TWI460340B - Chimeric Folding Roofing Building Materials - Google Patents

Chimeric Folding Roofing Building Materials Download PDF

Info

Publication number
TWI460340B
TWI460340B TW099112643A TW99112643A TWI460340B TW I460340 B TWI460340 B TW I460340B TW 099112643 A TW099112643 A TW 099112643A TW 99112643 A TW99112643 A TW 99112643A TW I460340 B TWI460340 B TW I460340B
Authority
TW
Taiwan
Prior art keywords
building material
seam
side fitting
fitting portion
type folding
Prior art date
Application number
TW099112643A
Other languages
Chinese (zh)
Other versions
TW201040364A (en
Inventor
Tomohide Someya
Norio Kudo
Original Assignee
Jfe Galvanizing & Coating Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jfe Galvanizing & Coating Co filed Critical Jfe Galvanizing & Coating Co
Publication of TW201040364A publication Critical patent/TW201040364A/en
Application granted granted Critical
Publication of TWI460340B publication Critical patent/TWI460340B/en

Links

Classifications

    • EFIXED CONSTRUCTIONS
    • E04BUILDING
    • E04DROOF COVERINGS; SKY-LIGHTS; GUTTERS; ROOF-WORKING TOOLS
    • E04D3/00Roof covering by making use of flat or curved slabs or stiff sheets
    • E04D3/36Connecting; Fastening
    • E04D3/361Connecting; Fastening by specially-profiled marginal portions of the slabs or sheets
    • E04D3/363Connecting; Fastening by specially-profiled marginal portions of the slabs or sheets with snap action
    • EFIXED CONSTRUCTIONS
    • E04BUILDING
    • E04DROOF COVERINGS; SKY-LIGHTS; GUTTERS; ROOF-WORKING TOOLS
    • E04D3/00Roof covering by making use of flat or curved slabs or stiff sheets
    • E04D3/36Connecting; Fastening

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Roof Covering Using Slabs Or Stiff Sheets (AREA)

Description

嵌合式折板屋頂建材Fitting type folding roof building materials

本發明係關於金屬製嵌合式折板屋頂建材,特別係關於將相鄰屋頂建材的端部間利用接縫(seam)接合,便可簡單且迅速地連接而施行屋頂覆蓋施工,且外觀優異、接縫鎖緊接合部對暴風等的強度優異之嵌合式折板屋頂建材。The present invention relates to a metal-made folded-panel roofing building material, and particularly relates to a roof covering construction in which the ends of adjacent roofing building materials are joined by seams, and can be easily and quickly connected, and the appearance is excellent. Seam-locked roofing building materials with excellent joint strength for joints such as storms.

對諸如工廠、倉庫、店面等施行的屋頂覆蓋方法,習知已知有如經由在屋頂底層(梁)上,依一定間隔固定的屋頂支座,將一金屬製折板屋頂建材(其係設有在寬度方向其中一側緣部所成形的內接縫側嵌合部)、與相鄰接的另一屋頂建材(其係設有在該屋頂建材的寬度方向另一側緣部所成形的外接縫側嵌合部(上接縫))施行接縫接合,將該金屬製折板屋頂建材間依序連接,且依無螺栓狀態(嵌合式)施行屋頂鋪蓋的施工方法(專利文獻1、2)。For roof covering methods such as factories, warehouses, storefronts, etc., it is known to have a metal folding roof building material (which is provided by a roof support fixed at a certain interval on the roof bottom (beam)). An inner seam side fitting portion formed by one side edge portion in the width direction, and another roof building material adjacent thereto (which is provided with an external connection formed at the other side edge portion in the width direction of the roof building material) The seam-side fitting portion (upper seam) is subjected to joint joining, and the metal folding panel roof building materials are sequentially connected, and the roof covering method is applied in a boltless state (fitting type) (Patent Documents 1 and 2) ).

此種習知嵌合式折板屋頂建材係有:內/外接縫側嵌合部係由例如倒L字形狀角接縫(專利文獻1)、略圓弧狀圓形接縫(專利文獻2)、略三角形狀三角形接縫所構成。The conventional fitting type folding roof building material is such that the inner/outer seam side fitting portion is made of, for example, an inverted L-shaped corner joint (Patent Document 1) and a slightly arc-shaped circular joint (Patent Document 2) ), slightly triangular shape triangle joints.

然而,專利文獻1的屋頂板,當主板部因風的颳起而產生朝上壓力時,會對內接縫側嵌合部(倒L字)與外接縫側嵌合部中至少其中任一者,施加因風壓等所造成的旋轉力矩,導致接縫鎖緊接合部輕易地脫落,且即便作業者在屋頂上步行 而產生朝下壓力時,亦會有該接縫鎖緊接合部發生鬆脫或脫落的問題。However, in the roof panel of Patent Document 1, when the main plate portion is pressed upward by the wind, at least one of the inner seam side fitting portion (inverted L-shaped) and the outer seam-side fitting portion is at least In one case, the rotational moment caused by the wind pressure or the like is applied, so that the seam locking joint is easily detached, and even if the operator walks on the roof When the downward pressure is generated, there is also a problem that the seam locking joint portion is loosened or detached.

再者,專利文獻2的折板型屋頂板,屬於屋頂建材間之接合部的內/外接縫側嵌合部構造,係由圓形截面的嵌合構造構成,雖在嵌合後對因風颳起所造成的負壓、與因作業者的踩踏等所造成的按押,具有安定的強度,但難謂接縫鎖緊加工性良好,尚有殘留在施行接縫鎖緊加工時容易發生外接縫側嵌合部頂部的彎曲位置不整合情形,以及鎖緊力較弱、容易喪失直線性等待解決的課題。In addition, the flap type roof panel of the patent document 2 belongs to the inner/outer seam side fitting portion structure of the joint portion of the roof building material, and is configured by a fitting structure having a circular cross section, and the fitting is made after fitting. The negative pressure caused by the wind blown, and the press by the operator's pedaling, etc., have a stable strength, but it is difficult to say that the seam locking workability is good, and there is still a residual residue in the seam sewing process. The problem that the bending position of the top portion of the outer seam side fitting portion is unconformed, and the locking force is weak, and the linearity is easily lost is solved.

當外接縫的彎曲位置非為一定的情況(例如,如圖11所示,三角形所指外接縫的基線,較中心更靠右側(圖11(a))或靠左側(圖11(b))的情況),會導致接縫鎖緊強度降低。When the bending position of the outer seam is not certain (for example, as shown in Fig. 11, the base of the outer seam indicated by the triangle is closer to the right side (Fig. 11(a)) or to the left side than the center (Fig. 11 (b ))), which will result in reduced seam locking strength.

再者,當內/外接縫側嵌合部係由三角形接縫構成時,雖接縫鎖緊加工較為容易、且牢固地嵌接、經嵌合後對風壓具有安定的強度,但因為外接縫側嵌合部的頂部折縫(折線)呈尖銳,因而較難因應現有屋頂底層與支座(緊框架)的歪斜,會有外觀直線性與形狀精度差之問題。Further, when the inner/outer seam side fitting portion is formed of a triangular joint, the seam locking process is relatively easy, and is firmly engaged and fitted to have a stable strength against the wind pressure, but because The top crease (fold line) of the outer seam side fitting portion is sharp, so that it is difficult to cope with the skew of the existing roof bottom layer and the support (tight frame), and there is a problem that the appearance straightness and shape accuracy are poor.

再者,金屬板係原板寬度具有容許差(0~+7mm),該誤差會由在金屬板二側緣部所形成的內接縫側嵌合部與外接縫側嵌合部所吸收,因而嵌合部的形狀會依每一金屬板產生變化,導致內接縫側嵌合部與外接縫側嵌合部無法完全地嵌接。Further, the metal plate has an allowable difference (0 to +7 mm) in the width of the original plate, and the error is absorbed by the inner seam side fitting portion and the outer seam side fitting portion formed at both side edges of the metal plate. Therefore, the shape of the fitting portion varies depending on each of the metal plates, and the inner seam side fitting portion and the outer seam side fitting portion cannot be completely engaged.

另外,此種嵌合式屋頂建材的施工工事,因為在施工時較難從外側判斷接縫鎖緊嵌合狀態的良莠,因而如何作成屋頂板的接縫鎖緊嵌合構造(例如內/外接縫側嵌合部的形狀),便屬極重要之事。In addition, in the construction work of such a fitted roof building material, it is difficult to determine the joint of the joint in the joint state during the construction, so how to make the joint locking structure of the roof panel (for example, inside/outside) The shape of the joint on the seam side is extremely important.

[先行技術文獻][Advanced technical literature] [專利文獻][Patent Literature]

專利文獻1:日本專利特開2003-82820號公報Patent Document 1: Japanese Patent Laid-Open Publication No. 2003-82820

專利文獻2:日本專利實開昭54-18018號公報Patent Document 2: Japanese Patent Publication No. Sho 54-18018

上述習知技術的情況,在本發明對象的無螺栓施工屋頂容易發生屋頂建材彈起情況,即,容易因風壓所造成的屋頂建材彈起情況,或者容易發生接縫鎖緊接合部的鬆脫、脫落情況(專利文獻1),且相關接縫鎖緊加工(電動接縫加工)性、稜線的直線性(即,屋頂覆蓋外觀的修整)仍尚有待改善的餘地(專利文獻2),更有指出內/外接縫側嵌合部的形狀精度差、彎曲剛性小、特別係在無支座(緊框架)處的結合力偏低等問題。In the case of the above-mentioned prior art, in the boltless construction roof of the object of the present invention, it is easy for the roof building material to bounce, that is, the roof building material bounce due to wind pressure, or the looseness of the joint locking joint. In the case of the detachment and the detachment (Patent Document 1), there is still room for improvement in the seam-locking processing (electric seam processing) and the straightness of the ridge line (that is, the trimming of the roof covering appearance) (Patent Document 2). Further, it is pointed out that the inner/outer seam side fitting portion has a problem of poor shape accuracy, small bending rigidity, and particularly low bonding force at a seatless (tight frame).

在此,本發明目的在於提供:當對嵌合式折板屋頂建材施工時,可使由內接縫側嵌合部與外接縫側嵌合部所造成的相互支撐力提升,且即便因風颳起而造成的負壓、或因作業者的踩踏等而造成的按押,在接縫鎖緊接合部仍不會發生鬆脫與脫落情形,具有較高接縫鎖緊程度(結合力)的嵌合式折板屋頂建材。又,本發明目的在於提案:不受金屬板的原板寬度誤差所左右,具有高形狀精度之外/內接縫側嵌合部,且接縫鎖緊加工性優異、接縫鎖緊外觀形狀漂亮,能依簡單且迅速地施行屋頂覆蓋的嵌合式折板屋頂建材。Here, an object of the present invention is to provide that the mutual support force caused by the inner seam side fitting portion and the outer seam side fitting portion can be improved when the fitting type folding roof building material is applied, and even if the wind is caused The negative pressure caused by the scraping, or the pressing caused by the operator's pedaling, etc., still does not loosen and fall off at the seam locking joint, and has a high seam locking degree (bonding force) Fitting-style folding roofing building materials. Further, an object of the present invention is to provide a high-accuracy-precision/internal seam-side fitting portion without being affected by the original plate width error of the metal plate, and the seam locking workability is excellent, and the seam locking appearance is beautiful. A chisel-type folding roof building material that can cover the roof in a simple and rapid manner.

為能克服圍繞習知技術的上述問題,俾實現上述目的,而經深入鑽研,結果發明者等開發出相關以下主旨構造的本發明。即,本發明所提案的嵌合式折板屋頂建材,係由:造形成矩形金屬板寬度方向中央部的基底部;從該基底部的寬度方向二側端,朝各自的斜方向立起之傾斜側板部;從該等傾斜側板部上端部,分別朝水平方向延伸的水平部;及分別立設於該等水平部自由端部的內接縫側嵌合部與外接縫側嵌合部所構成,經由該等內/外接縫側嵌合部,依將相鄰金屬板間予以連結的嵌合式折板屋頂建材;其特徵在於:上述外接縫側嵌合部係由:從上述水平部端緣站立的基底部側腳部、連設於該基底部側腳部上端部的凸面形頭部、及在從該凸面形頭部延伸的位置處,形成接縫鎖緊嵌合狀態的側端部側腳部所構成,且呈截面略菇形;上述內接縫側嵌合部係由:從上述水平部端緣站立的腳部、及連設於該腳部上端部的山形頭部所構成,且呈截面略傘形。In order to overcome the above-mentioned problems of the prior art, the inventors have developed the present invention relating to the following main features in order to achieve the above object. In other words, the fitting type folding roof building material proposed by the present invention is formed by forming a base portion at the central portion in the width direction of the rectangular metal plate, and tilting from the opposite ends of the base portion toward the respective oblique directions. a side plate portion; a horizontal portion extending in a horizontal direction from the upper end portion of the inclined side plate portions; and an inner seam side fitting portion and an outer seam side fitting portion respectively standing at the free end portions of the horizontal portions And a fitting type folding roof building material according to the inner/outer seam side fitting portion, wherein the outer seam side fitting portion is: from the above level a base-side leg portion where the end edge is standing, a convex-shaped head portion connected to the upper end portion of the base-side leg portion, and a position where the seam is locked and fitted at a position extending from the convex-shaped head portion The side end side leg portion is formed in a slightly mushroom shape; the inner seam side fitting portion is: a leg portion standing from the edge portion of the horizontal portion, and a mountain shaped head connected to the upper end portion of the leg portion It is composed of a part and has a slightly umbrella shape in cross section.

另外,本發明的上述屋頂板所提供更佳解決手段,上述外接縫側嵌合部,係在凸面形頭部的頂部形成由曲率不同的凸條部所構成之折線;上述內接縫側嵌合部係於山形頭部的非腳部側折回而形成重疊部;上述外接縫側嵌合部的基底部側腳部及內接縫側嵌合部的腳部,係形成從各水平部端緣分別朝傾斜站立;上述傾斜側板,係在高度方向上形成1或複數小落差;上述傾斜側板係在鄰接基底部的下端開始彎曲位置,形成朝基底部側凹陷的大落差;以及上述傾斜側板係在鄰接水平部的上端,形成朝基底部側凹陷的延伸凹部。Further, the above-described roof panel of the present invention provides a better solution, wherein the outer seam side fitting portion forms a fold line formed by a ridge portion having a different curvature at the top of the convex head portion; the inner seam side The fitting portion is folded back on the non-foot side of the mountain-shaped head portion to form an overlapping portion, and the base portion side leg portion and the inner seam side fitting portion of the outer seam side fitting portion are formed from various levels. The end edges respectively stand obliquely; the inclined side plates are formed with 1 or a plurality of small drops in the height direction; the inclined side plates are bent at a lower end adjacent to the base portion to form a large drop recessed toward the base portion side; The inclined side plate is attached to the upper end of the horizontal portion to form an extending recess that is recessed toward the base portion side.

採用上述構造的本發明,藉由形成將外接縫側嵌合部設為菇形、並將內接縫側嵌合部設為傘形的接縫鎖緊嵌合構造,即便因風颳起或作業者踩踏等而對屋頂板左右任一者施加壓力時,內接縫側嵌合部與外接縫側嵌合部在左右二側部所設置延伸部相互碰撞,俾使屋頂板的旋轉受約束,因而即便因風颳起所造成的負壓、與因作業者的踩踏等所造成按押,仍不會有該屋頂建材旋轉而導致接縫鎖緊嵌合狀態簡單地鬆脫或脫落,故可有效地防止雨水侵入。According to the present invention having the above-described structure, the seam-sealing fitting structure in which the outer-slit-side fitting portion is formed into a mushroom shape and the inner-slit-side fitting portion has an umbrella shape is formed, even if it is blown by the wind When the operator applies pressure to any of the right and left sides of the shingle, the inner seam side fitting portion and the outer seam side fitting portion collide with each other at the left and right side portions, thereby causing the roof panel to rotate. Constrained, even if the negative pressure caused by the wind blown, and the pedaling caused by the operator's pedaling, etc., there will be no rotation of the roof building material, and the seam locking and fitting state will simply loosen or fall off. Therefore, it can effectively prevent rainwater from entering.

再者,根據本發明的屋頂建材,因為在外接縫側嵌合部的凸面形頭部之頂部預先設置折線,因此接縫鎖緊加工(接縫加工)容易,且稜線(屋脊)的直線性(基線)高,容易吸收因屋頂底層或支座(緊框架)的歪斜所造成的施工誤差,可修整出漂亮的屋頂覆蓋外觀形狀。Further, according to the roof building material of the present invention, since the fold line is provided in advance on the top of the convex-shaped head portion of the outer seam side fitting portion, the seam locking processing (joining processing) is easy, and the straightness of the ridge line (ridge) High (baseline), it is easy to absorb the construction error caused by the skew of the bottom of the roof or the support (tight frame), and the beautiful roof covering appearance can be trimmed.

再者,根據本發明,由內/外接縫側嵌合部所構成接縫鎖緊嵌合狀態的結合力較強,且內接縫側嵌合部係設有折回重疊部,因而該內接縫側嵌合部的形狀精度高、經接縫鎖緊後的形狀安定性與嵌接力均優異。According to the present invention, the joint force in the joint locking state of the inner/outer seam side fitting portion is strong, and the inner seam side fitting portion is provided with the folded-over overlapping portion, and thus the inner portion The seam-side fitting portion has high shape accuracy, and is excellent in both shape stability and fitting force after being seam-sealed.

再者,本發明中,藉由使從基底部站立的側板呈傾斜,便可提高從屋頂板的基底部起至嵌合部頂部的山高度,且可提升屋頂板的彎曲剛性。Further, in the present invention, by inclining the side plates standing from the base portion, the height of the mountain from the base portion of the roof panel to the top of the fitting portion can be increased, and the bending rigidity of the roof panel can be improved.

以下,針對本發明舉代表性的實施形態進行說明。Hereinafter, a representative embodiment of the present invention will be described.

圖1所示的本發明嵌合式折板屋頂建材一實施形態,係將矩形狀金屬板朝寬度方向曲折成形為波形,對造形為寬度方向中央部的基底部1,連設從其寬度方向二側端,分別朝斜上方折起並立起的傾斜側板部2、2',且從該等傾斜側板部2、2'的各自上端部,連設朝水平方向延伸的水平部3、3',然後在該等水平部3、3'的自由端部,分別彎曲形成後所詳述之外接縫側嵌合部4與內接縫側嵌合部5。In one embodiment of the fitting type folding roofing building material of the present invention shown in Fig. 1, a rectangular metal plate is bent into a wave shape in the width direction, and the base portion 1 which is formed in the center portion in the width direction is connected to the width direction. The side ends are inclined side plate portions 2, 2' which are respectively folded up and raised upward, and the horizontal portions 3, 3' extending in the horizontal direction are connected from the respective upper end portions of the inclined side plate portions 2, 2', Then, the outer seam side fitting portion 4 and the inner seam side fitting portion 5, which are described in detail later, are bent and formed at the free end portions of the horizontal portions 3, 3', respectively.

該本實施形態的屋頂建材,係對一屋頂板的內接縫側嵌合部5,經由後述支座(緊框架),從上方覆蓋並嵌合另一屋頂板的外接縫側嵌合部4,且依序相連接,並將相鄰屋頂建材間在寬度方向,利用無螺栓施工方式施行屋頂覆蓋。另外,本實施形態的屋頂板之形狀與構造的說明,主要係根據該屋頂建材的截面形狀進行敘述。In the roofing building material of the present embodiment, the inner joint side fitting portion 5 of one roof panel is covered with the outer joint side fitting portion of the other roof panel from above via a bracket (tight frame) to be described later. 4, and connected in sequence, and adjacent roof building materials in the width direction, using the bolt-free construction method to cover the roof. In addition, the description of the shape and structure of the roof panel of this embodiment is mainly based on the cross-sectional shape of the roofing building material.

本實施形態的屋頂建材之特徵性構造,係外接縫側嵌合部4與內接縫側嵌合部5的截面形狀、及該等接縫鎖緊加工時的嵌合構造。在此,首先針對外接縫側嵌合部4進行說明。該外接縫側嵌合部4係如圖2所示,在從屋頂的傾斜側板部2延伸之水平部3的自由端部位置,由右腳部4a(其係接縫鎖緊加工前的狀態朝略垂直站立的基底部側腳部)、凸面形頭部4b(其係連設於該右腳部4a的上端部)、及左腳部4c(其係在該頭部4b的延伸上,且依經施行接縫鎖緊加工後,沿內接縫側嵌合部5的腳部5a之方式延伸的側端部側腳部)連設而成,且截面形狀呈略菇形,並使覆蓋呈包圍上述內接縫側嵌合部5整體的狀態。此處,凸面形頭部4b亦可其頂部應成為彎曲的起點,且將曲率不同其他(曲率半徑較小)部分(例如,圖3中相當於4d的部分),相對於該寬度方向二側的另一(曲率半徑較大)部分形成平滑連續狀態。The characteristic structure of the roofing building material according to the present embodiment is the cross-sectional shape of the outer-slit-side fitting portion 4 and the inner-slit-side fitting portion 5, and the fitting structure at the time of the seam-sealing processing. Here, first, the outer seam side fitting portion 4 will be described. As shown in FIG. 2, the outer seam side fitting portion 4 is located at the free end portion of the horizontal portion 3 extending from the inclined side plate portion 2 of the roof by the right leg portion 4a (before the seam is locked and processed) a base-side leg portion that is slightly oriented vertically, a convex-shaped head portion 4b (which is connected to the upper end portion of the right leg portion 4a), and a left leg portion 4c (which is attached to the extension of the head portion 4b) And after the seam locking process is performed, the side end side leg portions extending along the leg portion 5a of the inner seam side fitting portion 5 are connected, and the cross-sectional shape is a slightly mushroom shape, and The cover is in a state of surrounding the entire inner seam side fitting portion 5 . Here, the convex-shaped head portion 4b may also have a top portion of the curved portion as the starting point of the bending, and the other portions having different curvatures (the portion having the smaller radius of curvature) (for example, the portion corresponding to 4d in FIG. 3), on both sides with respect to the width direction The other (larger radius of curvature) portion forms a smooth continuous state.

相對於此,內接縫側嵌合部5係如圖2所示,位於從上述傾斜側板部2延伸的水平部3'之自由端部位置,且由呈略垂直站立的腳部5a,以及連設於該腳部5a上端部而形成的山形頭部5b所構成,整體截面形狀呈略傘形。On the other hand, as shown in FIG. 2, the inner seam side fitting portion 5 is located at a free end portion of the horizontal portion 3' extending from the inclined side plate portion 2, and is provided by a leg portion 5a that stands slightly vertically, and The mountain-shaped head portion 5b formed by being connected to the upper end portion of the leg portion 5a is formed in a substantially umbrella shape.

根據本實施形態的屋頂建材,如圖2所示,使外接縫側嵌合部4覆蓋於內接縫側嵌合部5上之後,再將外接縫側嵌合部4的左腳部4c,從虛線所示位置朝A方向押下至實線所示位置,並利用該左腳部4c,將位於內側的內接縫側嵌合 部5之腳部5a鎖緊,便可施行牢固地接縫鎖緊加工。According to the roofing building material of the present embodiment, as shown in FIG. 2, the outer seam side fitting portion 4 is placed over the inner seam side fitting portion 5, and then the left leg portion of the outer seam side fitting portion 4 is further attached. 4c, the position shown by the broken line is pressed in the direction A to the position shown by the solid line, and the inner side seam side is fitted by the left leg portion 4c. The foot portion 5a of the portion 5 is locked, and a firm seam locking process can be performed.

即,於本實施形態中,朝圖中箭頭所示B方向,即便因風颳起等所造成的負壓,施加於屋頂板左右任一者,或者即便因作業者的踩踏等所造成的按押力,施加於屋頂板左右任一者,外接縫側嵌合部4的凸面形頭部4b下端之左右延伸部4e、4e'、與內接縫側嵌合部5的山形頭部5b下端之左右延伸部5d、5d'會相互碰撞,可約束屋頂板旋轉情形,俾可防止嵌合發生鬆脫或脫落情形。In other words, in the present embodiment, the negative pressure caused by wind blows or the like in the B direction indicated by the arrow in the figure is applied to either the left or right of the roof panel, or even if the operator steps on the pedal or the like. The left and right extension portions 4e and 4e' of the lower end of the convex-shaped head portion 4b of the outer seam side fitting portion 4 and the mountain-shaped head portion 5b of the inner seam side fitting portion 5 are applied to either one of the right and left sides of the roof panel. The left and right extensions 5d, 5d' of the lower end collide with each other to restrain the rotation of the roof panel, and the fitting can prevent the fitting from loosening or falling off.

另外,該內接縫側嵌合部5,係在非腳部側(即自由端部側)的下面折回而曲折形成重疊的折回重疊部5c。藉此,便可補強山形頭部5b,並抑制接縫鎖緊加工時的變形,俾提升形狀精度,且原板寬度的容許差(誤差)可由該折回重疊部5c吸收,因而可將內接縫側嵌合部5經常維持相同形狀,俾可使內接縫側嵌合部5與外接縫側嵌合部4能牢固地嵌接。另外,該折回重疊部5c係如圖2所示,除朝內接縫側嵌合部5的下面側折回之外,亦可朝內接縫側嵌合部5的上面側折回。In addition, the inner seam side fitting portion 5 is folded back on the lower side of the non-foot side (that is, on the free end side) to be folded to form a folded folded overlap portion 5c. Thereby, the mountain-shaped head portion 5b can be reinforced, and the deformation at the time of the seam locking processing can be suppressed, the shape accuracy can be improved, and the tolerance (error) of the original sheet width can be absorbed by the folded-back overlapping portion 5c, so that the inner seam can be obtained The side fitting portion 5 is always maintained in the same shape, and the inner seam side fitting portion 5 and the outer seam side fitting portion 4 can be firmly engaged. In addition, as shown in FIG. 2, the folded-over overlapping portion 5c can be folded back toward the upper surface side of the inner seam side fitting portion 5, in addition to being folded back toward the lower surface side of the inner seam side fitting portion 5.

再者,水平部3、3'較佳係朝基底部1側些微朝下傾斜(例如,傾斜1~10°左右)。藉此,便可防止水侵入內接縫側嵌合部5與外接縫側嵌合部4間的接縫鎖緊接合部。Further, it is preferable that the horizontal portions 3, 3' are slightly inclined downward toward the base portion 1 side (for example, inclined by about 1 to 10 degrees). Thereby, it is possible to prevent water from intruding into the seam locking joint portion between the inner seam side fitting portion 5 and the outer seam side fitting portion 4.

其次,圖3所示,係上述實施形態的外接縫側嵌合部4與內接縫側嵌合部5之一變化例。該變化例的特徵在於:對 外接縫側嵌合部4,使右腳部4a'及左腳部4c'任一者從水平部3傾斜站立,內接縫側嵌合部5則連設於水平部3'的腳部5a'傾斜站立。Next, a modification of the outer seam side fitting portion 4 and the inner seam side fitting portion 5 of the above-described embodiment is shown in Fig. 3 . The variation is characterized by: The outer seam side fitting portion 4 causes one of the right leg portion 4a' and the left leg portion 4c' to stand obliquely from the horizontal portion 3, and the inner seam side fitting portion 5 is connected to the leg portion of the horizontal portion 3'. 5a' stands on the slope.

藉此,相較於將腳部成形為略垂直站立狀態的圖2所示之屋頂建材,本發明可減少當作外接縫側嵌合部4與內接縫側嵌合部5用的必要板寬度,而此減少部分便可增加從屋頂建材的基底部1至嵌合部4、5頂部的山高,因而可提升整體屋頂建材對彎曲的剛性、強度。Thereby, the present invention can reduce the necessity of being used as the outer seam side fitting portion 4 and the inner seam side fitting portion 5 as compared with the roof building material shown in Fig. 2 in which the leg portion is formed in a slightly vertical standing state. The width of the plate can increase the height from the base portion 1 of the roof building material to the top of the fitting portions 4, 5, thereby improving the rigidity and strength of the overall roof building material against bending.

再者,在該外接縫側嵌合部4的凸面形頭部4b,其頂部應成為彎折的起點,明確形成曲率不同於其他(曲率半徑較小)的部分,即由凸條部所構成之折線4d。藉由設計該折線4d,該外接縫側嵌合部4在接縫鎖緊加工時,便可更明確地特定出彎折開始位置而容易成形,同時不會有稜線(屋脊)變動而可輕易維持直線性,且即便因屋頂底層(梁材)與支座(緊框架)的不整合而多少有發生位置偏移情況時,仍可使基線的偏移不會顯眼,俾可漂亮地修整屋頂覆蓋的外觀。Further, in the convex-shaped head portion 4b of the outer-slit-side fitting portion 4, the top portion thereof should be the starting point of the bending, and the portion having the curvature different from the other (the radius of curvature is smaller) is clearly formed, that is, the ridge portion is The broken line 4d is constructed. By designing the fold line 4d, the outer seam side fitting portion 4 can be more easily specified at the bending start position when the seam is locked, and can be easily formed without ridges (ridges). It is easy to maintain linearity, and even if there is a positional shift due to the unconformity between the bottom layer of the roof (beam) and the support (tight frame), the offset of the baseline can be made inconspicuous, and the trim can be beautifully trimmed. The appearance of the roof covering.

然後,如同圖2的情況,外接縫側嵌合部4與內接縫側嵌合部5,係在內接縫側嵌合部5上覆蓋外接縫側嵌合部4後,再將外接縫側嵌合部4的左腳部4c',從圖中虛線所示位置朝A方向押下至實線所示位置,利用該左腳部4c'鎖緊位於內側的內接縫側嵌合部5之腳部5a,便可施行牢固的接縫鎖緊加工。Then, as in the case of FIG. 2, the outer seam side fitting portion 4 and the inner seam side fitting portion 5 cover the outer seam side fitting portion 4 on the inner seam side fitting portion 5, and then The left leg portion 4c' of the outer seam side fitting portion 4 is pushed downward in the direction A from the position shown by the broken line in the figure to the position shown by the solid line, and the inner leg joint side is locked by the left leg portion 4c'. The foot portion 5a of the joint portion 5 can perform a firm seam locking process.

本實施形態的屋頂建材中,實質支撐外接縫側嵌合部4與內接縫側嵌合部5的傾斜側板部2、2',基本上係如圖1所示,形成1~複數個小落差2a、2b、2a'、2b',且在與水平部3、3'相鄰接的上端部分,形成朝基底部1側凹陷之通稱「顎」的延伸凹部2c、2c',該等延伸凹部2c、2c'係如下述,具有供與從支座(緊框架)6的側板裁切立起的爪片7、7'能相卡合用的機能。In the roof building material of the present embodiment, the inclined side plate portions 2 and 2' which substantially support the outer seam side fitting portion 4 and the inner seam side fitting portion 5 are basically formed as shown in FIG. Small drops 2a, 2b, 2a', 2b', and upper end portions adjacent to the horizontal portions 3, 3' are formed with extending recesses 2c, 2c' which are generally referred to as "颚" which are recessed toward the base portion 1 side. The extending recesses 2c and 2c' have the function of being engageable with the claw pieces 7, 7' which are cut and raised from the side plates of the holder (tight frame) 6, as follows.

圖4所示係在屋頂底層所固定的支座(緊框架)6上,安裝著本實施形態的屋頂建材之狀態。由該圖中得知,該屋頂建材對支座(緊框架)6的安裝,係透過在該支座(緊框架)6二側面上部突設的爪片7、7'實施,此時,使該屋頂建材的基底部1掉落入於支座(緊框架)6的底部,同時使上述爪片7、7'卡止於與傾斜側板部2、2'相鄰接之水平部3、3'的上端所設置延伸凹部2c、2c'中而實施。Fig. 4 shows the state in which the roofing building material of the present embodiment is attached to the support (tight frame) 6 to which the bottom layer of the roof is fixed. As can be seen from the figure, the mounting of the roof building material to the support (tight frame) 6 is carried out by the claw pieces 7, 7' projecting from the upper side of the two sides of the support (tight frame) 6, at this time, The base portion 1 of the roof building material is dropped into the bottom of the support (tight frame) 6, while the claw pieces 7, 7' are locked to the horizontal portions 3, 3 adjacent to the inclined side plate portions 2, 2'. The upper end of the ' is provided in the extending recesses 2c, 2c'.

然後,依如上述,對先前所安裝之側屋頂建材的內接縫側嵌合部5,使接著欲施工之屋頂建材的外接縫側嵌合部4,從上方覆蓋被覆的方式嵌合。然後,利用未圖示電動接縫加工機(接縫),如圖2或圖3所示,藉由將外接縫側嵌合部4的右腳部4a、左腳部4c施行接縫鎖緊加工,外接縫側嵌合部4與內接縫側嵌合部5便如圖2或圖3中實線所示,形成相互確實嵌合狀態。Then, as described above, the inner seam side fitting portion 5 of the roof building material to be installed is fitted so as to cover the outer seam side fitting portion 4 of the roof building material to be applied from above. Then, the right foot portion 4a and the left leg portion 4c of the outer seam side fitting portion 4 are seam-locked by the electric seaming machine (joint) (not shown) as shown in Fig. 2 or Fig. 3 In the tightening process, the outer seam side fitting portion 4 and the inner seam side fitting portion 5 are formed to be in a true fitting state as shown by solid lines in Fig. 2 or Fig. 3 .

再者,圖3所示變化例,因為外接縫側嵌合部4的右腳部4a'與左腳部4c'、及內接縫側嵌合部5的腳部5a',形成傾斜站立,因而當使用具有一定原板寬度(例如762mm)的金屬板時,相較於將嵌合部的腳部略垂直站立的屋頂建材,腳部的板材較少便可完成,因而可增加至嵌合部的頂部之山高度,俾可提升整體屋頂建材對彎曲的剛性、強度。Further, in the modification shown in Fig. 3, the right leg portion 4a' and the left leg portion 4c' of the outer seam side fitting portion 4 and the leg portion 5a' of the inner seam side fitting portion 5 are formed to stand obliquely. Therefore, when a metal plate having a certain original plate width (for example, 762 mm) is used, the sheet material of the foot portion can be completed less than the roof building material in which the foot portion of the fitting portion is vertically stood, so that it can be added to the fitting. The height of the mountain at the top of the department can increase the rigidity and strength of the overall roof building materials.

其他,就本發明相關外接縫側嵌合部4、內接縫側嵌合部5及傾斜側板部2、2'的組合,尚有如圖5~10所示之實施形態。其中,如圖5所示,配設圖2所示之外接縫側嵌合部4與內接縫側嵌合部5,傾斜側板部2、2'的形狀呈1個小落差,且在與水平部3、3'相鄰接的上端部分,具有朝基底部1側凹陷的延伸凹部2c、2c'之例。Other combinations of the outer seam side fitting portion 4, the inner seam side fitting portion 5, and the inclined side plate portions 2, 2' according to the present invention are as shown in Figs. 5 to 10. As shown in Fig. 5, the outer seam side fitting portion 4 and the inner seam side fitting portion 5 shown in Fig. 2 are disposed, and the inclined side plate portions 2, 2' have a small drop shape, and The upper end portion adjacent to the horizontal portions 3, 3' has an example of extending recesses 2c, 2c' recessed toward the base portion 1 side.

圖6所示係該傾斜側板部2、2'的形狀呈2個小落差,且在與水平部3、3'相鄰接的上端部分,具有朝基底部1側凹陷的延伸凹部2c、2c',同時在基底部1相鄰接的下端之開始彎曲位置,設有朝基底部1側凹陷的大落差2d、2d'之例;圖7所示,係在圖6所示例中,外接縫側嵌合部4與內接縫側嵌合部5,具有圖3所示構造,且外接縫側嵌合部4與內接縫側嵌合部5的腳部4a'、4c'、5a'呈傾斜的例子。Fig. 6 shows that the inclined side plate portions 2, 2' have two small drop shapes, and the upper end portions adjacent to the horizontal portions 3, 3' have extended recesses 2c, 2c recessed toward the base portion 1 side. At the same time, at the beginning of the bending position of the lower end of the base portion 1 adjacent thereto, a large drop 2d, 2d' which is recessed toward the base portion 1 side is provided; and as shown in Fig. 6, the external connection is shown in Fig. 6. The slit side fitting portion 4 and the inner seam side fitting portion 5 have the structure shown in FIG. 3, and the outer seam side fitting portion 4 and the leg portions 4a', 4c' of the inner seam side fitting portion 5, 5a' is an example of a tilt.

圖8所示係傾斜側板部2、2'完全無設落差的情況例,圖9所示無延伸凹部,但位於與傾斜側板部2、2'的基底部1相鄰接之下端的開始彎曲位置,形成有大落差2d、2d'與1個小落差之例;圖10所示係對圖9所示之傾斜側板部2、2',配設圖3所示之腳部4a'、4c'、5a'呈傾斜的外接縫側嵌合部4與內接縫側嵌合部5之例。Fig. 8 shows an example in which the inclined side plate portions 2, 2' are completely free of a drop, and the non-extended recess portion shown in Fig. 9 is located at the beginning of the lower end adjacent to the base portion 1 of the inclined side plate portions 2, 2'. The position is formed with a large drop 2d, 2d' and a small drop; FIG. 10 shows the inclined side plate portions 2, 2' shown in FIG. 9, and the leg portions 4a', 4c shown in FIG. ', 5a' is an example in which the outer seam side fitting portion 4 and the inner seam side fitting portion 5 are inclined.

(產業上之可利用性)(industrial availability)

本發明係可利用為諸如一般住宅、學校、車庫、工廠、倉庫、店面、集合場、體育館等的屋頂覆蓋材。The present invention can be utilized as a roof covering such as a general house, a school, a garage, a factory, a warehouse, a storefront, a collection yard, a gymnasium, and the like.

1...基底部1. . . Base bottom

2、2'...傾斜側板部2, 2'. . . Tilted side panel

2a、2a'、2b、2b'...小落差2a, 2a', 2b, 2b'. . . Small drop

2c、2c'...延伸凹部2c, 2c'. . . Extended recess

2d、2d'...大落差2d, 2d'. . . Large drop

3、3'...水平部3, 3'. . . Horizontal department

4...外接縫側嵌合部4. . . Outer seam side fitting

4a、4a'...右腳部4a, 4a'. . . Right foot

4b...凸面形頭部4b. . . Convex head

4c、4c'...左腳部4c, 4c'. . . Left foot

4d...折線4d. . . Polyline

4e、4e'...延伸部4e, 4e'. . . Extension

5...內接縫側嵌合部5. . . Inner seam side fitting

5a、5a'...腳部5a, 5a'. . . Foot

5b...山形頭部5b. . . Yamagata head

5c...折回重疊部5c. . . Fold back overlap

5d、5d'...延伸部5d, 5d'. . . Extension

6...支座(緊框架)6. . . Support (tight frame)

7、7'...爪片7, 7'. . . Claw piece

圖1為本發明的嵌合式折板屋頂建材一實施形態的正視圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing an embodiment of a fitting type folding roof building material according to the present invention.

圖2為上述實施形態之屋頂建材,經接縫鎖緊加工後的內/外接縫側嵌合部之放大端面圖。Fig. 2 is an enlarged end elevational view showing the inner/outer seam side fitting portion after the seam locking processing of the roofing building material of the above embodiment.

圖3為上述實施形態之屋頂建材,經接縫鎖緊加工後的內/外接縫側嵌合部一變化例之放大端面圖。Fig. 3 is an enlarged end elevational view showing a modification of the inner/outer seam side fitting portion after the seam locking processing of the roofing building material of the above embodiment.

圖4為本發明的嵌合式折板屋頂建材之上述實施形態,安裝於支座(緊框架)上的狀態其中一部分的正視圖。Fig. 4 is a front elevational view showing a part of the above-described embodiment of the fitting type folding roof building material of the present invention, which is attached to a support (tight frame).

圖5為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 5 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖6為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 6 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖7為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 7 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖8為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 8 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖9為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 9 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖10為本發明的嵌合式折板屋頂建材再另一實施形態的正視圖。Fig. 10 is a front elevational view showing still another embodiment of the fitting type folding roof building material of the present invention.

圖11為習知例的圓形接縫式之嵌合式折板屋頂建材形態的正視圖。Fig. 11 is a front elevational view showing the form of a circular seam type of a fitting type folding roof building material according to a conventional example.

1...基底部1. . . Base bottom

2、2'...傾斜側板部2, 2'. . . Tilted side panel

2a、2a'、2b、2b'...小落差2a, 2a', 2b, 2b'. . . Small drop

2c、2c'...延伸凹部2c, 2c'. . . Extended recess

3、3'...水平部3, 3'. . . Horizontal department

4...外接縫側嵌合部4. . . Outer seam side fitting

5...內接縫側嵌合部5. . . Inner seam side fitting

Claims (9)

一種嵌合式折板屋頂建材,係由:造形成矩形金屬板寬度方向中央部的基底部;從該基底部的寬度方向二側端,朝各自的斜方向立起之傾斜側板部;從該等傾斜側板部上端部,分別朝水平方向延伸的水平部;及分別立設於該等水平部之自由端部的內接縫側嵌合部與外接縫側嵌合部所構成,並經由該等內/外接縫側嵌合部,將相鄰的金屬板彼此連結而成的嵌合式折板屋頂建材;其特徵在於:上述外接縫側嵌合部係由右腳部、凸面形頭部及左腳部所構成且呈截面略菇形;該右腳部係從上述水平部端緣站立;該凸面形頭部係連接於該右腳部之上端部且於頂部具有由曲率不同的凸條部所構成的折線;該左腳部係可進行在從該凸面形頭部下端之延伸部所延伸的位置處,藉由以上述凸條部為起點之彎折而將位於內側之內接縫側嵌合部的腳部沿著該左腳部鎖緊的接縫鎖緊加工;上述內接縫側嵌合部係由腳部及山形頭部所構成且呈截面略傘形;該腳部係從上述水平部端緣站立;該山形頭部係連接於該腳部之上端部。 A fitting type folding roof building material is a base portion formed in a central portion in a width direction of a rectangular metal plate; and an inclined side plate portion rising from a side end in a width direction of the base portion toward each of the oblique directions; a horizontal portion that extends in the horizontal direction at an upper end portion of the inclined side plate portion; and an inner seam side fitting portion and an outer seam side fitting portion that are respectively erected at the free end portions of the horizontal portions, and The inner/outer seam side fitting portion is a fitting type folding roof building material in which adjacent metal plates are connected to each other; wherein the outer seam side fitting portion is a right leg portion or a convex head portion And a left leg portion formed in a slightly mushroom shape; the right leg portion is standing from the edge of the horizontal portion; the convex head portion is connected to the upper end portion of the right leg portion and has a curvature different at the top portion a fold line formed by the ridge portion; the left leg portion can be located at a position extending from the extending portion of the lower end of the convex-shaped head portion, and is bent inside by the ridge portion as a starting point The foot of the seam side fitting portion is locked along the left leg portion a seam locking process; the inner seam side fitting portion is formed by a foot portion and a mountain-shaped head portion and has a slightly umbrella shape; the foot portion stands from the edge portion of the horizontal portion; the mountain-shaped head portion is connected to the The upper end of the foot. 如申請專利範圍第1項之嵌合式折板屋頂建材,其中,上述內接縫側嵌合部係於山形頭部的非腳部側折回而形成重疊部。 The fitting type folding roofing building material according to the first aspect of the invention, wherein the inner seam side fitting portion is folded back on the non-foot side of the mountain-shaped head portion to form an overlapping portion. 如申請專利範圍第2項之嵌合式折板屋頂建材,其中, 上述外接縫側嵌合部的右腳部及內接縫側嵌合部的腳部,係形成為從各水平部端緣分別朝傾斜站立。 For example, the chisel type folding roof building material of the second application patent scope, wherein The right leg portion of the outer seam side fitting portion and the leg portion of the inner seam side fitting portion are formed to stand obliquely from the respective edge portions of the horizontal portions. 如申請專利範圍第2項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在高度方向上形成1或複數小落差。 The fitting type folding roof building material according to the second aspect of the invention, wherein the inclined side plate portion is formed in a height direction by one or a plurality of small drops. 如申請專利範圍第3項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在高度方向上形成1或複數小落差。 The chisel type folding roof building material according to claim 3, wherein the inclined side plate portion is formed in a height direction by 1 or a plurality of small drops. 如申請專利範圍第4項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在鄰接基底部下端的開始彎曲位置處,形成朝基底部側凹陷的大落差。 The fitting type folding roofing building material according to the fourth aspect of the invention, wherein the inclined side plate portion forms a large difference in depression toward the base portion side at a position where the lower end portion of the base portion is adjacent to the bottom end portion. 如申請專利範圍第5項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在鄰接基底部下端的開始彎曲位置處,形成朝基底部側凹陷的大落差。 The fitting type folding roofing building material according to claim 5, wherein the inclined side plate portion is formed at a starting bending position adjacent to a lower end of the base portion to form a large difference in depression toward the base portion side. 如申請專利範圍第6項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在鄰接水平部的上端,形成朝基底部側凹陷的延伸凹部。 The fitting type folding roofing building material according to claim 6, wherein the inclined side plate portion is formed at an upper end adjacent to the horizontal portion, and an extending concave portion that is recessed toward the base portion side is formed. 如申請專利範圍第7項之嵌合式折板屋頂建材,其中,上述傾斜側板部係在鄰接水平部的上端,形成朝基底部側凹陷的延伸凹部。 The fitting type folding roofing building material according to claim 7, wherein the inclined side plate portion is formed at an upper end adjacent to the horizontal portion, and an extending concave portion that is recessed toward the base portion side is formed.
TW099112643A 2009-04-22 2010-04-22 Chimeric Folding Roofing Building Materials TWI460340B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009103863A JP5204031B2 (en) 2009-04-22 2009-04-22 Mating type folded roof material

Publications (2)

Publication Number Publication Date
TW201040364A TW201040364A (en) 2010-11-16
TWI460340B true TWI460340B (en) 2014-11-11

Family

ID=43010879

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099112643A TWI460340B (en) 2009-04-22 2010-04-22 Chimeric Folding Roofing Building Materials

Country Status (8)

Country Link
JP (1) JP5204031B2 (en)
KR (1) KR101319168B1 (en)
CN (1) CN102405323B (en)
AU (1) AU2010240349B2 (en)
MY (1) MY172145A (en)
SG (1) SG174437A1 (en)
TW (1) TWI460340B (en)
WO (1) WO2010122752A1 (en)

Families Citing this family (253)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9394608B2 (en) 2009-04-06 2016-07-19 Asm America, Inc. Semiconductor processing reactor and components thereof
KR20100133155A (en) 2009-06-11 2010-12-21 엘지전자 주식회사 A refrigerator comprising an ice making device
US8802201B2 (en) 2009-08-14 2014-08-12 Asm America, Inc. Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
JP5715460B2 (en) * 2010-06-28 2015-05-07 Jfe鋼板株式会社 Mating type folded roof material
US9312155B2 (en) 2011-06-06 2016-04-12 Asm Japan K.K. High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
US10854498B2 (en) 2011-07-15 2020-12-01 Asm Ip Holding B.V. Wafer-supporting device and method for producing same
US20130023129A1 (en) 2011-07-20 2013-01-24 Asm America, Inc. Pressure transmitter for a semiconductor processing environment
US9017481B1 (en) 2011-10-28 2015-04-28 Asm America, Inc. Process feed management for semiconductor substrate processing
TW201410949A (en) * 2012-09-07 2014-03-16 Liu rui yu Construction board structure improvement
US10714315B2 (en) 2012-10-12 2020-07-14 Asm Ip Holdings B.V. Semiconductor reaction chamber showerhead
US20160376700A1 (en) 2013-02-01 2016-12-29 Asm Ip Holding B.V. System for treatment of deposition reactor
JP6144530B2 (en) * 2013-04-22 2017-06-07 三晃金属工業株式会社 Claw suspension
US10683571B2 (en) 2014-02-25 2020-06-16 Asm Ip Holding B.V. Gas supply manifold and method of supplying gases to chamber using same
US10167557B2 (en) 2014-03-18 2019-01-01 Asm Ip Holding B.V. Gas distribution system, reactor including the system, and methods of using the same
US11015245B2 (en) 2014-03-19 2021-05-25 Asm Ip Holding B.V. Gas-phase reactor and system having exhaust plenum and components thereof
US10858737B2 (en) 2014-07-28 2020-12-08 Asm Ip Holding B.V. Showerhead assembly and components thereof
US9890456B2 (en) 2014-08-21 2018-02-13 Asm Ip Holding B.V. Method and system for in situ formation of gas-phase compounds
US10941490B2 (en) 2014-10-07 2021-03-09 Asm Ip Holding B.V. Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
US10276355B2 (en) 2015-03-12 2019-04-30 Asm Ip Holding B.V. Multi-zone reactor, system including the reactor, and method of using the same
US10458018B2 (en) 2015-06-26 2019-10-29 Asm Ip Holding B.V. Structures including metal carbide material, devices including the structures, and methods of forming same
US10600673B2 (en) 2015-07-07 2020-03-24 Asm Ip Holding B.V. Magnetic susceptor to baseplate seal
US10211308B2 (en) 2015-10-21 2019-02-19 Asm Ip Holding B.V. NbMC layers
US11139308B2 (en) 2015-12-29 2021-10-05 Asm Ip Holding B.V. Atomic layer deposition of III-V compounds to form V-NAND devices
US10529554B2 (en) 2016-02-19 2020-01-07 Asm Ip Holding B.V. Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US10190213B2 (en) 2016-04-21 2019-01-29 Asm Ip Holding B.V. Deposition of metal borides
US10865475B2 (en) 2016-04-21 2020-12-15 Asm Ip Holding B.V. Deposition of metal borides and silicides
US10367080B2 (en) 2016-05-02 2019-07-30 Asm Ip Holding B.V. Method of forming a germanium oxynitride film
US10032628B2 (en) 2016-05-02 2018-07-24 Asm Ip Holding B.V. Source/drain performance through conformal solid state doping
US11453943B2 (en) 2016-05-25 2022-09-27 Asm Ip Holding B.V. Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
US9859151B1 (en) 2016-07-08 2018-01-02 Asm Ip Holding B.V. Selective film deposition method to form air gaps
US10612137B2 (en) 2016-07-08 2020-04-07 Asm Ip Holdings B.V. Organic reactants for atomic layer deposition
US10714385B2 (en) 2016-07-19 2020-07-14 Asm Ip Holding B.V. Selective deposition of tungsten
KR102532607B1 (en) 2016-07-28 2023-05-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and method of operating the same
US9812320B1 (en) 2016-07-28 2017-11-07 Asm Ip Holding B.V. Method and apparatus for filling a gap
US9887082B1 (en) 2016-07-28 2018-02-06 Asm Ip Holding B.V. Method and apparatus for filling a gap
US10643826B2 (en) 2016-10-26 2020-05-05 Asm Ip Holdings B.V. Methods for thermally calibrating reaction chambers
US11532757B2 (en) 2016-10-27 2022-12-20 Asm Ip Holding B.V. Deposition of charge trapping layers
US10643904B2 (en) 2016-11-01 2020-05-05 Asm Ip Holdings B.V. Methods for forming a semiconductor device and related semiconductor device structures
US10714350B2 (en) 2016-11-01 2020-07-14 ASM IP Holdings, B.V. Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10229833B2 (en) 2016-11-01 2019-03-12 Asm Ip Holding B.V. Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
KR102546317B1 (en) 2016-11-15 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Gas supply unit and substrate processing apparatus including the same
KR20180068582A (en) 2016-12-14 2018-06-22 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11581186B2 (en) 2016-12-15 2023-02-14 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
KR20180070971A (en) 2016-12-19 2018-06-27 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US10269558B2 (en) 2016-12-22 2019-04-23 Asm Ip Holding B.V. Method of forming a structure on a substrate
US10867788B2 (en) 2016-12-28 2020-12-15 Asm Ip Holding B.V. Method of forming a structure on a substrate
US11390950B2 (en) 2017-01-10 2022-07-19 Asm Ip Holding B.V. Reactor system and method to reduce residue buildup during a film deposition process
US10655221B2 (en) 2017-02-09 2020-05-19 Asm Ip Holding B.V. Method for depositing oxide film by thermal ALD and PEALD
US10468261B2 (en) 2017-02-15 2019-11-05 Asm Ip Holding B.V. Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
US10529563B2 (en) 2017-03-29 2020-01-07 Asm Ip Holdings B.V. Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
KR102457289B1 (en) 2017-04-25 2022-10-21 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US10892156B2 (en) 2017-05-08 2021-01-12 Asm Ip Holding B.V. Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
US11306395B2 (en) 2017-06-28 2022-04-19 Asm Ip Holding B.V. Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
US10685834B2 (en) 2017-07-05 2020-06-16 Asm Ip Holdings B.V. Methods for forming a silicon germanium tin layer and related semiconductor device structures
KR20190009245A (en) 2017-07-18 2019-01-28 에이에스엠 아이피 홀딩 비.브이. Methods for forming a semiconductor device structure and related semiconductor device structures
US11374112B2 (en) 2017-07-19 2022-06-28 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US10541333B2 (en) 2017-07-19 2020-01-21 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US11018002B2 (en) 2017-07-19 2021-05-25 Asm Ip Holding B.V. Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
US10590535B2 (en) 2017-07-26 2020-03-17 Asm Ip Holdings B.V. Chemical treatment, deposition and/or infiltration apparatus and method for using the same
US10692741B2 (en) 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
US10770336B2 (en) 2017-08-08 2020-09-08 Asm Ip Holding B.V. Substrate lift mechanism and reactor including same
US11139191B2 (en) 2017-08-09 2021-10-05 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
US10249524B2 (en) 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
USD900036S1 (en) 2017-08-24 2020-10-27 Asm Ip Holding B.V. Heater electrical connector and adapter
US11830730B2 (en) 2017-08-29 2023-11-28 Asm Ip Holding B.V. Layer forming method and apparatus
US11295980B2 (en) 2017-08-30 2022-04-05 Asm Ip Holding B.V. Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
KR102491945B1 (en) 2017-08-30 2023-01-26 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11056344B2 (en) 2017-08-30 2021-07-06 Asm Ip Holding B.V. Layer forming method
US10844484B2 (en) 2017-09-22 2020-11-24 Asm Ip Holding B.V. Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US10658205B2 (en) 2017-09-28 2020-05-19 Asm Ip Holdings B.V. Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
US10403504B2 (en) 2017-10-05 2019-09-03 Asm Ip Holding B.V. Method for selectively depositing a metallic film on a substrate
US10319588B2 (en) 2017-10-10 2019-06-11 Asm Ip Holding B.V. Method for depositing a metal chalcogenide on a substrate by cyclical deposition
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
KR102443047B1 (en) 2017-11-16 2022-09-14 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
US10910262B2 (en) 2017-11-16 2021-02-02 Asm Ip Holding B.V. Method of selectively depositing a capping layer structure on a semiconductor device structure
KR102597978B1 (en) 2017-11-27 2023-11-06 에이에스엠 아이피 홀딩 비.브이. Storage device for storing wafer cassettes for use with batch furnaces
CN111344522B (en) 2017-11-27 2022-04-12 阿斯莫Ip控股公司 Including clean mini-environment device
US10872771B2 (en) 2018-01-16 2020-12-22 Asm Ip Holding B. V. Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
TW202325889A (en) 2018-01-19 2023-07-01 荷蘭商Asm 智慧財產控股公司 Deposition method
CN111630203A (en) 2018-01-19 2020-09-04 Asm Ip私人控股有限公司 Method for depositing gap filling layer by plasma auxiliary deposition
USD903477S1 (en) 2018-01-24 2020-12-01 Asm Ip Holdings B.V. Metal clamp
US11018047B2 (en) 2018-01-25 2021-05-25 Asm Ip Holding B.V. Hybrid lift pin
USD880437S1 (en) 2018-02-01 2020-04-07 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US11081345B2 (en) 2018-02-06 2021-08-03 Asm Ip Holding B.V. Method of post-deposition treatment for silicon oxide film
CN108166568B (en) * 2018-02-11 2022-05-06 成都市阳光电器工业有限公司 Assembled integrated pumping irrigation pump house
US10896820B2 (en) 2018-02-14 2021-01-19 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
EP3737779A1 (en) 2018-02-14 2020-11-18 ASM IP Holding B.V. A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US10731249B2 (en) 2018-02-15 2020-08-04 Asm Ip Holding B.V. Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
KR102636427B1 (en) 2018-02-20 2024-02-13 에이에스엠 아이피 홀딩 비.브이. Substrate processing method and apparatus
US10658181B2 (en) 2018-02-20 2020-05-19 Asm Ip Holding B.V. Method of spacer-defined direct patterning in semiconductor fabrication
US10975470B2 (en) 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11473195B2 (en) 2018-03-01 2022-10-18 Asm Ip Holding B.V. Semiconductor processing apparatus and a method for processing a substrate
US11114283B2 (en) 2018-03-16 2021-09-07 Asm Ip Holding B.V. Reactor, system including the reactor, and methods of manufacturing and using same
KR102646467B1 (en) 2018-03-27 2024-03-11 에이에스엠 아이피 홀딩 비.브이. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
US11230766B2 (en) 2018-03-29 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
US11088002B2 (en) 2018-03-29 2021-08-10 Asm Ip Holding B.V. Substrate rack and a substrate processing system and method
KR102501472B1 (en) 2018-03-30 2023-02-20 에이에스엠 아이피 홀딩 비.브이. Substrate processing method
TW202344708A (en) 2018-05-08 2023-11-16 荷蘭商Asm Ip私人控股有限公司 Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
TWI816783B (en) 2018-05-11 2023-10-01 荷蘭商Asm 智慧財產控股公司 Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures
KR102596988B1 (en) 2018-05-28 2023-10-31 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
US11718913B2 (en) 2018-06-04 2023-08-08 Asm Ip Holding B.V. Gas distribution system and reactor system including same
US11270899B2 (en) 2018-06-04 2022-03-08 Asm Ip Holding B.V. Wafer handling chamber with moisture reduction
US11286562B2 (en) 2018-06-08 2022-03-29 Asm Ip Holding B.V. Gas-phase chemical reactor and method of using same
US10797133B2 (en) 2018-06-21 2020-10-06 Asm Ip Holding B.V. Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
KR102568797B1 (en) 2018-06-21 2023-08-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing system
WO2020003000A1 (en) 2018-06-27 2020-01-02 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US11492703B2 (en) 2018-06-27 2022-11-08 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
US10612136B2 (en) 2018-06-29 2020-04-07 ASM IP Holding, B.V. Temperature-controlled flange and reactor system including same
KR20200002519A (en) 2018-06-29 2020-01-08 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10388513B1 (en) 2018-07-03 2019-08-20 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10755922B2 (en) 2018-07-03 2020-08-25 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10767789B2 (en) 2018-07-16 2020-09-08 Asm Ip Holding B.V. Diaphragm valves, valve components, and methods for forming valve components
US11053591B2 (en) 2018-08-06 2021-07-06 Asm Ip Holding B.V. Multi-port gas injection system and reactor system including same
US10883175B2 (en) 2018-08-09 2021-01-05 Asm Ip Holding B.V. Vertical furnace for processing substrates and a liner for use therein
US10829852B2 (en) 2018-08-16 2020-11-10 Asm Ip Holding B.V. Gas distribution device for a wafer processing apparatus
US11430674B2 (en) 2018-08-22 2022-08-30 Asm Ip Holding B.V. Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
KR20200030162A (en) 2018-09-11 2020-03-20 에이에스엠 아이피 홀딩 비.브이. Method for deposition of a thin film
US11024523B2 (en) 2018-09-11 2021-06-01 Asm Ip Holding B.V. Substrate processing apparatus and method
US11049751B2 (en) 2018-09-14 2021-06-29 Asm Ip Holding B.V. Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
CN110970344A (en) 2018-10-01 2020-04-07 Asm Ip控股有限公司 Substrate holding apparatus, system including the same, and method of using the same
US11232963B2 (en) 2018-10-03 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
KR102592699B1 (en) 2018-10-08 2023-10-23 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same
US10847365B2 (en) 2018-10-11 2020-11-24 Asm Ip Holding B.V. Method of forming conformal silicon carbide film by cyclic CVD
US10811256B2 (en) 2018-10-16 2020-10-20 Asm Ip Holding B.V. Method for etching a carbon-containing feature
KR102605121B1 (en) 2018-10-19 2023-11-23 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
KR102546322B1 (en) 2018-10-19 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
USD948463S1 (en) 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US11087997B2 (en) 2018-10-31 2021-08-10 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
KR20200051105A (en) 2018-11-02 2020-05-13 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and substrate processing apparatus including the same
US11572620B2 (en) 2018-11-06 2023-02-07 Asm Ip Holding B.V. Methods for selectively depositing an amorphous silicon film on a substrate
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US10818758B2 (en) 2018-11-16 2020-10-27 Asm Ip Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
US10847366B2 (en) 2018-11-16 2020-11-24 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US11217444B2 (en) 2018-11-30 2022-01-04 Asm Ip Holding B.V. Method for forming an ultraviolet radiation responsive metal oxide-containing film
KR102636428B1 (en) 2018-12-04 2024-02-13 에이에스엠 아이피 홀딩 비.브이. A method for cleaning a substrate processing apparatus
WO2020117036A1 (en) * 2018-12-07 2020-06-11 Lamitec S.A. De C.V. Panel with a securing mechanism
US11158513B2 (en) 2018-12-13 2021-10-26 Asm Ip Holding B.V. Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
JP2020096183A (en) 2018-12-14 2020-06-18 エーエスエム・アイピー・ホールディング・ベー・フェー Method of forming device structure using selective deposition of gallium nitride, and system for the same
TWI819180B (en) 2019-01-17 2023-10-21 荷蘭商Asm 智慧財產控股公司 Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
KR20200091543A (en) 2019-01-22 2020-07-31 에이에스엠 아이피 홀딩 비.브이. Semiconductor processing device
CN111524788B (en) 2019-02-01 2023-11-24 Asm Ip私人控股有限公司 Method for topologically selective film formation of silicon oxide
TW202104632A (en) 2019-02-20 2021-02-01 荷蘭商Asm Ip私人控股有限公司 Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
KR20200102357A (en) 2019-02-20 2020-08-31 에이에스엠 아이피 홀딩 비.브이. Apparatus and methods for plug fill deposition in 3-d nand applications
TW202044325A (en) 2019-02-20 2020-12-01 荷蘭商Asm Ip私人控股有限公司 Method of filling a recess formed within a surface of a substrate, semiconductor structure formed according to the method, and semiconductor processing apparatus
KR102626263B1 (en) 2019-02-20 2024-01-16 에이에스엠 아이피 홀딩 비.브이. Cyclical deposition method including treatment step and apparatus for same
TW202100794A (en) 2019-02-22 2021-01-01 荷蘭商Asm Ip私人控股有限公司 Substrate processing apparatus and method for processing substrate
KR20200108243A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. Structure Including SiOC Layer and Method of Forming Same
KR20200108242A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer
KR20200108248A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
JP2020167398A (en) 2019-03-28 2020-10-08 エーエスエム・アイピー・ホールディング・ベー・フェー Door opener and substrate processing apparatus provided therewith
KR20200116855A (en) 2019-04-01 2020-10-13 에이에스엠 아이피 홀딩 비.브이. Method of manufacturing semiconductor device
KR20200123380A (en) 2019-04-19 2020-10-29 에이에스엠 아이피 홀딩 비.브이. Layer forming method and apparatus
KR20200125453A (en) 2019-04-24 2020-11-04 에이에스엠 아이피 홀딩 비.브이. Gas-phase reactor system and method of using same
KR20200130121A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Chemical source vessel with dip tube
KR20200130118A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Method for Reforming Amorphous Carbon Polymer Film
KR20200130652A (en) 2019-05-10 2020-11-19 에이에스엠 아이피 홀딩 비.브이. Method of depositing material onto a surface and structure formed according to the method
JP2020188255A (en) 2019-05-16 2020-11-19 エーエスエム アイピー ホールディング ビー.ブイ. Wafer boat handling device, vertical batch furnace, and method
USD947913S1 (en) 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD935572S1 (en) 2019-05-24 2021-11-09 Asm Ip Holding B.V. Gas channel plate
USD922229S1 (en) 2019-06-05 2021-06-15 Asm Ip Holding B.V. Device for controlling a temperature of a gas supply unit
KR20200141003A (en) 2019-06-06 2020-12-17 에이에스엠 아이피 홀딩 비.브이. Gas-phase reactor system including a gas detector
KR20200143254A (en) 2019-06-11 2020-12-23 에이에스엠 아이피 홀딩 비.브이. Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method
USD944946S1 (en) 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD931978S1 (en) 2019-06-27 2021-09-28 Asm Ip Holding B.V. Showerhead vacuum transport
KR20210005515A (en) 2019-07-03 2021-01-14 에이에스엠 아이피 홀딩 비.브이. Temperature control assembly for substrate processing apparatus and method of using same
JP2021015791A (en) 2019-07-09 2021-02-12 エーエスエム アイピー ホールディング ビー.ブイ. Plasma device and substrate processing method using coaxial waveguide
CN112216646A (en) 2019-07-10 2021-01-12 Asm Ip私人控股有限公司 Substrate supporting assembly and substrate processing device comprising same
KR20210010307A (en) 2019-07-16 2021-01-27 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR20210010816A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Radical assist ignition plasma system and method
KR20210010820A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Methods of forming silicon germanium structures
US11643724B2 (en) 2019-07-18 2023-05-09 Asm Ip Holding B.V. Method of forming structures using a neutral beam
CN112242296A (en) 2019-07-19 2021-01-19 Asm Ip私人控股有限公司 Method of forming topologically controlled amorphous carbon polymer films
CN112309843A (en) 2019-07-29 2021-02-02 Asm Ip私人控股有限公司 Selective deposition method for achieving high dopant doping
CN112309900A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112309899A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
US11587815B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587814B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11227782B2 (en) 2019-07-31 2022-01-18 Asm Ip Holding B.V. Vertical batch furnace assembly
KR20210018759A (en) 2019-08-05 2021-02-18 에이에스엠 아이피 홀딩 비.브이. Liquid level sensor for a chemical source vessel
USD965524S1 (en) 2019-08-19 2022-10-04 Asm Ip Holding B.V. Susceptor support
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
JP2021031769A (en) 2019-08-21 2021-03-01 エーエスエム アイピー ホールディング ビー.ブイ. Production apparatus of mixed gas of film deposition raw material and film deposition apparatus
KR20210024423A (en) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for forming a structure with a hole
USD940837S1 (en) 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD949319S1 (en) 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
USD930782S1 (en) 2019-08-22 2021-09-14 Asm Ip Holding B.V. Gas distributor
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
KR20210024420A (en) 2019-08-23 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
KR20210029090A (en) 2019-09-04 2021-03-15 에이에스엠 아이피 홀딩 비.브이. Methods for selective deposition using a sacrificial capping layer
KR20210029663A (en) 2019-09-05 2021-03-16 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11562901B2 (en) 2019-09-25 2023-01-24 Asm Ip Holding B.V. Substrate processing method
CN112593212B (en) 2019-10-02 2023-12-22 Asm Ip私人控股有限公司 Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process
TW202129060A (en) 2019-10-08 2021-08-01 荷蘭商Asm Ip控股公司 Substrate processing device, and substrate processing method
KR20210043460A (en) 2019-10-10 2021-04-21 에이에스엠 아이피 홀딩 비.브이. Method of forming a photoresist underlayer and structure including same
KR20210045930A (en) 2019-10-16 2021-04-27 에이에스엠 아이피 홀딩 비.브이. Method of Topology-Selective Film Formation of Silicon Oxide
US11637014B2 (en) 2019-10-17 2023-04-25 Asm Ip Holding B.V. Methods for selective deposition of doped semiconductor material
KR20210047808A (en) 2019-10-21 2021-04-30 에이에스엠 아이피 홀딩 비.브이. Apparatus and methods for selectively etching films
US11646205B2 (en) 2019-10-29 2023-05-09 Asm Ip Holding B.V. Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
KR20210054983A (en) 2019-11-05 2021-05-14 에이에스엠 아이피 홀딩 비.브이. Structures with doped semiconductor layers and methods and systems for forming same
US11501968B2 (en) 2019-11-15 2022-11-15 Asm Ip Holding B.V. Method for providing a semiconductor device with silicon filled gaps
KR20210062561A (en) 2019-11-20 2021-05-31 에이에스엠 아이피 홀딩 비.브이. Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
KR20210065848A (en) 2019-11-26 2021-06-04 에이에스엠 아이피 홀딩 비.브이. Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
CN112951697A (en) 2019-11-26 2021-06-11 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112885692A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112885693A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
JP2021090042A (en) 2019-12-02 2021-06-10 エーエスエム アイピー ホールディング ビー.ブイ. Substrate processing apparatus and substrate processing method
KR20210070898A (en) 2019-12-04 2021-06-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
TW202125596A (en) 2019-12-17 2021-07-01 荷蘭商Asm Ip私人控股有限公司 Method of forming vanadium nitride layer and structure including the vanadium nitride layer
KR20210080214A (en) 2019-12-19 2021-06-30 에이에스엠 아이피 홀딩 비.브이. Methods for filling a gap feature on a substrate and related semiconductor structures
JP2021109175A (en) 2020-01-06 2021-08-02 エーエスエム・アイピー・ホールディング・ベー・フェー Gas supply assembly, components thereof, and reactor system including the same
KR20210095050A (en) 2020-01-20 2021-07-30 에이에스엠 아이피 홀딩 비.브이. Method of forming thin film and method of modifying surface of thin film
TW202130846A (en) 2020-02-03 2021-08-16 荷蘭商Asm Ip私人控股有限公司 Method of forming structures including a vanadium or indium layer
TW202146882A (en) 2020-02-04 2021-12-16 荷蘭商Asm Ip私人控股有限公司 Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber
US11776846B2 (en) 2020-02-07 2023-10-03 Asm Ip Holding B.V. Methods for depositing gap filling fluids and related systems and devices
US11781243B2 (en) 2020-02-17 2023-10-10 Asm Ip Holding B.V. Method for depositing low temperature phosphorous-doped silicon
US11876356B2 (en) 2020-03-11 2024-01-16 Asm Ip Holding B.V. Lockout tagout assembly and system and method of using same
KR20210116240A (en) 2020-03-11 2021-09-27 에이에스엠 아이피 홀딩 비.브이. Substrate handling device with adjustable joints
KR20210117157A (en) 2020-03-12 2021-09-28 에이에스엠 아이피 홀딩 비.브이. Method for Fabricating Layer Structure Having Target Topological Profile
KR20210124042A (en) 2020-04-02 2021-10-14 에이에스엠 아이피 홀딩 비.브이. Thin film forming method
TW202146689A (en) 2020-04-03 2021-12-16 荷蘭商Asm Ip控股公司 Method for forming barrier layer and method for manufacturing semiconductor device
TW202145344A (en) 2020-04-08 2021-12-01 荷蘭商Asm Ip私人控股有限公司 Apparatus and methods for selectively etching silcon oxide films
US11821078B2 (en) 2020-04-15 2023-11-21 Asm Ip Holding B.V. Method for forming precoat film and method for forming silicon-containing film
KR20210132600A (en) 2020-04-24 2021-11-04 에이에스엠 아이피 홀딩 비.브이. Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element
US11898243B2 (en) 2020-04-24 2024-02-13 Asm Ip Holding B.V. Method of forming vanadium nitride-containing layer
KR20210132605A (en) 2020-04-24 2021-11-04 에이에스엠 아이피 홀딩 비.브이. Vertical batch furnace assembly comprising a cooling gas supply
KR20210134226A (en) 2020-04-29 2021-11-09 에이에스엠 아이피 홀딩 비.브이. Solid source precursor vessel
KR20210134869A (en) 2020-05-01 2021-11-11 에이에스엠 아이피 홀딩 비.브이. Fast FOUP swapping with a FOUP handler
KR20210141379A (en) 2020-05-13 2021-11-23 에이에스엠 아이피 홀딩 비.브이. Laser alignment fixture for a reactor system
KR20210143653A (en) 2020-05-19 2021-11-29 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR20210145078A (en) 2020-05-21 2021-12-01 에이에스엠 아이피 홀딩 비.브이. Structures including multiple carbon layers and methods of forming and using same
TW202201602A (en) 2020-05-29 2022-01-01 荷蘭商Asm Ip私人控股有限公司 Substrate processing device
TW202218133A (en) 2020-06-24 2022-05-01 荷蘭商Asm Ip私人控股有限公司 Method for forming a layer provided with silicon
TW202217953A (en) 2020-06-30 2022-05-01 荷蘭商Asm Ip私人控股有限公司 Substrate processing method
TW202219628A (en) 2020-07-17 2022-05-16 荷蘭商Asm Ip私人控股有限公司 Structures and methods for use in photolithography
TW202204662A (en) 2020-07-20 2022-02-01 荷蘭商Asm Ip私人控股有限公司 Method and system for depositing molybdenum layers
KR20220027026A (en) 2020-08-26 2022-03-07 에이에스엠 아이피 홀딩 비.브이. Method and system for forming metal silicon oxide and metal silicon oxynitride
USD990534S1 (en) 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
USD1012873S1 (en) 2020-09-24 2024-01-30 Asm Ip Holding B.V. Electrode for semiconductor processing apparatus
TW202229613A (en) 2020-10-14 2022-08-01 荷蘭商Asm Ip私人控股有限公司 Method of depositing material on stepped structure
KR20220053482A (en) 2020-10-22 2022-04-29 에이에스엠 아이피 홀딩 비.브이. Method of depositing vanadium metal, structure, device and a deposition assembly
TW202223136A (en) 2020-10-28 2022-06-16 荷蘭商Asm Ip私人控股有限公司 Method for forming layer on substrate, and semiconductor processing system
TW202235675A (en) 2020-11-30 2022-09-16 荷蘭商Asm Ip私人控股有限公司 Injector, and substrate processing apparatus
US11946137B2 (en) 2020-12-16 2024-04-02 Asm Ip Holding B.V. Runout and wobble measurement fixtures
TW202231903A (en) 2020-12-22 2022-08-16 荷蘭商Asm Ip私人控股有限公司 Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate
USD980813S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD981973S1 (en) 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus
USD980814S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
USD990441S1 (en) 2021-09-07 2023-06-27 Asm Ip Holding B.V. Gas flow control plate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09184252A (en) * 1995-12-28 1997-07-15 Douichi Kinzoku Kogyo Kk Roof board and clip tingle for arch-form roof
JP2002097754A (en) * 2000-09-26 2002-04-05 Sumitomo Metal Steel Products Inc Roofing structure and retaining metal tools and roofing materials
JP2003253819A (en) * 2002-03-04 2003-09-10 Maruichi:Kk Roof structure, roof plate, and roof plate fixture

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057624U (en) * 1983-09-28 1985-04-22 三晃金属工業株式会社 Mating enclosure
JPH0384252A (en) * 1989-08-28 1991-04-09 Nippon T M I:Kk Linear drive actuator
JP3047319B2 (en) * 1996-06-03 2000-05-29 元旦ビューティ工業株式会社 Exterior materials for buildings and exterior structures of buildings
JP2001132173A (en) 1999-08-23 2001-05-15 Sanko Metal Ind Co Ltd Roof board material
KR200247950Y1 (en) 2001-06-13 2001-10-29 (주)동성에스엔피 Connection device for panel for construction
KR101209969B1 (en) * 2006-05-09 2012-12-07 가부시키가이샤 미야텍 Water-proof connection structure for metal shingle
CN200955225Y (en) * 2006-09-21 2007-10-03 百安力钢结构应用科技有限公司 Roof board
CN101294437B (en) * 2007-04-26 2010-05-26 百安力钢结构应用科技有限公司 Latching structure for roof plate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09184252A (en) * 1995-12-28 1997-07-15 Douichi Kinzoku Kogyo Kk Roof board and clip tingle for arch-form roof
JP2002097754A (en) * 2000-09-26 2002-04-05 Sumitomo Metal Steel Products Inc Roofing structure and retaining metal tools and roofing materials
JP2003253819A (en) * 2002-03-04 2003-09-10 Maruichi:Kk Roof structure, roof plate, and roof plate fixture

Also Published As

Publication number Publication date
CN102405323A (en) 2012-04-04
MY172145A (en) 2019-11-14
TW201040364A (en) 2010-11-16
JP2010255218A (en) 2010-11-11
SG174437A1 (en) 2011-10-28
CN102405323B (en) 2014-09-10
AU2010240349A1 (en) 2011-10-13
AU2010240349B2 (en) 2014-02-13
KR101319168B1 (en) 2013-10-16
JP5204031B2 (en) 2013-06-05
WO2010122752A1 (en) 2010-10-28
KR20110134893A (en) 2011-12-15

Similar Documents

Publication Publication Date Title
TWI460340B (en) Chimeric Folding Roofing Building Materials
JP2002513106A (en) Rain gutters and frames for roof penetration buildings
JP5715460B2 (en) Mating type folded roof material
JPH0693687A (en) Vertically roofed roof structure and execution thereof
JP2002097754A (en) Roofing structure and retaining metal tools and roofing materials
JP5284682B2 (en) Shimoya waterproof gasket, seal structure of outer wall joint using the same, and sealing method of outer wall joint
JP6628594B2 (en) Folded plate roof repair metal fittings
JP2746542B2 (en) Standard-size horizontal roofing exterior material and manufacturing equipment for fixed-size exterior material
JP5468677B2 (en) Roofing construction method for mated folded plate roofing materials
JP6928433B2 (en) Connection structure of metal vertical roofing material and metal vertical roofing material
JP3185418U (en) Yokohama roofing material
JP6126721B2 (en) Yokohama roofing material
JP3099587U (en) Roofing material
JP2583353Y2 (en) Sheet metal corner ridge tile
JP2502888B2 (en) Vertical roof exterior structure
JP4012768B2 (en) Draining material
JPH0613295Y2 (en) Folded plate structure roof
WO2009095694A1 (en) Apron flashing for window
JP2023073106A (en) Roof material, tight frame, roof structure, and construction method of roof structure
JPS6022166Y2 (en) roof shingle connection device
JP3067912U (en) Mating type folded roof
JP5591735B2 (en) Mating type folded plate roof bracket
JP5802029B2 (en) Metal roofing material and its laying structure
JP3947534B2 (en) Folding plate roof mounting structure
JPH0715916U (en) Keraba roof tile made of sheet metal