JP5669384B2 - 圧電駆動式バルブ及び圧電駆動式流量制御装置 - Google Patents

圧電駆動式バルブ及び圧電駆動式流量制御装置 Download PDF

Info

Publication number
JP5669384B2
JP5669384B2 JP2009274005A JP2009274005A JP5669384B2 JP 5669384 B2 JP5669384 B2 JP 5669384B2 JP 2009274005 A JP2009274005 A JP 2009274005A JP 2009274005 A JP2009274005 A JP 2009274005A JP 5669384 B2 JP5669384 B2 JP 5669384B2
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
valve body
heat dissipation
piezoelectric
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009274005A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011117499A5 (enExample
JP2011117499A (ja
Inventor
敦志 日高
敦志 日高
薫 平田
薫 平田
正明 永瀬
正明 永瀬
池田　信一
信一 池田
土肥　亮介
亮介 土肥
西野　功二
功二 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009274005A priority Critical patent/JP5669384B2/ja
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to US13/505,620 priority patent/US9163743B2/en
Priority to CN201510674731.9A priority patent/CN105179799B/zh
Priority to CN201080054455.1A priority patent/CN102667284B/zh
Priority to PCT/JP2010/006483 priority patent/WO2011067891A1/ja
Priority to KR1020127008912A priority patent/KR101366018B1/ko
Priority to TW99139989A priority patent/TWI422765B/zh
Publication of JP2011117499A publication Critical patent/JP2011117499A/ja
Publication of JP2011117499A5 publication Critical patent/JP2011117499A5/ja
Application granted granted Critical
Publication of JP5669384B2 publication Critical patent/JP5669384B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Details Of Valves (AREA)
  • Flow Control (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP2009274005A 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置 Active JP5669384B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置
CN201510674731.9A CN105179799B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置
CN201080054455.1A CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置
PCT/JP2010/006483 WO2011067891A1 (ja) 2009-12-01 2010-11-04 圧電駆動式バルブ及び圧電駆動式流量制御装置
US13/505,620 US9163743B2 (en) 2009-12-01 2010-11-04 Piezoelectrically driven valve and piezoelectrically driven flow rate control device
KR1020127008912A KR101366018B1 (ko) 2009-12-01 2010-11-04 압전 구동식 밸브 및 압전 구동식 유량 제어 장치
TW99139989A TWI422765B (zh) 2009-12-01 2010-11-19 Piezoelectric drive valve and piezoelectric drive type flow control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置

Publications (3)

Publication Number Publication Date
JP2011117499A JP2011117499A (ja) 2011-06-16
JP2011117499A5 JP2011117499A5 (enExample) 2012-10-18
JP5669384B2 true JP5669384B2 (ja) 2015-02-12

Family

ID=44114754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009274005A Active JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置

Country Status (6)

Country Link
US (1) US9163743B2 (enExample)
JP (1) JP5669384B2 (enExample)
KR (1) KR101366018B1 (enExample)
CN (2) CN105179799B (enExample)
TW (1) TWI422765B (enExample)
WO (1) WO2011067891A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
CN105556186B (zh) * 2013-09-04 2018-04-03 株式会社堀场Stec 交错提升机构
JP6380401B2 (ja) * 2013-09-30 2018-08-29 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
US10114385B2 (en) * 2013-10-21 2018-10-30 Horiba Stec, Co., Ltd. Fluid control valve
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6475441B2 (ja) 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
WO2017033423A1 (ja) * 2015-08-21 2017-03-02 株式会社フジキン 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置
CN105333195A (zh) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 一种压电阀门
KR102056140B1 (ko) * 2016-02-29 2019-12-16 가부시키가이샤 후지킨 유량 제어 장치
US10697373B2 (en) * 2016-06-27 2020-06-30 WASK Engineering Inc. Active combustion control valve, system and method
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102016226075A1 (de) 2016-12-22 2018-06-28 Continental Automotive Gmbh Ventil
US11054052B2 (en) * 2016-12-26 2021-07-06 Fujikin Incorporated Piezoelectric-element-driven valve and flow rate control device
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7244530B2 (ja) 2017-11-21 2023-03-22 イリノイ トゥール ワークス インコーポレイティド プッシュアクチュエーターの小型円形リンク機構
US11079774B2 (en) * 2017-11-30 2021-08-03 Fujikin Incorporated Flow rate control device
WO2019159959A1 (ja) * 2018-02-19 2019-08-22 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
KR102395620B1 (ko) * 2018-08-30 2022-05-09 가부시키가이샤 후지킨 유체 제어 기기
US11859733B2 (en) * 2019-07-31 2024-01-02 Fujikin Incorporated Valve device, fluid control device, and manufacturing method of valve device
US11976748B2 (en) 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
CN114364907B (zh) * 2019-09-05 2024-10-11 株式会社堀场Stec 流量控制阀和流量控制装置
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
WO2022209639A1 (ja) 2021-04-01 2022-10-06 株式会社フジキン 制御器及び気化供給装置
FR3131615A1 (fr) * 2022-01-06 2023-07-07 Pytheas Technology Valve comportant un actionneur piézoélectrique.
CN117311401B (zh) * 2022-12-13 2024-05-03 青海盐湖工业股份有限公司 控流计量装置及介质输送系统
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1601306A (en) 1978-05-08 1981-10-28 Philips Electronic Associated Fluidcontrol valve
JP3425963B2 (ja) * 1992-01-08 2003-07-14 清原 まさ子 制御器
JP3291161B2 (ja) 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP4287935B2 (ja) * 1999-01-14 2009-07-01 株式会社堀場エステック ピエゾ方式の流量調整弁駆動部構造
JP2000249251A (ja) * 1999-03-01 2000-09-12 Kitz Corp 結露防止ニードル弁
JP4119109B2 (ja) * 2001-10-17 2008-07-16 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4499984B2 (ja) * 2002-11-08 2010-07-14 株式会社堀場エステック 高温対応バルブ
JP4113425B2 (ja) 2002-12-16 2008-07-09 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
CN101059183A (zh) * 2006-10-16 2007-10-24 唐剑波 带开闭程度显示装置的磁力阀门及制造方法
JP4933936B2 (ja) 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
US7789371B2 (en) * 2007-05-31 2010-09-07 Gianchandani Yogesh B Low-power piezoelectric micro-machined valve

Also Published As

Publication number Publication date
US9163743B2 (en) 2015-10-20
KR20120048042A (ko) 2012-05-14
KR101366018B1 (ko) 2014-02-21
CN102667284B (zh) 2016-10-26
TW201139902A (en) 2011-11-16
TWI422765B (zh) 2014-01-11
JP2011117499A (ja) 2011-06-16
CN105179799B (zh) 2017-07-21
US20120273061A1 (en) 2012-11-01
WO2011067891A1 (ja) 2011-06-09
CN105179799A (zh) 2015-12-23
CN102667284A (zh) 2012-09-12

Similar Documents

Publication Publication Date Title
JP5669384B2 (ja) 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP4743763B2 (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
CN101652592B (zh) 压电元件驱动式控制阀
US11054052B2 (en) Piezoelectric-element-driven valve and flow rate control device
JP4119109B2 (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
JP6475441B2 (ja) 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
WO2014156043A1 (ja) 流量制御装置用の流量制御弁
JP4951091B2 (ja) 圧電素子駆動式金属ダイヤフラム型制御弁
JP6818357B2 (ja) 圧電駆動式バルブおよび流量制御装置
CN112334695A (zh) 致动器、阀、及流体控制装置
JP2000197374A (ja) ピエゾアクチュエ―タ並びにこれを用いた制御弁
WO2019159959A1 (ja) 圧電素子駆動式バルブおよび流量制御装置
JP2022147590A (ja) 常時閉型流量制御バルブ
JP7645536B2 (ja) バルブ用アクチュエータ及びこれを用いたバルブ
JP2003156167A (ja) ガス流量制御機器用バルブ
JP2020026829A (ja) ダイヤフラムバルブおよび流量制御装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120905

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120905

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130826

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20131023

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131023

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140210

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140409

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20140409

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20140806

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141105

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20141105

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20141113

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141205

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141216

R150 Certificate of patent or registration of utility model

Ref document number: 5669384

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250