TWI421909B - 參數決定方法、曝光方法、半導體裝置製造方法、及儲存媒體 - Google Patents

參數決定方法、曝光方法、半導體裝置製造方法、及儲存媒體 Download PDF

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Publication number
TWI421909B
TWI421909B TW098107869A TW98107869A TWI421909B TW I421909 B TWI421909 B TW I421909B TW 098107869 A TW098107869 A TW 098107869A TW 98107869 A TW98107869 A TW 98107869A TW I421909 B TWI421909 B TW I421909B
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TW
Taiwan
Prior art keywords
image
optical
parameter
simulator
photoresist
Prior art date
Application number
TW098107869A
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English (en)
Chinese (zh)
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TW200952040A (en
Inventor
吉井啟人
辻田好一郎
三上晃司
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佳能股份有限公司
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Publication of TW200952040A publication Critical patent/TW200952040A/zh
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Publication of TWI421909B publication Critical patent/TWI421909B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
    • G03F7/70441—Optical proximity correction [OPC]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70125—Use of illumination settings tailored to particular mask patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW098107869A 2008-03-13 2009-03-11 參數決定方法、曝光方法、半導體裝置製造方法、及儲存媒體 TWI421909B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008064823A JP5178257B2 (ja) 2008-03-13 2008-03-13 パラメータ決定方法、露光方法、デバイス製造方法及びプログラム

Publications (2)

Publication Number Publication Date
TW200952040A TW200952040A (en) 2009-12-16
TWI421909B true TWI421909B (zh) 2014-01-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW098107869A TWI421909B (zh) 2008-03-13 2009-03-11 參數決定方法、曝光方法、半導體裝置製造方法、及儲存媒體

Country Status (4)

Country Link
US (1) US7642022B2 (enExample)
JP (1) JP5178257B2 (enExample)
KR (1) KR101030370B1 (enExample)
TW (1) TWI421909B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5224687B2 (ja) * 2006-12-22 2013-07-03 キヤノン株式会社 露光条件算出プログラム及び露光条件算出方法
JP2010107737A (ja) * 2008-10-30 2010-05-13 Toshiba Corp マスク検証方法、半導体装置の製造方法及び露光条件の調整プログラム
JP5539148B2 (ja) * 2010-10-19 2014-07-02 キヤノン株式会社 レジストパターンの算出方法及び算出プログラム
US9064808B2 (en) 2011-07-25 2015-06-23 Synopsys, Inc. Integrated circuit devices having features with reduced edge curvature and methods for manufacturing the same
US8609550B2 (en) * 2011-09-08 2013-12-17 Synopsys, Inc. Methods for manufacturing integrated circuit devices having features with reduced edge curvature
KR20190039579A (ko) * 2016-08-19 2019-04-12 에이에스엠엘 네델란즈 비.브이. 노광후 공정들의 모델링
US11139402B2 (en) 2018-05-14 2021-10-05 Synopsys, Inc. Crystal orientation engineering to achieve consistent nanowire shapes
JP7256287B2 (ja) * 2019-03-25 2023-04-11 エーエスエムエル ネザーランズ ビー．ブイ． パターニングプロセスにおいてパターンを決定するための方法
US11264458B2 (en) 2019-05-20 2022-03-01 Synopsys, Inc. Crystal orientation engineering to achieve consistent nanowire shapes
TW202344928A (zh) * 2022-05-04 2023-11-16 聯華電子股份有限公司 光源參數的匹配方法
CN119165745B (zh) * 2024-11-07 2025-09-30 中国科学院微电子研究所 一种工艺窗口确定方法和相关装置
CN119882359B (zh) * 2025-01-20 2025-11-21 上海积塔半导体有限公司 一种接触孔光刻工艺条件设计方法及半导体结构

Citations (3)

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Publication number Priority date Publication date Assignee Title
US20040139418A1 (en) * 2002-07-26 2004-07-15 Xuelong Shi Automatic optical proximity correction (OPC) rule generation
US20050055658A1 (en) * 2003-09-09 2005-03-10 International Business Machines Corporation Method for adaptive segment refinement in optical proximity correction
JP2005062750A (ja) * 2003-08-20 2005-03-10 Toshiba Corp Ｏｐｃを用いたパターン寸法の補正方法及び検証方法、該補正方法を用いて作成されたマスク及び半導体装置、並びに該補正方法を実行するシステム及びプログラム

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004228228A (ja) * 2003-01-21 2004-08-12 Toshiba Corp 形状シミュレーション方法、形状シミュレーションプログラム及びマスクパターン作成方法
JP2005352365A (ja) * 2004-06-14 2005-12-22 Renesas Technology Corp 半導体デバイスの製造方法、露光用マスクの製造方法および露光用マスク

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040139418A1 (en) * 2002-07-26 2004-07-15 Xuelong Shi Automatic optical proximity correction (OPC) rule generation
JP2005062750A (ja) * 2003-08-20 2005-03-10 Toshiba Corp Ｏｐｃを用いたパターン寸法の補正方法及び検証方法、該補正方法を用いて作成されたマスク及び半導体装置、並びに該補正方法を実行するシステム及びプログラム
US7213226B2 (en) * 2003-08-20 2007-05-01 Kabushiki Kaisha Toshiba Pattern dimension correction method and verification method using OPC, mask and semiconductor device fabricated by using the correction method, and system and software product for executing the correction method
US20050055658A1 (en) * 2003-09-09 2005-03-10 International Business Machines Corporation Method for adaptive segment refinement in optical proximity correction

Also Published As

Publication number Publication date
JP2009224409A (ja) 2009-10-01
KR20090098720A (ko) 2009-09-17
US20090233194A1 (en) 2009-09-17
JP5178257B2 (ja) 2013-04-10
KR101030370B1 (ko) 2011-04-20
US7642022B2 (en) 2010-01-05
TW200952040A (en) 2009-12-16

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