TWI421487B - And a method of detecting the state of the object to be conveyed - Google Patents

And a method of detecting the state of the object to be conveyed Download PDF

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Publication number
TWI421487B
TWI421487B TW098137606A TW98137606A TWI421487B TW I421487 B TWI421487 B TW I421487B TW 098137606 A TW098137606 A TW 098137606A TW 98137606 A TW98137606 A TW 98137606A TW I421487 B TWI421487 B TW I421487B
Authority
TW
Taiwan
Prior art keywords
floating
transport
control device
detecting
escape
Prior art date
Application number
TW098137606A
Other languages
English (en)
Chinese (zh)
Other versions
TW201022661A (en
Inventor
Kensuke Hirata
Hajime Banno
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW201022661A publication Critical patent/TW201022661A/zh
Application granted granted Critical
Publication of TWI421487B publication Critical patent/TWI421487B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW098137606A 2008-11-20 2009-11-05 And a method of detecting the state of the object to be conveyed TWI421487B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008296345A JP5223615B2 (ja) 2008-11-20 2008-11-20 薄板の浮上搬送状態検出方法及びその装置

Publications (2)

Publication Number Publication Date
TW201022661A TW201022661A (en) 2010-06-16
TWI421487B true TWI421487B (zh) 2014-01-01

Family

ID=42280893

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098137606A TWI421487B (zh) 2008-11-20 2009-11-05 And a method of detecting the state of the object to be conveyed

Country Status (4)

Country Link
JP (1) JP5223615B2 (ja)
KR (1) KR101187220B1 (ja)
CN (1) CN101738162B (ja)
TW (1) TWI421487B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6235524B2 (ja) * 2015-04-17 2017-11-22 ファナック株式会社 砂鋳型を製造する砂鋳型製造システムおよび砂鋳型製造方法
JP6393666B2 (ja) * 2015-08-25 2018-09-19 Ｊｆｅプラントエンジ株式会社 搬送鋼板挙動検出方法
CN108181310A (zh) * 2017-12-16 2018-06-19 武汉谷丰光电科技有限公司 检测线式小型盆栽植株检测平台
CN111650392A (zh) * 2020-07-03 2020-09-11 东北大学 基于线阵相机立体视觉的金属板材运动速度检测方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003279495A (ja) * 2002-03-22 2003-10-02 V Technology Co Ltd ガラス基板の検査装置
JP2007034168A (ja) * 2005-07-29 2007-02-08 Fujifilm Holdings Corp ステージ位置変動情報取得方法および装置
TW200716970A (en) * 2005-10-12 2007-05-01 Olympus Corp Substrate inspection apparatus

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04178506A (ja) * 1990-11-13 1992-06-25 Matsushita Electric Ind Co Ltd ワークの３次元位置計測方法
JPH11121589A (ja) * 1997-10-09 1999-04-30 Nikon Corp 搬送方法および搬送装置、および露光装置
JP4357619B2 (ja) 1999-02-09 2009-11-04 キヤノンアネルバ株式会社 マルチチャンバシステム
US6359686B1 (en) * 1999-06-29 2002-03-19 Corning Incorporated Inspection system for sheet material
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
WO2004076320A1 (de) * 2003-02-25 2004-09-10 Technische Universität München Vorrichtung zum berührungslosen transportieren und positionieren von bauteilen
JP2005249495A (ja) * 2004-03-02 2005-09-15 Asahi Kasei Construction Materials Co Ltd 平板体の表面検査方法及び装置
US7080962B1 (en) * 2005-05-31 2006-07-25 Kimberly-Clark Worldwide, Inc. Air conveyance apparatus
KR101213991B1 (ko) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 기판 이송 장치 및 방법
JP4876640B2 (ja) * 2006-03-09 2012-02-15 セイコーエプソン株式会社 ワーク搬送装置およびワーク搬送方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003279495A (ja) * 2002-03-22 2003-10-02 V Technology Co Ltd ガラス基板の検査装置
JP2007034168A (ja) * 2005-07-29 2007-02-08 Fujifilm Holdings Corp ステージ位置変動情報取得方法および装置
TW200716970A (en) * 2005-10-12 2007-05-01 Olympus Corp Substrate inspection apparatus

Also Published As

Publication number Publication date
CN101738162B (zh) 2012-10-10
CN101738162A (zh) 2010-06-16
JP5223615B2 (ja) 2013-06-26
KR20100056972A (ko) 2010-05-28
KR101187220B1 (ko) 2012-10-02
TW201022661A (en) 2010-06-16
JP2010120747A (ja) 2010-06-03

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MM4A Annulment or lapse of patent due to non-payment of fees