TWI489117B - 供電流流動用之撓性連接的不連續之偵測裝置與方法 - Google Patents

供電流流動用之撓性連接的不連續之偵測裝置與方法 Download PDF

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Publication number
TWI489117B
TWI489117B TW099113521A TW99113521A TWI489117B TW I489117 B TWI489117 B TW I489117B TW 099113521 A TW099113521 A TW 099113521A TW 99113521 A TW99113521 A TW 99113521A TW I489117 B TWI489117 B TW I489117B
Authority
TW
Taiwan
Prior art keywords
flexible connector
detection circuit
current
current flow
coil
Prior art date
Application number
TW099113521A
Other languages
English (en)
Chinese (zh)
Other versions
TW201126179A (en
Inventor
Seyed Jafar Jafarian-Tehrani
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of TW201126179A publication Critical patent/TW201126179A/zh
Application granted granted Critical
Publication of TWI489117B publication Critical patent/TWI489117B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52—Testing for short-circuits, leakage current or ground faults
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/54—Testing for continuity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW099113521A 2009-04-28 2010-04-28 供電流流動用之撓性連接的不連續之偵測裝置與方法 TWI489117B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/431,593 US8466697B2 (en) 2009-04-28 2009-04-28 Arrangements for detecting discontinuity of flexible connections for current flow and methods thereof

Publications (2)

Publication Number Publication Date
TW201126179A TW201126179A (en) 2011-08-01
TWI489117B true TWI489117B (zh) 2015-06-21

Family

ID=42991565

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099113521A TWI489117B (zh) 2009-04-28 2010-04-28 供電流流動用之撓性連接的不連續之偵測裝置與方法

Country Status (7)

Country Link
US (1) US8466697B2 (ko)
JP (1) JP5781064B2 (ko)
KR (1) KR101617231B1 (ko)
CN (2) CN102415221B (ko)
SG (1) SG175164A1 (ko)
TW (1) TWI489117B (ko)
WO (1) WO2010129229A2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102018733B1 (ko) 2013-06-13 2019-09-06 삼성디스플레이 주식회사 플렉서블 표시장치
CN105116271B (zh) * 2015-08-07 2019-04-26 深圳一电航空技术有限公司 桨叶检测装置及方法、桨叶组件、飞行器及其控制方法
KR102417178B1 (ko) * 2015-09-03 2022-07-05 삼성전자주식회사 마이크로파 탐침, 그 탐침을 구비한 플라즈마 모니터링 시스템, 및 그 시스템을 이용한 반도체 소자 제조방법
WO2019130159A1 (ja) * 2017-12-27 2019-07-04 株式会社半導体エネルギー研究所 薄膜製造装置、およびニューラルネットワークを用いた薄膜製造装置
CN115825529B (zh) * 2022-12-25 2023-11-17 北京屹唐半导体科技股份有限公司 射频探头、射频匹配器、射频电源及射频测量仪

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6221221B1 (en) * 1998-11-16 2001-04-24 Applied Materials, Inc. Apparatus for providing RF return current path control in a semiconductor wafer processing system
US20080116876A1 (en) * 2006-11-20 2008-05-22 Applied Materials, Inc. Plasma processing chamber with ground member integrity indicator and method for using the same
US20080179005A1 (en) * 2004-02-20 2008-07-31 Tokyo Electron Limited Plasma processing apparatus and control method thereof

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
CA2100135C (en) * 1992-07-10 1997-11-04 Makoto Kawakami Dc current sensor
JPH09257861A (ja) * 1996-03-21 1997-10-03 Toshiba Corp 心線損傷検出装置
JPH1079350A (ja) 1996-09-04 1998-03-24 Kokusai Electric Co Ltd プラズマ処理装置
JP2002202328A (ja) * 2000-12-28 2002-07-19 Japan System Engineering Kk 磁界型電流センサ
US7271580B1 (en) * 2001-10-26 2007-09-18 Schweitzer Engineering Laboratories, Inc. Apparatus and method for programmable trip settings in a faulted circuit indicator
JP3773189B2 (ja) * 2002-04-24 2006-05-10 独立行政法人科学技術振興機構 窓型プローブ、プラズマ監視装置、及び、プラズマ処理装置
KR100483355B1 (ko) 2002-11-14 2005-04-15 학교법인 성균관대학 자장강화된 외장형 선형 안테나를 구비하는 대면적 처리용유도 결합 플라즈마 소오스
US6876205B2 (en) * 2003-06-06 2005-04-05 Advanced Energy Industries, Inc. Stored energy arc detection and arc reduction circuit
US7145345B2 (en) * 2003-12-23 2006-12-05 General Electric Company Current transformers for partial discharge detection on aircraft cables and wires
US7972470B2 (en) * 2007-05-03 2011-07-05 Applied Materials, Inc. Asymmetric grounding of rectangular susceptor
US8343305B2 (en) 2007-09-04 2013-01-01 Lam Research Corporation Method and apparatus for diagnosing status of parts in real time in plasma processing equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6221221B1 (en) * 1998-11-16 2001-04-24 Applied Materials, Inc. Apparatus for providing RF return current path control in a semiconductor wafer processing system
US20080179005A1 (en) * 2004-02-20 2008-07-31 Tokyo Electron Limited Plasma processing apparatus and control method thereof
US20080116876A1 (en) * 2006-11-20 2008-05-22 Applied Materials, Inc. Plasma processing chamber with ground member integrity indicator and method for using the same

Also Published As

Publication number Publication date
CN104360211B (zh) 2017-11-24
KR101617231B1 (ko) 2016-05-02
US20100271040A1 (en) 2010-10-28
US8466697B2 (en) 2013-06-18
TW201126179A (en) 2011-08-01
CN102415221B (zh) 2014-11-19
KR20120020104A (ko) 2012-03-07
CN104360211A (zh) 2015-02-18
JP2012525683A (ja) 2012-10-22
SG175164A1 (en) 2011-11-28
JP5781064B2 (ja) 2015-09-16
WO2010129229A2 (en) 2010-11-11
WO2010129229A3 (en) 2011-02-03
CN102415221A (zh) 2012-04-11

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