TWI408344B - 垂直安裝的質流感測器 - Google Patents

垂直安裝的質流感測器 Download PDF

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Publication number
TWI408344B
TWI408344B TW095142904A TW95142904A TWI408344B TW I408344 B TWI408344 B TW I408344B TW 095142904 A TW095142904 A TW 095142904A TW 95142904 A TW95142904 A TW 95142904A TW I408344 B TWI408344 B TW I408344B
Authority
TW
Taiwan
Prior art keywords
thermal
fluid
mass flow
conduit
sensor tube
Prior art date
Application number
TW095142904A
Other languages
English (en)
Chinese (zh)
Other versions
TW200736582A (en
Inventor
丁軍華
巴麥克
詹凱文
Original Assignee
Ｍｋｓ公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｍｋｓ公司 filed Critical Ｍｋｓ公司
Publication of TW200736582A publication Critical patent/TW200736582A/zh
Application granted granted Critical
Publication of TWI408344B publication Critical patent/TWI408344B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
TW095142904A 2005-11-22 2006-11-21 垂直安裝的質流感測器 TWI408344B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/284,452 US7296465B2 (en) 2005-11-22 2005-11-22 Vertical mount mass flow sensor

Publications (2)

Publication Number Publication Date
TW200736582A TW200736582A (en) 2007-10-01
TWI408344B true TWI408344B (zh) 2013-09-11

Family

ID=37963959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142904A TWI408344B (zh) 2005-11-22 2006-11-21 垂直安裝的質流感測器

Country Status (7)

Country Link
US (1) US7296465B2 (enExample)
JP (3) JP2009516853A (enExample)
KR (1) KR101380800B1 (enExample)
DE (1) DE112006002995B4 (enExample)
GB (1) GB2446116B (enExample)
TW (1) TWI408344B (enExample)
WO (1) WO2007061608A2 (enExample)

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US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
US8499786B2 (en) * 2010-04-09 2013-08-06 Hitachi Metals, Ltd Mass flow controller with enhanced operating range
US8504311B2 (en) 2010-04-09 2013-08-06 Hitachi Metals, Ltd. Method and mass flow controller for enhanced operating range
DE202011109511U1 (de) * 2011-12-23 2012-02-02 Bürkert Werke GmbH Massendurchflussmess- oder -regelgerät
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
CN105102868B (zh) * 2013-03-08 2017-05-24 株式会社富士金 流体控制装置以及流体控制装置上的热传感器设置结构
US9476517B2 (en) * 2014-02-28 2016-10-25 Mks Instruments, Inc. Pilot valve structures and mass flow controllers
SG11201607383UA (en) * 2014-03-11 2016-10-28 Mks Instr Inc System for and method of monitoring flow through mass flow controllers in real time
US9151647B1 (en) * 2014-04-01 2015-10-06 Ya-Ping Huang Vertical flow meter equipped
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
JP6172475B2 (ja) * 2015-02-18 2017-08-02 Smc株式会社 熱式フローセンサ
JP6651323B2 (ja) * 2015-10-02 2020-02-19 サーパス工業株式会社 流量調整装置
TWI598286B (zh) * 2016-06-29 2017-09-11 立錡科技股份有限公司 流體配送器、流體配送控制裝置以及流體配送異常監控裝置
KR101820050B1 (ko) * 2016-08-19 2018-01-19 주식회사 유엔지니어링 온도차를 이용한 하수관 유량 측정 장치
KR102101068B1 (ko) 2017-12-11 2020-04-14 조북룡 통합 분석기에 의한 질량 유량 최적화 제어 시스템

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04366728A (ja) * 1991-06-13 1992-12-18 Nippon M K S Kk 流量センサのバイパスユニット
US5279154A (en) * 1990-06-14 1994-01-18 Unit Instruments, Inc. Thermal mass flow sensor
JPH0916268A (ja) * 1995-06-29 1997-01-17 Hisashi Takahashi 遅れ補償機能付流量制御弁
JPH11160120A (ja) * 1997-12-02 1999-06-18 Stec Kk 質量流量センサ
US6044701A (en) * 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
TW200306468A (en) * 2001-12-21 2003-11-16 Mks Instr Inc Apparatus and method for thermal management of a mass flow controller
TWI223056B (en) * 2002-07-19 2004-11-01 Celerity Group Inc Methods and apparatus for pressure compensation in a mass flow controller
US20050222782A1 (en) * 2004-03-30 2005-10-06 Nicholas Kottenstette Flow monitoring system

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Publication number Priority date Publication date Assignee Title
US4100801A (en) 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
JP2619735B2 (ja) * 1990-09-05 1997-06-11 アンリツ株式会社 熱流量センサ
EP0664879B1 (en) 1992-10-16 2000-01-05 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JP2589318Y2 (ja) * 1993-04-24 1999-01-27 株式会社エステック マスフローメータおよびマスフローコントローラ
JP3266707B2 (ja) * 1993-07-10 2002-03-18 株式会社エステック 質量流量センサ
US5693880A (en) 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
US5763774A (en) * 1996-08-01 1998-06-09 Millipore Corporation Fluid flow meter with reduced orientation sensitivity
US5824894A (en) * 1997-05-07 1998-10-20 Mks Instruments, Inc. Mass flowmeter and laminar flow elements for use therein
US6038921A (en) * 1997-10-15 2000-03-21 Mcmillan Company Mass flow sensor system for fast temperature sensing responses
US6062077A (en) * 1997-10-17 2000-05-16 Azima; Faramarz Techniques for making and using a sensing assembly for a mass flow controller
US20010019120A1 (en) 1999-06-09 2001-09-06 Nicolas E. Schnur Method of improving performance of refrigerant systems
US6595049B1 (en) 1999-06-18 2003-07-22 Mks Instruments, Inc. Thermal mass flow sensor with improved sensitivity and response time
US6668641B2 (en) * 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279154A (en) * 1990-06-14 1994-01-18 Unit Instruments, Inc. Thermal mass flow sensor
JPH04366728A (ja) * 1991-06-13 1992-12-18 Nippon M K S Kk 流量センサのバイパスユニット
US6044701A (en) * 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JPH0916268A (ja) * 1995-06-29 1997-01-17 Hisashi Takahashi 遅れ補償機能付流量制御弁
JPH11160120A (ja) * 1997-12-02 1999-06-18 Stec Kk 質量流量センサ
TW200306468A (en) * 2001-12-21 2003-11-16 Mks Instr Inc Apparatus and method for thermal management of a mass flow controller
TWI223056B (en) * 2002-07-19 2004-11-01 Celerity Group Inc Methods and apparatus for pressure compensation in a mass flow controller
US20050222782A1 (en) * 2004-03-30 2005-10-06 Nicholas Kottenstette Flow monitoring system

Also Published As

Publication number Publication date
JP2017040668A (ja) 2017-02-23
WO2007061608A2 (en) 2007-05-31
JP2009516853A (ja) 2009-04-23
DE112006002995B4 (de) 2019-08-08
US7296465B2 (en) 2007-11-20
TW200736582A (en) 2007-10-01
WO2007061608A3 (en) 2007-07-12
KR20080072039A (ko) 2008-08-05
KR101380800B1 (ko) 2014-04-04
US20070113641A1 (en) 2007-05-24
GB0811056D0 (en) 2008-07-23
JP6163245B2 (ja) 2017-07-12
GB2446116B (en) 2010-09-29
GB2446116A (en) 2008-07-30
WO2007061608A9 (en) 2007-09-07
JP2015057618A (ja) 2015-03-26
DE112006002995T5 (de) 2008-10-09

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