TWI413228B - 複合半導體元件與電路之靜電放電保護電路 - Google Patents
複合半導體元件與電路之靜電放電保護電路 Download PDFInfo
- Publication number
- TWI413228B TWI413228B TW096132093A TW96132093A TWI413228B TW I413228 B TWI413228 B TW I413228B TW 096132093 A TW096132093 A TW 096132093A TW 96132093 A TW96132093 A TW 96132093A TW I413228 B TWI413228 B TW I413228B
- Authority
- TW
- Taiwan
- Prior art keywords
- series
- coupled
- terminal
- transistor
- circuit
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 239000002131 composite material Substances 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000005669 field effect Effects 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 8
- 230000002457 bidirectional effect Effects 0.000 claims description 7
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 3
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims description 3
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 claims 3
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 claims 3
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 claims 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000001356 surgical procedure Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H9/00—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
- H02H9/04—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess voltage
- H02H9/045—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess voltage adapted to a particular application and not provided for elsewhere
- H02H9/046—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess voltage adapted to a particular application and not provided for elsewhere responsive to excess voltage appearing at terminals of integrated circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
- H10D89/811—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/512,951 US8144441B2 (en) | 2006-08-30 | 2006-08-30 | Electrostatic discharge protection circuit for compound semiconductor devices and circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200820415A TW200820415A (en) | 2008-05-01 |
| TWI413228B true TWI413228B (zh) | 2013-10-21 |
Family
ID=39136742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096132093A TWI413228B (zh) | 2006-08-30 | 2007-08-29 | 複合半導體元件與電路之靜電放電保護電路 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8144441B2 (enExample) |
| JP (1) | JP5497437B2 (enExample) |
| TW (1) | TWI413228B (enExample) |
| WO (1) | WO2008027802A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI680560B (zh) * | 2018-05-16 | 2019-12-21 | 財團法人工業技術研究院 | 系統封裝結構及其靜電放電防護結構 |
| US11387230B2 (en) | 2018-05-16 | 2022-07-12 | Industrial Technology Research Institute | System in package structure for perform electrostatic discharge operation and electrostatic discharge protection structure thereof |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7593204B1 (en) * | 2006-06-06 | 2009-09-22 | Rf Micro Devices, Inc. | On-chip ESD protection circuit for radio frequency (RF) integrated circuits |
| US7679870B2 (en) * | 2006-10-02 | 2010-03-16 | Win Semiconductors Corp. | On-chip ESD protection circuit using enhancement-mode HEMT/MESFET technology |
| JP2008251755A (ja) * | 2007-03-30 | 2008-10-16 | Eudyna Devices Inc | 半導体装置 |
| JP5532538B2 (ja) * | 2008-02-04 | 2014-06-25 | 三菱電機株式会社 | 保護回路 |
| US7881029B1 (en) * | 2008-07-07 | 2011-02-01 | Rf Micro Devices, Inc. | Depletion-mode field effect transistor based electrostatic discharge protection circuit |
| US7881030B1 (en) * | 2008-07-07 | 2011-02-01 | Rf Micro Devices, Inc. | Enhancement-mode field effect transistor based electrostatic discharge protection circuit |
| US8300378B2 (en) * | 2008-09-19 | 2012-10-30 | Advanced Fusion Systems, Llc | Method and apparatus for protecting power systems from extraordinary electromagnetic pulses |
| JP5289565B2 (ja) * | 2009-05-19 | 2013-09-11 | 三菱電機株式会社 | ゲート駆動回路 |
| JP5431791B2 (ja) * | 2009-05-27 | 2014-03-05 | ルネサスエレクトロニクス株式会社 | 静電気保護回路 |
| JP2011165749A (ja) * | 2010-02-05 | 2011-08-25 | Panasonic Corp | 半導体装置 |
| US8785973B2 (en) * | 2010-04-19 | 2014-07-22 | National Semiconductor Corporation | Ultra high voltage GaN ESD protection device |
| US8462477B2 (en) * | 2010-09-13 | 2013-06-11 | Analog Devices, Inc. | Junction field effect transistor for voltage protection |
| JP5678866B2 (ja) | 2011-10-31 | 2015-03-04 | 株式会社デンソー | 半導体装置およびその製造方法 |
| US8854103B2 (en) * | 2012-03-28 | 2014-10-07 | Infineon Technologies Ag | Clamping circuit |
| US9160326B2 (en) | 2012-07-10 | 2015-10-13 | The Hong Kong University Of Science And Technology | Gate protected semiconductor devices |
| JP2014026996A (ja) * | 2012-07-24 | 2014-02-06 | Toshiba Corp | Esd保護回路 |
| US8723227B2 (en) | 2012-09-24 | 2014-05-13 | Analog Devices, Inc. | Heterojunction compound semiconductor protection clamps and methods of forming the same |
| US8913359B2 (en) * | 2012-12-11 | 2014-12-16 | Globalfoundries Singapore Pte. Ltd. | Latch-up free RC-based NMOS ESD power clamp in HV use |
| US9064704B2 (en) * | 2013-02-15 | 2015-06-23 | Win Semiconductors Corp. | Integrated circuits with ESD protection devices |
| KR20140104379A (ko) * | 2013-02-20 | 2014-08-28 | 페어차일드 세미컨덕터 코포레이션 | 전기적 과부하/서지/iec를 위한 클램핑 회로 및 장치 |
| US9431390B2 (en) * | 2013-05-03 | 2016-08-30 | Microchip Technology Incorporated | Compact electrostatic discharge (ESD) protection structure |
| JP6052068B2 (ja) * | 2013-06-07 | 2016-12-27 | 株式会社デンソー | 半導体装置の保護回路 |
| US9225163B2 (en) * | 2013-11-01 | 2015-12-29 | Infineon Technologies Ag | Combined ESD active clamp for cascaded voltage pins |
| US9921596B2 (en) * | 2013-12-23 | 2018-03-20 | Marvell Israel (M.I.S.L) Ltd | Power supply noise reduction circuit and power supply noise reduction method |
| US9647476B2 (en) | 2014-09-16 | 2017-05-09 | Navitas Semiconductor Inc. | Integrated bias supply, reference and bias current circuits for GaN devices |
| US9571093B2 (en) | 2014-09-16 | 2017-02-14 | Navitas Semiconductor, Inc. | Half bridge driver circuits |
| US10290623B2 (en) | 2015-04-16 | 2019-05-14 | Gan Systems Inc. | Gate input protection for devices and systems comprising high power E-mode GaN transistors |
| US20160372920A1 (en) * | 2015-06-18 | 2016-12-22 | Navitas Semiconductor, Inc. | Integrated esd protection circuits in gan |
| US20170092637A1 (en) * | 2015-09-30 | 2017-03-30 | Infineon Technologies Ag | Semiconductor ESD Protection Device and Method |
| US10505032B2 (en) | 2015-10-30 | 2019-12-10 | The Hong Kong University Of Science And Technology | Semiconductor device with III-nitride channel region and silicon carbide drift region |
| JP6597357B2 (ja) * | 2016-02-09 | 2019-10-30 | 三菱電機株式会社 | 保護ダイオード付き電界効果トランジスタ |
| US9831867B1 (en) | 2016-02-22 | 2017-11-28 | Navitas Semiconductor, Inc. | Half bridge driver circuits |
| CN107123977B (zh) * | 2016-02-24 | 2019-04-19 | 比亚迪股份有限公司 | 晶体管的驱动电路 |
| US11373990B2 (en) * | 2016-02-29 | 2022-06-28 | Semtech Corporation | Semiconductor device and method of stacking semiconductor die for system-level ESD protection |
| US10438940B2 (en) * | 2016-12-29 | 2019-10-08 | Nxp Usa, Inc. | ESD protection for depletion-mode devices |
| DE102018124676B4 (de) | 2017-10-13 | 2023-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Schaltung, System und Verfahren für elektrostatischen Entladungsschutz (ESD-Schutz) |
| US20190115750A1 (en) * | 2017-10-13 | 2019-04-18 | Getac Technology Corporation | Electronic device with output energy limiting function |
| US10879232B2 (en) * | 2017-10-13 | 2020-12-29 | Taiwan Semiconductor Manufacturing Company Ltd. | Circuit, system and method for electrostatic discharge (ESD) protection |
| US11081881B2 (en) * | 2017-12-20 | 2021-08-03 | Stmicroelectronics International N.V. | Full swing positive to negative MOSFET supply clamp for electrostatic discharge (ESD) protection |
| US10381828B1 (en) * | 2018-01-29 | 2019-08-13 | Dialog Semiconductor (Uk) Limited | Overvoltage protection of transistor devices |
| CN108110746A (zh) * | 2018-02-09 | 2018-06-01 | 苏州容芯微电子有限公司 | 一种基于增强型phemt的esd保护电路 |
| CN108321781A (zh) * | 2018-04-17 | 2018-07-24 | 江苏卓胜微电子股份有限公司 | 一种ESD保护电路及基于GaAs PHEMT工艺的集成模块 |
| CN110571212A (zh) * | 2018-06-06 | 2019-12-13 | 中芯国际集成电路制造(上海)有限公司 | 静电保护结构及其形成方法和工作方法、静电保护电路 |
| US10693288B2 (en) * | 2018-06-26 | 2020-06-23 | Vishay SIliconix, LLC | Protection circuits with negative gate swing capability |
| US10833063B2 (en) | 2018-07-25 | 2020-11-10 | Vishay SIliconix, LLC | High electron mobility transistor ESD protection structures |
| US11699899B2 (en) * | 2020-04-28 | 2023-07-11 | Innoscience (Zhuhai) Technology Co., Ltd. | Electronic device and electrostatic discharge protection circuit |
| CN112740498B (zh) * | 2020-11-30 | 2023-03-31 | 英诺赛科(苏州)半导体有限公司 | 电子装置和静电放电保护电路 |
| CN113809067B (zh) * | 2021-11-16 | 2022-02-18 | 芯众享(成都)微电子有限公司 | 一种带有片内栅极回跳保护的常关型hemt器件 |
| US12107416B2 (en) | 2021-12-17 | 2024-10-01 | Gan Systems Inc. | Integrated bidirectional ESD protection circuit for power semiconductor switching devices |
| US11695272B1 (en) * | 2021-12-30 | 2023-07-04 | Halo Microelectronics International | Surge protection apparatus |
| CN116073768A (zh) * | 2023-03-20 | 2023-05-05 | 成都明夷电子科技有限公司 | 射频低噪声放大器芯片的静电保护电路及射频放大电路 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6069782A (en) * | 1998-08-26 | 2000-05-30 | Integrated Device Technology, Inc. | ESD damage protection using a clamp circuit |
| US20030043517A1 (en) * | 2001-08-29 | 2003-03-06 | Yamaha Corporation | Electro-static discharge protecting circuit |
| US7064942B2 (en) * | 2003-05-19 | 2006-06-20 | Silicon Integrated Systems Corp. | ESD protection circuit with tunable gate-bias |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6151877A (ja) * | 1984-08-21 | 1986-03-14 | Toshiba Corp | 半導体装置 |
| US4707216A (en) * | 1986-01-24 | 1987-11-17 | University Of Illinois | Semiconductor deposition method and device |
| DE68928395T2 (de) * | 1988-06-28 | 1998-05-14 | Nippon Electric Co | Halbleitervorrichtung mit Verbindungshalbleiterfet mit E/D-Struktur mit hoher Geräuschmarge |
| US4930036A (en) * | 1989-07-13 | 1990-05-29 | Northern Telecom Limited | Electrostatic discharge protection circuit for an integrated circuit |
| JPH05343374A (ja) * | 1992-06-05 | 1993-12-24 | Hitachi Ltd | 化合物半導体の加工方法及び加工装置 |
| US5570276A (en) * | 1993-11-15 | 1996-10-29 | Optimun Power Conversion, Inc. | Switching converter with open-loop input voltage regulation on primary side and closed-loop load regulation on secondary side |
| JP3495847B2 (ja) * | 1995-09-11 | 2004-02-09 | シャープ株式会社 | サイリスタを備える半導体集積回路 |
| JP2897736B2 (ja) * | 1996-09-30 | 1999-05-31 | 日本電気株式会社 | 化合物半導体電界効果トランジスタ |
| US6172383B1 (en) * | 1997-12-31 | 2001-01-09 | Siliconix Incorporated | Power MOSFET having voltage-clamped gate |
| US6600356B1 (en) * | 1999-04-30 | 2003-07-29 | Analog Devices, Inc. | ESD protection circuit with controlled breakdown voltage |
| JP2001358297A (ja) * | 2000-06-14 | 2001-12-26 | Nec Corp | 静電保護回路 |
| EP1299932A4 (en) * | 2000-06-15 | 2006-04-26 | Sarnoff Corp | MULTIFINGER CURRENT BALLAST ESD PROTECTIVE SWITCHING AND NESTED BALLAST PROCESS FOR ESD-SENSITIVE CIRCUITS |
| US6646840B1 (en) * | 2000-08-03 | 2003-11-11 | Fairchild Semiconductor Corporation | Internally triggered electrostatic device clamp with stand-off voltage |
| US6507471B2 (en) * | 2000-12-07 | 2003-01-14 | Koninklijke Philips Electronics N.V. | ESD protection devices |
| JP3678156B2 (ja) * | 2001-03-01 | 2005-08-03 | 株式会社デンソー | 静電気保護回路 |
| US7589944B2 (en) * | 2001-03-16 | 2009-09-15 | Sofics Bvba | Electrostatic discharge protection structures for high speed technologies with mixed and ultra-low voltage supplies |
| TW502428B (en) * | 2001-09-03 | 2002-09-11 | Faraday Tech Corp | Electrostatic discharge protection circuit for power source terminal with dual trigger voltages |
| US7280332B2 (en) * | 2002-01-18 | 2007-10-09 | The Regents Of The University Of California | On-chip ESD protection circuit for compound semiconductor heterojunction bipolar transistor RF circuits |
| US20040057172A1 (en) * | 2002-09-25 | 2004-03-25 | Maoyou Sun | Circuit for protection against electrostatic discharge |
| JP4463635B2 (ja) * | 2004-07-20 | 2010-05-19 | 株式会社リコー | スイッチングレギュレータ、スイッチングレギュレータを使用した電源回路及びスイッチングレギュレータを使用した二次電池の充電回路 |
| JP4843927B2 (ja) * | 2004-10-13 | 2011-12-21 | ソニー株式会社 | 高周波集積回路 |
| US7236053B2 (en) * | 2004-12-31 | 2007-06-26 | Cree, Inc. | High efficiency switch-mode power amplifier |
| JP2006303110A (ja) * | 2005-04-19 | 2006-11-02 | Nec Electronics Corp | 半導体装置 |
| US7679870B2 (en) * | 2006-10-02 | 2010-03-16 | Win Semiconductors Corp. | On-chip ESD protection circuit using enhancement-mode HEMT/MESFET technology |
| US8076699B2 (en) * | 2008-04-02 | 2011-12-13 | The Hong Kong Univ. Of Science And Technology | Integrated HEMT and lateral field-effect rectifier combinations, methods, and systems |
| US20120049241A1 (en) * | 2010-08-27 | 2012-03-01 | National Semiconductor Corporation | CDM-resilient high voltage ESD protection cell |
-
2006
- 2006-08-30 US US11/512,951 patent/US8144441B2/en active Active
-
2007
- 2007-08-24 JP JP2009526823A patent/JP5497437B2/ja not_active Expired - Fee Related
- 2007-08-24 WO PCT/US2007/076724 patent/WO2008027802A2/en not_active Ceased
- 2007-08-29 TW TW096132093A patent/TWI413228B/zh active
-
2012
- 2012-01-26 US US13/359,461 patent/US8767366B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6069782A (en) * | 1998-08-26 | 2000-05-30 | Integrated Device Technology, Inc. | ESD damage protection using a clamp circuit |
| US20030043517A1 (en) * | 2001-08-29 | 2003-03-06 | Yamaha Corporation | Electro-static discharge protecting circuit |
| US7064942B2 (en) * | 2003-05-19 | 2006-06-20 | Silicon Integrated Systems Corp. | ESD protection circuit with tunable gate-bias |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI680560B (zh) * | 2018-05-16 | 2019-12-21 | 財團法人工業技術研究院 | 系統封裝結構及其靜電放電防護結構 |
| US11387230B2 (en) | 2018-05-16 | 2022-07-12 | Industrial Technology Research Institute | System in package structure for perform electrostatic discharge operation and electrostatic discharge protection structure thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008027802A3 (en) | 2008-05-02 |
| JP5497437B2 (ja) | 2014-05-21 |
| WO2008027802A2 (en) | 2008-03-06 |
| US8144441B2 (en) | 2012-03-27 |
| TW200820415A (en) | 2008-05-01 |
| US20120236449A1 (en) | 2012-09-20 |
| US8767366B2 (en) | 2014-07-01 |
| US20080062595A1 (en) | 2008-03-13 |
| JP2010503217A (ja) | 2010-01-28 |
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