TWI465280B - Separation method and separation device - Google Patents
Separation method and separation device Download PDFInfo
- Publication number
- TWI465280B TWI465280B TW101106790A TW101106790A TWI465280B TW I465280 B TWI465280 B TW I465280B TW 101106790 A TW101106790 A TW 101106790A TW 101106790 A TW101106790 A TW 101106790A TW I465280 B TWI465280 B TW I465280B
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid
- mixed acid
- distillation
- hydrogen fluoride
- hydrofluoric acid
- Prior art date
Links
- 238000000926 separation method Methods 0.000 title claims description 65
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 171
- 239000002253 acid Substances 0.000 claims description 107
- 238000004821 distillation Methods 0.000 claims description 98
- 239000007787 solid Substances 0.000 claims description 61
- 239000007788 liquid Substances 0.000 claims description 60
- LDDQLRUQCUTJBB-UHFFFAOYSA-O azanium;hydrofluoride Chemical compound [NH4+].F LDDQLRUQCUTJBB-UHFFFAOYSA-O 0.000 claims description 54
- 238000005530 etching Methods 0.000 claims description 35
- 238000010438 heat treatment Methods 0.000 claims description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000001816 cooling Methods 0.000 claims description 24
- 238000003756 stirring Methods 0.000 claims description 19
- -1 hydrazine compound Chemical class 0.000 claims description 18
- 239000002699 waste material Substances 0.000 claims description 17
- 238000002425 crystallisation Methods 0.000 claims description 16
- 230000008025 crystallization Effects 0.000 claims description 14
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 11
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 10
- 229910052707 ruthenium Inorganic materials 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 238000011282 treatment Methods 0.000 claims description 9
- 150000003304 ruthenium compounds Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 150000001463 antimony compounds Chemical class 0.000 claims 1
- AZTSDLGKGCQZQJ-UHFFFAOYSA-N antimony;hydrate Chemical compound O.[Sb] AZTSDLGKGCQZQJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000243 solution Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 29
- 229910052703 rhodium Inorganic materials 0.000 description 7
- 239000010948 rhodium Substances 0.000 description 7
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 7
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 6
- 230000006698 induction Effects 0.000 description 5
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 4
- 229910001634 calcium fluoride Inorganic materials 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000001376 precipitating effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004448 titration Methods 0.000 description 2
- VRZJGENLTNRAIG-UHFFFAOYSA-N 4-[4-(dimethylamino)phenyl]iminonaphthalen-1-one Chemical compound C1=CC(N(C)C)=CC=C1N=C1C2=CC=CC=C2C(=O)C=C1 VRZJGENLTNRAIG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- UKCBKQLNTLMFAA-UHFFFAOYSA-N F.[F] Chemical compound F.[F] UKCBKQLNTLMFAA-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- LPLMZAJYUPAYQZ-UHFFFAOYSA-N diazanium;difluoride Chemical compound [NH4+].[NH4+].[F-].[F-] LPLMZAJYUPAYQZ-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000002798 spectrophotometry method Methods 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
Landscapes
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Removal Of Specific Substances (AREA)
- ing And Chemical Polishing (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011046718A JP2012183457A (ja) | 2011-03-03 | 2011-03-03 | 分離方法および分離装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201236738A TW201236738A (en) | 2012-09-16 |
| TWI465280B true TWI465280B (zh) | 2014-12-21 |
Family
ID=46806899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101106790A TWI465280B (zh) | 2011-03-03 | 2012-03-01 | Separation method and separation device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012183457A (enExample) |
| CN (1) | CN102674254B (enExample) |
| TW (1) | TWI465280B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140063449A (ko) * | 2012-11-15 | 2014-05-27 | 오지 가부시키가이샤 | Ｓｉ 함유 불산계 폐액으로부터 Ｓｉ를 제거하는 방법과 Ｓｉ 함유 불산계 혼산 폐액으로부터 불산을 회수하는 방법 및 회수장치 |
| JP5941028B2 (ja) * | 2012-11-15 | 2016-06-29 | オー・ジー株式会社 | Ｓｉ含有フッ酸系廃液からＳｉを除去する方法及びＳｉ含有フッ酸系混酸廃液からフッ酸を回収する方法 |
| JP2014151269A (ja) * | 2013-02-08 | 2014-08-25 | Seiko Epson Corp | エッチング液の再生方法およびエッチング液再生装置 |
| CN103566606B (zh) * | 2013-11-04 | 2015-03-04 | 中国地质大学（武汉） | 一种多功能提纯装置以及利用该装置提纯氟化氢铵的方法 |
| CN110104864A (zh) * | 2019-06-06 | 2019-08-09 | 盛隆资源再生（无锡）有限公司 | 一种酸性磷酸型含氟含氨废水的处理方法 |
| CN110272159A (zh) * | 2019-06-17 | 2019-09-24 | 苏州乔发环保科技股份有限公司 | 一种工业废水中无机盐的资源化处理方法及装置 |
| CN113045089B (zh) * | 2021-03-15 | 2023-04-18 | 盛隆资源再生（无锡）有限公司 | 一种蚀刻废液精制纯化的方法 |
| CN113358436B (zh) * | 2021-06-11 | 2022-12-30 | 中国科学技术大学 | 氟化氢铵的提纯装置及方法 |
| CN113880048B (zh) * | 2021-09-30 | 2023-06-27 | 中化蓝天霍尼韦尔新材料有限公司 | 一种氢氟酸高效回收系统及方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05170435A (ja) * | 1991-10-03 | 1993-07-09 | Hashimoto Kasei Kk | フッ素系エッチング剤からフッ化カルシウムを回収する方法 |
| CN101028919A (zh) * | 2006-02-27 | 2007-09-05 | 三菱化学工程株式会社 | 氟酸的回收方法 |
| JP2008189483A (ja) * | 2007-02-01 | 2008-08-21 | Morita Kagaku Kogyo Kk | フッ化水素酸、塩酸およびケイフッ化水素酸を含有する廃液から酸成分を分離・回収する方法およびその装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4936955A (en) * | 1988-08-12 | 1990-06-26 | Alameda Instruments, Inc. | Hydrofluoric acid reprocessing for semiconductor standards |
| JPH03267189A (ja) * | 1990-03-16 | 1991-11-28 | Konica Corp | 写真処理廃液の蒸発濃縮装置 |
| CN1180043A (zh) * | 1997-11-10 | 1998-04-29 | 应烈荣 | 一种含氟硫酸提取氢氟酸的工艺 |
| JP4581618B2 (ja) * | 2004-10-14 | 2010-11-17 | 三菱化学エンジニアリング株式会社 | フッ酸の回収方法 |
| DE102006040830A1 (de) * | 2006-08-31 | 2008-03-06 | Wacker Chemie Ag | Verfahren zur Aufarbeitung einer Ätzmischung, die bei der Herstellung von hochreinem Silicium anfällt |
| CN201253537Y (zh) * | 2008-09-04 | 2009-06-10 | 常熟市胜诺环保设备有限公司 | 混酸废气处理装置 |
| JP5347664B2 (ja) * | 2009-04-03 | 2013-11-20 | 栗田工業株式会社 | フッ素含有排水の処理方法及び処理装置 |
-
2011
- 2011-03-03 JP JP2011046718A patent/JP2012183457A/ja not_active Withdrawn
-
2012
- 2012-03-01 TW TW101106790A patent/TWI465280B/zh not_active IP Right Cessation
- 2012-03-02 CN CN201210054230.7A patent/CN102674254B/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05170435A (ja) * | 1991-10-03 | 1993-07-09 | Hashimoto Kasei Kk | フッ素系エッチング剤からフッ化カルシウムを回収する方法 |
| CN101028919A (zh) * | 2006-02-27 | 2007-09-05 | 三菱化学工程株式会社 | 氟酸的回收方法 |
| JP2008189483A (ja) * | 2007-02-01 | 2008-08-21 | Morita Kagaku Kogyo Kk | フッ化水素酸、塩酸およびケイフッ化水素酸を含有する廃液から酸成分を分離・回収する方法およびその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102674254A (zh) | 2012-09-19 |
| JP2012183457A (ja) | 2012-09-27 |
| CN102674254B (zh) | 2014-12-03 |
| TW201236738A (en) | 2012-09-16 |
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| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |