TWI455980B - 正型感光性樹脂組成物 - Google Patents

正型感光性樹脂組成物 Download PDF

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Publication number
TWI455980B
TWI455980B TW099101537A TW99101537A TWI455980B TW I455980 B TWI455980 B TW I455980B TW 099101537 A TW099101537 A TW 099101537A TW 99101537 A TW99101537 A TW 99101537A TW I455980 B TWI455980 B TW I455980B
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Taiwan
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group
constituent unit
carbon atoms
component
mass
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TW099101537A
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English (en)
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TW201031703A (en
Inventor
Hiroyuki Taguchi
Yoshinori Nito
Yukihiro Kato
Shuichi Takahashi
Toshiya Okamura
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Nof Corp
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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Health & Medical Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)

Claims (3)

  1. 一種感光性樹脂組成物，其係由成分(A)、(B)及(C)所組成，其特徵為，成分(A)係由下述構成單位所組成的共聚物：由下述式(1)所示之反丁烯二酸(fumaric acid)二酯單體所衍生的構成單位(a1)；由下述式(2)所示之芳香族乙烯(vinyl)單體所衍生的構成單位(a2)；由下述式(3)所示之α,β-不飽和羧酸單體所衍生的構成單位(a3)；及由下述式(4)所示之(甲基)丙烯酸酯單體所衍生的構成單位(a4)，該共聚物中，構成單位(a1)與構成單位(a2)之合計量在該成分(A)中為40至85質量%，構成單位(a3)與構成單位(a4)之質量比(a4)/(a3)為0.2至7.0， 式中，R1 及R2 係各自為碳數3至8之分支烷基、碳數4至12之環烷基或經取代的分支之環烷基 式中，R3 為氫原子或甲基；R4 為碳數6至12之芳香族烴基 式中之R5 為氫原子、甲基或羧甲基 式中之R6 為氫原子或甲基；R7 為碳數6至12之芳香族烴基、碳數1至12之烷基、碳數1至12之分支烷基、碳數2至12之羥烷基或主環(principle ring)構成碳數為5至12之脂環式烴基成分(B)係將具有羥基的酚性化合物與醌二疊氮化合物予以酯化反應所得，具有醌二疊氮基(quinonediazide group)的感光劑，成分(C)係具有2個以上環氧基的硬化劑，相對於成分(A)100質量份，成分(B)及(C)之構成比率為：(B)為5至50質量份及(C)為1至40質量份。
  2. 一種平面顯示器，其係具有將如申請專利範圍第1項之感光性樹脂組成物予以硬化之層。
  3. 一種半導體裝置，其係具有將如申請專利範圍第1項之感光性樹脂組成物予以硬化之層。
TW099101537A 2009-02-09 2010-01-20 正型感光性樹脂組成物 TWI455980B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009027641A JP5338352B2 (ja) 2009-02-09 2009-02-09 ポジ型感光性樹脂組成物

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TW201031703A TW201031703A (en) 2010-09-01
TWI455980B true TWI455980B (zh) 2014-10-11

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JP (1) JP5338352B2 (zh)
KR (1) KR101312603B1 (zh)
CN (1) CN101799627B (zh)
TW (1) TWI455980B (zh)

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JP5526693B2 (ja) * 2009-10-09 2014-06-18 日油株式会社 感光性樹脂組成物およびその用途
JP5672827B2 (ja) * 2010-08-03 2015-02-18 日油株式会社 感光性樹脂組成物及びその用途
JP5736718B2 (ja) * 2010-10-18 2015-06-17 Jsr株式会社 感放射線性樹脂組成物、硬化膜及びその形成方法
JP5625751B2 (ja) * 2010-10-29 2014-11-19 東ソー株式会社 フラットパネルディスプレイ用耐熱透明プラスチック基板
JP5691657B2 (ja) * 2011-03-04 2015-04-01 日油株式会社 感光性樹脂組成物およびその用途
JP5659896B2 (ja) * 2011-03-18 2015-01-28 日油株式会社 感光性樹脂組成物およびその用途
JP5729079B2 (ja) * 2011-03-28 2015-06-03 Jsr株式会社 液浸露光用感放射線性樹脂組成物
WO2012176750A1 (ja) * 2011-06-20 2012-12-27 日本化薬株式会社 ネガ型感光性樹脂組成物及びその硬化物
JP2013130816A (ja) * 2011-12-22 2013-07-04 Nippon Zeon Co Ltd 永久膜用樹脂組成物及び電子部品
JP5884551B2 (ja) * 2012-02-27 2016-03-15 日油株式会社 感光性樹脂組成物およびその用途
JP5851307B2 (ja) * 2012-03-29 2016-02-03 東京応化工業株式会社 遮光層形成用感光性基材組成物の製造方法
CN103376650B (zh) * 2012-04-25 2016-03-02 东京应化工业株式会社 遮光层形成用感光性基材组合物的制造方法
JP6326824B2 (ja) * 2014-01-15 2018-05-23 日油株式会社 感光性樹脂組成物およびその用途
JP6248725B2 (ja) * 2014-03-17 2017-12-20 日油株式会社 感光性樹脂組成物及びその用途
JP6287652B2 (ja) * 2014-07-10 2018-03-07 日油株式会社 感光性樹脂組成物およびその用途
KR101813911B1 (ko) * 2015-03-05 2018-01-02 동우 화인켐 주식회사 네가티브형 감광성 수지 조성물
KR20160111805A (ko) * 2015-03-17 2016-09-27 동우 화인켐 주식회사 감광성 수지 조성물, 이로부터 형성된 광경화 패턴 및 이를 포함하는 화상 표시 장치
CN107422605B (zh) * 2017-08-02 2020-05-05 京东方科技集团股份有限公司 正性光刻胶组合物、过孔的形成方法、显示基板及显示装置
KR20190043303A (ko) * 2017-10-18 2019-04-26 동우 화인켐 주식회사 착색 감광성 수지 조성물의 전기적 특성을 측정하기 위한 평가 셀의 제조방법
JP2020076945A (ja) * 2018-09-21 2020-05-21 旭化成株式会社 感光性樹脂組成物
JP7224844B2 (ja) * 2018-10-16 2023-02-20 太陽ホールディングス株式会社 感光性樹脂組成物、ドライフィルム、硬化物および電子部品

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TW574615B (en) * 2001-09-27 2004-02-01 Clariant Int Ltd Photosensitive resin composition
TW200307722A (en) * 2002-05-24 2003-12-16 Dainippon Printing Co Ltd Photocurable resin composition for forming overcoats, RGB pixels, black matrixes or spacers in color filter production, and color filters

Also Published As

Publication number Publication date
CN101799627A (zh) 2010-08-11
CN101799627B (zh) 2013-07-17
JP5338352B2 (ja) 2013-11-13
KR101312603B1 (ko) 2013-09-30
KR20100091115A (ko) 2010-08-18
TW201031703A (en) 2010-09-01
JP2010181827A (ja) 2010-08-19

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