KR101366018B1 - 압전 구동식 밸브 및 압전 구동식 유량 제어 장치 - Google Patents

압전 구동식 밸브 및 압전 구동식 유량 제어 장치 Download PDF

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Publication number
KR101366018B1
KR101366018B1 KR1020127008912A KR20127008912A KR101366018B1 KR 101366018 B1 KR101366018 B1 KR 101366018B1 KR 1020127008912 A KR1020127008912 A KR 1020127008912A KR 20127008912 A KR20127008912 A KR 20127008912A KR 101366018 B1 KR101366018 B1 KR 101366018B1
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South Korea
Prior art keywords
piezoelectric actuator
piezoelectric
heat dissipation
flow path
valve body
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KR1020127008912A
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English (en)
Korean (ko)
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KR20120048042A (ko
Inventor
아쯔시 히다카
카오루 히라타
마사아키 나가세
노브카즈 이케다
료우스케 도히
코우지 니시노
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가부시키가이샤 후지킨
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Details Of Valves (AREA)
  • Flow Control (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
KR1020127008912A 2009-12-01 2010-11-04 압전 구동식 밸브 및 압전 구동식 유량 제어 장치 Active KR101366018B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2009-274005 2009-12-01
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置
PCT/JP2010/006483 WO2011067891A1 (ja) 2009-12-01 2010-11-04 圧電駆動式バルブ及び圧電駆動式流量制御装置

Publications (2)

Publication Number Publication Date
KR20120048042A KR20120048042A (ko) 2012-05-14
KR101366018B1 true KR101366018B1 (ko) 2014-02-21

Family

ID=44114754

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127008912A Active KR101366018B1 (ko) 2009-12-01 2010-11-04 압전 구동식 밸브 및 압전 구동식 유량 제어 장치

Country Status (6)

Country Link
US (1) US9163743B2 (enExample)
JP (1) JP5669384B2 (enExample)
KR (1) KR101366018B1 (enExample)
CN (2) CN105179799B (enExample)
TW (1) TWI422765B (enExample)
WO (1) WO2011067891A1 (enExample)

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US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
CN105556186B (zh) * 2013-09-04 2018-04-03 株式会社堀场Stec 交错提升机构
JP6380401B2 (ja) * 2013-09-30 2018-08-29 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
US10114385B2 (en) * 2013-10-21 2018-10-30 Horiba Stec, Co., Ltd. Fluid control valve
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6475441B2 (ja) 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
WO2017033423A1 (ja) * 2015-08-21 2017-03-02 株式会社フジキン 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置
CN105333195A (zh) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 一种压电阀门
KR102056140B1 (ko) * 2016-02-29 2019-12-16 가부시키가이샤 후지킨 유량 제어 장치
US10697373B2 (en) * 2016-06-27 2020-06-30 WASK Engineering Inc. Active combustion control valve, system and method
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102016226075A1 (de) 2016-12-22 2018-06-28 Continental Automotive Gmbh Ventil
US11054052B2 (en) * 2016-12-26 2021-07-06 Fujikin Incorporated Piezoelectric-element-driven valve and flow rate control device
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7244530B2 (ja) 2017-11-21 2023-03-22 イリノイ トゥール ワークス インコーポレイティド プッシュアクチュエーターの小型円形リンク機構
US11079774B2 (en) * 2017-11-30 2021-08-03 Fujikin Incorporated Flow rate control device
WO2019159959A1 (ja) * 2018-02-19 2019-08-22 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
KR102395620B1 (ko) * 2018-08-30 2022-05-09 가부시키가이샤 후지킨 유체 제어 기기
US11859733B2 (en) * 2019-07-31 2024-01-02 Fujikin Incorporated Valve device, fluid control device, and manufacturing method of valve device
US11976748B2 (en) 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
CN114364907B (zh) * 2019-09-05 2024-10-11 株式会社堀场Stec 流量控制阀和流量控制装置
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
WO2022209639A1 (ja) 2021-04-01 2022-10-06 株式会社フジキン 制御器及び気化供給装置
FR3131615A1 (fr) * 2022-01-06 2023-07-07 Pytheas Technology Valve comportant un actionneur piézoélectrique.
CN117311401B (zh) * 2022-12-13 2024-05-03 青海盐湖工业股份有限公司 控流计量装置及介质输送系统
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

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JP2004162733A (ja) * 2002-11-08 2004-06-10 Stec Inc 高温対応バルブ

Also Published As

Publication number Publication date
US9163743B2 (en) 2015-10-20
KR20120048042A (ko) 2012-05-14
CN102667284B (zh) 2016-10-26
TW201139902A (en) 2011-11-16
TWI422765B (zh) 2014-01-11
JP2011117499A (ja) 2011-06-16
CN105179799B (zh) 2017-07-21
US20120273061A1 (en) 2012-11-01
WO2011067891A1 (ja) 2011-06-09
CN105179799A (zh) 2015-12-23
CN102667284A (zh) 2012-09-12
JP5669384B2 (ja) 2015-02-12

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