TWI437609B - 外部電極型放電燈以及使用該放電燈之紫外線照射裝置 - Google Patents

外部電極型放電燈以及使用該放電燈之紫外線照射裝置 Download PDF

Info

Publication number
TWI437609B
TWI437609B TW98117781A TW98117781A TWI437609B TW I437609 B TWI437609 B TW I437609B TW 98117781 A TW98117781 A TW 98117781A TW 98117781 A TW98117781 A TW 98117781A TW I437609 B TWI437609 B TW I437609B
Authority
TW
Taiwan
Prior art keywords
electrode
ultraviolet
window portion
discharge tube
transmittance
Prior art date
Application number
TW98117781A
Other languages
English (en)
Chinese (zh)
Other versions
TW201003720A (en
Inventor
Kazuya Hatase
Original Assignee
Gs Yuasa Int Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gs Yuasa Int Ltd filed Critical Gs Yuasa Int Ltd
Publication of TW201003720A publication Critical patent/TW201003720A/zh
Application granted granted Critical
Publication of TWI437609B publication Critical patent/TWI437609B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW98117781A 2008-05-30 2009-05-27 外部電極型放電燈以及使用該放電燈之紫外線照射裝置 TWI437609B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008142706 2008-05-30

Publications (2)

Publication Number Publication Date
TW201003720A TW201003720A (en) 2010-01-16
TWI437609B true TWI437609B (zh) 2014-05-11

Family

ID=41377123

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98117781A TWI437609B (zh) 2008-05-30 2009-05-27 外部電極型放電燈以及使用該放電燈之紫外線照射裝置

Country Status (5)

Country Link
JP (1) JP5088595B2 (ko)
KR (1) KR101572461B1 (ko)
CN (1) CN102047382B (ko)
TW (1) TWI437609B (ko)
WO (1) WO2009145253A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5257480B2 (ja) * 2011-03-28 2013-08-07 ウシオ電機株式会社 光処理装置
JP6349208B2 (ja) * 2014-09-09 2018-06-27 東京応化工業株式会社 紫外線照射装置、紫外線照射方法、基板処理装置、及び基板処理装置の製造方法
JP7115036B2 (ja) * 2018-05-25 2022-08-09 ウシオ電機株式会社 エキシマランプ
JP7029641B2 (ja) * 2018-07-06 2022-03-04 ウシオ電機株式会社 エキシマランプ
JP6896919B1 (ja) * 2020-08-03 2021-06-30 株式会社クォークテクノロジー 殺菌ランプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260396A (ja) 1999-03-05 2000-09-22 Quark Systems Co Ltd エキシマランプ、エキシマ照射装置および有機化合物の分解方法
JP4578051B2 (ja) 2002-09-11 2010-11-10 株式会社Ｇｓユアサ 紫外線照射装置
JP2004097986A (ja) * 2002-09-11 2004-04-02 Japan Storage Battery Co Ltd 紫外線照射装置
JP2004111326A (ja) * 2002-09-20 2004-04-08 Japan Storage Battery Co Ltd エキシマランプ
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ
JP4561448B2 (ja) * 2004-04-07 2010-10-13 株式会社Ｇｓユアサ 誘電体バリア放電ランプ及び紫外線照射装置

Also Published As

Publication number Publication date
JP5088595B2 (ja) 2012-12-05
KR101572461B1 (ko) 2015-11-27
WO2009145253A1 (ja) 2009-12-03
KR20110022593A (ko) 2011-03-07
CN102047382B (zh) 2012-11-07
CN102047382A (zh) 2011-05-04
JPWO2009145253A1 (ja) 2011-10-13
TW201003720A (en) 2010-01-16

Similar Documents

Publication Publication Date Title
TWI437609B (zh) 外部電極型放電燈以及使用該放電燈之紫外線照射裝置
TWI416583B (zh) Excimer lamp
US20160339138A1 (en) Ultraviolet irradiation apparatus
CN101937829B (zh) 紫外线灯及紫外线照射装置
JP5472112B2 (ja) エキシマランプ及びエキシマランプユニット及び紫外線照射装置
JP4561448B2 (ja) 誘電体バリア放電ランプ及び紫外線照射装置
TWI641020B (zh) 放電燈
JP2008279396A (ja) 紫外線照射装置
TWI606287B (zh) 紫外線照射裝置
JP2004097986A (ja) 紫外線照射装置
TWI566017B (zh) Ultraviolet radiation device
JP2013098015A (ja) 紫外線照射装置
KR20060052655A (ko) 유전체 배리어 방전 램프
KR102003807B1 (ko) 유전체 배리어 방전 램프
JP5148803B2 (ja) 無声放電ランプ
CN113451107A (zh) 准分子灯、光照射装置
KR101399225B1 (ko) 방전 램프
JP2004119942A (ja) 紫外線照射装置
TW202431351A (zh) 紫外光照射裝置
KR101374022B1 (ko) 엑시머 램프
JP5597951B2 (ja) 紫外線照射装置
JP5293430B2 (ja) エキシマランプ
JPH10208701A (ja) 放電ランプおよび照明装置
TWI450311B (zh) Ultraviolet light radiator
TWI453786B (zh) Light irradiation device