CN102674254B - 分离方法以及分离装置 - Google Patents
分离方法以及分离装置 Download PDFInfo
- Publication number
- CN102674254B CN102674254B CN201210054230.7A CN201210054230A CN102674254B CN 102674254 B CN102674254 B CN 102674254B CN 201210054230 A CN201210054230 A CN 201210054230A CN 102674254 B CN102674254 B CN 102674254B
- Authority
- CN
- China
- Prior art keywords
- liquid
- hydrofluoric acid
- mixed acid
- acid
- distillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000926 separation method Methods 0.000 title claims abstract description 76
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 178
- 239000002253 acid Substances 0.000 claims abstract description 101
- 239000007788 liquid Substances 0.000 claims abstract description 93
- 238000004821 distillation Methods 0.000 claims abstract description 78
- MIMUSZHMZBJBPO-UHFFFAOYSA-N 6-methoxy-8-nitroquinoline Chemical compound N1=CC=CC2=CC(OC)=CC([N+]([O-])=O)=C21 MIMUSZHMZBJBPO-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000010703 silicon Substances 0.000 claims abstract description 31
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000007787 solid Substances 0.000 claims description 59
- 238000005530 etching Methods 0.000 claims description 35
- 238000010438 heat treatment Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 22
- 238000002425 crystallisation Methods 0.000 claims description 21
- 230000008025 crystallization Effects 0.000 claims description 21
- 238000003756 stirring Methods 0.000 claims description 21
- 239000002699 waste material Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 description 40
- -1 ammonium fluorosilicate Chemical compound 0.000 description 15
- 238000011084 recovery Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- 238000011282 treatment Methods 0.000 description 5
- 150000007513 acids Chemical class 0.000 description 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 4
- 229910001634 calcium fluoride Inorganic materials 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000001376 precipitating effect Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004448 titration Methods 0.000 description 2
- VRZJGENLTNRAIG-UHFFFAOYSA-N 4-[4-(dimethylamino)phenyl]iminonaphthalen-1-one Chemical compound C1=CC(N(C)C)=CC=C1N=C1C2=CC=CC=C2C(=O)C=C1 VRZJGENLTNRAIG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- UKCBKQLNTLMFAA-UHFFFAOYSA-N F.[F] Chemical compound F.[F] UKCBKQLNTLMFAA-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Landscapes
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Removal Of Specific Substances (AREA)
- ing And Chemical Polishing (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011046718A JP2012183457A (ja) | 2011-03-03 | 2011-03-03 | 分離方法および分離装置 |
| JP2011-046718 | 2011-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102674254A CN102674254A (zh) | 2012-09-19 |
| CN102674254B true CN102674254B (zh) | 2014-12-03 |
Family
ID=46806899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210054230.7A Expired - Fee Related CN102674254B (zh) | 2011-03-03 | 2012-03-02 | 分离方法以及分离装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012183457A (enExample) |
| CN (1) | CN102674254B (enExample) |
| TW (1) | TWI465280B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140063449A (ko) * | 2012-11-15 | 2014-05-27 | 오지 가부시키가이샤 | Ｓｉ 함유 불산계 폐액으로부터 Ｓｉ를 제거하는 방법과 Ｓｉ 함유 불산계 혼산 폐액으로부터 불산을 회수하는 방법 및 회수장치 |
| JP5941028B2 (ja) * | 2012-11-15 | 2016-06-29 | オー・ジー株式会社 | Ｓｉ含有フッ酸系廃液からＳｉを除去する方法及びＳｉ含有フッ酸系混酸廃液からフッ酸を回収する方法 |
| JP2014151269A (ja) * | 2013-02-08 | 2014-08-25 | Seiko Epson Corp | エッチング液の再生方法およびエッチング液再生装置 |
| CN103566606B (zh) * | 2013-11-04 | 2015-03-04 | 中国地质大学（武汉） | 一种多功能提纯装置以及利用该装置提纯氟化氢铵的方法 |
| CN110104864A (zh) * | 2019-06-06 | 2019-08-09 | 盛隆资源再生（无锡）有限公司 | 一种酸性磷酸型含氟含氨废水的处理方法 |
| CN110272159A (zh) * | 2019-06-17 | 2019-09-24 | 苏州乔发环保科技股份有限公司 | 一种工业废水中无机盐的资源化处理方法及装置 |
| CN113045089B (zh) * | 2021-03-15 | 2023-04-18 | 盛隆资源再生（无锡）有限公司 | 一种蚀刻废液精制纯化的方法 |
| CN113358436B (zh) * | 2021-06-11 | 2022-12-30 | 中国科学技术大学 | 氟化氢铵的提纯装置及方法 |
| CN113880048B (zh) * | 2021-09-30 | 2023-06-27 | 中化蓝天霍尼韦尔新材料有限公司 | 一种氢氟酸高效回收系统及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1180043A (zh) * | 1997-11-10 | 1998-04-29 | 应烈荣 | 一种含氟硫酸提取氢氟酸的工艺 |
| CN201253537Y (zh) * | 2008-09-04 | 2009-06-10 | 常熟市胜诺环保设备有限公司 | 混酸废气处理装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4936955A (en) * | 1988-08-12 | 1990-06-26 | Alameda Instruments, Inc. | Hydrofluoric acid reprocessing for semiconductor standards |
| JPH03267189A (ja) * | 1990-03-16 | 1991-11-28 | Konica Corp | 写真処理廃液の蒸発濃縮装置 |
| JP3378892B2 (ja) * | 1991-10-03 | 2003-02-17 | ステラケミファ株式会社 | フッ素系エッチング剤からフッ化カルシウムを回収する方法 |
| JP4581618B2 (ja) * | 2004-10-14 | 2010-11-17 | 三菱化学エンジニアリング株式会社 | フッ酸の回収方法 |
| CN101028919B (zh) * | 2006-02-27 | 2011-07-20 | 三菱化学工程株式会社 | 氟酸的回收方法 |
| DE102006040830A1 (de) * | 2006-08-31 | 2008-03-06 | Wacker Chemie Ag | Verfahren zur Aufarbeitung einer Ätzmischung, die bei der Herstellung von hochreinem Silicium anfällt |
| JP5143440B2 (ja) * | 2007-02-01 | 2013-02-13 | 森田化学工業株式会社 | フッ化水素酸、塩酸およびケイフッ化水素酸を含有する廃液から酸成分を分離・回収する方法およびその装置 |
| JP5347664B2 (ja) * | 2009-04-03 | 2013-11-20 | 栗田工業株式会社 | フッ素含有排水の処理方法及び処理装置 |
-
2011
- 2011-03-03 JP JP2011046718A patent/JP2012183457A/ja not_active Withdrawn
-
2012
- 2012-03-01 TW TW101106790A patent/TWI465280B/zh not_active IP Right Cessation
- 2012-03-02 CN CN201210054230.7A patent/CN102674254B/zh not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1180043A (zh) * | 1997-11-10 | 1998-04-29 | 应烈荣 | 一种含氟硫酸提取氢氟酸的工艺 |
| CN201253537Y (zh) * | 2008-09-04 | 2009-06-10 | 常熟市胜诺环保设备有限公司 | 混酸废气处理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102674254A (zh) | 2012-09-19 |
| TWI465280B (zh) | 2014-12-21 |
| JP2012183457A (ja) | 2012-09-27 |
| TW201236738A (en) | 2012-09-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102674254B (zh) | 分离方法以及分离装置 | |
| TWI481550B (zh) | 高純度硫酸溶液之製備方法 | |
| JP4646251B2 (ja) | 水性エッチング混合物からの酸回収方法 | |
| TW200946458A (en) | Processes and devices for removing ruthenium as RUO4 from ruthenate-containing solutions by distillation | |
| CN102689876A (zh) | 分离方法及分离装置 | |
| JP4599162B2 (ja) | フルオロカルボン酸の製造方法 | |
| TW201041809A (en) | Method for processing waste water containing fluorine and silicon, method for producing calcium fluoride, and facility for processing fluorine-containing waste water | |
| KR20130099025A (ko) | 불소의 정제 방법 | |
| JP2008189484A (ja) | フッ化水素酸およびケイフッ化水素酸を含有する廃液から酸成分を分離・回収する方法およびその装置 | |
| CN114901590B (zh) | 用于生产双(氟磺酰)亚胺的集成方法 | |
| EP0460110B1 (en) | Process for the continuous recovery of hydrogen fluoride gas | |
| EP1542957B1 (en) | Process for preparing fluorocarboxylic acids | |
| CN1379288A (zh) | 蚀刻方法以及蚀刻液的定量分析方法 | |
| JP4582602B2 (ja) | ヒドロキシルアミン水溶液およびその製造方法 | |
| JP5432892B2 (ja) | ブロモピクリンを調製する連続プロセス | |
| CN107522339A (zh) | 一种对位酯生产过程中产生的缩合废水的处理方法 | |
| CN1065296A (zh) | 处理含镍刻蚀废流体的方法 | |
| JP2011178586A (ja) | 多結晶シリコンの精製方法 | |
| JP2004217529A (ja) | フェノールタールの処理方法 | |
| CN106966861A (zh) | 一种甲苯氧化工艺中的重副产物处理工艺和装置 | |
| RU2639148C2 (ru) | Способ очистки перфторэтилизопропилкетона | |
| CN113396140A (zh) | 制备4,4’-二氯二苯亚砜的方法 | |
| CN113582826B (zh) | 用酸碱试剂去除甲基异丙基甲酮生产中杂质异戊醛的方法及应用 | |
| JPH05154466A (ja) | シリコン処理廃液から硝酸を回収、再利用する方法 | |
| US20080003172A1 (en) | Continuous hydrolysis of hexafluoroarsenic acid |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 Termination date: 20180302 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |