201022661 六、發明說明： 【發明所屬之技術領域】 本發明是在一邊使對象物浮上，一邊搬送的浮上搬送 裝置中，檢測出被浮上搬送的對象物的狀態之方法及其裝 置。 【先前技術】 φ 在半導體裝置或液晶面板的製造，有玻璃製的基板被 利用。通常，玻璃製的基板，爲了防止受傷，一邊藉由壓 縮空氣等的流體來浮上，一邊搬送。但，有因爲浮上高度 不足等的各種理由，玻璃基板接觸於浮上搬送裝置的任一 部位，因此傷及玻璃製基板的情形。 爲了確認有無傷，可藉由目視來檢査。如此的作業必 須中斷工程，因此高度被自動化的工程效率性會顯著受損 。須有自動檢測出有無接觸的方法及其裝置。 Ο 日本特許出願公開2007-0768 3 6號公報是揭示氣體浮 上搬送裝置，其係具備在與搬送面的接觸時檢測出流動於 檢出用搬送體與搬送面之間的電流的檢出器。如此的技術 ’必須對搬送面預先賦予導電性皮膜。 【發明內容】 本發明爲了可自動地檢測出對象物與浮上搬送裝置的 接觸有無，而以提供一種檢測出所被浮上搬送的對象物的 狀態之方法及其裝置爲目的。 -5- 201022661 本發明的第1局面，係一種檢測出從搬送面向上方浮 上而搬送之具有複數的標識的對象物的狀態之方法，其特 徵爲： 藉由彼此離間配置的複數的相機來分別攝取浮上搬送 的路徑中的區域， 在藉由前述相機所被攝取的各畫像中，分別特定該當 於前述對象物中的前述標識之像素的位置， 從所被特定的前述像素的各前述位置來算出前述對象 φ 物的3次元位置。 較理想是上述的方法，更包含：根據前述3次元位置 來檢測出由前述對象物與前述搬送面的接觸有無、及前述 對象物與前述搬送面接觸之處所構成的群來選擇的任一方 〇 且較理想是上述的方法，更包含：由前述3次元位置 的歷時變化來算出前述對象物的速度。 或較理想是上述的方法，更包含：根據前述3次元位 @ 置的歷時變化來實行由前述對象物的有無逸走的檢出、及 前述對象物的逸走量的算出所構成的群來選擇的任一方。 本發明的第2局面，係一種檢測出從搬送面向上方浮 上而搬送之具有複數的標識的對象物的狀態之裝置，其特 徵爲具備： 複數的相機’其係構成爲了分別攝取浮上搬送的路徑 中的區域而彼此離間配置；及 控制裝置’其係構成爲了在藉由前述相機所攝取的各 -6- 201022661 畫像中’分別特定該當於前述對象物中的前述標識之像素 ’從所被特定的各前述像素的位置、及前述相機的位置， 來算出前述對象物的3次元位置。 較理想是前述控制裝置更構成爲了根據前述3次元位 置來檢測出由前述對象物與前述搬送面的接觸有無、及前 述對象物與前述搬送面接觸之處所構成的群來選擇的任一 方。 Ο 且較理想是前述控制裝置更構成爲了由前述3次元位 置的歷時變化來算出前述對象物的速度。 或較理想是前述控制裝置更構成爲了根據前述3次元 位置的歷時變化來實行由前述對象物的有無逸走的檢出、 及前述對象物的逸走量的算出所構成的群來選擇的任一方 【實施方式】 以下參照圖面來説明本發明的實施形態。爲了方便説 明’如圖1所示’定義X、Y、Z軸、及沿著該等的方向 爲X、Υ、Ζ方向。該定義是爲了方便説明，本發明並非 一定限於此。 本發明的實施形態之浮上搬送裝置10，如圖1及圖6 〜8所示，是用以使對象物w在垂直方向（圖中φ ζ方向 )浮上而於水平的搬送方向（圖中的X方向）搬送之裝置 在本說明書及申請專利範圍中是將「逸走」的用語定 201022661 義爲：對象物w作動於與原本所企圖的搬送方向相異的 方向。例如，當原本企圖的搬送方向爲X方向時，對象物 W的軌跡正確地一致於X方向而未變位於γ方向時，認 定爲「對象物W未逸走」。另一方面，即使對象物W的 軌跡大槪一致於X方向，當變位於Y方向時，認定爲「 對象物W逸走」。對象物W蛇行當然含於逸走的範疇。 對象物W是全體平面狀較薄的物體，例如液晶面板 用的玻璃基板等薄板爲適當。對象物W並非一定是全體 φ 平面狀，只要其下面的至少一部分爲平面狀即可。爲了使 浮上，例如可利用空氣之類的流體。浮上搬送裝置10可 因應所需設置於無塵室内等使用》 浮上搬送裝置10是具備：延伸於X方向的基台B、 及在基台B上成列於X方向的搬送裝置11、及在基台B 上成列於X方向及Y方向雙方的複數的浮上裝置37、及 檢出裝置。 搬送裝置11是在基台B上的左端及右端附近具有分 藝 別在X方向成列的複數的滾筒1 3。各滾筒1 3是分別經由 轉軸13s來與禍輪（Worm wheel) 17 —體連結，藉由拖 架33來旋轉自如地支撐。以能夠在X方向貫通基台B的 方式具備一對的驅動軸19，各驅動軸19是具備可與各蝸 輪17驅動地咬合的蝸桿21。在各驅動軸19的前端是經由 連接器等來可驅動地連結馬達23的輸出軸。藉此’各滾 筒13會接受馬達23的驅動力，來以同旋轉速度旋轉。 如圖7所示，前述各滾筒13的上端部是比前述浮上 -8 - 201022661 裝置37的上面更稍微突出至上方，而以能夠在單一 上一致的方式配置。如圖7所示，對象物W是即使 上的狀態也可接觸於應該接受驅動力的滾筒13。亦可取 滾筒，將可驅動的箝位器或皮帶輸送器等的搬送手段適 於搬送裝置1 1。 參照圖6〜8，浮上裝置37是具備可使空氣流通的 數或單一的腔室25。腔室25是在其下部具備容許空氣 〇 入的一個以上的取入口 27，在其上部具備與浮上裝置 連通的複數的開口 29。各取入口 27是具備經由拖架33 支撐於基台B的送風裝置31。送風裝置31是用以供給 空氣的流體之裝置，可利用藉由馬達來驅動的風扇，但 非限於此。亦可藉由壓縮機來供給空氣，或利用預先儲 壓縮的空氣、氮或氬之氣瓶等。亦可在鄰接的腔室25 間設置與送風裝置31連通的開口 35。 各浮上裝置37是具備：具有平面的上面的上部體 β 、及被連結至其下部的脚部43。上部體39與脚部43皆 中空，内部互相連通。脚部43是分別以内部能夠和腔 25的開口 29連通之方式固定於基台Β上。如圖6所示 上部體39是具備與其内部連通的噴出孔41。複數的浮 裝置37是以其上面彼此間成單一平面的方式使高度一 。以下將此平面稱爲搬送面S。 參照圖1，2，檢出裝置是具備··複數的相機3R， 、及處理藉由相機3R，3L所攝取的畫像之控制裝置5 在此例中，相機爲2台，但亦可爲3台以上。[Technical Field] The present invention is a method and apparatus for detecting a state of an object to be transported by floating in a floating transport apparatus that transports an object while floating on the object. [Prior Art] φ In the manufacture of a semiconductor device or a liquid crystal panel, a substrate made of glass is used. Usually, the glass substrate is transported while being floated by a fluid such as compressed air in order to prevent injury. However, the glass substrate is in contact with any portion of the floating transport device for various reasons such as insufficient floating height, and thus the glass substrate is damaged. In order to confirm the presence or absence of injury, it can be checked by visual inspection. Such work must be interrupted, so highly automated engineering efficiency can be significantly impaired. There must be a method and device for automatically detecting the presence or absence of contact. Japanese Laid-Open Patent Publication No. 2007-0768 No. 3-6 discloses a gas floating upper conveying device that includes a detector that detects a current flowing between the detecting transporting body and the conveying surface when coming into contact with the conveying surface. In such a technique, it is necessary to impart a conductive film to the transfer surface in advance. SUMMARY OF THE INVENTION In order to automatically detect the presence or absence of contact between an object and a floating transport apparatus, the present invention is directed to a method and apparatus for detecting a state of an object to be transported by floating. -5-201022661 A first aspect of the present invention is a method of detecting a state of an object having a plurality of marks that are transported from above a transport surface, and is characterized by: a plurality of cameras disposed apart from each other In the image in the path of the floating transport, the position of the pixel of the marker in the object is specified in each of the images captured by the camera, and each position of the specified pixel is The third-order position of the object φ is calculated. Preferably, the method further includes: selecting one of the groups selected by the group of the object to be in contact with the transfer surface based on the third dimensional position; and detecting the presence or absence of contact between the object and the transfer surface; Preferably, the method further includes calculating a velocity of the object from a temporal change of the third dimensional position. Preferably, the method further includes: selecting a group consisting of detecting the presence or absence of the object and calculating the amount of escape of the object based on the temporal change of the third dimension @ Either side. According to a second aspect of the present invention, there is provided a device for detecting a state of a plurality of objects that are carried by a plurality of logos that are transported upward from a transport surface, and is characterized in that: a plurality of cameras are provided in order to respectively pick up a path for floating transport The middle area is disposed apart from each other; and the control device is configured to "specify the pixel of the aforementioned identifier in the object, respectively, from each of the -6-201022661 images taken by the camera" The position of each of the pixels and the position of the camera are used to calculate the third-order position of the object. Preferably, the control device is configured to select one of the groups formed by the presence or absence of contact between the object and the transfer surface and the group of the object to be contacted with the transfer surface based on the third-order position. Preferably, the control means further comprises a speed for calculating the velocity of the object from a temporal change of the third dimensional position. Preferably, the control device further includes one of the groups selected by the group of the detection of the presence or absence of the object and the calculation of the amount of escape of the object based on the temporal change of the third-order position. Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience of explanation, the X, Y, and Z axes are defined as shown in Fig. 1, and the directions along the directions are X, Υ, and Ζ. This definition is for convenience of explanation, and the present invention is not necessarily limited thereto. As shown in FIGS. 1 and 6 to 8 , the floating transport apparatus 10 according to the embodiment of the present invention is for moving the object w in the vertical direction (φ ζ direction in the drawing) in the horizontal transport direction (in the figure). In the present specification and the scope of the patent application, in the specification and the patent application, the term "escape" is defined as 201022661: the object w is moved in a direction different from the originally intended transport direction. For example, when the originally attempted transport direction is the X direction, the trajectory of the object W is correctly aligned with the X direction and does not change to the γ direction, and it is determined that "the object W has not escaped". On the other hand, even if the trajectory of the object W is larger than the X direction, when it is changed to the Y direction, it is determined as "the object W is escaping". The object W snake line is of course included in the category of escape. The object W is an object having a thin overall planar shape, and a thin plate such as a glass substrate for a liquid crystal panel is suitable. The object W is not necessarily all φ planar, as long as at least a part of the lower surface thereof is planar. In order to float, for example, a fluid such as air can be utilized. The floating transport device 10 can be installed in a clean room or the like according to the requirements. The floating transport device 10 includes a base B extending in the X direction, and a transport device 11 arranged in the X direction on the base B, and The base B is provided with a plurality of floating devices 37 and detection devices arranged in the X direction and the Y direction. The conveying device 11 has a plurality of rollers 13 which are arranged in the X direction in the vicinity of the left end and the right end of the base B. Each of the rollers 13 is coupled to a Worm wheel 17 via a rotating shaft 13s, and is rotatably supported by a carriage 33. A pair of drive shafts 19 are provided so as to be able to penetrate the base B in the X direction, and each of the drive shafts 19 is provided with a worm 21 that is engagably engageable with each of the worm wheels 17. The front end of each drive shaft 19 is an output shaft that is drivably coupled to the motor 23 via a connector or the like. Thereby, the respective rollers 13 receive the driving force of the motor 23 to rotate at the same rotational speed. As shown in Fig. 7, the upper end portions of the respective rollers 13 are slightly protruded upward from the upper surface of the above-mentioned floating -8 - 201022661 device 37, and are arranged to be uniform in a single manner. As shown in Fig. 7, the object W is in contact with the drum 13 which should receive the driving force even in the above state. It is also possible to take a roller and apply a conveying means such as a movable clamp or a belt conveyor to the conveying device 1 1. Referring to Figs. 6 to 8, the floating device 37 is provided with a number or a single chamber 25 through which air can flow. The chamber 25 has one or more inlets 27 for allowing air to enter at a lower portion thereof, and a plurality of openings 29 communicating with the floating device at its upper portion. Each of the intake ports 27 is provided with a blower 31 supported by the base B via the carriage 33. The air blowing device 31 is a device for supplying a fluid of air, and a fan driven by a motor can be used, but is not limited thereto. It is also possible to supply air by means of a compressor, or to use a pre-stored compressed air, a cylinder of nitrogen or argon or the like. An opening 35 communicating with the air blowing means 31 may be provided between the adjacent chambers 25. Each of the floating devices 37 includes an upper body β having a flat upper surface and a leg portion 43 connected to the lower portion thereof. The upper body 39 and the leg portion 43 are both hollow and communicate with each other. The leg portions 43 are respectively fixed to the base frame so that the inside can communicate with the opening 29 of the cavity 25. As shown in Fig. 6, the upper body 39 is provided with a discharge hole 41 communicating with the inside. The plurality of floating devices 37 have a height of one in such a manner that they are in a single plane with respect to each other. Hereinafter, this plane is referred to as a transfer surface S. Referring to Figs. 1 and 2, the detecting device is a camera 3R having a plurality of cameras, and a control device 5 for processing an image taken by the cameras 3R and 3L. In this example, the camera is two, but may be three. Above the station.
面 浮 代 用 複 流 37 來 如 並 存 之 39 爲 室 9 上 致 3L -9- 201022661 相機3R，3L是分別安裝於框架7，該框架7是配置 成可跨越所被配列的浮上裝置37。相機3R與相機3L是 以能夠在Y方向具有適當的間隔之方式彼此離間配置。 相機是以可具備CCD等的固體攝像元件來斷續地撮 像之數位相機爲合適。亦可取代數位相機，而利用可連續 地撮像的攝影機、或類比相機。類比相機亦可組合類比-數位變換裝置。相機3R，3L是彼此同步，攝取浮上搬送 的路徑中的共通區域。而且，相機3R，3L會將攝取的畫 φ 像以數位資料的形式週期性地輸出。 相機3 R，3 L所攝取的區域是在圖1中例如以虛線a 所示的區域。此區域A是在藉由浮上搬送裝置1〇來將對 象物W浮上搬送於X方向的路徑中，因應所需適當地設 定。相機3R與相機3L是在Y方向彼此離間配置，攝取 浮上搬送的路徑中的共通區域A，因此所被攝取的各畫像 是含所謂視差。 亦可在對象物W上具備被貼附於其表面的1個以上 〇 的標識9。當對象物W爲玻璃那樣由透明的素材所構成時 ’上述的視差無法明確地檢測出，但如此的標識9是有助 於使上述的視差明確化。又，亦可取代所被貼附的標識， 利用被印刷於對象物上的標識、對象物的輪郭、對象物的 表面模樣、形狀、全息圖等的畫像中可明確地識別的任何 對象。 控制裝置5是具備：實行資料的運算與處理的CPU5 a 、暫時容納資料的 RAM5b、及持續性記憶程式等的 -10- 201022661 ROM5c等。控制裝置5可更具備硬碟或固體碟片等的記憶 裝置、或顯示器等的顯示裝置等。CPU5a是與相機3L’ 3R連接，可取入從相機輸出的畫像資料。RAM5b是具有 記憶CPU5a所取入的資料的資料區域、及用以實行各種的 處理的工作區域。R〇M5c是容納使實行CPU5a的控制程 式。CPU5a是按照控制程式來解析從相機3L，3R輸出的 畫像資料。 〇 在RAM5b的資料區域容納有從記憶裝置或ROM5C讀 入的座標變換資料。座標變換資料是作爲座標値利用於算 出畫像中的特定要素的3次元位置。更在RAM5b的資料 區域容納有後述的搬送面S的3次元位置的座標値的資料 、或對象物W的形狀資料等。 在RAM5b的工作區域確保有用以幀單位來記憶從相 機3L’ 3R輸出的畫像資料之幢存儲器（frame memory) 區域。幀存儲器區域可對應於2台的相機3L，3R來確保 ® 2個。畫像資料會交替寫入至2個的幀存儲器區域，在一 方的幀存儲器區域進行畫像資料的寫入的期間，可對另一 方的幀存儲器區域實行畫像資料的解析。 CPU5a是按照容納於R〇M5c的控制程式，實行畫像 資料的解析。圖3〜圖5是表示其流程。 參照圖3’ 一旦被投入電源，則控制裝置5會啓動， CPU5a會從相機3L’ 3R來分別取入畫像資料（步驟si) ’解析取入的畫像資料（步驟S3 )，根據解析結果來算 出對象物W的位置（步驟S5)，檢測出對象物的狀態（ -11 - 201022661 步驟S7)。此一連串的步驟可重複實行。 更詳細是在步驟S1中’（^^^是將相機3l，3R輸出 的畫像資料分別寫入RAMSb中的2個幀存儲器區域。該 等的寫入是交替被實行。在步驟S3中，cpu5a是在—方 的幀存儲器區域進行畫像資料的寫入的期間，對另一方的 幀存儲器區域實行畫像資料的解析。 參照圖4 ’更詳細說明步驟S3。在步驟S3中， CPUh會抽出藉由相機3l，所攝取的各畫像中的標識 參 (步驟S31)。標識的抽出是可藉由邊緣抽出法（]Edge Detection method)或樣式辨認（pattern rec〇gniti〇n)法 等的周知方法。其次’ CPU5a會判定所被抽出的標識的數 量是否爲算出3次元位置所必要的個數以上（步驟S33) 。當數量比必要的個數還不足時（步驟S3 3中NO)， CPU5a會終了解析處理。 當所被抽出的標識的數量爲必要的個數以上時（步驟 S33中YES) ，CPU5a會分別特定該當於各標識之像素的 〇 位置（步驟S3 5)，從所被特定的前述像素的各前述位置 來算出前述對象物的3次元位置。3次元位置因爲視差所 產生的各畫像中的像素的位置不同，所以利用座標變換資 料作爲座標値算出。座標値是作爲正交座標系或極座標系 等適當的3次元座標系的値算出。座標系可爲整體座標系 (global coordinate system )或區域座標系統（l〇cal coordinate system)。藉由座標値的算出完了，完成畫像 資料解析處理的步驟S3。 -12- 201022661 回到圖3’在步驟S5中，CPU5a會從在步驟S35中 所被算出的各標識的3次元位置的座標値來算出區域A之 對象物W的下面的3次元位置的座標値的群。各標識的 正下方的下面的座標値是藉由對各標識的座標値加算對象 物W的板厚的値來取得。有關標識間的中間點是藉由對 標識的座標値的群適用適當的內插法來推定其座標値，其 次藉由加算對象物W的板厚的値來取得。或，亦可取代 〇 一定的板厚的値，利用預先準備的對象物W的形狀資料 。如此’針對對象物W的全體來算出3次元位置。 有關接續於步驟S5的步驟S7是參照圖5來說明其詳 細。CPU5 a是藉由比較：在步驟S5中所被算出的對象物 W的下面的3次元位置的座標値的群、及預先被準備的搬 送面S的3次元位置的座標値的群，來檢測出對象物w 與搬送面S的接觸有無（步驟S71)。亦即，有關對象物 W的下面的1點，是將Z方向的座標値（高度）與搬送面 ® S的Z方向的座標値（高度）的群作比較，判斷是否相同 ’或爲較低的値。當爲相同或低値時，該點判斷爲對象物 W與搬送面接觸之處。針對對象物w的下面的所有點重 複實行此判斷。當任何的點皆無接觸時，可檢測出無對象 物W與搬送面S的接觸。 接著，CPU 5 a會從在步驟S5中所被算出的對象物w 的3次元位置的座標値的歷時變化來算出對象物W的速 度（步驟S73)。亦即，CPU5a會從某時間點的座標値來 扣除以前的某時間點的座標値，藉此算出X方向的座標値 -13- 201022661 的變化。予以藉由經過的時間來除以，算出對象物w幻 (X方向的）速度。 同樣’ CPU5a會從在步驟S5中所被算出的對象物W 的3次兀位置的座標値的歷時變化來檢測出有無對象物w 的逸走（步驟S75)。亦即’ CPU5a會從某時間點的座標 値來扣除以前的某時間點的座標値，藉此算出γ方向的座 標値的變化。所被算出的變化的値是對象物W的逸走量 。當對象物W的逸走量比預先適當設定的臨界値更大時 φ ，檢測出對象物W逸走。 藉由以上完成步驟S7，完成檢測出對象物w的狀態 的處理。 若根據上述實施形態，則具備檢出裝置的浮上搬送裝 置1 〇是如以下般動作。 若從送風裝置31往腔室25供給空氣，則腔室25會 往各浮上裝置37均一地分配空氣，從各噴出孔41噴出空 氣。噴出的空氣會在上部體39的上面與對象物W的下面 G 之間，噴出孔41的開口所包圍的空間，使均一的壓力產 生，以對前述對象物W賦予浮力，由搬送面S向上方浮 上。另一方面，藉由驅動一對的馬達23，一對的驅動軸 19會同步旋轉。藉由蝸輪17與蝸桿21的咬合，驅動軸 19的旋轉會傳達至各滾筒13。對象物w是藉由接觸於旋 轉的滾筒13來以浮上的狀態搬送於X方向。相機3L，3R 是常時攝取區域A。當對象物W通過區域A時，對象物 W會與標識9 一起被相機3L，3R攝取。相機3L，3R會 -14- 201022661 將攝取的畫像以數位資料的形式來輸出至控制裝置5。控 制裝置5是利用畫像所具有的視差，如上述般算出前述對 象物的3次元位置。然後，控制裝置5會將所被算出的3 次元位置與預先準備的搬送面S的3次元位置作比較。控 制裝置5更根據此比較來檢測出對象物w與搬送面S的 接觸有無、及/或、對象物W與搬送面S所接觸之處。 而且，控制裝置5會根據所被算出的3次元位置的歷 〇 時變化來算出對象物W的速度。控制裝置5更根據所被 算出的3次元位置的歷時變化來算出前述對象物w的逸 走有無、及/或、前述對象物W的逸走量。 另外’亦可在圖3的步驟S7之後，實行控制對象物 W的浮上高度之處理。亦即，控制裝置5會從所被算出的 3次元位置的座標値來算出區域A之對象物w的下面與搬 送面S的距離（亦即對象物W的浮上高度）。控制裝置5 會控制送風裝置31的輸出，而使所被算出的浮上高度能 Ο 夠與預先準備的基準高度一致，以對象物W的浮上高度 能夠與基準高度一致的方式控制。 由以上可理解’若根據本實施形態，則可檢測出對象 物的3次元位置’且對象物的速度、或有無對象物的逸走 、逸走的量等之對象物的狀態會被檢測出。如上述般，可 根據對象物的3次兀位置來檢測出對象物與浮上搬送裝置 的接觸有無，且其次那樣的各種控制也可能。 根據所被算出的對象物W的速度，對象物w的速度 的反餽控制可能。亦即，控制裝置5會比較所被算出的對 -15- 201022661 象物W的速度與預先準備的基準速度。當對象物w的速 度比基準速度小時’控制裝置5會控制成增速馬達23，當 對象物W的速度比基準速度大時，控制裝置5會控制成 減速馬達23。以對象物W的速度能夠與基準速度一致的 方式控制。或’亦可取代馬達2 3的控制，而控制送風裝 置31的輸出。一旦浮上高度藉由送風裝置31的控制而改 變’則對象物W藉由與滾筒13的接觸而接受的驅動力會 變化，因此結果對象物W的速度會被控制。 φ 又’可根據對象物W的有無逸走的檢出、及前述對 象物的逸走量的算出，來防止對象物W的逸走。亦即， 只要在右列的滾筒13與左列的滾筒13之間使產生速度差 ，便可在抗拒逸走的方向對對象物W賦予驅動力。或， 只要藉由送風裝置31的控制來對各浮上裝置37改變噴出 的流量，便可在抗拒逸走的方向對對象物W賦予驅動力 。亦即，解消逸走之類的控制可能。 如前述般，標識9並非是必須，在所被攝取的畫像中 · 可明確識別的任何對象皆可利用。如此的畫像中的對象抽 出，例如可利用周知的樣式辨認技術來容易地實行。然後 所被抽出的對象可根據上述的方法來算出對象物的3次元 位置。 並且，就上述的説明而言，所被貼附的標識9是分別 在X方向及Y方向取等間隔來正交配列。亦可取代如此 的配列，爲六方的配列、或隨機的配列等適當的配列。標 識9的密度是均一爲理想，但並非限於此。又，標識9可 -16- 201022661 不必在對象物W的全體分布，限於其一部分即可。 參照適當的實施形態來說明本發明，但本發明並非 於上述實施形態。具有本技術領域的通常技術者可根據上 揭内容藉由實施形態的修正乃至變形來實施本發明。 〔產業上的利用可能性〕 提供一種可自動檢測出對象物與浮上搬送裝置的接觸 Φ 有無之被浮上搬送的對象物的狀態之方法及其裝置。 【圖式簡單說明】 圖1是本發明的實施形態的檢出裝置的槪略立體圖。 圖2是前述檢出裝置的電性連接的槪略圖。 圖3是有關前述檢出裝置的檢出方法的流程圖。 圖4是表示圖3的流程圖的畫像資料解析處理的詳細 流程圖。 φ 圖5是表示圖3的流程圖的浮上搬送狀態檢出處理的 詳細流程圖。 圖6是適用前述檢出裝置的浮上搬送裝置的部分平面 圖。 圖7是前述浮上搬送裝置的側面圖。 圖8是前述浮上搬送裝置的部分縱剖面圖。 【主要元件符號說明】 5 :控制裝置 -17- 201022661 9 :標識 10 :浮上搬送裝置 11 :搬送裝置 13 :滾筒 1 3 s :旋轉軸 17 :蝸輪 1 9 :驅動軸 2 1 ·•蝸桿 ⑩ 23 :馬達 25 :腔室 27 :取入口 31 :送風裝置 3 3 :拖架 35 :開口 3 7 :浮上裝置 39 :上部體 Θ 4 1 :噴出孔 43 :脚部The surface float is replaced by a reflow 37 as a chamber. 9 is a 3L -9-201022661 camera 3R, 3L is mounted to the frame 7, respectively, which is configured to span the arranged floating device 37. The camera 3R and the camera 3L are disposed apart from each other so as to have an appropriate interval in the Y direction. The camera is suitably a digital camera that can be intermittently imaged by a solid-state imaging device such as a CCD. It can also replace a digital camera and use a camera that can continuously capture images, or an analog camera. Analog cameras can also be combined with analog-to-digital converters. The cameras 3R, 3L are in synchronization with each other, and take in a common area in the path of the floating transport. Further, the cameras 3R, 3L periodically output the captured picture φ image in the form of digital data. The area taken by the cameras 3 R, 3 L is the area shown by the broken line a in Fig. 1, for example. This area A is a path in which the object W is floated and transported in the X direction by the floating transport apparatus 1A, and is appropriately set as needed. Since the camera 3R and the camera 3L are disposed apart from each other in the Y direction, and the common area A in the path of the floating transport is taken, the respective images taken are so-called parallax. It is also possible to provide the object W with one or more 9 marks 9 attached to the surface thereof. When the object W is made of transparent material like glass, the above-described parallax cannot be clearly detected, but such a mark 9 contributes to clarifying the above-described parallax. Further, in place of the attached label, any object that can be clearly recognized by the logo printed on the object, the wheel of the object, the surface pattern of the object, the shape, the hologram, or the like can be used. The control device 5 includes a CPU 5a that performs calculation and processing of data, a RAM 5b that temporarily stores data, and a temporary memory program such as -10-201022661 ROM5c. The control device 5 may further include a memory device such as a hard disk or a solid disk, or a display device such as a display. The CPU 5a is connected to the camera 3L' 3R and can take in image data output from the camera. The RAM 5b is a data area having data to be taken in by the memory CPU 5a, and a work area for performing various processes. R 〇 M5c is a control mode for accommodating the execution of the CPU 5a. The CPU 5a analyzes the image data output from the cameras 3L, 3R in accordance with the control program.座 The coordinate conversion data read from the memory device or ROM 5C is accommodated in the data area of the RAM 5b. The coordinate transformation data is a three-dimensional position used as a coordinate to calculate a specific element in the image. Further, in the data area of the RAM 5b, the data of the coordinate 3 at the 3rd position of the transport surface S to be described later, or the shape data of the object W, and the like are accommodated. In the work area of the RAM 5b, a frame memory area for storing image data output from the camera 3L' 3R in frame units is secured. The frame memory area can correspond to 2 cameras 3L and 3R to ensure ® 2 . The image data is alternately written into the two frame memory areas, and the image data is analyzed in the other frame memory area while the image data is being written in one frame memory area. The CPU 5a performs analysis of image data in accordance with a control program housed in R〇M5c. 3 to 5 show the flow. Referring to Fig. 3', when the power is turned on, the control device 5 is activated, and the CPU 5a takes in the image data from the camera 3L' 3R (step si) 'analyzes the captured image data (step S3), and calculates based on the analysis result. The position of the object W (step S5) detects the state of the object ( -11 - 201022661, step S7). This series of steps can be repeated. More specifically, in step S1, (^^^ is to write the image data output from the cameras 31, 3R to the two frame memory areas in the RAMSb. The writing is alternately performed. In step S3, cpu5a In the case where the image data is written in the frame memory area, the image data is analyzed in the other frame memory area. Step S3 will be described in more detail with reference to Fig. 4, and in step S3, CPUh is extracted. The camera 31 detects the marker in each of the captured images (step S31). The extraction of the marker is a well-known method such as an edge detection method or a pattern recognizing method. Next, the CPU 5a determines whether or not the number of flags to be extracted is more than the number necessary for calculating the 3-dimensional position (step S33). When the number is less than the necessary number (NO in step S3 3), the CPU 5a ends. When the number of the extracted identifiers is more than necessary (YES in step S33), the CPU 5a specifies the 〇 position of each of the identified pixels (step S3 5), from the specific The three-dimensional position of the object is calculated for each position of the element. The position of the pixel in each image due to the parallax is different, so the coordinate conversion data is used as the coordinate 値. The coordinate 値 is used as the orthogonal coordinate system. Or the calculation of the appropriate three-dimensional coordinate system such as the polar coordinate system. The coordinate system can be a global coordinate system or a l coordinate coordinate system. The calculation of the image data is completed by the calculation of the coordinate 値. Step S3 of the processing. -12- 201022661 Returning to Fig. 3', in step S5, the CPU 5a calculates the lower surface of the object W of the area A from the coordinate 値 of the third-order position of each of the markers calculated in step S35. The group of coordinates 3 at the position of the third dimension. The lower coordinate 正 directly below the respective markers is obtained by adding the thickness of the object W to the coordinates of each marker. The intermediate point between the markers is by The group of the marked coordinates 适用 is determined by appropriate interpolation method to estimate the coordinates 値, and secondly by adding the thickness of the object W to the thickness of the object W. Alternatively, it may be replaced by a certain amount. In the case of the thickness of the object W, the shape data of the object W prepared in advance is used. The three-dimensional position is calculated for the entire object W. The step S7 following the step S5 is described in detail with reference to Fig. 5. The CPU 5 a is By comparing the group of coordinates 3 at the lower third-order position of the object W calculated in step S5 and the group of coordinates 3 at the three-dimensional position of the transport surface S prepared in advance, the object is detected. w. The presence or absence of contact with the transport surface S (step S71). That is, the lower point of the object W is the coordinate 値 (height) of the coordinate direction 高度 (height) in the Z direction and the Z direction of the transport surface о S The group is compared to determine if it is the same 'or lower. When it is the same or low, the point is judged to be the point where the object W comes into contact with the transport surface. This judgment is repeated for all points below the object w. When no point is in contact, the contact of the object W with the conveying surface S can be detected. Next, the CPU 5a calculates the speed of the object W from the change of the coordinate 値 of the third dimension position of the object w calculated in step S5 (step S73). That is, the CPU 5a deducts the coordinate 値 at a certain point in time from the coordinate 値 at a certain point in time, thereby calculating the change of the coordinate 値 -13 - 201022661 in the X direction. By dividing by the elapsed time, the velocity of the object w (X direction) is calculated. Similarly, the CPU 5a detects the presence or absence of the object w from the change of the coordinate 値 of the third position of the object W calculated in step S5 (step S75). That is, the CPU 5a calculates the coordinate 値 in the γ direction by subtracting the coordinate 以前 at a certain point in time from the coordinate 某 at a certain point in time. The enthalpy of the calculated change is the amount of escape of the object W. When the escape amount of the object W is larger than the threshold 値 which is appropriately set in advance, φ is detected, and the object W is detected to escape. By the above completion of step S7, the process of detecting the state of the object w is completed. According to the above embodiment, the floating transport device 1 including the detecting device operates as follows. When air is supplied from the air blowing device 31 to the chamber 25, the chamber 25 uniformly distributes air to each of the floating devices 37, and ejects air from each of the ejection holes 41. The ejected air is between the upper surface of the upper body 39 and the lower surface G of the object W, and the space surrounded by the opening of the ejecting hole 41 is generated to generate a uniform pressure to impart buoyancy to the object W, and the conveying surface S is upward. The square floats. On the other hand, by driving the pair of motors 23, the pair of drive shafts 19 rotate in synchronization. By the engagement of the worm wheel 17 and the worm 21, the rotation of the drive shaft 19 is transmitted to the respective rollers 13. The object w is conveyed in the X direction by being brought into contact with the rotating drum 13 in a floating state. The cameras 3L, 3R are the constantly ingested areas A. When the object W passes through the area A, the object W is taken up by the cameras 3L, 3R together with the mark 9. The camera 3L, 3R will -14- 201022661 output the captured image to the control device 5 in the form of digital data. The control device 5 calculates the third-order position of the object as described above by using the parallax of the image. Then, the control device 5 compares the calculated third-order position with the 3-dimensional position of the transport surface S prepared in advance. Further, based on this comparison, the control device 5 detects the presence or absence of contact between the object w and the transport surface S, and/or the contact between the object W and the transport surface S. Further, the control device 5 calculates the velocity of the object W based on the change in the history of the calculated third-order position. The control device 5 further calculates the presence or absence of the escape of the object w and/or the amount of escape of the object W based on the temporal change of the calculated third-order position. Further, the process of controlling the flying height of the object W may be performed after step S7 of Fig. 3 . In other words, the control device 5 calculates the distance between the lower surface of the object w of the region A and the transport surface S (i.e., the floating height of the object W) from the coordinate 値 of the calculated ternary position. The control device 5 controls the output of the air blowing device 31 so that the calculated flying height can be made to match the reference height prepared in advance, and can be controlled such that the flying height of the object W can match the reference height. As can be understood from the above, according to the present embodiment, the state of the object such as the third-order position of the object can be detected and the speed of the object or the amount of escape or escape of the object can be detected. As described above, the presence or absence of contact between the object and the floating transport device can be detected based on the position of the target three times, and various controls such as the next can be performed. According to the calculated speed of the object W, feedback control of the speed of the object w is possible. That is, the control device 5 compares the calculated speed of the object -15 - 201022661 with the reference speed prepared in advance. When the speed of the object w is smaller than the reference speed, the control device 5 controls the speed increasing motor 23, and when the speed of the object W is larger than the reference speed, the control device 5 controls the speed reducing motor 23. The speed of the object W can be controlled in such a manner as to match the reference speed. Alternatively, the output of the air blowing device 31 may be controlled instead of the control of the motor 23. When the flying height is changed by the control of the air blowing device 31, the driving force received by the object W by contact with the drum 13 changes, and as a result, the speed of the object W is controlled. φ " can prevent the escape of the object W based on the detection of the presence or absence of the object W and the calculation of the amount of escape of the object. That is, as long as a speed difference is generated between the drum 13 in the right row and the drum 13 in the left row, the driving force can be applied to the object W in the direction in which the escape is prevented. Alternatively, if the flow rate of the discharge is changed for each of the floating devices 37 by the control of the air blowing device 31, the driving force can be applied to the object W in the direction against the escape. That is, the control possibility such as solving the escape is possible. As described above, the logo 9 is not essential, and any object that can be clearly identified in the image taken is available. The object extraction in such an image can be easily performed, for example, using well-known pattern recognition technology. Then, the object to be extracted can calculate the 3-dimensional position of the object according to the above method. Further, in the above description, the attached marks 9 are orthogonally arranged at equal intervals in the X direction and the Y direction, respectively. Instead of such an arrangement, it may be an appropriate arrangement such as a hexagonal arrangement or a random arrangement. It is desirable that the density of the identification 9 is uniform, but it is not limited thereto. Further, the logo 9 can be -16-201022661 and does not have to be distributed over the entire object W, and is limited to a part thereof. The present invention will be described with reference to the preferred embodiments, but the present invention is not limited to the embodiments described above. The present invention can be implemented by a person skilled in the art from the above-described modifications and variations of the embodiments. [Industrial Applicability] A method and apparatus for automatically detecting the contact between the object and the floating transport device Φ with or without the state of the object being transported by the float are provided. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic perspective view of a detecting device according to an embodiment of the present invention. Fig. 2 is a schematic diagram showing the electrical connection of the above-described detecting device. Fig. 3 is a flow chart showing a method of detecting the above-described detecting device. Fig. 4 is a flowchart showing the details of the image data analysis processing of the flowchart of Fig. 3; φ Fig. 5 is a detailed flowchart showing the floating transport state detection processing of the flowchart of Fig. 3. Fig. 6 is a partial plan view showing the floating transport apparatus to which the above-described detecting device is applied. Fig. 7 is a side view of the above-described floating transport device. Fig. 8 is a partial longitudinal sectional view showing the above-described floating transport device. [Description of main component symbols] 5 : Control device-17- 201022661 9 : Mark 10 : Floating transport device 11 : Transport device 13 : Roller 1 3 s : Rotary shaft 17 : Worm gear 1 9 : Drive shaft 2 1 ·• Worm 10 23 : Motor 25 : Chamber 27 : Take-in port 31 : Air supply unit 3 3 : Trailer 35 : Opening 3 7 : Floating device 39 : Upper body Θ 4 1 : Spray hole 43 : Foot
3 R、3 L :相機 5a ： CPU 5b ： RAM 5 c '· ROM s :搬送面 w :對象物 •18- 201022661 B :基台3 R, 3 L : Camera 5a : CPU 5b : RAM 5 c '· ROM s : Transfer surface w : Object • 18- 201022661 B : Abutment