JP2015057618A5 - - Google Patents

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Publication number
JP2015057618A5
JP2015057618A5 JP2014261316A JP2014261316A JP2015057618A5 JP 2015057618 A5 JP2015057618 A5 JP 2015057618A5 JP 2014261316 A JP2014261316 A JP 2014261316A JP 2014261316 A JP2014261316 A JP 2014261316A JP 2015057618 A5 JP2015057618 A5 JP 2015057618A5
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JP
Japan
Prior art keywords
mass flow
fluid
sensor tube
conduit
thermal mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014261316A
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English (en)
Japanese (ja)
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JP2015057618A (ja
Filing date
Publication date
Priority claimed from US11/284,452 external-priority patent/US7296465B2/en
Application filed filed Critical
Publication of JP2015057618A publication Critical patent/JP2015057618A/ja
Publication of JP2015057618A5 publication Critical patent/JP2015057618A5/ja
Pending legal-status Critical Current

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JP2014261316A 2005-11-22 2014-12-24 熱式質量流量計、熱式質量流量制御器、及び質量流量制御器内の熱サイフォンを防止する方法 Pending JP2015057618A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/284,452 2005-11-22
US11/284,452 US7296465B2 (en) 2005-11-22 2005-11-22 Vertical mount mass flow sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008542329A Division JP2009516853A (ja) 2005-11-22 2006-11-03 垂直取り付け式質量流量センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016234888A Division JP6163245B2 (ja) 2005-11-22 2016-12-02 熱式質量流量計及び熱式質量流量制御器

Publications (2)

Publication Number Publication Date
JP2015057618A JP2015057618A (ja) 2015-03-26
JP2015057618A5 true JP2015057618A5 (enExample) 2015-05-21

Family

ID=37963959

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2008542329A Pending JP2009516853A (ja) 2005-11-22 2006-11-03 垂直取り付け式質量流量センサ
JP2014261316A Pending JP2015057618A (ja) 2005-11-22 2014-12-24 熱式質量流量計、熱式質量流量制御器、及び質量流量制御器内の熱サイフォンを防止する方法
JP2016234888A Expired - Fee Related JP6163245B2 (ja) 2005-11-22 2016-12-02 熱式質量流量計及び熱式質量流量制御器

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2008542329A Pending JP2009516853A (ja) 2005-11-22 2006-11-03 垂直取り付け式質量流量センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016234888A Expired - Fee Related JP6163245B2 (ja) 2005-11-22 2016-12-02 熱式質量流量計及び熱式質量流量制御器

Country Status (7)

Country Link
US (1) US7296465B2 (enExample)
JP (3) JP2009516853A (enExample)
KR (1) KR101380800B1 (enExample)
DE (1) DE112006002995B4 (enExample)
GB (1) GB2446116B (enExample)
TW (1) TWI408344B (enExample)
WO (1) WO2007061608A2 (enExample)

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US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
US8499786B2 (en) * 2010-04-09 2013-08-06 Hitachi Metals, Ltd Mass flow controller with enhanced operating range
US8504311B2 (en) 2010-04-09 2013-08-06 Hitachi Metals, Ltd. Method and mass flow controller for enhanced operating range
DE202011109511U1 (de) * 2011-12-23 2012-02-02 Bürkert Werke GmbH Massendurchflussmess- oder -regelgerät
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
CN105102868B (zh) * 2013-03-08 2017-05-24 株式会社富士金 流体控制装置以及流体控制装置上的热传感器设置结构
US9476517B2 (en) * 2014-02-28 2016-10-25 Mks Instruments, Inc. Pilot valve structures and mass flow controllers
SG11201607383UA (en) * 2014-03-11 2016-10-28 Mks Instr Inc System for and method of monitoring flow through mass flow controllers in real time
US9151647B1 (en) * 2014-04-01 2015-10-06 Ya-Ping Huang Vertical flow meter equipped
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
JP6172475B2 (ja) * 2015-02-18 2017-08-02 Smc株式会社 熱式フローセンサ
JP6651323B2 (ja) * 2015-10-02 2020-02-19 サーパス工業株式会社 流量調整装置
TWI598286B (zh) * 2016-06-29 2017-09-11 立錡科技股份有限公司 流體配送器、流體配送控制裝置以及流體配送異常監控裝置
KR101820050B1 (ko) * 2016-08-19 2018-01-19 주식회사 유엔지니어링 온도차를 이용한 하수관 유량 측정 장치
KR102101068B1 (ko) 2017-12-11 2020-04-14 조북룡 통합 분석기에 의한 질량 유량 최적화 제어 시스템

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US4100801A (en) 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
WO1991019959A1 (en) 1990-06-14 1991-12-26 Unit Instruments, Inc. Thermal mass flow sensor
JP2619735B2 (ja) * 1990-09-05 1997-06-11 アンリツ株式会社 熱流量センサ
JP2582961B2 (ja) * 1991-06-13 1997-02-19 日本エム・ケー・エス株式会社 流量センサのバイパスユニット
US6044701A (en) 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
EP0664879B1 (en) 1992-10-16 2000-01-05 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JP2589318Y2 (ja) * 1993-04-24 1999-01-27 株式会社エステック マスフローメータおよびマスフローコントローラ
JP3266707B2 (ja) * 1993-07-10 2002-03-18 株式会社エステック 質量流量センサ
JP2802246B2 (ja) * 1995-06-29 1998-09-24 久 高橋 遅れ補償機能付流量制御弁
US5693880A (en) 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
US5763774A (en) * 1996-08-01 1998-06-09 Millipore Corporation Fluid flow meter with reduced orientation sensitivity
US5824894A (en) * 1997-05-07 1998-10-20 Mks Instruments, Inc. Mass flowmeter and laminar flow elements for use therein
US6038921A (en) * 1997-10-15 2000-03-21 Mcmillan Company Mass flow sensor system for fast temperature sensing responses
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JP4368432B2 (ja) * 1997-12-02 2009-11-18 株式会社堀場エステック 質量流量センサ並びにこれを用いるマスフローメータおよびマスフローコントローラ
US20010019120A1 (en) 1999-06-09 2001-09-06 Nicolas E. Schnur Method of improving performance of refrigerant systems
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