TWI420569B - 圖案及配線圖案與彼等之製法 - Google Patents

圖案及配線圖案與彼等之製法 Download PDF

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Publication number
TWI420569B
TWI420569B TW095143669A TW95143669A TWI420569B TW I420569 B TWI420569 B TW I420569B TW 095143669 A TW095143669 A TW 095143669A TW 95143669 A TW95143669 A TW 95143669A TW I420569 B TWI420569 B TW I420569B
Authority
TW
Taiwan
Prior art keywords
photosensitive resin
resin composition
layer
pattern
coating layer
Prior art date
Application number
TW095143669A
Other languages
English (en)
Chinese (zh)
Other versions
TW200731341A (en
Inventor
長原達郎
Original Assignee
Ａｚ電子材料Ｉｐ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ａｚ電子材料Ｉｐ股份有限公司 filed Critical Ａｚ電子材料Ｉｐ股份有限公司
Publication of TW200731341A publication Critical patent/TW200731341A/zh
Application granted granted Critical
Publication of TWI420569B publication Critical patent/TWI420569B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1258—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0568—Resist used for applying paste, ink or powder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0577—Double layer of resist having the same pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1173—Differences in wettability, e.g. hydrophilic or hydrophobic areas

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Materials For Photolithography (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electroluminescent Light Sources (AREA)
TW095143669A 2005-12-28 2006-11-27 圖案及配線圖案與彼等之製法 TWI420569B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005379508A JP2007178885A (ja) 2005-12-28 2005-12-28 パターンおよび配線パターンならびにそれらの製造法

Publications (2)

Publication Number Publication Date
TW200731341A TW200731341A (en) 2007-08-16
TWI420569B true TWI420569B (zh) 2013-12-21

Family

ID=38194244

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095143669A TWI420569B (zh) 2005-12-28 2006-11-27 圖案及配線圖案與彼等之製法

Country Status (4)

Country Link
US (1) US20070148591A1 (enExample)
JP (1) JP2007178885A (enExample)
KR (1) KR20070070125A (enExample)
TW (1) TWI420569B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7846644B2 (en) * 2007-11-20 2010-12-07 Eastman Kodak Company Photopatternable deposition inhibitor containing siloxane
US20120288697A1 (en) * 2011-05-13 2012-11-15 Xerox Corporation Coating methods using silver nanoparticles
TWI617629B (zh) * 2013-05-01 2018-03-11 Jsr股份有限公司 具有凹圖案的基材的製造方法、組成物、導電膜的形成方法、電子電路及電子元件
CN113903873B (zh) 2020-06-22 2023-04-07 京东方科技集团股份有限公司 量子点发光面板、显示装置和制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688938A (en) * 1984-12-04 1987-08-25 Centre National De La Recherche Scientifique (C.N.R.S.) Method and apparatus for determining the contact angle of a drop of liquid placed on a solid or liquid horizontal substrate
US20040019176A1 (en) * 2000-08-29 2004-01-29 Takayuki Araki Curable fluoropolymer, curable resin composition containing the same, and antireflection film
TW200510943A (en) * 2003-07-15 2005-03-16 Seiko Epson Corp Method for manufacturing layer pattern, wiring and electronic equipment
US20050139110A1 (en) * 2002-03-22 2005-06-30 Yasuharu Suda Method for regenerating lithographic printing plate, regenerating device, printer, lithographic printing plate and its production method, and layered structure body and its production method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770974A (en) * 1986-09-18 1988-09-13 International Business Machines Corporation Microlithographic resist containing poly(1,1-dialkylsilazane)
JPH02254449A (ja) * 1989-03-29 1990-10-15 Konica Corp 湿し水不要の平版印刷版材料
JP3238369B2 (ja) * 1998-04-10 2001-12-10 ソニーケミカル株式会社 フォトレジスト用組成物、及びフレキシブルプリント配線板の製造方法
TW495494B (en) * 1998-10-05 2002-07-21 Tonengeneral Sekiyu Kk Photosensitive polysilazane composition and method of forming patterned polysilazane film
US6790587B1 (en) * 1999-05-04 2004-09-14 E. I. Du Pont De Nemours And Company Fluorinated polymers, photoresists and processes for microlithography
JP2002243931A (ja) * 2001-02-19 2002-08-28 Canon Inc ブラックマトリクス基板、カラーフィルタ及びその製造方法、液晶素子
US7425399B2 (en) * 2002-10-09 2008-09-16 Nissan Chemical Industries, Ltd. Composition for forming anti-reflective coating for use in lithography
TWI258635B (en) * 2002-11-27 2006-07-21 Tokyo Ohka Kogyo Co Ltd Undercoating material for wiring, embedded material, and wiring formation method
JP4697406B2 (ja) * 2004-08-05 2011-06-08 信越化学工業株式会社 高分子化合物，レジスト保護膜材料及びパターン形成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688938A (en) * 1984-12-04 1987-08-25 Centre National De La Recherche Scientifique (C.N.R.S.) Method and apparatus for determining the contact angle of a drop of liquid placed on a solid or liquid horizontal substrate
US20040019176A1 (en) * 2000-08-29 2004-01-29 Takayuki Araki Curable fluoropolymer, curable resin composition containing the same, and antireflection film
US20050139110A1 (en) * 2002-03-22 2005-06-30 Yasuharu Suda Method for regenerating lithographic printing plate, regenerating device, printer, lithographic printing plate and its production method, and layered structure body and its production method
TW200510943A (en) * 2003-07-15 2005-03-16 Seiko Epson Corp Method for manufacturing layer pattern, wiring and electronic equipment

Also Published As

Publication number Publication date
US20070148591A1 (en) 2007-06-28
JP2007178885A (ja) 2007-07-12
KR20070070125A (ko) 2007-07-03
TW200731341A (en) 2007-08-16

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