TWI447878B - 增加通路及降低電阻之電晶體連接結構 - Google Patents
增加通路及降低電阻之電晶體連接結構 Download PDFInfo
- Publication number
- TWI447878B TWI447878B TW099116458A TW99116458A TWI447878B TW I447878 B TWI447878 B TW I447878B TW 099116458 A TW099116458 A TW 099116458A TW 99116458 A TW99116458 A TW 99116458A TW I447878 B TWI447878 B TW I447878B
- Authority
- TW
- Taiwan
- Prior art keywords
- soldering
- medium
- wafer
- lead frame
- area
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 22
- 238000005476 soldering Methods 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 16
- 229910000679 solder Inorganic materials 0.000 claims description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 230000006854 communication Effects 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 17
- 229910052782 aluminium Inorganic materials 0.000 description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 15
- 238000003466 welding Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49517—Additional leads
- H01L23/49524—Additional leads the additional leads being a tape carrier or flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49517—Additional leads
- H01L23/4952—Additional leads the additional leads being a bump or a wire
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
- H01L23/49562—Geometry of the lead-frame for devices being provided for in H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
- H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L24/80 - H01L24/90
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/37124—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/4005—Shape
- H01L2224/4009—Loop shape
- H01L2224/40091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45014—Ribbon connectors, e.g. rectangular cross-section
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48699—Principal constituent of the connecting portion of the wire connector being Aluminium (Al)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/4901—Structure
- H01L2224/4903—Connectors having different sizes, e.g. different diameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/4905—Shape
- H01L2224/49051—Connectors having different shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/494—Connecting portions
- H01L2224/4941—Connecting portions the connecting portions being stacked
- H01L2224/49425—Wedge bonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
- Lead Frames For Integrated Circuits (AREA)
Description
本發明係有關一種電晶體連接結構,尤指一種能明顯增加電訊連通通路、降低電阻及提高電訊傳輸速率之電晶體連接結構。
按,習用電晶體連接結構,請參閱第1圖、第2圖及第3圖所示,係利用一連通介物(3)連接一個或數個晶片(1)與導線架(2)以達到電訊之連通,其中業界使用來做為連通介物(3)的原料包括有金、銅及鋁,依其製造形狀而稱包括有金線、銅線、鋁線、鋁帶或沖壓銅片等;然而在連接過程中,由於必需顧及後續封裝的巨大衝力、避免暇疵品產生及方便加工作業,在將連通介物(3)焊設於晶片(1)及導線架(2)上時,往往需要有較寬的可焊設區域(11),相對的也能使電訊的連通較多且較快,然而,一般用於連通介物(3)之金線、銅線、鋁線、鋁帶或沖壓銅片的體積都非常的細薄;換言之,電訊藉以通過的通路面積(31)也會非常的窄且不及於連通介物(3)與晶片(1)及導線架(2)的焊設區域(12、21)面積,在此情況下,往往造成電訊在連通的過程中產生巨大的電阻而減緩電訊傳輸速率,如此成為業界相當棘手的問題。
因此為有效解決上述電阻過高及傳輸速率過慢等缺失,本案發明人乃研發出此一利用藉由增加連通再介物的結構,除能有效增加電訊連通的通路及擴大電訊通過之介面外,相對更能降低電阻及提高電訊傳輸速率。
本發明可增加通路及降低電阻之電晶體連接結構,主要係利用於連通介物上增加至少一層之連通再介物的結構特徵,藉以有效增加電訊連通之通路及擴大電訊通過之介面外,進而有效降低電阻及提高電訊傳輸速率等效果為其主要發明者。
茲依附圖實施例將本發明之結構特徵及其他之作用、目的詳細說明如下:請參閱第4圖所示,係包括至少一晶片(4),至少一導線架(5)及至少一連通介物(6)與至少一連通再介物(7),其中:在該晶片(4)之可選擇面上設有可焊設區域(41),主要係提供連通介物(6)之第一焊接點(61)焊設於晶片(4)上做為電訊導通之用,而晶片(1)上與連通介物(6)之第一焊接點(61)實際焊設之區塊我們稱之為第一焊設區域(42);在該導線架(5)之可選擇面上亦可供連通介物(6)之第二焊接點(62)焊設之,以做為電訊導通之用,而導線架(5)上與連通介物(6)之第二焊接點(62)實際焊接之區塊我們稱之第二焊設區域(51);該連通介物(6)之材質係可為金、銅及鋁等導通性佳的金屬,其形態可為線狀、帶狀、片狀等,依其材質及形態可概分為金線、銅線、鋁線、鋁帶及沖壓銅片等,主要係於連通介物(6)之兩端分別設有第一焊接點(61)與第二焊接點(62),該第一焊接點(61)係與晶片(1)之第一焊設區域(42)焊接之,該第二焊接點(62)係與導線架(5)之第二焊設區域(51)焊接之,如此能達到晶片(4)與導線架(5)間電訊的連通,而連通介物(6)上可供電訊通過之區域我們稱之為通路面積(63);該連通再介物(7)之材質亦可為金、銅及鋁等導通性佳的金屬,其形態亦可為線狀、帶狀、片狀等,依其材質及形態可概分為金線、銅線、鋁線、鋁帶及沖壓銅片等,該連通再介物(7)之兩端亦分別設有第一焊接點(71)與第二焊接點(72),該第一焊接點(72)係焊設於連通介物(6)上非與晶片(4)相焊設之一面,該第二焊接點(72)係焊設於連通介物(6)上非與導線架(5)相焊設之一面,藉此而能增加晶片(4)與導線架(5)間電訊連通的通路面積(73),如此除能有效降低晶片(4)與導線架(5)間電訊連通的電阻外,更能提高電訊傳輸速率(因為電阻降低,通路增加了);請參閱第5圖至第10圖所示,其主要係為藉由本發明主要概念加以配合不同材質及形態之連通介物(6)與連通再介物(7)加以組合成之應用實施例設計,第五圖係為沖壓銅片之連通介物(6)再加上沖壓銅片的連通再介物(7)的設計組合,第六圖則帶狀之連通介物(6)再加上鋁線狀之連通再介物(7)的設計組合,第七圖則為帶狀之連通介物(6)再加上金線或銅線之連通再介物(7)的設計組合,第八圖則為沖壓銅片的連通介物(6)再加上帶狀之連通再介物(7)的設計組合,第九圖則為沖壓銅片的連通介物(6)再加上鋁線的連通再介物(7)的設計組合,第十圖則為沖壓銅片的連通介物(6)再加上金線或銅線之連通再介物(7)的設計組合;上述所列舉之實施例僅為本發明內容可供變化設計組合之部份,其藉由金線、銅線、鋁線、鋁帶、沖壓銅片交互組合所形成之設計皆為本發明範圍之中,且連通再介物(7)之組合亦不限於一層,即為連通介物上所層疊之連通再介物可依封裝面積及實際需求多層層疊;綜上所述,本發明所為增加通路及降低電阻之電晶體連接結構,已確實具有新實用性與創作性,其手段之運用亦出於新穎無疑,且功效與設計目的誠然符合,完全符合專利要件,為此,依法提出發明專利申請。
1...晶片
2...導線架
3...連通介物
11...可焊設區域
31...通路面積
12、21...焊設區域
4...晶片
5...導線架
6...連通介物
7...連通再介物
41...晶片可焊設區域
61...連通介物第一焊接點
42...第一焊設區域
62...連通介物第二焊接點
51...第二焊設區域
63...連通介物之通路面積
71...連通再介物第一焊接點
72...連通再介物第二焊接點
73...連通再介物之通路面積
第1圖:係為習用僅有一層線狀連通介物之立體組合示圖。
第2圖:係為習用僅有一層帶狀連通介物之立體組合示圖。
第3圖:係為習用僅有一層沖壓銅片連通介物之立體組合示圖。
第4圖:係為本發明之立體組合示圖。
第5圖:係為本發明第一較佳實施例立體組合示圖。
第6圖:係為本發明第二較佳實施例立體組合示圖。
第7圖:係為本發明第三較佳實施例立體組合示圖。
第8圖:係為本發明第四較佳實施例立體組合示圖。
第9圖:係為本發明第五較佳實施例立體組合示圖。
第10圖:係為本發明第六較佳實施例立體組合示圖。
4...晶片
5...導線架
6...連通介物
7...連通再介物
41...晶片可焊設區域
61...連通介物第一焊接點
42...第一焊設區域
62...連通介物第二焊接點
51...第二焊設區域
63...連通介物之通路面積
71...連通再介物第一焊接點
72...連通再介物第二焊接點
73...連通再介物之通路面積
Claims (2)
- 一種增加通路及降低電阻之電晶體連接結構,包含:至少一晶片,其上設有第一焊設區域,以供連通介物之第一焊接點焊設之;至少一導線架,其上設有第二焊設區域,以供連通介物之第二焊接點焊設之;至少一連通介物,兩端設有第一焊接點與第二焊接點,分別與晶片之第一焊設區域及導線架之第二焊設區域焊接連通之,其中,該連通介物可為帶狀或沖壓片狀之形狀者,其材質可為金或銅等導通性較佳之金屬;至少一連通再介物,兩端設有第一焊接點與第二焊接點,分別焊接於連通介物上非與晶片及導線架相焊設之一面,其中,該連通再介物可為帶狀或沖壓片狀之形狀者,其材質可為金或銅等導通性較佳之金屬;
- 如申請專利範圍第1項所述增加通路及降低電阻之電晶體連接結構,其中連通介物與連通再介物之層疊型態可為沖壓片層疊沖壓片、沖壓片層疊帶狀、沖壓片層疊線狀及帶狀層疊帶狀等。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23775709P | 2009-08-28 | 2009-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201133751A TW201133751A (en) | 2011-10-01 |
TWI447878B true TWI447878B (zh) | 2014-08-01 |
Family
ID=43623612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099116458A TWI447878B (zh) | 2009-08-28 | 2010-05-24 | 增加通路及降低電阻之電晶體連接結構 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20110049692A1 (zh) |
TW (1) | TWI447878B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3343600A1 (de) * | 2016-12-28 | 2018-07-04 | Siemens Aktiengesellschaft | Halbleitermodul mit einem ersten und einem zweiten verbindungselement zum verbinden eines halbleiterchips sowie herstellungsverfahren |
KR102152014B1 (ko) * | 2020-03-03 | 2020-09-04 | 제엠제코(주) | 가압형 반도체 패키지 및 이의 제조방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW239901B (zh) * | 1992-09-30 | 1995-02-01 | Texas Instruments Inc | |
TW328167B (en) * | 1996-01-31 | 1998-03-11 | Sony Co Ltd | Method for manufacturing lead frame |
TW200714732A (en) * | 2005-09-07 | 2007-04-16 | Rohm & Haas Elect Mat | Metal duplex and method |
CN100423250C (zh) * | 2006-10-17 | 2008-10-01 | 晶方半导体科技(苏州)有限公司 | 双层引线封装结构及其制造方法 |
TW200908176A (en) * | 2007-05-10 | 2009-02-16 | Freescale Semiconductor Inc | Power lead-on-chip ball grid array package |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004180126A (ja) * | 2002-11-28 | 2004-06-24 | Murata Mfg Co Ltd | ストリップラインフィルタ |
US7592649B2 (en) * | 2007-12-26 | 2009-09-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Memory word lines with interlaced metal layers |
-
2010
- 2010-05-24 TW TW099116458A patent/TWI447878B/zh active
- 2010-08-19 US US12/859,268 patent/US20110049692A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW239901B (zh) * | 1992-09-30 | 1995-02-01 | Texas Instruments Inc | |
TW328167B (en) * | 1996-01-31 | 1998-03-11 | Sony Co Ltd | Method for manufacturing lead frame |
TW200714732A (en) * | 2005-09-07 | 2007-04-16 | Rohm & Haas Elect Mat | Metal duplex and method |
CN100423250C (zh) * | 2006-10-17 | 2008-10-01 | 晶方半导体科技(苏州)有限公司 | 双层引线封装结构及其制造方法 |
TW200908176A (en) * | 2007-05-10 | 2009-02-16 | Freescale Semiconductor Inc | Power lead-on-chip ball grid array package |
Also Published As
Publication number | Publication date |
---|---|
TW201133751A (en) | 2011-10-01 |
US20110049692A1 (en) | 2011-03-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104218013B (zh) | 半导体装置以及半导体装置的制造方法 | |
CN106298722B (zh) | 一种大电流功率半导体器件的封装结构及制造方法 | |
WO2015043499A1 (zh) | 一种半导体封装结构及其成型方法 | |
JP6610590B2 (ja) | 半導体装置とその製造方法 | |
JPWO2011125747A1 (ja) | プレスフィット端子および半導体装置 | |
CN206116387U (zh) | 一种大电流功率半导体器件的封装结构 | |
TWM508801U (zh) | 高散熱低成本之導線架結構改良 | |
TWI447878B (zh) | 增加通路及降低電阻之電晶體連接結構 | |
US9972561B2 (en) | QFN package with grooved leads | |
US20100258945A1 (en) | Semiconductor device and method for manufacturing the same | |
US9171817B2 (en) | Semiconductor device | |
CN104617088A (zh) | 半导体封装件及其制法与基板暨封装结构 | |
CN212113710U (zh) | 一种引线框架及焊接铝箔的芯片封装结构 | |
JP6129090B2 (ja) | パワーモジュール及びパワーモジュールの製造方法 | |
JP2014146645A (ja) | 半導体装置 | |
JP2015201505A (ja) | 半導体装置 | |
JP2014236168A (ja) | 半導体装置及び半導体装置の製造方法 | |
CN103326234B (zh) | 一种大功率半导体激光器过渡热沉及其制备方法 | |
CN112599654B (zh) | 一种带导电通孔的热电模块 | |
CN102366853B (zh) | 一种焊接方法 | |
WO2019179195A1 (zh) | 一种贴片压敏电阻及其制作方法 | |
CN203118939U (zh) | 四方扁平型功率器件封装体 | |
JP4004445B2 (ja) | 半導体パッケージ及びその製造方法 | |
TWM508783U (zh) | 晶片封裝之結構改良 | |
CN203118935U (zh) | 整流芯片的dfn封装结构 |