TWI426573B - Apparatus and method for fabricating substrate - Google Patents

Description

Substrate manufacturing apparatus and method thereof

The present invention relates to a device and method for manufacturing a substrate for a flat panel display device, and more particularly to an indentation inspection of a substrate for a flat panel display device such as a liquid crystal display device (LCD) used for image processing. A manufacturing apparatus and method for polyoxynitride coating.

Recent information processing machines are rapidly evolving in the direction of multiple forms of functions and higher speeds of information processing. Such an information processing device has a display panel that displays prescribed information. In the past, the display panel mainly uses a cathode ray tube monitor, but recently, due to the rapid development of technology, the use of a flat panel display device such as a liquid crystal display device which is lighter and occupies a small space is being used. Increased urgency.

Generally, a liquid crystal display device includes a liquid crystal display panel that receives a gate signal and a data signal to display an image. A plurality of gate carrier packages are attached to the gate side of the liquid crystal display panel, and a plurality of data tape and tape packages are attached to the source side. The gate-reel-type package outputs a gate signal to the liquid crystal display panel, and the data tape-and-reel package outputs a data signal to the liquid crystal display panel.

Therefore, the substrate for a liquid crystal display device includes a liquid crystal display panel and a plurality of gate tape-and-reel packages and data tape-and-reel packages attached to the liquid crystal display panel.

The step of manufacturing such a substrate for a liquid crystal display device includes: an indentation inspection step of inspecting a gate tape package and a data ribbon package and a liquid crystal display panel; and a protective film coating The step of forming a protective film on each of the output leads of the gate and tape package and the data tape package.

In general, the means for performing the indentation inspection step and the means for performing the protective film coating step are respectively disposed in different spaces, and thus the space utilization rate is lowered. Further, the indentation inspection step and the protective film coating step are sequentially performed, and the indentation inspection takes a lot of time. As a result, the step time is increased and the productivity is lowered.

Such a problem is not limited to the substrate for a liquid crystal display device, and the substrate for a flat panel display device such as a plasma display panel (PDP) or an organic electroluminescence (EL) panel has such a problem.

The present invention has been made in view of the above problems, and an object thereof is to provide a substrate manufacturing apparatus and method which can efficiently perform an indentation inspection step and a protective film coating step.

Further, an object of the present invention is to provide a substrate manufacturing apparatus and method which can improve the space utilization rate when performing an indentation inspection step and a protective film coating step.

The subject matter to be solved by the present invention is not limited thereto, and other problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

The present invention provides an apparatus for performing an indentation inspection step on a substrate and a coating step of a protective film comprising polyoxymethylene. The substrate manufacturing apparatus has an inspection module and a coating module.

The inspection module inspects a bonding state between the signal transmitting and receiving member and the substrate, and the signal transmitting and receiving member is attached to the substrate, and inputs and outputs a signal to the substrate. The coating module and the inspection module are disposed on upper and lower layers different in height from each other, and form a protective film on the signal transmitting and receiving member and the substrate, the protective film is used for a wire for inputting/outputting a signal transmitting and receiving member of the signal Protect.

Further, the substrate manufacturing apparatus may further include an elevating member. In order to transport the substrate to which the signal transmitting and receiving member is attached to the inspection module or the coating module, the lifting member moves in a vertical direction with respect to the ground, and the substrate is transferred to the inspection module and the coating module. between.

On the other hand, the inspection module includes a first workbench and an imaging unit. The first stage fixes the substrate transferred from the lifting member. The imaging unit is disposed below the substrate, and images an image of a bonding region to which the signal transmission/reception member is attached to the substrate.

The coating module includes a second stage and a coating unit. The substrate transferred from the elevating member is fixed to the second table. The coating portion is disposed above the substrate, and ejects an oxidation resistant liquid to apply the protective film to the signal transmitting and receiving member and the substrate.

Moreover, the present invention provides a method of performing an indentation inspection step and a crucible coating step. First, the inspection module and the coating module are disposed on the upper and lower layers having different heights, wherein the inspection module checks the bonding state of the signal transmitting and receiving member and the substrate, and the coating module is configured by the signal transmitting and receiving member and the above A protective film is formed on the substrate, and the signal transmitting and receiving member is attached to the substrate and outputs a signal to the substrate. Driving the inspection module to inspect the bonding state of the Nth (where N is a natural number greater than or equal to 1) of the plurality of substrates and the signal transmitting and receiving member corresponding to the substrate, and at the same time, driving The coating module is configured to sequentially form the protective film on the (N+1)th and subsequent substrates in the substrate.

Further, the substrate manufacturing apparatus for a display device according to one of the features of the present invention described above includes an inspection module and a coating module.

The inspection module checks a combination state of the display panel and the signal transmitting and receiving member, wherein the display panel receives the image signal and displays the image, and the signal transmitting and receiving member is attached to the display panel, and the image signal is provided to the display panel. The coating module is disposed on the upper and lower layers different in height from the inspection module, and forms a protective film on the display panel and the signal transmitting and receiving member, wherein the protective film is used for the signal transmitting and receiving member that outputs the image signal. The wires are protected.

Further, the substrate manufacturing apparatus of the present invention includes a first transport unit that transports the substrate, the processing unit performs a step on the substrate transported from the first transport unit, and the second transport unit performs the processing unit. The substrate of the step is transported. The processing unit has an inspection module that checks a bonding state between the signal transmitting and receiving member and the substrate, the signal transmitting and receiving member outputs a signal to the substrate, and the coating module is located on a layer different from the inspection module. And forming a protective film on the signal transmitting and receiving member and the substrate, wherein the protective film is for protecting the wire of the signal transmitting and receiving member; and the lifting member is movable in a vertical direction to transfer the substrate transferred from the first conveying unit The invention is selectively carried to the inspection module and the coating module.

The inspection module, the coating module, and the lifting member each include a shaft, and the substrate between the lifting member and the inspection module and between the lifting member and the coating module can be transported by the above The rotation of the shaft is performed.

Further, according to the substrate manufacturing method of the present invention, the inspection module and the coating module are disposed in upper and lower layers having different heights, wherein the inspection module inspects a bonding state between the signal transmitting and receiving member and the substrate, and the coating is performed. The cloth module forms a protective film on the signal transmitting and receiving member and the substrate, the signal transmitting and receiving member outputs a signal to the substrate, the protective film protects the wire of the signal transmitting and receiving member, and selects the selected one of the transferred substrates The substrate is transferred to the inspection module to perform an inspection step, and the unselected substrate among the transferred substrates is transferred to the coating module to perform a coating step. The substrate subjected to inspection in the inspection module can be transferred to the coating module to perform a coating step.

[Effect of the invention]

According to the present invention, the indentation inspection and the protective film coating step can be performed efficiently.

According to the present invention, the substrate manufacturing apparatus sets the inspection module and the coating module on the upper and lower layers having different heights, thereby improving the space utilization rate.

The above described features and advantages of the present invention will be more apparent from the following description.

Hereinafter, embodiments of the present invention will be described in further detail with reference to the accompanying drawings 1 to 18. The embodiments of the present invention can be modified to form various forms, and the scope of the present invention should not be construed as being limited to the embodiments described below. This embodiment is intended to provide a more comprehensive description of the present invention. Therefore, the shapes of the elements in the drawings are sometimes exaggerated in order to emphasize a more explicit description.

Fig. 1 is a view showing a substrate manufacturing apparatus 600 according to an embodiment of the present invention.

As shown in FIG. 1, the substrate manufacturing apparatus 600 manufactures a substrate (hereinafter referred to as "liquid crystal display device") 100 for a flat panel display device, and the flat panel display device includes a liquid crystal display device that displays an image. Hereinafter, the liquid crystal display device 100 will be described with reference to FIGS. 2 to 4, and then the configuration of the substrate manufacturing apparatus 600 will be specifically described.

FIG. 2 is a plan view showing the liquid crystal display device 100 shown in FIG. 1, FIG. 3 is a cross-sectional view taken along line II' of FIG. 2, and FIG. 4 is a cross-sectional line II-II' of FIG. Sectional view.

As shown in FIGS. 2 to 4, the liquid crystal display device 100 includes a liquid crystal display panel 110 for displaying images and a signal transmitting and receiving member attached to the periphery of the liquid crystal display panel 110. The signal transmitting and receiving member includes at least a plurality of gate coils for outputting gate signals. The tape package 120 and the plurality of data tape and package packages 130 for outputting the data signals may also include components corresponding to the gate signals from the tape and tape packages and input/output signals other than the data signals. .

The liquid crystal display panel 110 receives the gate signal from the gate tape package 120 and receives the data signal from the data tape package 130 to display an image. Specifically, the liquid crystal display panel 110 includes an array substrate 111, a facing substrate 112 facing the array substrate 111, and a liquid crystal layer 113 interposed between the array substrate 111 and the opposite substrate 112.

The array substrate 111 includes a first base substrate 111a, a plurality of gate lines 111b that transmit gate signals, and a plurality of data lines 111d that transmit data signals.

Each of the gate lines 111b is formed on the upper surface of the first base substrate 111a, and a pad portion of the gate line 111b is electrically connected to the gate tape package 120 and receives a gate signal.

A gate insulating film 111c is formed on the upper surface of the first base substrate 111a on which the gate line 111b is formed, and a data line 111d is formed on the upper surface of the gate insulating film 111c. Each of the data lines 111d is formed along a direction orthogonal to the longitudinal direction of the gate line 111b, and is arranged along the longitudinal direction of the gate line 111b. The pad portion of the data line 111d is electrically connected to the data tape package 130 and receives a data signal.

Although not shown, a plurality of thin film transistors connected to the gate line 111b and the data line 111d are formed on the array substrate 111. The thin film transistors are arranged in an array form on the first base substrate 111a to switch the pixel voltage.

At least one insulating film 111e is formed on the upper surface of the gate insulating film 111c on which the data line 111d is formed. A plurality of pixel electrodes 111f are formed on the insulating film 111e, and pixel voltages are applied to the respective pixel electrodes 111f from the thin film transistors.

The opposite substrate 112 is provided on the array substrate 111. The counter substrate 112 includes a second base substrate 112a, a color filter 112b formed on the second base substrate 112a and exhibiting a predetermined color by light, and a common electrode 112c formed in the color filter. A common voltage is applied to 112b.

The liquid crystal layer 113 adjusts the light transmittance corresponding to an electric field formed between the pixel electrode 111f and the common electrode 112c, and supplies the adjusted light to the color filter 112b. This is used to display images.

A gate tape package 120 and a data tape package 130 are attached to the end of the array substrate 111.

Specifically, the gate tape package 120 is attached to the gate regions GA1 and GA2 of the array substrate 111, and the pad portions of the gate lines 111b are formed on the gate regions GA1 and GA2. In the present embodiment, the array substrate 111 includes two gate regions GA1 and GA2, and the gate tape package 120 is located at both end portions of the gate line 111b. However, the array substrate 111 may also have one gate region GA1. In this case, the gate tape package 120 is located only at one end of the gate line 111b.

Each of the gate tape package 120 includes a first base film 121, a plurality of gate wires 122 formed on the first base film 121, and a gate chip 123. Each of the gate wires 122 receives a gate signal from the gate wafer 123 and outputs it.

An anisotropic conductive member (Anisotropic Conductive Film) 140 is provided between the gate tape package 120 and the array substrate 111, thereby enabling the gate tape package 120 and the gate line 111b. Turn on. A gate pad electrode GPE is formed between the pad portion of the gate line 111b and the anisotropic conductive film 140. The gate pad electrode GPE is made of a transparent conductive material such as Indium Tin Oxide (ITO) or Indium Zinc Oxide (IZO). The gate signal output from the gate wire 122 is applied to the pad portion of the gate line 111b via the anisotropic conductive film 140 and the gate pad electrode GPE.

A data tape and reel package 130 is attached to the source region SA of the array substrate 111. The data tape package 130 includes a second base film 131, a plurality of data wires 132 formed on the second base film 131, and a material wafer 133. Each data lead 132 receives a data signal from the data wafer 133 and outputs it.

Between the data tape package 130 and the array substrate 111, an anisotropic conductive film 140 is provided to electrically connect the data tape package 130 and the data line 111d. A data pad electrode DPE is formed between the pad portion of the data line 111d and the anisotropic conductive film 140. The data pad electrode DPE is made of the same material as the gate pad electrode GPE. The data signal output from the data lead 132 is applied to the pad portion of the data line 111d via the anisotropic conductive film 140 and the data pad electrode DPE.

As shown in FIGS. 1 and 2, the substrate manufacturing apparatus 600 includes a first transport unit 500a, a processing unit, and a second transport unit 500b. The first transport unit 500a and the second transport unit 500b can be provided in another device that is inline connected to the substrate manufacturing apparatus 600 of the present invention. The processing unit has an inspection module 200 for inspecting a bonding relationship between the liquid crystal display panel 110 and the gate tape package 120 and the data tape package 130. The coating module 300 forms a (coating) protective film. The protective film is used to protect the gate tape package 120 and the data tape package 130; and the lifting member 400 to vertically or horizontally transport the liquid crystal display device 100. The first transfer unit 500a horizontally transports the substrate for the step to the processing unit, and the second transfer unit 500b horizontally transports the substrate processed in the processing unit to the outside of the processing unit.

The inspection module 200 and the coating module 300 are located on upper and lower layers having different heights. Such a configuration can increase the space utilization rate of the manufacturing system 600 of the display device. In the present embodiment, the inspection module 200 is located above the coating module 300, but the coating module 300 may be positioned above the inspection module 200.

When viewed from above, the first transport unit 500a, the elevating member 400, the inspection module 200, the coating module 300, and the second transport unit 500b are arranged in a row, and at least the inspection module 200 and the coating module 300 are The portions where the lifting members 400 are in contact overlap. The first transfer unit 500a, the coating module 300, and the second transfer unit 500b are disposed on the same layer, and the inspection module 200 is disposed on another layer.

5 is a plan view showing the inspection module 200 shown in FIG. 1, and FIG. 6 is a cross-sectional view of the inspection module 200 shown in FIG. 5.

As shown in FIGS. 1 and 5 , the inspection module 200 includes a first stage 210 and at least one imaging unit (inspection camera) 220 . The first stage 210 has a plurality of shaft members 211 , a first frame 212 , and a first rotation driving unit 213 . The first stage 210 has a size smaller than that of the liquid crystal display panel 110.

Specifically, the shaft members 211 are arranged in parallel with each other in parallel with each other and are separated from each other by a predetermined distance. Each of the shaft members 211 has a shaft 211a, a plurality of rollers 211b, and two pulleys 211c.

The shaft 211a has a rod shape and is rotated in one direction by the first rotation driving unit 213. The shaft 211a is inserted into the plurality of rollers 211b. The rollers 211b are disposed apart from each other and rotate together with the shaft 211a.

As shown in FIG. 6, the liquid crystal display panel 110 placed on the first stage 210 is disposed to face the shaft 211a, and is supported by a plurality of rollers 211b. The liquid crystal display panel 110 can be horizontally moved in the rotation direction of the shaft member 211 by the rotational movement of the roller 211b.

Each of the pulleys 211c is fixedly coupled (fixed) to both ends of the shaft 211a. One of the pulleys 211c of the shaft member 211 is connected to the first rotation driving portion 213. As an example of the present invention, the first rotation driving unit 213 is connected to the pulley 211c of the first shaft member of the shaft member 211. The rotational force of the first rotational drive unit 213 is transmitted to the first shaft member via the connected pulley 211c, whereby the first shaft member rotates.

Two pulleys adjacent to each other are connected by a belt 214. The rotational force of the first rotation driving unit 213 is sequentially transmitted from the first shaft member via the belt 214, and the shaft member 211 is rotated.

The first frame 212 surrounds the shaft member 211 and has a ring shape of four sides. The first frame 212 has an upper surface 212a on which an opening portion is formed and a side wall 212b extending in a downward direction from an end portion of the upper surface 212a. Both ends of the shaft member 211 are coupled to the side wall 212b of the first frame 212 by the journal support. Thereby, the shaft member 211 is rotated by the first rotation driving unit 213 provided on the outer side of the first frame 212 while being fixed to the first frame 212.

The shaft member 211 is exposed through the opening formed in the upper surface 212a of the first frame 212, and the portion where each of the shaft members 211 is in contact with the liquid crystal display panel 110, that is, the uppermost end of the roller 211b is higher than the upper surface of the first frame 212. 212a is located on the upper side. Thereby, the first frame 212 is disposed apart from the liquid crystal display panel 110.

The inspection module 200 is for inspecting the bonding state between the gate tape package 120 and the data tape package 130 (see FIG. 2) and the liquid crystal display panel 110, and must be mounted on the first job. The liquid crystal display panel 110 on the stage 210 is fixed to the first stage.

Fig. 7 is a cross-sectional view showing another operation mode of the first stage shown in Fig. 6;

As shown in FIG. 7, the first stage 240 of the other operation mode of the present invention includes a plurality of shaft members 211 and a first frame 230. The shaft member 211 shown in FIG. 7 has the same configuration as that of the shaft member 211 shown in FIG. 6, and therefore the same reference numerals are given to the same reference numerals, and the detailed description thereof will be omitted.

The first frame 230 is a ring shape of four sides and surrounds the shaft member 211. The first frame 230 has an open upper surface 231 and a side wall 232 extending downward from the end of the upper surface 231. The shaft member 211 is provided in such a manner that it can be relatively moved in the vertical direction with respect to the side wall 232 (= 212b) of the first frame 230 (= 212) to perform "installation" and "disassembly".

When the liquid crystal display panel 110 is transported, as shown in FIG. 6, the shaft member 211 is in the "packed" state, the liquid crystal display panel 110 is mounted on the roller 211b of the shaft member 211, and the shaft member 211 is coupled by the journal support. 1 The frame 212 (= 230) is rotated in the state of the side wall 212b (= 232), so that the liquid crystal display panel 110 is horizontally moved with respect to the ground along the first stage 210 (= 240).

On the other hand, when the state of bonding between the liquid crystal display panel 110 and the gate tape package 120 and the data tape package 130 (see FIG. 2) is checked, as shown in FIG. 7, the shaft member 211 is "disassembled". The state is separated from the first frame 230 (=212), and the liquid crystal display panel 110 is fixed to the upper surface 231 (=212a) of the first frame 230. At this time, the upper surface 231 of the first frame 230 supports the end of the liquid crystal display panel 110.

In this manner, the first stage 210 controls the height of the shaft member 211 and the first frame 212, thereby switching between the following two types of operation modes, that is, the liquid crystal display panel 110 placed on either one. That is, the liquid crystal display device 100 is horizontally transported (FIG. 6) with respect to the first stage 210 or fixed (FIG. 7).

The switching of the operation mode of the table is common to all the stations described below.

Further, as shown in FIGS. 5 and 6, an inspection camera 220 is provided below the first stage 210. In the present embodiment, the inspection module 200 includes one inspection camera 220, but may include a plurality of inspection cameras. In this case, the inspection camera is arranged such that the relative positions of the first stage 210 are different from each other.

The inspection camera 220 moves along the gate region GA and the source region SA (refer to FIG. 2 ) of the liquid crystal display panel 110 on the one hand, and the pressure formed on the liquid crystal display panel 110 by the anisotropic conductive film 140 on the other hand. The mark is taken. Specifically, the anisotropic conductive film 140 includes conductive particles 141 (see FIGS. 3 and 4) that electrically conduct the gate tape package 120 and the data tape package 130 and the liquid crystal display panel 110. When the gate tape package 120 and the data tape package 130 are attached to the liquid crystal display panel 110, the gate tape package 120 and the data tape package 130 are provided with appropriate pressure and heat. Thereby, an indentation is formed on the gate pad electrode GPE (see FIG. 3) and the data pad electrode DPE (see FIG. 4) by the conductive particles 141 of the anisotropic conductive film 140.

The inspection camera 220 images an indentation formed by conductive particles on the back surface of the liquid crystal display panel 110. The presence or absence of a mistake in the connection between the gate tape package 120 and the data tape package 130 and the liquid crystal display panel 110 is the position and number of indentations recognized based on the image captured by the inspection camera 220. Wait until you decide.

8 is a plan view showing the coating module shown in FIG. 1, and FIG. 9 is a cross-sectional view showing the coating module shown in FIG.

As shown in FIGS. 1 and 8 , a coating module 300 is provided below the inspection module 200 . The coating module 300 includes: a second stage 310 fixed to the liquid crystal display panel 110; and at least one alignment camera 320 for inspecting an alignment state between the liquid crystal display panel 110 and the second stage 310; And at least one coating portion 330 forming a protective film.

The second stage 310 includes a plurality of shaft members 311 , a second frame 312 , and a second rotation driving unit 313 . Each of the shaft members 311 has the same components as those of the shaft member 211 of the first table 210. Therefore, the same reference numerals are given to the same reference numerals, and the description thereof will not be repeated.

When the liquid crystal display panel 110 is placed on the shaft member 311 on the second stage 310, the plurality of rollers 211b of the shaft member 311 support the liquid crystal display panel 110. The liquid crystal display panel 110 can be horizontally moved in the rotation direction of the shaft member 311 by the rotational movement of the roller 211b.

The second rotation driving unit 313 is connected to any one of the shaft members 311, and transmits the rotational force to the connected shaft member. The two adjacent axial members are connected to each other by a belt 314, and the rotational force of the shaft member connected to the second rotational driving portion 313 is transmitted to the adjacent shaft member via the belt 314. Thereby, the shaft member 311 is rotated.

On the other hand, the second frame 312 surrounds the shaft member 311 and has a ring shape of four sides. Specifically, the second frame 312 has an upper surface 312a on which an opening is formed and a side wall 312b extending from an end of the upper surface 312a. Both ends of the shaft member 311 are coupled to the side wall 312b of the second frame 312 by the journal support. Thereby, the shaft member 311 is rotated by the second rotation driving unit 313 provided on the outer side of the second frame 312 while being fixed to the second frame 312.

The shaft member 311 is exposed through the opening formed in the upper surface 312a of the second frame 312, and the portion where the shaft member 311 is in contact with the liquid crystal display panel 110, that is, the uppermost end of the roller 211b is higher than the upper portion of the second frame 312. The surface 312a is located on the upper side. Thereby, the second frame 312 is disposed apart from the liquid crystal display panel 110.

The coating module 300 forms a protective film in a state where the liquid crystal display panel 110 is placed on the second frame 312 and fixed to the second stage 310.

Similarly to the first stage 240 shown in FIG. 7 described above, the shaft member 311 is relatively movable in the vertical direction with respect to the side wall 312b of the second frame 312, and is detachably attached.

At this time, the protective film is formed in a state where the liquid crystal display panel 110 is placed and fixed on the second frame 312. When the liquid crystal display panel 110 is transported, the shaft member 311 is coupled to the second frame 312 to support the liquid crystal display panel 110.

On the other hand, the alignment camera 320 is disposed below the second stage 310, and images the liquid crystal display device 100 and the second stage 310. Before the liquid crystal display panel 110 is fixed to the upper surface 312a of the second frame 312, the alignment (alignment) between the second stage 310 and the liquid crystal display device 100 is adjusted by the image captured by the alignment camera 320. .

In the present embodiment, the coating module 300 is provided with one alignment camera 320. However, the number of the alignment cameras 320 may be increased according to the size of the liquid crystal display device 100 and the efficiency of the steps.

An application portion 330 is provided above the second stage 310. The application portion 330 is disposed above the liquid crystal display device 100, and moves on the one hand along the end portion of the liquid crystal display panel 110 to eject the oxidation resistant material 10 on the one hand. The oxidation resistant material 10 is, for example, polyfluorene oxide, and the oxidation resistant material 10 is supplied to the liquid crystal display device 100 to form a protective film.

In the present embodiment, the application module 300 includes one application unit 330. However, the number of application units 330 may be increased depending on the size of the liquid crystal display device 100 and the efficiency of the steps. For example, when the coating module 300 includes four application portions, two application portions are disposed corresponding to the source region SA (see FIG. 2 ) of the liquid crystal display panel 110 and correspond to the gate of the liquid crystal display panel 110 . One coating unit is disposed in each of the regions GA1 and GA2 (see FIG. 2).

Further, as shown in FIG. 1, a lifting member 400 is provided on one side of the coating module 300. The elevating member 400 includes a third stage 410 and a vertical moving unit 420, and transports the liquid crystal display device 100 to the inspection module 200 or the coating module 300.

Specifically, the third stage 410 has a plurality of shaft members 411 and a third frame 412. Each of the shaft members 411 has the same configuration as the shaft member 211 of the first table 210, and the third frame 412 has the same configuration as the first frame 212 of the first table 210. Further, the coupling relationship between the shaft member 411 and the third frame 412 is the same as the coupling relationship between the shaft member 211 and the first frame 212. Therefore, the detailed description thereof is omitted.

The shaft member 411 of the third stage 410 supports the lower surface of the liquid crystal display panel 110 and rotates on the basis of the central axis, thereby transporting the liquid crystal display device 100 along the third stage 410 in the horizontal direction with respect to the ground. .

A vertical moving portion 420 is provided below the third stage 410. In the present embodiment, the elevation member 400 is provided with two vertical movement portions 420, but the number of the vertical movement portions 420 may be increased or decreased depending on the size of the third table 410.

The vertical moving portion 420 moves in the vertical direction with respect to the ground, thereby moving the third stage 410 up or down. Thus, the lifting member 400 adjusts the distance between the third table 410 and the ground by the vertical movement of the vertical moving portion 420. Thereby, the third stage 410 can be located in the same layer as the first stage 410 by the height of the vertical moving unit 420, or can be located in the same layer as the second stage 410.

The lifting member 400 adjusts the vertical movement of the vertical moving portion 420, and vertically transports the liquid crystal display device 100 fixed to the third stage 410 to the first stage 210 and the second stage on the mutually different layers. After the height of any one of the layers 310, the liquid crystal display device 100 can be horizontally transported on the third stage 410, and the liquid crystal display device 100 can be transported to the first stage 210 or the second stage 310. Here, when the inspection module 200 is positioned above the coating module 300 as shown in FIG. 1, the liquid crystal display device 100 on which the protective film 10 has not been formed is initially raised by the elevating member 400 on the first stage 210. The inspection step is performed, and then, the liquid crystal display device 100 is lowered to perform a coating step on the second stage 310, whereby the protective film 10 is formed on the liquid crystal display device 100.

The manufacturing system 600 of the display device further includes a first transfer unit 500a that transports the liquid crystal display device 100 to the elevating member 400, and a liquid crystal display that has been subjected to the steps related to the coating module 300 and/or the inspection module 200. The device 100 is transported to the external second transport unit 500b. The first transport unit 500 a is located on the opposite side of the application module 300 with respect to the elevation member 400 , and the second transport unit 500 b is located on the opposite side of the elevation member 400 with respect to the application module 300 .

Each of the conveyance units 500a and 500b is provided with a plurality of conveyance shaft members 510a and 510b. In the present embodiment, each of the conveyance shaft members 510a and 510b has the same configuration as the shaft member 211 of the first table 210, and the method of driving the conveyance shaft members 510a and 510b is also the same as the method of driving the shaft member 211, and therefore the description thereof is omitted. Specific instructions.

Hereinafter, a method of manufacturing the substrate 100 for a liquid crystal display device will be specifically described with reference to the drawings.

FIG. 10 is a view showing a method of manufacturing a liquid crystal display device by using the substrate manufacturing apparatus 600 shown in FIG. 1 (the above-mentioned "liquid crystal display device" means a "substrate" for a flat panel display device including a liquid crystal display device). FIG. 11 to FIG. 18 are views showing a procedure of manufacturing a liquid crystal display device by the substrate manufacturing apparatus shown in FIG. 1.

As shown in FIG. 10, FIG. 11 and FIG. 12, first, in the M liquid crystal display devices including the first to Mth liquid crystal display devices, the first liquid crystal display device 100a is horizontally moved from the first transfer unit 500a to the elevating member 400. The elevating member 400 transports the first liquid crystal display device 100a to the inspection module 200 (step S110). Here, M is a natural number greater than or equal to 1.

Specifically, as shown in FIG. 11, the first liquid crystal display device 100a is fixed to the third stage 410 of the elevating member 400. Then, as shown in FIG. 12, the vertical moving portion 420 of the elevating member 400 moves the third table 410 upward, whereby the third table 410 and the first table 210 of the inspection module 200 are located in the same layer.

As shown in FIG. 12, each of the shaft members 411 of the third stage 410 is rotated to convey the first liquid crystal display device 100a horizontally to the first stage 210. At the same time, the respective shaft members 211 of the first stage 210 are also rotated, and the liquid crystal display panel 110 of the first liquid crystal display device 100a is horizontally transported to the first stage 210.

As shown in FIG. 13, when the liquid crystal display panel 110 of the first liquid crystal display device 100a is completely transferred to the position on the first stage 210, the liquid crystal display panel 110 is fixed to the first stage.

14 is a plan view of the first stage 210 and the first liquid crystal display device 100a placed and fixed on the first stage 210, and the gate region of the liquid crystal display panel 110 of the first liquid crystal display device 100a. The GA1, GA2, and source region SA are located outside the first frame 212 of the first stage 210.

As shown in FIG. 10, the inspection module 200 performs the inspection of the indentation of the first liquid crystal display device 100a, that is, the inspection module 200, the liquid crystal display panel 110 of the first liquid crystal display device 100a, the gate-reel package 120, and the data. The bonding state between the tape and reel packages 130 is checked. At the same time, the coating module 300 sequentially forms a protective film on the second and subsequent liquid crystal display devices from the second liquid crystal display device 100b (step S120).

The indentation inspection process of the first liquid crystal display device 100a will be described below with reference to Figs. 7 and 14 . When the liquid crystal display panel 110 is fixed on the first stage 240 (=210), the inspection camera 220 of the inspection module 200 moves along the end of the liquid crystal display panel 110 on the one hand, and on the other hand, the liquid crystal display panel 110 Indentation for imaging. That is, the inspection camera 220 moves on the bonding area BA attached to the liquid crystal display panel 110 along the gate tape package 120 and the data tape package 130 on the one hand, and the anisotropic conductive film 140 on the other hand. The indentation formed on the joint area BA is imaged.

As shown in FIG. 13 and FIG. 15 , after the elevating member 400 transports the first liquid crystal display device 100 a to the first stage 210 , the third stage 410 is lowered again to make the third stage 410 and the second stage 310 . Located on the same floor. Then, the second liquid crystal display device 100b is transported to the third stage 410 from the first transfer unit 500a, and is temporarily fixed to the third stage 410, and then the second liquid crystal display device 100b is transported from the third stage 410 to the third liquid crystal display device 100b. The second stage 310 of the coating module 300.

As shown in FIG. 15, the second stage 210 rotates each of the shaft members 311, and transports the second liquid crystal display device 100b from the third stage 410 of the elevating member 400 to the second stage 310, and then fixes it.

As shown in FIGS. 9 and 16 , the alignment camera 320 disposed below the second stage 310 moves along the end of the second stage 310 on the one hand, and the second liquid crystal display device 100 b and the 2 The stage 310 performs imaging. The second stage 310 and the second liquid crystal display device 100b are aligned by the image captured by the camera 320.

As shown in FIG. 9, the application portion 330 is disposed above the second liquid crystal display device 100b (=100). On the one hand, the application portion 330 moves along the bonding region BA of the second liquid crystal display device 100b, and discharges the antioxidant liquid 10, whereby the protective film 150 is formed on the liquid crystal display panel 110 of the second liquid crystal display device 100b.

As shown in FIG. 17, the protective film 150 covers the upper end portion and the side surface of the gate tape package 120, and coats the gate wire 122 exposed on the side surface of the gate tape package 120. Thereby, the protective film 150 prevents oxidation of the gate wire 122.

Although not shown, the protective film 150 is formed in the same manner as the gate tape package 120 in the data tape package 130 of the second liquid crystal display device 100b (see FIG. 16) to prevent the data tape package 130. The oxidation of the data line 132 (see Figure 4).

As shown in FIG. 18, when the formation of the protective film 150 (see FIG. 17) of the second liquid crystal display device 100b is completed, the respective shaft members 311 of the second stage 310 are rotated to transport the second liquid crystal display device 100b to The second transfer unit 500b side. The second transport unit 500b transports the second liquid crystal display device 100b to the outside.

On the other hand, when the second liquid crystal display device 100b is transported from the application module 300 to the second transport unit 500b, the third liquid crystal display device 100c is transported from the first transport unit 500a to the elevating member 400, and the elevating member 400 The third liquid crystal display device 100c is transported to the second stage 310 of the coating module 300. After the coating film 300 forms the protective film 150 (see FIG. 17) on the third liquid crystal display device 100c, the third liquid crystal display device 100c is transported to the second transfer unit 500b.

In this manner, the coating module 300 sequentially forms the protective film 150 (see FIG. 17) from the second liquid crystal display device to the Mth liquid crystal display device, and the protective film 150 is formed on the liquid crystal display device by the same process.

On the other hand, as shown in FIG. 10, when the inspection of the indentation of the first liquid crystal display device 100a is completed in the inspection module 200, the elevating member 400 moves the third stage 310 upward, thereby moving the third stage. 310 and the first stage 210 of the inspection module 200 are disposed in the same layer.

The first stage 210 rotates the shaft member 211 in a direction opposite to the above direction, thereby unloading the first liquid crystal display device 100a, and transporting the first liquid crystal display device 100a to the third stage 310, and then the first stage. The liquid crystal display device 100a is fixed to the third stage 310.

The elevating member 400 is lowered again, and the third stage 310 is again placed on the same layer as the second stage 310. The third stage 310 transports the first liquid crystal display device 100a to the second stage 310, and fixes the first liquid crystal display device 100a to the second stage 310. The coating module 300 forms a protective film 150 on the first liquid crystal display device 100a (see FIG. 18). During this period, the fourth liquid crystal display device 100d stands by in the first transport unit 500a.

The formation of the protective film 150 of the first liquid crystal display device 100a may be performed after the formation of the protective film of the Mth liquid crystal display device is completed, or may be currently performed after the indentation inspection of the first liquid crystal display device 100a is completed. Immediately after the formation of the protective film 150 of the liquid crystal display device in the module 300 is completed. When the formation of the protective film 150 of the first liquid crystal display device 100a is performed after the formation of the protective film of the Mth liquid crystal display device, the first liquid crystal display device 100a stands by in a state of being fixed to the first stage 210.

In the present embodiment, the manufacturing system 600 of the display device performs indentation inspection only on the first liquid crystal display device 100a of the M liquid crystal display devices in order to prevent the decrease in productivity due to the indentation inspection, but the indentation inspection is performed. The number and period of cycles can be increased depending on the efficiency of the step and the yield of the article.

As described above, the manufacturing system 600 of the display device simultaneously performs the indentation inspection and the protective film coating of the liquid crystal display device, whereby the step time can be shortened and the productivity can be improved.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

10. . . Protective film (antioxidant material)

100. . . Liquid crystal display device (for flat panel display device including liquid crystal display device) substrate

100a. . . First liquid crystal display device

110. . . LCD panel

111. . . Array substrate

111a. . . First base substrate

111b. . . Gate line

111c. . . Gate insulating film

111d. . . Data line

111e. . . Insulating film

111f. . . Pixel electrode

112. . . Opposite substrate

112a. . . Second base substrate

112b. . . Color filter

112c. . . Common electrode

113. . . Liquid crystal layer

120. . . Gate tape and reel package

121. . . First base film

122. . . Gate wire

123. . . Gate wafer

130. . . Data tape and tape package

131. . . Second base film

132. . . Data wire

133. . . Data chip

140. . . Anisotropic conductive film (anisotropic conductive member)

141. . . Conductive particle

200. . . Inspection module

210, 240. . . Workbench

211. . . Shaft member

211a. . . axis

211b. . . Roll

211c. . . pulley

212, 230. . . First frame

212a, 231. . . Upper surface (formed with an opening)

212b, 232. . . Side wall

213. . . First rotary drive unit

214. . . Belt

220. . . Check the camera (camera)

300. . . Coating module

310. . . Second workbench

311. . . Shaft member

312. . . 2nd frame

312a. . . Upper surface (formed with an opening)

312b. . . Side wall

313. . . Second rotary drive unit

320. . . Align the camera

330. . . Coating department

400. . . Lifting member

410. . . Workbench

411. . . Shaft member

412. . . 3rd frame

420. . . Vertical movement

500a. . . First transport unit

510a. . . Transport shaft member

500b. . . Second transport unit

510b. . . Transport shaft member

600. . . Substrate manufacturing device

BA. . . Joint area

DPE. . . Data pad electrode

GA1, GA2. . . Gate region

GPE. . . Gate pad electrode

SA. . . Source area

Fig. 1 is a view showing a manufacturing system of a display device according to an embodiment of the present invention.

Fig. 2 is a plan view showing the liquid crystal display device shown in Fig. 1;

Figure 3 is a cross-sectional view taken along line II' of Figure 2 .

Figure 4 is a cross-sectional view taken along line II-II' of Figure 2 .

Fig. 5 is a plan view showing the inspection module shown in Fig. 1;

Fig. 6 is a cross-sectional view showing the inspection module shown in Fig. 5;

Fig. 7 is a cross-sectional view showing another operational state of the first stage shown in Fig. 6;

Fig. 8 is a plan view showing the coating module shown in Fig. 1;

Fig. 9 is a cross-sectional view showing the coating module shown in Fig. 8;

FIG. 10 is a flowchart showing a method of manufacturing a liquid crystal display device using the manufacturing system of the liquid crystal display device shown in FIG. 1.

Fig. 11 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1.

Fig. 12 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 13 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 14 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 15 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 16 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 17 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

Fig. 18 is a view showing a procedure of a process of manufacturing a liquid crystal display device in the manufacturing system of the display device shown in Fig. 1;

100. . . Liquid crystal display device (for flat panel display device including liquid crystal display device) substrate

110. . . LCD panel

120. . . Gate tape and reel package

200. . . Inspection module

210. . . Workbench

211. . . Shaft member

212. . . First frame

220. . . Check the camera (camera)

300. . . Coating module

310. . . Second workbench

311. . . Shaft member

312. . . 2nd frame

320. . . Align the camera

330. . . Coating department

400. . . Lifting member

410. . . Workbench

411. . . Shaft member

412. . . 3rd frame

420. . . Vertical movement

500a. . . First transport unit

510a. . . Transport shaft member

500b. . . Second transport unit

510b. . . Transport shaft member

600. . . Substrate manufacturing device

Claims (27)

A substrate manufacturing apparatus, comprising: an inspection module for inspecting a bonding state between a signal transmitting and receiving member and a substrate, wherein the signal transmitting and receiving member is configured to input/output a signal to the substrate; and the coating module, and the inspection The module is disposed on the upper and lower layers of different heights, and forms a protective film on the signal transmitting and receiving member and the substrate, and the protective film is used to protect the wires of the signal transmitting and receiving member. The substrate manufacturing apparatus according to claim 1, further comprising a lifting member that moves the substrate to which the signal transmitting and receiving member is attached in a vertical direction to be transported to the inspection module or the coating module. The substrate manufacturing apparatus according to claim 2, wherein the inspection module includes: a first stage that fixes the substrate conveyed from the elevating member; and an imaging unit that is disposed to be fixed to the first A bonding region on which the signal transmitting and receiving member is attached to the substrate is imaged below the substrate on the stage. The substrate manufacturing apparatus according to claim 3, wherein the signal transmitting/receiving member is attached to the substrate via thermocompression bonding and an anisotropic conductive member having conductive particles, and the image pickup portion is electrically conductive. The indentation formed on the substrate by the particles is imaged. The substrate manufacturing apparatus according to claim 3, wherein The coating module includes a second stage that fixes the substrate conveyed from the elevating member, and a coating unit that is disposed above the substrate placed on the second stage to eject an antioxidant liquid The protective film is applied onto the signal transmitting and receiving member and the substrate. The substrate manufacturing apparatus according to claim 5, wherein each of the first stage and the second stage includes a plurality of axes, and the plurality of axes are arranged in parallel with each other, and are placed on each of the plurality of axes by rotation. The above substrate on the workbench is horizontally transported. The substrate manufacturing apparatus according to claim 6, wherein at least one of the first stage and the second stage further includes a frame that can be coupled to the shaft to fix a position of the shaft. The substrate manufacturing apparatus according to claim 6, wherein the shaft is detachably attached to the frame, and the shaft is horizontally movable to support the table in the "fit" state. In the "detached" state of the mounted substrate, the frame is fixed to support the substrate placed on the table. The substrate manufacturing apparatus according to claim 2, wherein the lifting and lowering member includes a third stage, and includes a plurality of shafts and a frame, wherein the plurality of shafts are arranged in parallel with each other and are placed by rotation The substrate is transported thereon, and the frame is coupled to the shaft to fix the position of the shaft And the vertical moving portion moves the third table in the vertical direction. The substrate manufacturing apparatus according to claim 1, wherein the inspection module is disposed above the coating module. The substrate manufacturing apparatus according to claim 1, further comprising: a first transport unit that transports the substrate to the elevating member by rotation of the shaft; and a second transport unit that is disposed in the coating module On one side, a substrate is supplied from the coating module and the substrate is transferred by rotation of the shaft. A method for manufacturing a substrate, comprising the steps of: providing an inspection module and a coating module on upper and lower layers having different heights, wherein the inspection module checks a bonding state of the signal transmitting and receiving member and the substrate, and the coating is performed. Forming a protective film on the signal transmitting and receiving member and the substrate, the signal transmitting and receiving member is attached to the substrate and inputting/outputting a signal to the substrate; and driving the inspection module to the Nth of the plurality of substrates (where Here, N is a natural number of 1 or more substrates and a bonding state of a signal transmitting/receiving member corresponding to the substrate is inspected, and at the same time, the (N+1) of the coating module is driven in the substrate. The protective film described above is sequentially formed on the subsequent substrates. The substrate manufacturing method according to claim 12, comprising the step of: the Nth substrate and a signal transmitting and receiving member corresponding to the substrate The bonding state is checked; the Nth substrate is fixed to the first stage of the inspection module; the imaging unit of the inspection module is disposed below the Nth substrate; and the imaging unit is The signal transmitting and receiving member performs imaging on a bonding region to which the Nth substrate is attached. The substrate manufacturing method according to claim 13, wherein the signal transmitting and receiving member is attached to the substrate via thermocompression bonding and an anisotropic conductive member having conductive particles, and the imaging portion is along The bonding region of the Nth substrate moves, and on the other hand, an image is formed on the indentation formed on the substrate by the conductive particles. The method for manufacturing a substrate according to claim 14, wherein the step of forming the protective film comprises the steps of: fixing the substrate to a second stage of the coating module; and coating the coating module. The cloth portion is disposed above the bonding region of the substrate; and the coating portion is moved along the bonding region of the substrate, and the protective film is applied to the substrate and the signal transmitting and receiving member corresponding to the substrate; The substrate is unloaded from the second stage. The substrate manufacturing method according to claim 12, further comprising the step of: vertically transporting the Nth substrate to the ground and arranging the coating on the substrate when the bonding state inspection of the Nth substrate is completed And driving the coating module to form the protective film on the upper surface of the Nth substrate and the signal transmitting and receiving member corresponding to the substrate. A substrate manufacturing apparatus comprising: a first transport unit that transports a substrate; a processing unit that performs a step on a substrate transported from the first transport unit; and a second transport unit that is configured by the processing unit The substrate that has been subjected to the step of transporting, the processing unit includes: an inspection module that checks a bonding state between the signal transmitting and receiving member and the substrate, the signal transmitting and receiving member inputs/outputs a signal to the substrate; and the coating module, The inspection module is disposed on the upper and lower layers having different heights, and forms a protective film on the signal transmitting and receiving member and the substrate, the protective film is used to protect the wires of the signal transmitting and receiving member, and the lifting member is movable in the up and down direction. The substrate conveyed from the first transfer unit is selectively transferred to the inspection module and the coating module. The substrate manufacturing apparatus according to claim 17, wherein The inspection module, the coating module, and the lifting member each include a shaft for conveying the substrate. The substrate manufacturing apparatus according to claim 18, wherein each of the first transport unit and the second transport unit includes a shaft for transporting the substrate. The substrate manufacturing apparatus according to claim 17, wherein the first transfer unit, the elevating member, the inspection module, the coating module, and the second transfer unit are sequentially arranged in a row when viewed from above. Arranged in contact with each other, the inspection module is disposed to overlap with at least a portion of the coating module that is in contact with the elevating member. The substrate manufacturing apparatus according to claim 20, wherein the first conveying unit, the coating module, and the second conveying unit are disposed in the same layer. The substrate manufacturing apparatus according to claim 17, wherein the signal transmitting and receiving member is attached to the substrate via thermocompression bonding and an anisotropic conductive member having conductive particles, and the inspection module has a pair An imaging unit that images an indentation formed on the substrate by the conductive particles, and the coating module includes the signal transmitting and receiving member and the substrate The coated portion of the polyoxygen is coated. A method for manufacturing a substrate, wherein the inspection module and the coating module are disposed on upper and lower layers having different heights, wherein the inspection module inspects a bonding state between the signal transmitting and receiving member and the substrate, and the coating is performed. The module forms a protective film on the signal transmitting and receiving member and the substrate, and the signal transmitting and receiving member inputs/outputs a signal to the substrate, and the protective film protects a wire of the signal transmitting and receiving member, and a predetermined one of the transferred substrates is to be performed. The substrate in the inspection step is transferred to the inspection module to perform an inspection step, and the substrate that is not scheduled to be inspected in the transferred substrate is transferred to the coating module to perform a coating step. The substrate manufacturing method according to claim 23, wherein the substrate subjected to inspection in the inspection module is transferred to the coating module to perform a coating step. The substrate manufacturing method according to claim 23, wherein the substrate is transferred to the coating module or the inspection module via a lifting member movable in a vertical direction. The substrate manufacturing method according to claim 25, wherein the lifting member, the inspection module, and the coating module are each provided with a shaft, between the lifting member and the inspection module, and the lifting member and Substrate between the above coating modules by rotating the shaft The transfer. The substrate manufacturing method according to claim 23, wherein the signal transmitting and receiving member is attached to the substrate via thermocompression bonding and an anisotropic conductive member having conductive particles, wherein the checking step is performed by the above The indentation formed on the substrate by the conductive particles is imaged, and the coating step applies polyfluorene oxide to the signal transmitting and receiving member and the substrate.