JP2005249495A - Surface inspection method and device for flat plate body - Google Patents

Surface inspection method and device for flat plate body Download PDF

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JP2005249495A
JP2005249495A JP2004058131A JP2004058131A JP2005249495A JP 2005249495 A JP2005249495 A JP 2005249495A JP 2004058131 A JP2004058131 A JP 2004058131A JP 2004058131 A JP2004058131 A JP 2004058131A JP 2005249495 A JP2005249495 A JP 2005249495A
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flat plate
camera
difference
abnormal point
coordinate values
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Tsutomu Akama
努 赤間
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Asahi Kasei Construction Materials Corp
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Asahi Kasei Construction Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To detect whether an abnormal point in an image taken by a camera when inspecting a surface of a flat plate body is abnormal on the surface of the flat plate body or not with high speed and high accuracy. <P>SOLUTION: The present invention is a surface inspection method for flat plate body 1 to inspect abnormality on a surface of the flat plate body 1, wherein 2 cameras 10 and 11 are provided at a certain distance from the flat plate body 1 to take images of the surface of the flat plane body. Coordinate data of an abnormal point taken by the camera A10 and that of the abnormal point taken by he camera B11 are obtained. In addition to calculating difference between the coordinate data, difference between the coordinate data of a sample point taken by the both cameras on the surface of the flat plate body is calculated in advance. If the differences of the abnormal point and the sample point agree each other, the abnormal point taken by the camera is detected as abnormality on the surface of the flat plate body. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、平板体の表面検査方法及び装置に関し、より詳しくは表面撮影により異常画像を得た時に、該画像が表面上の異常であるか否かを判定する技術に係るものである。   The present invention relates to a surface inspection method and apparatus for a flat body, and more particularly to a technique for determining whether or not an image is abnormal on the surface when an abnormal image is obtained by surface imaging.

コンクリートパネルや石膏ボードなどの平板体工業製品の製造時には、出荷前に平板体の表面に傷や断層、色斑などの異常がないかを検査する必要がある。そして、従来から製品の表面を目視により確認したり、カメラによって撮影して公知の画像処理技術により異常な画像が検出された場合に、製品異常として警報することが行われている。   When manufacturing flat plate industrial products such as concrete panels and gypsum boards, it is necessary to inspect the surface of the flat plate for abnormalities such as scratches, faults, and color spots before shipment. Conventionally, when the surface of a product is confirmed visually or when an abnormal image is detected by a known image processing technique after being photographed by a camera, an alarm is given as a product abnormality.

特に、平板体の製造ラインにおいては、平板体をローラなどにより水平に移送することが多く、製品の表裏がある場合には、表て面に対しては上方から目視により厳密な検査を行っている。一方、裏面はそれほど厳密な検査を必要としない場合があるので、鏡を裏面(下面)側に設置して、表て面の目視と同時に鏡に映った裏面を確認したり、カメラによる画像処理で異常を検出していた。   In particular, in a flat plate production line, the flat plate is often transported horizontally by rollers, etc. When there is a front and back of the product, the front surface is subjected to a strict inspection visually from above. Yes. On the other hand, the back side may not require a very strict inspection, so a mirror is installed on the back side (bottom side), and the back side reflected in the mirror is confirmed at the same time as the front side is viewed, or image processing by the camera An abnormality was detected.

カメラによって異常を検出する方法は、作業者の負担を軽減し、高速かつ連続的に検査が行えるため好適であるが、撮影した画像において異常点がある場合に、それが平板体表面の検出すべき異常であるのか、平板体とカメラの間に存在する粉塵などや、カメラ自体に付着した粉塵であるのかの区別が出来ず、誤って異常と検出される場合も少なくなかった。このため、異常と検出された場合には作業者が確認し直す必要があり、生産効率の低下を招くことがあった。   The method of detecting an abnormality with a camera is preferable because it reduces the burden on the operator and enables high-speed and continuous inspection. However, when there is an abnormal point in the captured image, it detects the surface of the flat plate. In many cases, it is impossible to distinguish whether it is a power abnormality, dust existing between the flat plate and the camera, or dust attached to the camera itself, and it is erroneously detected as an abnormality. For this reason, when an abnormality is detected, it is necessary for the operator to check again, which may lead to a reduction in production efficiency.

特に、粉塵が多く舞う環境における検査や、コンクリートボードや石膏ボードなど表面が脆性の素材をローラなどで搬送して表面から粉塵が脱落しやすい場合には、上記のように下面側から裏面を撮影すると粉塵の影響が大きく、効率的な検出を行うことができない問題があった。
従来、平面の表面を検査する技術としては特許文献1に開示されるような光学的な反射特性により測定する技術などが知られている。
特開平11―108636号公報
Especially when inspecting in an environment with a lot of dust, or when materials with brittle surfaces such as concrete board or gypsum board are transported with rollers, etc., and dust tends to fall off from the surface, take a picture of the back side from the bottom as described above. Then, there is a problem that the influence of dust is large and efficient detection cannot be performed.
Conventionally, as a technique for inspecting a flat surface, a technique for measuring by an optical reflection characteristic as disclosed in Patent Document 1 is known.
Japanese Patent Application Laid-Open No. 11-108636

本発明は、上記従来技術の有する問題点に鑑みて創出されたものであり、その目的は、カメラによる撮影画像中の異常点が、平板体表面の異常か否かを高速かつ高精度に検出する技術を提供することである。   The present invention was created in view of the above-described problems of the prior art, and its purpose is to detect whether an abnormal point in a photographed image by a camera is abnormal on the surface of a flat plate with high speed and high accuracy. Is to provide technology to do.

上記目的を達成するために、本発明による平板体の表面検査方法は次のような特徴を備える。
すなわち、請求項1に記載の発明は、平板体の表面における異常を検査する平板体の表面検査方法であって、平板体から所定距離の位置に、該平板体と平行に第1カメラ及び第2カメラを設け、両カメラにより平板体表面を撮影する。
その際、第1カメラにおいて撮影された異常点と、第2カメラにおいて撮影された異常点のそれぞれの座標値を得て、その座標値の差分を算出すると共に、予め平板体表面のサンプル点を撮影した場合の両カメラにおける該サンプル点の座標値の差分を求めておき、異常点座標値の差分と、サンプル点座標値の差分とが一致した場合には、撮影された異常点を平板体表面における異常として検出することを特徴するものである。
In order to achieve the above object, the surface inspection method for a flat plate according to the present invention has the following features.
That is, the invention described in claim 1 is a method for inspecting a surface of a flat plate for inspecting an abnormality on the surface of the flat plate, and is located at a predetermined distance from the flat plate in parallel with the first camera and the first camera. Two cameras are provided, and the surface of the flat plate is photographed by both cameras.
At that time, the respective coordinate values of the abnormal point photographed by the first camera and the abnormal point photographed by the second camera are obtained, and the difference between the coordinate values is calculated. The difference between the coordinate values of the sample points in both cameras when the image was taken is obtained, and if the difference between the abnormal point coordinate values and the difference between the sample point coordinate values match, It is detected as an abnormality on the surface.

請求項2に記載の発明は、平板体を略水平に所定方向に移送しながら、該平板体の下面側から上向きに固定した前記第1カメラ及び第2カメラにより平板体下面を撮影するものである。   The invention according to claim 2 is to photograph the lower surface of the flat plate with the first camera and the second camera fixed upward from the lower surface side of the flat plate while moving the flat plate substantially horizontally in a predetermined direction. is there.

さらに、本発明は平板体の表面検査装置を提供することができる。すなわち、請求項3に記載の発明は、平板体の表面における異常を検査する平板体の表面検査装置であって、該平板体から所定距離の位置に、該平板体と平行に第1カメラ及び第2カメラを備え、両カメラにより平板体表面を撮影する構成において、両カメラの撮影画像を入力する画像入力手段と、入力画像から、第1カメラにおいて撮影された異常点と、第2カメラにおいて撮影された異常点のそれぞれの座標値を得る画像処理手段と、その座標値の差分を算出する演算手段と、予め平板体表面のサンプル点を撮影した場合の両カメラにおける該サンプル点の座標値の差分を求めて記憶する記憶手段と、異常点座標値の差分と、サンプル点座標値の差分とが一致するか否か比較し、一致した場合には撮影された異常点を平板体表面における異常として検出する異常判定手段とを備えたことを特徴する。   Furthermore, the present invention can provide a flat surface inspection apparatus. That is, the invention described in claim 3 is a flat plate surface inspection apparatus for inspecting abnormalities on the surface of the flat plate, and is located at a predetermined distance from the flat plate and in parallel with the flat plate. In the configuration including the second camera and photographing the surface of the flat body with both cameras, the image input means for inputting the images taken by both cameras, the abnormal points photographed by the first camera from the input images, and the second camera Image processing means for obtaining each coordinate value of the photographed abnormal point, calculation means for calculating the difference between the coordinate values, and the coordinate value of the sample point in both cameras when the sample point on the surface of the flat plate is photographed in advance The storage means for determining and storing the difference, the difference between the abnormal point coordinate values and the difference between the sample point coordinate values match, and if they match, the photographed abnormal points on the surface of the plate body To; and an abnormality judging means for detecting a normal.

また、請求項4に記載の発明は、前記平板体の表面検査装置が、平板体を略水平に所定方向に移送する移送装置の下部に付設され、該平板体の下面側から上向きに固定した前記第1カメラ及び第2カメラにより平板体下面を撮影する構成を開示するものである。   According to a fourth aspect of the present invention, the flat plate surface inspection device is attached to a lower portion of a transfer device that transfers the flat plate substantially horizontally in a predetermined direction, and is fixed upward from the lower surface side of the flat plate. The structure which image | photographs the flat plate lower surface with the said 1st camera and a 2nd camera is disclosed.

以上の手段により次の効果を奏する。すなわち、本発明によれば、2台のカメラで異常点を2方向から撮影することにより、立体的に異常点をとらえて当該画像の座標値の差分を算出する極めて簡便な方法で表面上の異常点か否かを判定できるため、生産効率の向上に寄与する。特に、本発明によれば、高速な処理が可能であり、しかも検査装置の構成は極めてシンプルであるため、コストの抑制を図ることができる。   The following effects are produced by the above means. That is, according to the present invention, an abnormal point is photographed from two directions with two cameras, and the abnormal point is detected three-dimensionally to calculate the difference between the coordinate values of the image. Since it can be determined whether it is an abnormal point, it contributes to the improvement of production efficiency. In particular, according to the present invention, high-speed processing is possible, and the configuration of the inspection apparatus is extremely simple, so that costs can be reduced.

以下、本発明の最良と考えられる実施形態を、図面に示す実施例を基に説明する。なお、実施形態は下記に限定されるものではない。
図1は本発明に係る平板体の表面検査装置のカメラ部斜視図である。図示のように、検査対象の平板体(1)は、製品の表て面を上面に、裏面を下面側にして駆動ローラ(2)(3)により水平に移送されている。
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, the best mode for carrying out the invention will be described based on examples shown in the drawings. The embodiment is not limited to the following.
FIG. 1 is a perspective view of a camera portion of a flat surface inspection apparatus according to the present invention. As shown in the drawing, the flat plate body (1) to be inspected is horizontally transferred by the drive rollers (2) and (3) with the front surface of the product being the upper surface and the rear surface being the lower surface side.

製品の表て面は、作業者により目視による検査が行われ、傷やクラックだけでなく、色合いの変化、色斑などの異常を細かくチェックされる。裏面は傷やクラックなどの重大な不良を検出すれば良いので、目視によるほどの検査は必要ではなく、高速で効率的に検査することが望まれる。
本発明では、これを検査するために、2個のCCDカメラ(10)(11)を上方に向けて製品の裏面を撮影する検査装置(4)を創出した。
The surface of the product is visually inspected by an operator, and not only scratches and cracks but also abnormalities such as color change and color spots are checked in detail. Since it is only necessary to detect serious defects such as scratches and cracks on the back surface, visual inspection is not necessary, and high-speed and efficient inspection is desired.
In the present invention, in order to inspect this, an inspection apparatus (4) for photographing the back surface of the product with the two CCD cameras (10) and (11) facing upward has been created.

製品は図1における矢印方向に移送されており、2個のカメラA(10)・カメラB(11)は該移送方向に沿って平板体と平行に設置されている。図2に示すように、カメラA(10)・カメラB(11)で撮影された画像は、公知のコンピュータで構成される画像入力部やCPUにおいて画像処理される。   The product is transferred in the direction of the arrow in FIG. 1, and the two cameras A (10) and B (11) are installed parallel to the flat plate along the transfer direction. As shown in FIG. 2, images captured by the camera A (10) and the camera B (11) are subjected to image processing in an image input unit or CPU constituted by a known computer.

2つのカメラ(10)(11)の画像は、公知のインターフェースを介して画像入力部(20)によりCPU(21)に取り込まれる。画像入力部(20)はビデオカードなどで構成することができる。
そして、CPU(21)の処理部である画像処理部(22)において、入力された2画像から異常点を検出し、その異常点の座標値を取得する。異常点の検出方法は、公知の画像処理技術を用いることができるが、例えばヒストグラムを生成して、あるしきい値を超えた点を異常点として検出する方法がある。
The images of the two cameras (10) and (11) are taken into the CPU (21) by the image input unit (20) via a known interface. The image input unit (20) can be composed of a video card or the like.
Then, in the image processing unit (22) which is a processing unit of the CPU (21), the abnormal point is detected from the two input images, and the coordinate value of the abnormal point is acquired. As an abnormal point detection method, a known image processing technique can be used. For example, there is a method of generating a histogram and detecting a point exceeding a certain threshold as an abnormal point.

図3に示すように、平板体の裏面からカメラA(10)で撮影した場合、平板体表面に存在する断層(40)は、該カメラA(10)の撮影領域(41)の左端から、座標値がL1(50)の距離に検出される。
一方、カメラA(10)と同時にカメラB(11)で撮影を行うと、その撮影領域(42)の左端からでは、座標値がL2(51)として検出される。2つのカメラにおける撮影領域(41)(42)の交わった空間が、検査領域(43)である。
画像処理部(22)において両座標値を取得し、一時的にメモリなどに記憶する。
As shown in FIG. 3, when the camera A (10) is photographed from the back surface of the flat plate, the tomography (40) existing on the flat plate surface is from the left end of the photographing region (41) of the camera A (10). A coordinate value is detected at a distance of L1 (50).
On the other hand, when photographing is performed with the camera B (11) simultaneously with the camera A (10), the coordinate value is detected as L2 (51) from the left end of the photographing region (42). The space where the imaging areas (41) and (42) intersect in the two cameras is the inspection area (43).
Both coordinate values are acquired in the image processing unit (22) and temporarily stored in a memory or the like.

さらに、演算部(23)において、取得した座標値の差を算出する。これにより得られる値は図3におけるL(52)である。本発明ではこのように予め表面にある異常点をサンプルとして用い、異常点が表面にある場合の座標値の差分L(52)をハードディスクなどの記憶手段(26)にサンプル点データとして保存しておく。   Further, the calculation unit (23) calculates the difference between the acquired coordinate values. The value obtained by this is L (52) in FIG. In the present invention, the abnormal point on the surface is used as a sample in advance as described above, and the coordinate value difference L (52) when the abnormal point is on the surface is stored as sample point data in the storage means (26) such as a hard disk. deep.

その上で、平板体(1)を移送しながらインラインで随時撮影し、異常点については画像処理部(22)及び演算部(23)による処理を行う。
図4は、平板体表面に存在する検出対象物(60)、検査領域(43)内の異物a(61)、異物b(62)についての座標値を示す図である。
まず、検出対象物(60)を、両カメラ(10)(11)において撮影した場合には、上記のサンプル点データ(26)における処理と同様に、座標値L1’(70)と座標値L2’(71)を取得し、演算部(23)で差分L’(72)を算出する。
After that, the in-line image is taken as needed while transferring the flat plate (1), and the abnormal point is processed by the image processing unit (22) and the calculation unit (23).
FIG. 4 is a diagram showing coordinate values for the detection object (60) existing on the surface of the flat body, the foreign object a (61) in the inspection region (43), and the foreign object b (62).
First, when the detection object (60) is photographed by both cameras (10) and (11), the coordinate value L1 ′ (70) and the coordinate value L2 are the same as the processing in the sample point data (26). '(71) is acquired, and the calculation unit (23) calculates the difference L' (72).

そして、異常判定部(24)において、該差分L’(72)と、サンプル点データ(26)として記憶された差分L(52)を比較する。ここで、平板体(1)の表面にある場合には常にL=L’が成り立つので一致し、この場合には異常と判定する。
製品異常として検出すると、出力部(25)により例えばモニタ(27)などで警告を表示したり、図示しないスピーカから音声を発したりする。
Then, the abnormality determination unit (24) compares the difference L ′ (72) with the difference L (52) stored as the sample point data (26). Here, when it is on the surface of the flat plate (1), L = L ′ always holds, so that they coincide, and in this case, it is determined as abnormal.
When a product abnormality is detected, a warning is displayed on the monitor (27), for example, by the output unit (25), or a sound is emitted from a speaker (not shown).

一方で、異物a(61)の場合、カメラA(10)による座標値はL1a(73)、カメラB(11)による座標値はL2a(74)となる。
L1a(73)は幾何的に上記L1’(70)に距離x(75)及び距離w(76)を合計した値に等しく(数1)、L2a(74)は、上記L2’(71)に距離w(76)を合計した値に等しい(数2)。
On the other hand, in the case of the foreign object a (61), the coordinate value by the camera A (10) is L1a (73), and the coordinate value by the camera B (11) is L2a (74).
L1a (73) is geometrically equal to the value obtained by adding the distance x (75) and the distance w (76) to the above L1 ′ (70) (Equation 1), and L2a (74) is equal to the above L2 ′ (71). This is equal to the sum of the distances w (76) (Equation 2).

[数1] L1a=L1’+x+w
[数2] L2a=L2’+w
[Equation 1] L1a = L1 ′ + x + w
[Expression 2] L2a = L2 ′ + w

従って、この時の両カメラによる座標値の差分は、L1a−L2aで、L1’−L2’=L’=Lであるから、L+xと算出される。
この結果、異常判定部(24)では差分の比較が一致せず、異常点と判定されないことになる。
Therefore, the difference between the coordinate values of the two cameras at this time is L1a−L2a, and L1′−L2 ′ = L ′ = L, and thus is calculated as L + x.
As a result, the abnormality determination unit (24) does not match the difference and does not determine an abnormal point.

同様に、異物b(62)の場合、カメラA(10)による座標値はL1b(77)、カメラB(11)による座標値はL2b(78)となる。
そして、幾何的に図中のL1b(77)、L1’(70)、距離y(79)の間に数3が、L2b(78)、L2’(71)、距離z(80)の間に数4が成立する。
Similarly, in the case of the foreign object b (62), the coordinate value by the camera A (10) is L1b (77), and the coordinate value by the camera B (11) is L2b (78).
Then, geometrically, the number 3 is between L1b (77), L1 ′ (70) and the distance y (79) in the figure, and between L2b (78), L2 ′ (71) and the distance z (80). Equation 4 holds.

[数3] L1b=L1’+y
[数4] L2b=L2’−z
[Equation 3] L1b = L1 ′ + y
[Expression 4] L2b = L2′−z

従って、この時の両カメラによる座標値の差分は、L1b−L2bで、L+y+zと算出され、やはり上記L(52)とは一致しない。
従来の手法では、何れの異物(61)(62)についても検査領域内に含まれ、しかも表面上か否かを判定できないため、平板体(1)の異常として検出される場合であるが、本発明により、正確に異常か否かを検出できるようになる。
Accordingly, the difference between the coordinate values of the two cameras at this time is L1b−L2b, which is calculated as L + y + z, and does not match L (52).
In the conventional technique, since any foreign matter (61) (62) is included in the inspection region and cannot be determined whether or not it is on the surface, it is a case where it is detected as an abnormality of the flat plate (1). According to the present invention, it is possible to accurately detect whether there is an abnormality.

本発明による表面検査装置のカメラ部を説明する斜視図である。It is a perspective view explaining the camera part of the surface inspection apparatus by this invention. 本発明による表面検査装置のブロック図である。It is a block diagram of the surface inspection apparatus by this invention. 本発明の原理を説明するための説明図である。It is explanatory drawing for demonstrating the principle of this invention. 本発明の原理を説明するための説明図である。It is explanatory drawing for demonstrating the principle of this invention.

符号の説明Explanation of symbols

1 平板体
2 駆動ローラ
3 駆動ローラ
4 表面検査装置
10 カメラA
11 カメラB

DESCRIPTION OF SYMBOLS 1 Flat plate 2 Drive roller 3 Drive roller 4 Surface inspection apparatus 10 Camera A
11 Camera B

Claims (4)

平板体の表面における異常を検査する平板体の表面検査方法であって、
該平板体から所定距離の位置に、該平板体と平行に第1カメラ及び第2カメラを設け、両カメラにより平板体表面を撮影した際に、
第1カメラにおいて撮影された異常点と、第2カメラにおいて撮影された異常点のそれぞれの座標値を得て、その座標値の差分を算出すると共に、
予め平板体表面のサンプル点を撮影した場合の両カメラにおける該サンプル点の座標値の差分を求めておき、
異常点座標値の差分と、サンプル点座標値の差分とが一致した場合には、撮影された異常点を平板体表面における異常として検出する
ことを特徴する平板体の表面検査方法。
A method for inspecting a surface of a flat plate to inspect abnormalities on the surface of the flat plate,
When a first camera and a second camera are provided in parallel to the flat plate at a predetermined distance from the flat plate, and the flat plate surface is photographed by both cameras,
While obtaining the respective coordinate values of the abnormal point imaged by the first camera and the abnormal point imaged by the second camera, calculating the difference between the coordinate values,
Obtain the difference between the coordinate values of the sample points in both cameras when the sample points on the surface of the flat plate are photographed in advance.
A method for inspecting a surface of a flat plate, comprising: detecting a photographed abnormal point as an abnormality on the surface of the flat plate when the difference between the abnormal point coordinate and the difference between the sample point coordinate values match.
前記平板体の表面検査方法が、
平板体を略水平に所定方向に移送しながら、該平板体の下面側から上向きに固定した前記第1カメラ及び第2カメラにより平板体下面を撮影する
請求項1に記載の平板体の表面検査方法。
The surface inspection method of the flat plate is
The surface inspection of the flat plate according to claim 1, wherein the flat plate is photographed by the first camera and the second camera fixed upward from the lower surface side of the flat plate, while the flat plate is transported substantially horizontally in a predetermined direction. Method.
平板体の表面における異常を検査する平板体の表面検査装置であって、
該平板体から所定距離の位置に、該平板体と平行に第1カメラ及び第2カメラを備え、両カメラにより平板体表面を撮影する構成において、
両カメラの撮影画像を入力する画像入力手段と、
入力画像から、第1カメラにおいて撮影された異常点と、第2カメラにおいて撮影された異常点のそれぞれの座標値を得る画像処理手段と、
その座標値の差分を算出する演算手段と、
予め平板体表面のサンプル点を撮影した場合の両カメラにおける該サンプル点の座標値の差分を求めて記憶する記憶手段と、
異常点座標値の差分と、サンプル点座標値の差分とが一致するか否か比較し、一致した場合には撮影された異常点を平板体表面における異常として検出する異常判定手段と
を備えたことを特徴する平板体の表面検査装置。
A flat surface inspection apparatus for inspecting abnormalities on the surface of a flat body,
In a configuration in which a first camera and a second camera are provided in parallel to the flat plate at a predetermined distance from the flat plate and the surface of the flat plate is photographed by both cameras.
Image input means for inputting captured images of both cameras;
Image processing means for obtaining, from the input image, respective coordinate values of the abnormal point imaged by the first camera and the abnormal point imaged by the second camera;
A computing means for calculating a difference between the coordinate values;
Storage means for obtaining and storing a difference between the coordinate values of the sample points in both cameras when the sample points on the surface of the flat plate are photographed in advance;
Comparing whether or not the difference between the abnormal point coordinate values and the difference between the sample point coordinate values match, and when there is a match, an abnormality determining means for detecting the photographed abnormal point as an abnormality on the surface of the flat body A flat surface inspection apparatus characterized by the above.
前記平板体の表面検査装置が、
平板体を略水平に所定方向に移送する移送装置の下部に付設され、
該平板体の下面側から上向きに固定した前記第1カメラ及び第2カメラにより平板体下面を撮影する構成である
請求項3に記載の平板体の表面検査装置。

A surface inspection apparatus for the flat plate,
Attached to the lower part of the transfer device for transferring the flat plate substantially horizontally in a predetermined direction,
The flat plate surface inspection apparatus according to claim 3, wherein the flat plate lower surface is photographed by the first camera and the second camera fixed upward from the lower surface side of the flat plate.

JP2004058131A 2004-03-02 2004-03-02 Surface inspection method and device for flat plate body Pending JP2005249495A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004058131A JP2005249495A (en) 2004-03-02 2004-03-02 Surface inspection method and device for flat plate body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004058131A JP2005249495A (en) 2004-03-02 2004-03-02 Surface inspection method and device for flat plate body

Publications (1)

Publication Number Publication Date
JP2005249495A true JP2005249495A (en) 2005-09-15

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Family Applications (1)

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JP2004058131A Pending JP2005249495A (en) 2004-03-02 2004-03-02 Surface inspection method and device for flat plate body

Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120747A (en) * 2008-11-20 2010-06-03 Ihi Corp Method and device for detecting floatation conveyance state of thin sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120747A (en) * 2008-11-20 2010-06-03 Ihi Corp Method and device for detecting floatation conveyance state of thin sheet

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