TWI497626B - 真空處理裝置 - Google Patents

真空處理裝置 Download PDF

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Publication number
TWI497626B
TWI497626B TW098108551A TW98108551A TWI497626B TW I497626 B TWI497626 B TW I497626B TW 098108551 A TW098108551 A TW 098108551A TW 98108551 A TW98108551 A TW 98108551A TW I497626 B TWI497626 B TW I497626B
Authority
TW
Taiwan
Prior art keywords
vacuum processing
unit
upper cover
cover
processing apparatus
Prior art date
Application number
TW098108551A
Other languages
English (en)
Chinese (zh)
Other versions
TW200941624A (en
Inventor
Saeng Hyun Cho
Sung Il Ahn
Original Assignee
Wonik Ips Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wonik Ips Co Ltd filed Critical Wonik Ips Co Ltd
Publication of TW200941624A publication Critical patent/TW200941624A/zh
Application granted granted Critical
Publication of TWI497626B publication Critical patent/TWI497626B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
TW098108551A 2008-03-17 2009-03-17 真空處理裝置 TWI497626B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080024320A KR100970201B1 (ko) 2008-03-17 2008-03-17 진공처리장치

Publications (2)

Publication Number Publication Date
TW200941624A TW200941624A (en) 2009-10-01
TWI497626B true TWI497626B (zh) 2015-08-21

Family

ID=41091384

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098108551A TWI497626B (zh) 2008-03-17 2009-03-17 真空處理裝置

Country Status (4)

Country Link
KR (1) KR100970201B1 (ko)
CN (1) CN101978307B (ko)
TW (1) TWI497626B (ko)
WO (1) WO2009116780A2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110067939A (ko) * 2009-12-15 2011-06-22 주식회사 테스 로드락 챔버
KR101237772B1 (ko) * 2010-11-30 2013-02-28 주식회사 케이씨텍 샤워헤드를 구비하는 직립방식 증착장치
KR20160062626A (ko) * 2014-11-25 2016-06-02 (주)에스티아이 이중 배기 구조의 프로세스챔버와 이를 포함하는 기판제조장치 및 기판제조방법
CN108987236A (zh) * 2018-07-16 2018-12-11 珠海安普特科技有限公司 一种基于等离子蚀刻机气动布局的反应室腔体
CN110682204B (zh) * 2019-11-20 2024-05-17 上海超硅半导体股份有限公司 一种卸载装置及化学机械抛光辅助设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050183827A1 (en) * 2004-02-24 2005-08-25 Applied Materials, Inc. Showerhead mounting to accommodate thermal expansion

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882411A (en) 1996-10-21 1999-03-16 Applied Materials, Inc. Faceplate thermal choke in a CVD plasma reactor
KR100965758B1 (ko) * 2003-05-22 2010-06-24 주성엔지니어링(주) 액정표시장치용 플라즈마 강화 화학기상증착 장치의샤워헤드 어셈블리
KR100661744B1 (ko) * 2004-12-23 2006-12-27 주식회사 에이디피엔지니어링 플라즈마 처리장치
KR100737716B1 (ko) * 2005-05-26 2007-07-10 주식회사 에이디피엔지니어링 플라즈마 처리장치
KR20070020903A (ko) * 2005-08-17 2007-02-22 삼성전자주식회사 반도체 제조 장치
US7845891B2 (en) * 2006-01-13 2010-12-07 Applied Materials, Inc. Decoupled chamber body

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050183827A1 (en) * 2004-02-24 2005-08-25 Applied Materials, Inc. Showerhead mounting to accommodate thermal expansion

Also Published As

Publication number Publication date
KR20090099205A (ko) 2009-09-22
KR100970201B1 (ko) 2010-07-14
CN101978307B (zh) 2015-06-03
CN101978307A (zh) 2011-02-16
WO2009116780A2 (ko) 2009-09-24
TW200941624A (en) 2009-10-01
WO2009116780A3 (ko) 2009-12-30

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MM4A Annulment or lapse of patent due to non-payment of fees