TWI445852B - A graphite nozzle for refining polysilicon cycle vacuum equipment - Google Patents

A graphite nozzle for refining polysilicon cycle vacuum equipment Download PDF

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Publication number
TWI445852B
TWI445852B TW101102334A TW101102334A TWI445852B TW I445852 B TWI445852 B TW I445852B TW 101102334 A TW101102334 A TW 101102334A TW 101102334 A TW101102334 A TW 101102334A TW I445852 B TWI445852 B TW I445852B
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Prior art keywords
graphite
joint portion
refining
nozzle
upper joint
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TW101102334A
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TW201331432A (zh
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Wen Pin Sun
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Sun Power Silicon Co Ltd
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Priority to TW101102334A priority Critical patent/TWI445852B/zh
Priority to CN2012105671728A priority patent/CN103213990A/zh
Priority to US13/741,385 priority patent/US20130186987A1/en
Priority to KR1020130005383A priority patent/KR101376922B1/ko
Publication of TW201331432A publication Critical patent/TW201331432A/zh
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Publication of TWI445852B publication Critical patent/TWI445852B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/14—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/008—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of an organic adhesive, e.g. phenol resin or pitch
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/08—Non-oxidic interlayers
    • C04B2237/086—Carbon interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/16—Silicon interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/78—Side-way connecting, e.g. connecting two plates through their sides

Description

用於精煉多晶矽循環真空設備之石墨吸嘴
本發明係為一種用於精煉多晶矽循環真空設備之石墨吸嘴。
本案申請人於2011年10月24日提出中華民國發明專利申請號第100138537號，發明名稱「真空循環精煉太陽能級多晶矽技術與設備」，其係揭露一種將RH爐(循環法真空處理爐)和VD爐(真空脫氣爐)合併，製成單嘴雙真空循環精煉太陽能級多晶矽設備，並運用此一設備的真空攪拌、擴散與脫氣技術，製備太陽能級多晶矽。該單嘴雙真空循環精煉太陽能級多晶矽設備包括：上方RH爐的高度真空室與下方VD爐(或合併中頻爐)的低度真空室，通過一根單嘴連通管(圓管吸嘴)連接。
其中，RH爐真空處理又稱循環法真空爐，其由德國Ruhrstahl/Heraeus二公司共同開發，其主要作業方式係透過真空室下方兩個導管插入鋼水，在抽真空後帶動鋼水上升至一定高度，再於上升管吹入惰性氣體Ar以帶動鋼液進入真空室接受真空處理，隨後經另一下行導管流回鋼包。此法已成為先進鋼廠的鋼水主要真空處理方法。然而目前煉鋼所使用的導管內襯吸嘴多為氧化鋁、石英(氧化矽)、陶瓷或其它含鎂、含硼...的耐火材料所製成，均不適合用來作為精煉太陽能級多晶矽循環真空設備(RH爐)中的吸嘴使用。
為使精煉的過程中，不受到導管材質的影嚮，本發明係提供一種於精煉多晶矽循環真空設備之石墨吸嘴，其可避免造成雜質與矽產生化學變化，並可應用於冶金法太陽能級多晶矽真空循環精煉設備(RH循環真空爐)中，連通導管內襯使用的高密度石墨吸嘴及其他內襯高密度石墨圓管耐火材使用。
本發明之石墨吸嘴係由複數節石墨管堆疊組合而成，其中每一石墨管包括一上結合部與一下結合部。上結合部位於該石墨管的上方頂面，下結合部位於該石墨管的下方底面，並與該上結合部對應，使得各石墨管之該上結合部與另一石墨管之該下接合部可相互抵接；並於各石墨管堆疊之後，經由燒結處理使各石墨管融合密接。
又，為使各石墨管在燒結前的相對位置穩定，故再進一步提供上結合部與下結合部對應之各種態樣，並可便於安裝。
進者，各石墨管之該上結合部與另一石墨管之該下接合部的間距係小於3公厘，藉此可利於後續加工以及燒結完成後之穩定性。
又，各石墨管之間係可進一步加入瀝青、柏油、碳膠、碳糊、碳水(碳泥)、碳灰、矽(Si)膠、矽糊、矽水(泥)、矽灰或水，以具有暫時性的輔助定位效果。
又，較佳者，各石墨管係可由石墨圓柱去心製成，便於生產製造。
有關本發明的其他功效及實施例，將會在下文中配合圖式說明。
請配合參閱各附圖所示，其中，第1圖為本實施例用於精煉多晶矽循環真空設備之石墨吸嘴之剖面示意圖，第2圖至第13圖為局部放大示意圖。
本實施例之用於精煉多晶矽循環真空設備之石墨吸嘴1，係由複數節石墨管10堆疊組合而成，其中每一石墨管10包括一上結合部11與一下結合部12。其中，上結合部11位於該石墨管10的上方頂面，下結合部12位於該石墨管10的下方底面，並與該上結合部11對應，使得各石墨管10之該上結合部11與另一石墨管10之該下接合部12可相互抵接，並於各石墨管10相互堆疊之後，經由燒結處理使各石墨管10融合密接。
上述之本實施例係可使精煉多晶矽的過程中，不會有其他雜質與矽產生化學變化，可直接應用於冶金法太陽能級多晶矽真空循環精煉設備(RH循環真空爐)中之連通導管內襯使用或是其他需要高密度石墨圓管耐火材使用，提升精煉多晶矽的穩定性。
進者，為增進各石墨管10在靠抵組裝的穩定性，本實施例係提供了數種型式之上結合部11與下結合部12，如第2圖至第13圖所示，可使該上結合部11呈平面且該下結合部12為對應之平面；或是該上結合部11呈由外向內上傾之斜面且該下結合部12亦為由外向內上傾之斜面；或是該上結合部11呈由外向內下傾之斜面且該下結合部12亦呈由外向內下傾之斜面。
或者，上結合部11可為一凸塊，而下結合部12為對應之一凹槽，該上結合部11為一凹槽，而該下結合部12為對應之一凸塊。進者，該凸塊可具有一斜面或是一弧面。
藉由第2圖至第13圖各種型式之上結合部11與下結合部12，使得各石墨管10在燒結前及燒結進行時的相對位置可以穩定，提升燒結完成後的良率。
又，可進一步使各石墨管10之該上結合部11與另一石墨管10之該下接合部12的在接合靠抵時的間距小於5公厘，藉此利於燒結的進行。
再者，各石墨管10之間係可加入瀝青、柏油、碳膠、碳糊、碳水(碳泥)、碳灰、矽(Si)膠、矽糊、矽水(泥)、矽灰或水，藉此形成暫時性與安慰性的黏劑，可協助各石墨管10在燒結前位置的穩定。
另外，各石墨管10係可由一石墨圓柱去心製成，藉此可提升各石墨管10的穩定性。
由上述內容可得知，本發明利用複數個石墨管10所製成之石墨吸嘴1，係可依需求進行尺寸或是外型上的設計，並利用堆疊方式，確保整體的安定性，利於連通導管內襯使用或是作為其他耐火材管路的內襯。
雖然本發明已透過上述之實施例揭露如上，然其並非用以限定本發明，任何熟習相像技藝者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，因此本發明之專利保護範圍須視本說明書所附之請求項所界定者為準。
1．．．石墨吸嘴
10．．．石墨管
11．．．上結合部
12．．．下結合部
第1圖係為本創作實施例之剖面示意圖；
第2圖至第13圖係為本創作實施例之局部放大示意圖。
1．．．石墨吸嘴
10．．．石墨管

Claims (7)

  1. 一種用於精煉多晶矽循環真空設備之石墨吸嘴，係由複數節石墨管堆疊組合而成，其中每一石墨管包括：一上結合部，位於該石墨管的上方頂面；及，一下結合部，位於該石墨管的下方底面，並與該上結合部對應，使得各石墨管之該上結合部與另一石墨管之該下接合部可相互抵接；並於各石墨管堆疊之後，經由燒結處理使各石墨管融合密接。
  2. 如請求項1所述之用於精煉多晶矽循環真空設備之石墨吸嘴，其中該上結合部可為呈平面且該下結合部為對應之平面；或是該上結合部呈由外向內上傾之斜面且該下結合部為由外向內上傾之斜面；或是該上結合部呈由外向內下傾之斜面且該下結合部亦呈由外向內下傾之斜面。
  3. 如請求項1所述之用於精煉多晶矽循環真空設備之石墨吸嘴，其中該上結合部可為一凸塊，而該下結合部為對應之一凹槽；或是，該上結合部為一凹槽，而該下結合部為對應之一凸塊。
  4. 如請求項3所述用於精煉多晶矽循環真空設備之石墨吸嘴，其中該凸塊具有一斜面或是一弧面。
  5. 如請求項2或4所述之用於精煉多晶矽循環真空設備之石墨吸嘴，其中各石墨管之該上結合部與另一石墨管之該下接合部的間距係小於5公厘。
  6. 如請求項1所述之用於精煉多晶矽循環真空設備之石墨吸嘴，其中各石墨管之間係可加入瀝青、柏油、碳膠、碳糊、碳水(碳泥)、碳灰、矽(Si)膠、矽糊、矽水(泥)、矽灰或水。
  7. 如請求項1所述之用於精煉多晶矽循環真空設備之石墨吸嘴，其中各石墨管係由一石墨圓柱去心製成。
TW101102334A 2012-01-20 2012-01-20 A graphite nozzle for refining polysilicon cycle vacuum equipment TWI445852B (zh)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW101102334A TWI445852B (zh) 2012-01-20 2012-01-20 A graphite nozzle for refining polysilicon cycle vacuum equipment
CN2012105671728A CN103213990A (zh) 2012-01-20 2012-12-25 用于精炼多晶硅循环真空设备的石墨吸嘴
US13/741,385 US20130186987A1 (en) 2012-01-20 2013-01-15 Graphite nozzle for polysilicon refining cyclic vacuum equipment
KR1020130005383A KR101376922B1 (ko) 2012-01-20 2013-01-17 폴리실리콘 정제용 순환 진공 설비의 흑연 노즐

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Application Number Priority Date Filing Date Title
TW101102334A TWI445852B (zh) 2012-01-20 2012-01-20 A graphite nozzle for refining polysilicon cycle vacuum equipment

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TW201331432A TW201331432A (zh) 2013-08-01
TWI445852B true TWI445852B (zh) 2014-07-21

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KR (1) KR101376922B1 (zh)
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM434072U (en) * 2012-01-20 2012-07-21 Sun Power Silicon Co Ltd Assembled graphite round pipe and graphite crucible formed thereby
JP6700836B2 (ja) * 2016-02-16 2020-05-27 三菱重工業株式会社 接合構造、燃焼器、及び、燃焼装置

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CN100582626C (zh) * 2005-06-09 2010-01-20 日本坩埚株式会社 坩埚式连续熔解炉
US8372482B2 (en) * 2009-02-27 2013-02-12 Goodrich Corporation Methods and apparatus for controlled chemical vapor deposition
CN101935230B (zh) * 2010-08-27 2013-01-30 南通京通石墨设备有限公司 加工型浸渍石墨管生产方法
TWM434072U (en) * 2012-01-20 2012-07-21 Sun Power Silicon Co Ltd Assembled graphite round pipe and graphite crucible formed thereby

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US20130186987A1 (en) 2013-07-25
CN103213990A (zh) 2013-07-24
TW201331432A (zh) 2013-08-01
KR101376922B1 (ko) 2014-03-20
KR20130085980A (ko) 2013-07-30

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