DE112006002995B4 - Massenströmungssensor mit vertikaler Montierung - Google Patents

Massenströmungssensor mit vertikaler Montierung Download PDF

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Publication number
DE112006002995B4
DE112006002995B4 DE112006002995.9T DE112006002995T DE112006002995B4 DE 112006002995 B4 DE112006002995 B4 DE 112006002995B4 DE 112006002995 T DE112006002995 T DE 112006002995T DE 112006002995 B4 DE112006002995 B4 DE 112006002995B4
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DE
Germany
Prior art keywords
sensor tube
fluid
mass flow
heat
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112006002995.9T
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German (de)
English (en)
Other versions
DE112006002995T5 (de
Inventor
Junhua Ding
Michael L. L'Bassi
Kaveh H. Zarkar
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MKS Instruments Inc
Original Assignee
MKS Instruments Inc
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Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE112006002995T5 publication Critical patent/DE112006002995T5/de
Application granted granted Critical
Publication of DE112006002995B4 publication Critical patent/DE112006002995B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
DE112006002995.9T 2005-11-22 2006-11-03 Massenströmungssensor mit vertikaler Montierung Expired - Fee Related DE112006002995B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/284,452 US7296465B2 (en) 2005-11-22 2005-11-22 Vertical mount mass flow sensor
US11/284,452 2005-11-22
PCT/US2006/043013 WO2007061608A2 (en) 2005-11-22 2006-11-03 Vertical mount mass flow sensor

Publications (2)

Publication Number Publication Date
DE112006002995T5 DE112006002995T5 (de) 2008-10-09
DE112006002995B4 true DE112006002995B4 (de) 2019-08-08

Family

ID=37963959

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112006002995.9T Expired - Fee Related DE112006002995B4 (de) 2005-11-22 2006-11-03 Massenströmungssensor mit vertikaler Montierung

Country Status (7)

Country Link
US (1) US7296465B2 (enExample)
JP (3) JP2009516853A (enExample)
KR (1) KR101380800B1 (enExample)
DE (1) DE112006002995B4 (enExample)
GB (1) GB2446116B (enExample)
TW (1) TWI408344B (enExample)
WO (1) WO2007061608A2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
US8499786B2 (en) * 2010-04-09 2013-08-06 Hitachi Metals, Ltd Mass flow controller with enhanced operating range
US8504311B2 (en) 2010-04-09 2013-08-06 Hitachi Metals, Ltd. Method and mass flow controller for enhanced operating range
DE202011109511U1 (de) * 2011-12-23 2012-02-02 Bürkert Werke GmbH Massendurchflussmess- oder -regelgerät
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
WO2014136557A1 (ja) * 2013-03-08 2014-09-12 株式会社フジキン 流体制御装置および流体制御装置へのサーマルセンサ設置構造
US9476517B2 (en) * 2014-02-28 2016-10-25 Mks Instruments, Inc. Pilot valve structures and mass flow controllers
WO2015138085A1 (en) * 2014-03-11 2015-09-17 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9151647B1 (en) * 2014-04-01 2015-10-06 Ya-Ping Huang Vertical flow meter equipped
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
JP6172475B2 (ja) * 2015-02-18 2017-08-02 Smc株式会社 熱式フローセンサ
JP6651323B2 (ja) * 2015-10-02 2020-02-19 サーパス工業株式会社 流量調整装置
TWI598286B (zh) * 2016-06-29 2017-09-11 立錡科技股份有限公司 流體配送器、流體配送控制裝置以及流體配送異常監控裝置
KR101820050B1 (ko) * 2016-08-19 2018-01-19 주식회사 유엔지니어링 온도차를 이용한 하수관 유량 측정 장치
KR102101068B1 (ko) 2017-12-11 2020-04-14 조북룡 통합 분석기에 의한 질량 유량 최적화 제어 시스템

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279154A (en) 1990-06-14 1994-01-18 Unit Instruments, Inc. Thermal mass flow sensor
DE69327538T2 (de) 1992-10-16 2000-10-12 Unit Instruments, Inc. Thermischer massendurchflussregler mit senkrecht angeordnetem massendurchflusssensor

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100801A (en) 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
JP2619735B2 (ja) * 1990-09-05 1997-06-11 アンリツ株式会社 熱流量センサ
JP2582961B2 (ja) * 1991-06-13 1997-02-19 日本エム・ケー・エス株式会社 流量センサのバイパスユニット
US6044701A (en) 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JP2589318Y2 (ja) * 1993-04-24 1999-01-27 株式会社エステック マスフローメータおよびマスフローコントローラ
JP3266707B2 (ja) * 1993-07-10 2002-03-18 株式会社エステック 質量流量センサ
JP2802246B2 (ja) * 1995-06-29 1998-09-24 久 高橋 遅れ補償機能付流量制御弁
US5693880A (en) 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
US5763774A (en) 1996-08-01 1998-06-09 Millipore Corporation Fluid flow meter with reduced orientation sensitivity
US5824894A (en) * 1997-05-07 1998-10-20 Mks Instruments, Inc. Mass flowmeter and laminar flow elements for use therein
US6038921A (en) * 1997-10-15 2000-03-21 Mcmillan Company Mass flow sensor system for fast temperature sensing responses
US6062077A (en) * 1997-10-17 2000-05-16 Azima; Faramarz Techniques for making and using a sensing assembly for a mass flow controller
JP4368432B2 (ja) * 1997-12-02 2009-11-18 株式会社堀場エステック 質量流量センサ並びにこれを用いるマスフローメータおよびマスフローコントローラ
US20010019120A1 (en) 1999-06-09 2001-09-06 Nicolas E. Schnur Method of improving performance of refrigerant systems
US6595049B1 (en) 1999-06-18 2003-07-22 Mks Instruments, Inc. Thermal mass flow sensor with improved sensitivity and response time
US6668641B2 (en) * 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal dissipation in a thermal mass flow sensor
US6779394B2 (en) * 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US7120542B2 (en) * 2004-03-30 2006-10-10 Mks Instruments, Inc. Flow monitoring system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279154A (en) 1990-06-14 1994-01-18 Unit Instruments, Inc. Thermal mass flow sensor
DE69327538T2 (de) 1992-10-16 2000-10-12 Unit Instruments, Inc. Thermischer massendurchflussregler mit senkrecht angeordnetem massendurchflusssensor

Also Published As

Publication number Publication date
KR20080072039A (ko) 2008-08-05
JP2009516853A (ja) 2009-04-23
JP2017040668A (ja) 2017-02-23
JP2015057618A (ja) 2015-03-26
GB2446116A (en) 2008-07-30
WO2007061608A2 (en) 2007-05-31
WO2007061608A3 (en) 2007-07-12
WO2007061608A9 (en) 2007-09-07
US20070113641A1 (en) 2007-05-24
DE112006002995T5 (de) 2008-10-09
KR101380800B1 (ko) 2014-04-04
GB0811056D0 (en) 2008-07-23
US7296465B2 (en) 2007-11-20
TWI408344B (zh) 2013-09-11
JP6163245B2 (ja) 2017-07-12
TW200736582A (en) 2007-10-01
GB2446116B (en) 2010-09-29

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