O < 33, 25 < N < 60, 0 < (element M) < 7, and the balance is Si. Moreover, as a suitable physical property value of the ceramic-based material, three-point bending strength [MPa]: >850, fracture toughness value [MPa‧m ^1/2 ]: >5, Young's modulus [GPa]: >290 And bulk density [g‧cm ^-3 ]: >3.2.

(Experimental Example 8)

The material of the roller was set to SUS440C. Further, the shape of the groove portion is set to a V shape.

Fig. 7 shows the relationship between the number of round trips of the transport path and the total amount of total wear powder per two rolls in Experimental Example 4 to Experimental Example 8.

As is clear from Fig. 7, the rolls of Experimental Examples 5 and 6 containing SUS-based materials were more resistant to abrasion than the rolls of Experimental Example 4 containing Al ₂ O ₃ . Further, in Experimental Example 6 in which the surface roughness Ra was small, the amount of abrasion was small as compared with Experimental Example 5 in which the surface roughness Ra was large.

Further, it was found that the roll of the experimental example 7 containing USR-1 can further reduce the amount of abrasion more than the roll containing the SUS-based material.

Further, in the experimental example 8 in which the shape of the groove portion of the roller was set to be V-shaped, the abrasion was larger than that in the experimental examples 5 and 6 in which the U-shape was set. It is considered that this is a difference in the peripheral speed in the vicinity of the groove portion of the V shape. As a result, it has been found that the groove can be smoothly conveyed by setting the groove portion into a U shape.

(Evaluation of Sialon)

In the following experiments, the transfer path in the form of a shaft & roll was carried out in various conditions including a roll of SiAlON, and the difference in the amount of wear was measured and evaluated.

The rack with a load of 260 kg was loaded and operated at a speed of 0.65 m/sec in a transport path of 12 m in length, and the average total amount of powder consumed per two rolls was measured.

(Experimental Example 9)

Run experiments in vacuum.

(Experimental Example 10)

Run experiments in the atmosphere.

(Experimental Example 11)

The experiment was carried out by heating to 120 ° C in a vacuum.

(Experimental Example 12)

The test was run at a high speed of 2 m/sec in a vacuum.

(Experimental Example 13)

The running experiment was carried out in a vacuum using a roll containing a SUS-based material.

The relationship between the number of round trips and the total amount of total abrasion powder per two rolls in Experimental Example 9 to Experimental Example 13 is shown in Figs. 8 to 12, respectively.

Fig. 8 shows a case where an operation experiment is performed in a vacuum, and Fig. 9 shows a case where an operation test is performed in the atmosphere, Fig. 10 shows a case where an operation experiment is performed in a heating vacuum, and Fig. 11 shows a case where a high speed is performed in a vacuum. In the case of running an experiment, Fig. 12 shows a case where an operation experiment was performed in a vacuum.

Comparing Fig. 8 with Fig. 12, it is understood that the experimental example 9 in which sialon is used as the material of the roller can significantly reduce the amount of abrasion during vacuum transportation as compared with the experimental example 13 using a roller containing a SUS-based material.

Further, as is apparent from FIGS. 9 to 11, the amount of wear can be greatly reduced in any of the atmospheric transfer, the vacuum heat transfer, and the vacuum high-speed transfer by using the material of the roll as the material of the roll. In other words, it has been confirmed that by using the material of the roll as the roll, the use space can be any one of the reduced pressure and the atmospheric pressure (that is, the reduced pressure atmosphere or the atmospheric pressure atmosphere), and the friction between the sliding shaft and the roller can be suppressed. low.

(Evaluation of combined operation of vacuum transfer and vacuum heat transfer)

In the following experiments, the combination of the material of the shaft and the roller was changed, and the running experiment was carried out in a vacuum and in the atmosphere, and the difference in the amount of abrasion was measured and evaluated.

A bracket that has a load of 260 kg is loaded and operated at a speed of 0.65 m/sec in a transport path of 120 m in length. At this time, a vacuum transfer of 1.4 × 10 ^-2 Pa was performed for 600,000 cycles, and 200,000 cycles of vacuum heating at 120 ° C were carried out, and the average amount of total abrasion powder per two rolls was measured.

(Experimental Example 14)

Set the axis material to SUS and set the material of the roller to Sialon.

(Experimental Example 15)

Set the shaft material to SUS and set the material of the roller to SUS.

Fig. 13 shows the relationship between the number of round trips of the transport path and the average amount of wear powder per two rolls.

As can be seen from Fig. 13, in comparison with the experimental example 15 in which the material of the roll was SUS, the material of the roll was set to be a combination of the vacuum transfer and the vacuum heat transfer of the test piece 14 of Sialon, and the wear was greatly reduced. the amount.

(Evaluation of shaft material and roller material)

In the following experiments, the combination of the material of the shaft and the roller was variously changed, and an operation experiment was conducted in the atmosphere to measure and evaluate the difference in the amount of wear.

The rack with a load of 260 kg was loaded and operated at a speed of 0.65 m/sec in a transport path of 12 m in length, and the average total amount of powder consumed per two rolls was measured.

(Experimental Example 16)

The shaft material was SUS440C, and the material of the roller was SUS440C (surface roughness Ra: 1.6 μm).

(Experimental Example 17)

The shaft material was SUS440C, and the material of the roller was SUS440C (surface roughness Ra: 0.2 μm).

(Experimental Example 18)

Set the shaft material to SUS440C and the material of the roller to USR-1.

(Experimental Example 19)

Set the shaft material to SUS304C and set the material of the roller to USR-1.

Fig. 14 shows the relationship between the number of round trips of the transport path and the total amount of total wear powder per two rolls in Experimental Example 16 to Experimental Example 19.

As is clear from Fig. 14, the experimental examples 16 and 17 in which the SUS-based material is included in both the shaft and the roller, and the roller of the experimental examples 18 and 19 in which one (here, the roller) is USR-1 can greatly reduce the wear. the amount. In addition, it is considered that the same effect can be obtained by setting the roll to a SUS-based material and setting the axis to USR-1.

(Evaluation of combined operation of vacuum transfer and atmospheric transfer)

In the following experiments, the combination of the material of the shaft and the roller was changed, and the running experiment was carried out in a vacuum and in the atmosphere, and the difference in the amount of wear was measured and evaluated.

The bracket with a load of 260 kg was loaded and operated at a speed of 0.65 m/sec in a transport path of 12 m in length. At this time, a vacuum transfer of 1.4 × 10 ^-2 Pa was performed for 600,000 cycles, a vacuum heating of 120 ° C was carried out for 100,000 cycles, an atmospheric transfer of 200,000 cycles, and a vacuum high-speed transfer of 200,000 cycles, and the average of each of the two rolls was measured ( The total amount of wear powder equivalent to 2 small chambers.

(Experimental Example 20)

Set the shaft material to SUS440C and the material of the roller to SUS440C.

(Experimental Example 21)

Set the shaft material to SUS440C and the material of the roller to USR-1.

Fig. 15 shows the relationship between the number of round trips of the transport path and the total amount of total wear powder per two rolls in Experimental Example 20 to Experimental Example 21.

As is clear from Fig. 15, the experimental example 20 of the SUS-based material was used for both the shaft and the roller, and one (here, the roller) was used as the roller of the experimental example 21 of the USR-1, and was transported by vacuum transfer or vacuum heating. In the combined transfer of atmospheric transfer and vacuum high-speed transfer, the amount of wear can be greatly reduced.

(Evaluation of the shape of the groove of the roll)

The relationship between the radius of curvature of the groove portion of the roller and the sliding coefficient and internal shear stress.

(Experimental Example 22)

The amount of slip and the internal shear stress were measured for the rolls having the grooves of the radius of curvature R = ∞ (plane), R = 34 mm, R = 28 mm, and R = 20 mm, respectively.

Fig. 16 shows the relationship between the radius of curvature R of the groove portion and the sliding coefficient and the internal shear stress.

As can be seen from Fig. 16, the smaller the radius of curvature R of the groove portion is, the larger the sliding coefficient is. On the other hand, the larger the radius of curvature R of the groove portion, the smaller the internal shear stress.

In order to reduce the abrasion caused by the sliding, the radius of curvature R is large (the shallow portion is shallow). On the other hand, in order to prevent cutting due to rotational fatigue, the radius of curvature R is small (ditch portion depth). Considering the sliding coefficient and the internal shear stress, by setting the radius of curvature of the groove portion to a specific range, both the cutting and the sliding caused by the rotational fatigue can be suppressed. For example, it is most desirable to set the radius of curvature R to 20 mm ≦ R ≦ 34 mm.

In the embodiment of the present invention, the conveying mechanism includes: a conveying member (a holder) having a cylindrical sliding shaft at a lower portion and conveying the object to be processed; and a “supporting member including a plurality of and the aforementioned a roller that contacts the U-shaped groove portion of the conveying member is provided in contact with the sliding shaft; and by using a material that defines a contact portion between the sliding shaft and the roller, even if the space used is under reduced pressure and atmospheric pressure (ie, Any of the reduced pressure atmosphere or the atmospheric pressure atmosphere can reduce the friction between the sliding shaft and the roller. As a result, the conveying mechanism according to the embodiment of the present invention can suppress the generation of fine particles caused by abrasion without depending on the use environment under reduced pressure or atmospheric pressure.

In the above, the transport mechanism of the object to be processed according to the embodiment of the present invention has been described, but the present invention is not limited thereto, and may be appropriately modified without departing from the scope of the invention.

[Industrial availability]

The present invention can be widely applied to a conveying mechanism of a target object.

1. . . Film forming device

2. . . Substrate (subject to be processed)

10A. . . L/UL room

10B. . . L/UL room

12A. . . Vacuum exhaust

12B. . . Vacuum exhaust

20. . . Heating chamber

twenty two. . . Vacuum exhaust

twenty three. . . heating equipment

30. . . Film forming chamber

32. . . Vacuum exhaust

33. . . Film forming device

40. . . Film forming chamber

43. . . Film forming device

50. . . Substrate loading and unloading mechanism

60. . . Bracket conveying member

70. . . support

71. . . Framed frame

72. . . magnet

73. . . Sliding shaft

74. . . Substrate holder

75. . . Fixture

76. . . Mask

80. . . line

81. . . First line (detour)

82. . . Second line (loop)

84. . . Lower support mechanism

85. . . motor

86. . . Roll

86a. . . Ditch

88. . . Upper support mechanism

89. . . magnet

100. . . Film forming device

120. . . Substrate loading and unloading room

140. . . L/UL room

160. . . First transport path

180. . . Second transport path

200. . . First vacuum processing room

210. . . Film forming device

220. . . Second vacuum processing room

230. . . Film forming device

240. . . Third vacuum processing room

250. . . Film forming device

300. . . Vacuum exhaust

Fig. 1 is a view schematically showing an example of a configuration of a film forming apparatus including a conveying mechanism of a target object according to an embodiment of the present invention.

Fig. 2 is a view showing an example of a substrate holder on which a substrate is mounted.

Fig. 3 is a view showing an example of a support mechanism for the lower portion of the substrate holder.

Fig. 4 is a view showing an example of a support mechanism for the lower portion of the substrate holder.

Fig. 5 is a view showing an example of a support mechanism for the upper portion of the substrate holder.

Fig. 6 is a view showing the relationship between the number of round trips of the transport path and the amount of wear powder in the case where the transport mode is changed.

Fig. 7 is a view showing the relationship between the number of round trips of the transport path and the amount of wear powder in the case of changing the transport mode.

Fig. 8 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case where the running experiment is performed in a vacuum.

Fig. 9 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case where the running experiment is performed in the atmosphere.

Fig. 10 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case where the running experiment is performed in a heating vacuum.

Fig. 11 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case of performing a high-speed running experiment in a vacuum.

Fig. 12 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case where the running experiment is performed in a vacuum.

Fig. 13 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case of performing a running experiment by a combination of vacuum transfer and vacuum heat transfer.

Fig. 14 is a view showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case where the combination of the material of the shaft and the material of the roller is variously changed.

Fig. 15 is a graph showing the relationship between the number of round trips of the transport path and the amount of abrasion powder in the case of performing an operation test by a combination of vacuum transfer and atmospheric transfer.

Fig. 16 is a view showing the relationship between the radius of curvature R, the sliding coefficient, and the internal shear stress of the groove portion of the roller.

Fig. 17 is a view schematically showing a configuration example of a film forming apparatus of a conventional conveying mechanism including a target object.

71. . . Framed frame

73. . . Sliding shaft

84. . . Lower support mechanism

85. . . motor

86. . . Roll

86a. . . Ditch

Claims (6)

A transport mechanism for a target object includes: a transport member that transports a target body with a cylindrical sliding shaft at a lower portion; and a support member that includes a guide member that is in contact with the slide shaft and that induces the transport member a plurality of rollers of the U-shaped groove portion; and at least one of the sliding shaft and the roller includes a body including bismuth, aluminum, oxygen, and nitrogen, and at least the other of the sliding shaft and the roller The contact portion comprises stainless steel; and the aforementioned main system further comprises at least one of barium, calcium, magnesium, lithium, and sodium. The conveying mechanism of the object to be processed according to claim 1, wherein the U-shaped groove portion of the support member has a radius of curvature R of 15 to 40 mm. A transport mechanism for a target object includes: a transport member that transports a target body with a cylindrical sliding shaft at a lower portion; and a support member that includes a guide member that is in contact with the slide shaft and that induces the transport member a plurality of rollers of the U-shaped groove portion; and at least one of the sliding shaft and the roller includes a body including bismuth, aluminum, oxygen, and nitrogen, and at least the other of the sliding shaft and the roller The contact portion comprises stainless steel; wherein the U-shaped groove portion of the aforementioned support member has a radius of curvature R Within the range of 15~40mm. The conveying mechanism of the object to be processed according to claim 1 or 3, wherein the conveying speed at which the conveying member is moved by the support member is in the range of 1 to 3000 mm/sec. The transport mechanism of the object to be processed according to claim 1 or 3, wherein the transport acceleration by moving the transport member by the support member is 1200 mm/sec ² or less, and the deceleration is -650 mm/sec ² or less. The conveying mechanism of the object to be processed according to claim 1 or 3, wherein the conveying member vertically conveys the object to be processed.