JP2012183457A - 分離方法および分離装置 - Google Patents

分離方法および分離装置 Download PDF

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Publication number
JP2012183457A
JP2012183457A JP2011046718A JP2011046718A JP2012183457A JP 2012183457 A JP2012183457 A JP 2012183457A JP 2011046718 A JP2011046718 A JP 2011046718A JP 2011046718 A JP2011046718 A JP 2011046718A JP 2012183457 A JP2012183457 A JP 2012183457A
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Japan
Prior art keywords
hydrofluoric acid
liquid
mixed acid
distillation
acid
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JP2011046718A
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English (en)
Japanese (ja)
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JP2012183457A5 (enExample
Inventor
Hideki Yamamoto
秀樹 山本
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2011046718A priority Critical patent/JP2012183457A/ja
Priority to TW101106790A priority patent/TWI465280B/zh
Priority to CN201210054230.7A priority patent/CN102674254B/zh
Publication of JP2012183457A publication Critical patent/JP2012183457A/ja
Publication of JP2012183457A5 publication Critical patent/JP2012183457A5/ja
Withdrawn legal-status Critical Current

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  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Removal Of Specific Substances (AREA)
  • ing And Chemical Polishing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2011046718A 2011-03-03 2011-03-03 分離方法および分離装置 Withdrawn JP2012183457A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011046718A JP2012183457A (ja) 2011-03-03 2011-03-03 分離方法および分離装置
TW101106790A TWI465280B (zh) 2011-03-03 2012-03-01 Separation method and separation device
CN201210054230.7A CN102674254B (zh) 2011-03-03 2012-03-02 分离方法以及分离装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011046718A JP2012183457A (ja) 2011-03-03 2011-03-03 分離方法および分離装置

Publications (2)

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JP2012183457A true JP2012183457A (ja) 2012-09-27
JP2012183457A5 JP2012183457A5 (enExample) 2014-04-10

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CN (1) CN102674254B (enExample)
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014113583A (ja) * 2012-11-15 2014-06-26 Og Corp Ｓｉ含有フッ酸系廃液からＳｉを除去する方法及びＳｉ含有フッ酸系混酸廃液からフッ酸を回収する方法並びに回収装置
JP2014151269A (ja) * 2013-02-08 2014-08-25 Seiko Epson Corp エッチング液の再生方法およびエッチング液再生装置
CN113045089A (zh) * 2021-03-15 2021-06-29 盛隆资源再生（无锡）有限公司 一种蚀刻废液精制纯化的方法
CN113358436A (zh) * 2021-06-11 2021-09-07 中国科学技术大学 氟化氢铵的提纯装置及方法
CN113880048A (zh) * 2021-09-30 2022-01-04 中化蓝天霍尼韦尔新材料有限公司 一种氢氟酸高效回收系统及方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140063449A (ko) * 2012-11-15 2014-05-27 오지 가부시키가이샤 Ｓｉ 함유 불산계 폐액으로부터 Ｓｉ를 제거하는 방법과 Ｓｉ 함유 불산계 혼산 폐액으로부터 불산을 회수하는 방법 및 회수장치
CN103566606B (zh) * 2013-11-04 2015-03-04 中国地质大学（武汉） 一种多功能提纯装置以及利用该装置提纯氟化氢铵的方法
CN110104864A (zh) * 2019-06-06 2019-08-09 盛隆资源再生（无锡）有限公司 一种酸性磷酸型含氟含氨废水的处理方法
CN110272159A (zh) * 2019-06-17 2019-09-24 苏州乔发环保科技股份有限公司 一种工业废水中无机盐的资源化处理方法及装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02160605A (ja) * 1988-08-12 1990-06-20 Alameda Instr Inc フツ化水素酸の再処理法
JPH03267189A (ja) * 1990-03-16 1991-11-28 Konica Corp 写真処理廃液の蒸発濃縮装置
JPH05170435A (ja) * 1991-10-03 1993-07-09 Hashimoto Kasei Kk フッ素系エッチング剤からフッ化カルシウムを回収する方法
JP2006111487A (ja) * 2004-10-14 2006-04-27 Mitsubishi Chemical Engineering Corp フッ酸の回収方法
JP2008057043A (ja) * 2006-08-31 2008-03-13 Wacker Chemie Ag 水性エッチング混合物からの酸回収方法
JP2010240558A (ja) * 2009-04-03 2010-10-28 Kurita Water Ind Ltd フッ素含有排水の処理方法及び処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1180043A (zh) * 1997-11-10 1998-04-29 应烈荣 一种含氟硫酸提取氢氟酸的工艺
CN101028919B (zh) * 2006-02-27 2011-07-20 三菱化学工程株式会社 氟酸的回收方法
JP5143440B2 (ja) * 2007-02-01 2013-02-13 森田化学工業株式会社 フッ化水素酸、塩酸およびケイフッ化水素酸を含有する廃液から酸成分を分離・回収する方法およびその装置
CN201253537Y (zh) * 2008-09-04 2009-06-10 常熟市胜诺环保设备有限公司 混酸废气处理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02160605A (ja) * 1988-08-12 1990-06-20 Alameda Instr Inc フツ化水素酸の再処理法
JPH03267189A (ja) * 1990-03-16 1991-11-28 Konica Corp 写真処理廃液の蒸発濃縮装置
JPH05170435A (ja) * 1991-10-03 1993-07-09 Hashimoto Kasei Kk フッ素系エッチング剤からフッ化カルシウムを回収する方法
JP2006111487A (ja) * 2004-10-14 2006-04-27 Mitsubishi Chemical Engineering Corp フッ酸の回収方法
JP2008057043A (ja) * 2006-08-31 2008-03-13 Wacker Chemie Ag 水性エッチング混合物からの酸回収方法
JP2010240558A (ja) * 2009-04-03 2010-10-28 Kurita Water Ind Ltd フッ素含有排水の処理方法及び処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014113583A (ja) * 2012-11-15 2014-06-26 Og Corp Ｓｉ含有フッ酸系廃液からＳｉを除去する方法及びＳｉ含有フッ酸系混酸廃液からフッ酸を回収する方法並びに回収装置
JP2014151269A (ja) * 2013-02-08 2014-08-25 Seiko Epson Corp エッチング液の再生方法およびエッチング液再生装置
CN113045089A (zh) * 2021-03-15 2021-06-29 盛隆资源再生（无锡）有限公司 一种蚀刻废液精制纯化的方法
CN113045089B (zh) * 2021-03-15 2023-04-18 盛隆资源再生（无锡）有限公司 一种蚀刻废液精制纯化的方法
CN113358436A (zh) * 2021-06-11 2021-09-07 中国科学技术大学 氟化氢铵的提纯装置及方法
CN113880048A (zh) * 2021-09-30 2022-01-04 中化蓝天霍尼韦尔新材料有限公司 一种氢氟酸高效回收系统及方法

Also Published As

Publication number Publication date
CN102674254A (zh) 2012-09-19
TWI465280B (zh) 2014-12-21
CN102674254B (zh) 2014-12-03
TW201236738A (en) 2012-09-16

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