TWI422765B - Piezoelectric drive valve and piezoelectric drive type flow control device - Google Patents

Piezoelectric drive valve and piezoelectric drive type flow control device Download PDF

Info

Publication number
TWI422765B
TWI422765B TW99139989A TW99139989A TWI422765B TW I422765 B TWI422765 B TW I422765B TW 99139989 A TW99139989 A TW 99139989A TW 99139989 A TW99139989 A TW 99139989A TW I422765 B TWI422765 B TW I422765B
Authority
TW
Taiwan
Prior art keywords
piezoelectric actuator
valve body
heat
flow path
fluid flow
Prior art date
Application number
TW99139989A
Other languages
English (en)
Chinese (zh)
Other versions
TW201139902A (en
Inventor
Atsushi Hidaka
Kaoru Hirata
Masaaki Nagase
Nobukazu Ikeda
Ryousuke Dohi
Kouji Nishino
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW201139902A publication Critical patent/TW201139902A/zh
Application granted granted Critical
Publication of TWI422765B publication Critical patent/TWI422765B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Details Of Valves (AREA)
  • Flow Control (AREA)
TW99139989A 2009-12-01 2010-11-19 Piezoelectric drive valve and piezoelectric drive type flow control device TWI422765B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置

Publications (2)

Publication Number Publication Date
TW201139902A TW201139902A (en) 2011-11-16
TWI422765B true TWI422765B (zh) 2014-01-11

Family

ID=44114754

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99139989A TWI422765B (zh) 2009-12-01 2010-11-19 Piezoelectric drive valve and piezoelectric drive type flow control device

Country Status (6)

Country Link
US (1) US9163743B2 (enExample)
JP (1) JP5669384B2 (enExample)
KR (1) KR101366018B1 (enExample)
CN (2) CN105179799B (enExample)
TW (1) TWI422765B (enExample)
WO (1) WO2011067891A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
WO2015035045A2 (en) * 2013-09-04 2015-03-12 Kim Ngoc Vu Interlace lifting mechanism
US9903497B2 (en) 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
JP6499969B2 (ja) * 2013-10-21 2019-04-10 株式会社堀場エステック 流体制御弁
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6475441B2 (ja) * 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
US10573801B2 (en) * 2015-08-21 2020-02-25 Fujikin Incorporated Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
CN105333195A (zh) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 一种压电阀门
CN108780332B (zh) * 2016-02-29 2021-10-01 株式会社富士金 流量控制装置
US10697373B2 (en) * 2016-06-27 2020-06-30 WASK Engineering Inc. Active combustion control valve, system and method
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102016226075A1 (de) * 2016-12-22 2018-06-28 Continental Automotive Gmbh Ventil
CN110114601B (zh) * 2016-12-26 2020-10-27 株式会社富士金 压电元件驱动式阀以及流量控制装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN111684186B (zh) 2017-11-21 2023-02-21 伊利诺斯工具制品有限公司 用于推动致动器的紧凑的圆形连杆机构
JP7216425B2 (ja) * 2017-11-30 2023-02-01 株式会社フジキン 流量制御装置
JPWO2019159959A1 (ja) * 2018-02-19 2021-02-04 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
CN112119249A (zh) * 2018-08-30 2020-12-22 株式会社富士金 流体控制设备
WO2021019922A1 (ja) * 2019-07-31 2021-02-04 株式会社フジキン バルブ装置、流体制御装置及びバルブ装置の製造方法
US11976748B2 (en) 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
US12025999B2 (en) * 2019-09-05 2024-07-02 Horiba Stec, Co., Ltd. Flow rate control valve and flow rate control device
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
JP7461686B2 (ja) 2021-04-01 2024-04-04 株式会社フジキン 制御器及び気化供給装置
FR3131615A1 (fr) * 2022-01-06 2023-07-07 Pytheas Technology Valve comportant un actionneur piézoélectrique.
CN117311401B (zh) * 2022-12-13 2024-05-03 青海盐湖工业股份有限公司 控流计量装置及介质输送系统
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003120832A (ja) * 2001-10-17 2003-04-23 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2004162733A (ja) * 2002-11-08 2004-06-10 Stec Inc 高温対応バルブ
JP2007192269A (ja) * 2006-01-18 2007-08-02 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2008249002A (ja) * 2007-03-30 2008-10-16 Fujikin Inc 圧電素子駆動式制御弁

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1601306A (en) 1978-05-08 1981-10-28 Philips Electronic Associated Fluidcontrol valve
JP3425963B2 (ja) * 1992-01-08 2003-07-14 清原 まさ子 制御器
JP3291161B2 (ja) 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP4287935B2 (ja) * 1999-01-14 2009-07-01 株式会社堀場エステック ピエゾ方式の流量調整弁駆動部構造
JP2000249251A (ja) * 1999-03-01 2000-09-12 Kitz Corp 結露防止ニードル弁
JP4113425B2 (ja) 2002-12-16 2008-07-09 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
CN101059183A (zh) * 2006-10-16 2007-10-24 唐剑波 带开闭程度显示装置的磁力阀门及制造方法
US7789371B2 (en) * 2007-05-31 2010-09-07 Gianchandani Yogesh B Low-power piezoelectric micro-machined valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003120832A (ja) * 2001-10-17 2003-04-23 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2004162733A (ja) * 2002-11-08 2004-06-10 Stec Inc 高温対応バルブ
JP2007192269A (ja) * 2006-01-18 2007-08-02 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2008249002A (ja) * 2007-03-30 2008-10-16 Fujikin Inc 圧電素子駆動式制御弁

Also Published As

Publication number Publication date
CN105179799A (zh) 2015-12-23
JP2011117499A (ja) 2011-06-16
CN102667284A (zh) 2012-09-12
KR20120048042A (ko) 2012-05-14
US20120273061A1 (en) 2012-11-01
US9163743B2 (en) 2015-10-20
JP5669384B2 (ja) 2015-02-12
TW201139902A (en) 2011-11-16
KR101366018B1 (ko) 2014-02-21
CN105179799B (zh) 2017-07-21
WO2011067891A1 (ja) 2011-06-09
CN102667284B (zh) 2016-10-26

Similar Documents

Publication Publication Date Title
TWI422765B (zh) Piezoelectric drive valve and piezoelectric drive type flow control device
KR101910357B1 (ko) 압전 소자 구동식 밸브 및 압전 소자 구동식 밸브를 구비한 유량 제어 장치
JP2008249002A (ja) 圧電素子駆動式制御弁
JP4743763B2 (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
TWI289244B (en) Fluid control valve
US11054052B2 (en) Piezoelectric-element-driven valve and flow rate control device
JP5775110B2 (ja) 流量制御装置用の流量制御弁
JP6499969B2 (ja) 流体制御弁
CN107771258B (zh) 压电致动器型阀
JP2017190872A (ja) 弁要素及び流体制御弁
JP2003120832A (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
US11346457B2 (en) Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
JP4951091B2 (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
JP2018092622A (ja) 圧電駆動式バルブおよび流量制御装置
WO2014201032A1 (en) High flow piezo type valve
TW202242292A (zh) 常閉型流量控制閥
WO2019159959A1 (ja) 圧電素子駆動式バルブおよび流量制御装置
JP2023028103A (ja) 流量制御バルブの弁座とその製造方法
JP7166599B2 (ja) ダイヤフラムバルブおよび流量制御装置
JP2025006698A (ja) シール荷重調整用バルブ