CN105179799B - 压电驱动式阀和压电驱动式流量控制装置 - Google Patents

压电驱动式阀和压电驱动式流量控制装置 Download PDF

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Publication number
CN105179799B
CN105179799B CN201510674731.9A CN201510674731A CN105179799B CN 105179799 B CN105179799 B CN 105179799B CN 201510674731 A CN201510674731 A CN 201510674731A CN 105179799 B CN105179799 B CN 105179799B
Authority
CN
China
Prior art keywords
piezoelectric actuator
valve body
valve
piezo
fluid flowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510674731.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN105179799A (zh
Inventor
日高敦志
平田薰
永濑正明
池田信
池田信一
土肥亮介
西野功二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN105179799A publication Critical patent/CN105179799A/zh
Application granted granted Critical
Publication of CN105179799B publication Critical patent/CN105179799B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Details Of Valves (AREA)
  • Flow Control (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
CN201510674731.9A 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置 Expired - Fee Related CN105179799B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2009-274005 2009-12-01
CN201080054455.1A CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201080054455.1A Division CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Publications (2)

Publication Number Publication Date
CN105179799A CN105179799A (zh) 2015-12-23
CN105179799B true CN105179799B (zh) 2017-07-21

Family

ID=44114754

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201080054455.1A Expired - Fee Related CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置
CN201510674731.9A Expired - Fee Related CN105179799B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201080054455.1A Expired - Fee Related CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Country Status (6)

Country Link
US (1) US9163743B2 (enExample)
JP (1) JP5669384B2 (enExample)
KR (1) KR101366018B1 (enExample)
CN (2) CN102667284B (enExample)
TW (1) TWI422765B (enExample)
WO (1) WO2011067891A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
WO2015035045A2 (en) 2013-09-04 2015-03-12 Kim Ngoc Vu Interlace lifting mechanism
US9903497B2 (en) 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
JP6499969B2 (ja) * 2013-10-21 2019-04-10 株式会社堀場エステック 流体制御弁
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6475441B2 (ja) 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
WO2017033423A1 (ja) * 2015-08-21 2017-03-02 株式会社フジキン 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置
CN105333195A (zh) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 一种压电阀门
US10641407B2 (en) * 2016-02-29 2020-05-05 Fujikin Incorporated Flow rate control device
US10697373B2 (en) * 2016-06-27 2020-06-30 WASK Engineering Inc. Active combustion control valve, system and method
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102016226075A1 (de) * 2016-12-22 2018-06-28 Continental Automotive Gmbh Ventil
KR102162045B1 (ko) * 2016-12-26 2020-10-06 가부시키가이샤 후지킨 압전 소자 구동식 밸브 및 유량 제어 장치
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
TWI803536B (zh) 2017-11-21 2023-06-01 美商威士塔戴爾泰克有限責任公司 用於一推進致動器之緊密圓形連動裝置
US11079774B2 (en) * 2017-11-30 2021-08-03 Fujikin Incorporated Flow rate control device
WO2019159959A1 (ja) * 2018-02-19 2019-08-22 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
WO2020044827A1 (ja) * 2018-08-30 2020-03-05 株式会社フジキン 流体制御機器
KR102613338B1 (ko) * 2019-07-31 2023-12-14 가부시키가이샤 후지킨 밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법
KR20220029730A (ko) 2019-08-30 2022-03-08 가부시키가이샤 후지킨 다이어프램 밸브
WO2021044721A1 (ja) * 2019-09-05 2021-03-11 株式会社堀場エステック 流量制御弁又は流量制御装置
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
KR102849824B1 (ko) 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
FR3131615A1 (fr) * 2022-01-06 2023-07-07 Pytheas Technology Valve comportant un actionneur piézoélectrique.
CN117311401B (zh) * 2022-12-13 2024-05-03 青海盐湖工业股份有限公司 控流计量装置及介质输送系统
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059183A (zh) * 2006-10-16 2007-10-24 唐剑波 带开闭程度显示装置的磁力阀门及制造方法
CN101360941A (zh) * 2006-01-18 2009-02-04 株式会社富士金 常开型压电元件驱动式金属隔膜控制阀

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1601306A (en) * 1978-05-08 1981-10-28 Philips Electronic Associated Fluidcontrol valve
JP3425963B2 (ja) * 1992-01-08 2003-07-14 清原 まさ子 制御器
JP3291161B2 (ja) 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP4287935B2 (ja) * 1999-01-14 2009-07-01 株式会社堀場エステック ピエゾ方式の流量調整弁駆動部構造
JP2000249251A (ja) * 1999-03-01 2000-09-12 Kitz Corp 結露防止ニードル弁
JP4119109B2 (ja) * 2001-10-17 2008-07-16 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4499984B2 (ja) * 2002-11-08 2010-07-14 株式会社堀場エステック 高温対応バルブ
JP4113425B2 (ja) 2002-12-16 2008-07-09 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4933936B2 (ja) 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
US7789371B2 (en) * 2007-05-31 2010-09-07 Gianchandani Yogesh B Low-power piezoelectric micro-machined valve

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101360941A (zh) * 2006-01-18 2009-02-04 株式会社富士金 常开型压电元件驱动式金属隔膜控制阀
CN101059183A (zh) * 2006-10-16 2007-10-24 唐剑波 带开闭程度显示装置的磁力阀门及制造方法

Also Published As

Publication number Publication date
JP5669384B2 (ja) 2015-02-12
WO2011067891A1 (ja) 2011-06-09
TW201139902A (en) 2011-11-16
TWI422765B (zh) 2014-01-11
US20120273061A1 (en) 2012-11-01
KR101366018B1 (ko) 2014-02-21
US9163743B2 (en) 2015-10-20
CN102667284A (zh) 2012-09-12
CN102667284B (zh) 2016-10-26
KR20120048042A (ko) 2012-05-14
CN105179799A (zh) 2015-12-23
JP2011117499A (ja) 2011-06-16

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