TWI407533B - 在基底封裝件上具有晶粒之積體電路封裝系統 - Google Patents

在基底封裝件上具有晶粒之積體電路封裝系統 Download PDF

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TWI407533B
TWI407533B TW096100881A TW96100881A TWI407533B TW I407533 B TWI407533 B TW I407533B TW 096100881 A TW096100881 A TW 096100881A TW 96100881 A TW96100881 A TW 96100881A TW I407533 B TWI407533 B TW I407533B
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substrate
package
die
base package
base
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TW096100881A
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TW200735301A (en
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Zigmund Ramirez Camacho
Henry D Bathan
Arnel Trasporto
Jeffrey D Punzalan
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Stats Chippac Ltd
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Description

在基底封裝件上具有晶粒之積體電路封裝系統
本發明係有關於積體電路封裝系統，且尤係關於用於封裝件設計與製造之封裝的系統。
半導體或電腦晶片已幾乎進入今日所製造之每一項電子產品中。晶片不僅用於非常精密的工業及商業電子設備，並且也用於許多家庭及消費品，例如電視、洗衣機與烘乾機、收音機及電話機。隨著許多這些類型的產品變得越小但卻越多功能性，因此在這些較小的產品中包含更多晶片的需要便應運而生。行動電話在體型上的減小就是如何將越來越多的性能找出方法塞進越來越小之電子產品的一個例子。
越小及越精密的電子產品之普及性已使用於此種裝置之晶片封裝的需求上升。這些上升的需求已引導新的晶片封裝概念與方法。未封裝的晶片(chips)稱為晶粒(die/dies)，且目前的方裝方法包括將超過一個晶粒置放於單一封裝件內。一種這樣的方法就是將一個晶粒堆疊於另一個晶粒上，然後將該等堆疊之晶粒於單一封裝件中。該多堆疊之半導體晶粒(multi－stacked semiconductor dies)之最終封裝件係遠小於假設該等晶粒係各分別封裝的結果。除了提供較小的尺寸之外，這些封裝件提供一些有關於製造該封裝件的多種態樣，例如容易處理與組裝。
晶粒堆疊技術的一個例子係加入一對包覆於塑膠成型的封裝件中堆疊之晶粒，該封裝件具有從該封裝件延伸出來之連接器或導線，其作用係作為該封裝件內晶粒之輸入/輸出端。該封裝件包括基板與設置於該基板之上表面之第一晶粒。第二晶粒則接著堆疊在該第一晶粒上。
基板可包含彈性的樹脂膠帶、剛性的纖維玻璃/銅疊層板、共燒陶瓷試樣(co－fired ceramic coupon)、或彈性金屬導線架、球柵陣列基板(ball grid array substrate)或在半導體產業中其它已知類型的基板，而取決於所使用之該特定類型之半導體封裝件。
該第一晶粒係以如一層之接著劑或膠膜慣用地設置在該基板之頂表面上，然後藉由電性連接將該晶粒至該基板之複數條細的導線(一般為金(Au)或鋁(Al))電性連接到該基板。該等導線係附著於位在該晶粒之數個焊墊(bonding pad)，而該等焊墊係位於該晶粒之圓周附近。
該第二晶粒係以接著層(adhesive layer)而設置於該第一晶粒之頂表面上，該接著層係位於該第一晶粒之頂表面之中央區域內。該接著層可接觸或涵蓋該第一晶粒之該等焊墊及接合至該第一晶粒之該等導線。該接著層將該第二晶粒定位至足夠遠離該第一晶粒上方之位置，以避免該等晶粒彼此接觸或任何導線連接到該等晶粒。該第二晶粒然後以與該第一晶粒相同的方式打線接合(wire bonded)至該基板。藉由使用相同的技術，則可在該第二晶粒之上方堆疊一個或更多個額外的晶粒。
在將該等晶粒被打線接合至該基板後，該等晶粒、基板與導線係以塑膠或其它適合的材質來覆蓋，該塑膠會封住該等堆疊的晶粒並保護該等晶粒免於潮濕及其它環境因素。
儘管努力克服導致具有堆疊晶粒之半導體封裝件之低良率的問題，其它問題依然存在。特別是，該堆疊內之晶粒只在組裝過後才提早失去作用或才被偵測出。
因此，仍需求能容許提升良率及導致低高度封裝件之裝置堆疊的方法。有鑑於增大的體積及較小封裝件的需求，找出這些問題的答案就日益緊要。有鑑於不斷的增加節省成本之需求及提升效率，找出這些問題的答案就越來越緊要。這些問題的解答長期以來一直被尋找，然而先前的研發尚未教示或提示任何解決方法，因此，這些問題的解決方法已長期困惑在此技術領域熟知此技藝之人士。
本發明提供一種在基底封裝件上具有晶粒之積體電路封裝系統，包含形成基底封裝件，該形成基底封裝件包括形成基板、在該基板上設置第一積體電路、將該積體電路與該基板以模壓化合物(molding compound)包覆、以及測試該基底封裝件；將裸晶(bare die)附著至基底封裝件；將該裸晶電性連接至該基板；以及包覆該裸晶與該基底封裝件。
本發明之某些實施例除了或替代那此已提及到的或明顯可從上文得知的態樣之外，還有其它態樣。該等態樣對在此技術領域具有通常技藝者於參考附圖時讀取以下之詳細說明將會變得顯而易見。
在以下的說明中，將給予多個特定的詳細說明以提供本發明之徹底的瞭解。然而，可實行本發明而不需這些特定之詳細說明係很明顯的。為了避免模糊本發明之焦點，一些已知的電路、系統組態、以及製程步驟係不詳細揭露的。同樣的，顯示該裝置之實施例之圖示係半圖示且不依比例畫的，特別是，某些尺寸係為了清晰呈現及在圖示中誇大顯示。所揭露及描述之多個實施例具有共同的特徵，為了實施例之清晰與容易例示、說明以及瞭解起見，彼此間類似與同樣的特徵通常以相同的參考數字來描述。
如用於本文之名稱”水平”係定義為平行於習知的接點或基板之表面，而不管其方向性。該名稱”垂直”係指垂直於如剛才所定義之水平的方向。例如”在…之上(above)”，”在…之下(below)”，”底部(bottom)”，”頂部(top)”，”側面(side)”(“如側壁(sidewall)”)，”高(higher)”，”低(lower)”，”上面(upper)”，”在…上方(over)”，以及在”在…下方(under)”，均對應該水接點定義。該名詞”在…上面(on)”係指元件間有直接的接觸。該名詞”製程(processing)”如用於本文中包括材料或光阻(photoresist)的沈積、圖案化(patterning)、曝光、顯影(development)、蝕刻、洗淨、以及/或移除如形成描述之結構所需的材料或光阻。
茲參考第1圖，其中在本發明之實施例中顯示在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖。該剖面圖包括基板102(例如層壓基板(laminate substrate)或陶瓷基板)，該基板102具有頂表面104及底表面106。積體電路108係以接著劑110附著至該頂表面104，該接著劑110例如晶粒附著材料，其可以是導電類型或非導電類型。焊墊112(配置於內排及外排)係在緊鄰該積體電路108之該頂表面104上，並且被第一焊線(bond wires)114電性連接。該內排係比該外排更靠近於該積體電路108。基板接觸點(contact)116係形成於該基板102之該底表面上。系統互連點118(例如焊錫球(solder balls)，焊接柱(solder columns)或凸塊(stud bumps))均附著至該基板接觸點116。第一模壓化合物120封裝該積體電路108、該第一焊線114、該焊墊112之內排以及該基板102之該頂表面104之部份。該產生的結構係為基底封裝件122，且於支撐該焊墊112之該外排之該基板102上具有寬的凸緣。該基底封裝件122在更進一步組裝前可以先被測試。測試該基底封裝件122可驗證該基底封裝件122係良好的(known good)。
在該基底封裝件122係驗證為良好的情況下，一層接著劑124(例如該裸晶附著材料)係被施加到該基底封裝件122之頂部並且裸晶126(例如未封裝的晶粒)係附著於該接著劑124上。第二焊線128電性連接該裸晶126至該焊墊112之該外排。施加第二模壓化合物130係被施加以包覆該裸晶126、該第二焊線128、以及該焊墊112之該外排。該完成之有封裝件於其中之封裝件(package－in－package)係被測試以驗證兩者之積體電路係良好的。
請參閱第2圖，係於本發明之實施例中，顯示在基底封裝件100上具有晶粒之積體電路封裝系統之基底封裝件122之更詳細的剖面圖。該更詳細的剖面圖繪可進行好下一級組裝之該基底封裝件122。該積體電路108可以是超薄的晶粒以有助薄形封裝結構。該基板102(具有該頂表面104及底表面106)支撐該積體電路108。該第一模壓化合物120在該積體電路108的上方具有加工面(finished surface)204。該焊墊112之該外排係可用於連接其它裝置，例如電路(圖中未顯示)或其它基板(圖中未顯示)。該系統互連點118係形成在該底部表面106上以允許連接至次一級系統(圖中未顯示)。該系統互連點118之圖案形成球柵陣列(ball grid array,BGA)。
請參閱第3圖，其中係顯示第2圖之基底封裝件122之俯視圖。該基底封裝件122之該俯視圖繪製該焊墊112之該外排之相關位置(形原於該頂表面104之寬凸緣上)，及繪製形成該封裝件頂部之完美表面204的該第一模壓化合物120。該相關的位置及該焊墊112之數目可依在該第1圖之積體電路108之接觸點的數且或該最終封裝件(圖中未顯示)之互連策略而有所不同。
請參閱第4圖，其中係顯示第2圖之基底封裝件122之底視圖。該基底封裝件122之底視圖繪製具有該系統互連點118之圖案之底表面106，該系統互連點118例如為焊錫球、焊接柱或凸塊。該系統互連點118之數目及圖案僅供例示的目的，並且該數目及位置可以改變。該系統互連點118提供該球柵陣列介面。
請參閱第5圖，其中係顯示利用第2圖之基底封裝件122在基底封裝件500上具有晶粒之積體電路封裝系統之剖面圖。該剖面圖繪製具有基板頂部504及基板底部506之基板502(例如層壓基板或陶瓷基板)且以接著劑110與覆晶(flipchip)晶粒508附著以使該主動面(active side)得次遠離該基板502。該基底封裝件122係設置在該覆晶晶粒之該主動面使得該系統互連點118與該覆晶晶粒508之接觸墊(contact pads)510對齊。焊線512提供該覆晶晶粒508之該接觸墊510、該基底封裝件122之該焊墊112、以及該基板502之基板焊墊514間之電性連接。該基底封裝件112、該覆晶晶粒508、該焊線512以及該基板接觸點均包覆裝於模壓化合物516內。該基板底部506支撐系統接觸點518陣列，該系統接觸點518陣列係連接至系統互連點520，例如焊錫球、焊接柱或凸塊。
請參閱第6圖，其中係顯示利用該第2圖之基底封裝件112在基底封裝件600上具有晶粒之積體電路封裝系統之剖面圖。該剖面包括具有在該基板頂部504上形成該基板焊墊514之該基板502。該基底基板122係設置於該基板502之該基板頂部504上，使得該系統互連點118藉由如回流焊接製程(solder reflow process)之連接製程而與該基板焊墊514電性連接。晶粒602係以接著劑110附著至該基底封裝件122之該頂部，且該積體電路之會動面係遠離該基底封裝件122。焊線604電性連接該晶粒602至該基底封裝件122元該等焊墊1120。該基底封裝件122、該晶粒602、該焊線604以及該基板502之該基板頂部504均以該模壓化合物606包覆裝。該模壓化合物606提供該等封裝的元件結構的完整性及受潮封閉。
參考第7圖，其中係顯示本發明之替代實施例之該基底封裝件700之剖面圖。該基底封裝件700之剖面圖繪製具有基板頂部704及基板底部706之基板702(例如壓層基板或陶瓷基板)，並且積體電路708係以如晶粒附著材料之接著劑110附著至該基板頂部704。該剖面圖也繪製在該基板頂部704上形成之焊墊112(該內排與該外排)。該焊墊112之該內排被用該第一焊線114電性連接至該積體電路708。該積體電路708、該第一焊線114、該焊墊112之該內排及該基板並704之部份均被該第一模壓化合物120包覆。無導腳接觸點(leadless contacts)712係形成在該基板底部706上，該無導腳接觸點712包含接點柵格陣列(land grid array,LGA)介面。
請參閱第8圖，其中係顯示第7圖之該基底封裝件700之底視圖。該基底封裝件700之底視圖包括該基板底部706及該無導腳接觸點712之圖案。該無導腳接觸點712之圖案、大小及形狀僅供例示之用，且該圖案、大小、及形狀可改變。該無導腳接觸點712在該基板702之底部上形成接點柵格陣列介面。
請參閱第9圖，其中係顯示利用該第7圖之基底封裝件700，本發明之替代實施例之剖面圖。該替代實施例之剖面圖包括具有基板頂部904與基板底部906之基板902(例如壓層基板或陶瓷基板)。基板焊墊908係形成於該基板頂部904。該基底封裝件700係設置在該基板902之該基板頂部904上，使得該無導腳接觸點712藉由例如回流焊接製程之連接製程而與該基板焊墊908電性連接。晶粒910係用接著劑110被附著到該基底封裝件700之該頂部，且該積體電路之主動面係朝向遠離該基底封裝件700。焊線912將該晶粒910電性連接至該基底封裝件700之該焊墊112。該基底封裝件700、該晶粒910、該焊線912及該基板902之該基板頂部均以模壓化合物914包覆。該模壓化合物914提供該等被包覆的元件結構的完整性及受潮封閉。該基板底部906支撐系統接觸點916陣列，該系統接觸點916陣列係連接至系統互連點918，例如焊錫球、焊接柱或凸塊。
請參考第10圖，其中係顯示利用該第7圖之基底封裝件700在基底封裝件1000上具有晶粒之積體電路封裝系統之剖面圖。該剖面圖繪製該基底封裝件700在反向位置設置在數個導腳(lead)1002上，例如四方平板封裝(quad flat pack,QFP)導腳，”J”型彎曲導腳，或塑膠導腳晶片載體(plastic leaded chip carrier，PLCC)導腳。該等導腳1003係藉由如焊接錫之導電結構材料1004與該基底封裝件700之該焊墊112電性連接。晶粒1006係由該接著劑110設置在該基底封裝件700之底部(在反向位置)，且該主動面係遠離該基底封裝件700。焊線1008電性連接該晶粒1006與該基底封裝件700之該無導腳接觸點712。模壓化合物1010包覆該基底封裝件700、該導腳1002之上部位、該晶粒1006以及該焊線1008。該模壓化合物1010對該等包覆的元件提供結構的完整性及受潮封閉。
請參閱第11圖，其中係顯示本發明之另一替代實施例之基底封裝件1100之剖面圖。該基底封裝件1100之剖面圖繪製具有基板頂部1104與基板底部1106之基板1102(例如壓層基板或陶瓷基板)。藉由使用例如晶粒附著材料之接著劑110將積體電路1108設置於該基板頂部1104上。該焊墊112之該內排及該外排係形成於該基板頂部1104上。該第一焊線114電性連接該焊墊112之內排至該積體電路1108。該第一模壓化合物120包覆該積體電路1108、該焊墊112之該內排、該第一焊線114及該基板頂部1104之部份。封裝件頂部1110係可用於安裝裝置(圖中未顯示)。在該基板底部1106上沒有電性連接。任何與該基底封裝件1100之電性連接必須透過該基板頂部1104上之該焊墊112之該外排來完成。
請參閱第12圖，其中係顯示第11圖之基底封裝件1100之底視圖。該基底封裝件1100之底視圖包括該基板底部1106與例如以防焊綠漆(solder mask)披覆銅之網狀護背(mesh backing)1202，其係選擇性地設置以強化該基底封裝件1100之結構。該網狀護背1202之圖案及位置係僅供例示之用，且該圖案及位置可改變。
請參考第13圖，其中係顯示利用第11圖之基底封裝件1100在基底封裝件1300上具有晶粒之積體電路封裝系統之剖面圖。該剖面圖繪製具有該基板頂部904及該基板底部906之基板902、藉由例如該晶粒附著材料之接著劑110接合至該基板頂部904晶粒1302。該晶粒1302之主動面係面向遠離該基板902。該基板焊墊908係形成於該基板902之該基板頂部904上。
該基底封裝件1100係以例如該晶粒附著材料設置在該晶粒1302之該主動面上。焊線1304在該基底封裝件1100、該晶粒1302以及該基板焊墊908間形成電性連接。該系統接觸點916陣列係形成於該基板902之該基板底部906上。該系統互連點918(例如焊錫球、焊接柱或凸塊)係附著到該系統接觸點916陣列用以連接到該次一級系統(圖中未顯示)。該基底封裝件1100、該晶粒1302、該焊線1304、該基板焊墊908以及該基板902之該基板頂部904係包覆於模壓化合物1306內。該模壓化合物1306對在該基底封裝件1300上具有晶粒之該積體電路封裝系統提供保護、受潮封閉以及結構的硬度。
請參考第14圖，其中係顯示利用第11圖之基底封裝件1100在基底封裝件1400上具有晶粒之積體電路封裝系統之剖面圖。該剖面圖繪製該基板902與該基底封裝件1100以接著劑110附著至該基板頂部904。晶粒1402以該接著劑110設置在該基底封裝件1100上。該基板焊墊908係形成於該基板902之該基板頂部904上。焊線1404電性連接該基底封裝件1100、該基板焊墊908以及該晶粒1402。模壓化合物1406包覆該基底封裝件1100、該基板焊墊908、該焊線1404、以及該基板902之該基板頂部904。
請參閱第15圖，其中係顯示在本發明之實施例中，用以製造在基底封裝件100上具有晶粒之積體電路封裝件系統而於基底封裝系統1500上具有晶粒之積體電路封裝件系統之流程圖。該在基底封裝系統1500上具有晶粒之該積體電路封裝系統包括於方塊1502中形成基底封裝件，形成該基底封裝件包括形成基板、在該基板上設置積體電路、以模壓化合物包覆該積體電路與該基板以及測試該基底封裝件；於方塊1504中，將裸晶附著至該基底封裝件；於方塊1506中，將該裸晶電性連接至該基板；於方塊1508中，包覆該裸晶與該基底封裝件。
詳而言之，於本發明之實施例中，一種用以製造在基底封裝件上具有晶粒之積體電路封裝系統的方法係執行如下：1.形成基底封裝件，包含形成具有在內排及外排之焊墊的壓層基板(laminate substrate)，將積體電路設置在該壓層基板上該焊墊的內排內，以模壓化合物包覆該積體電路及該壓層基板，其中該模壓化合物包覆該積體電路及該焊墊之內排，以及測試該基底封裝件，測試該基底封裝件包含驗證該基底封裝件係良好的。(第1圖)2.將裸晶附著至該基底封裝件，包括施加接著劑至該基底封裝件以用於裸晶附著。(第1圖)3.將該裸晶電性連接至該壓層基板，包括在該裸晶與該壓層基板上之該焊墊的外排之間接上焊線。(第1圖)以及4.包覆該裸晶及該基底封裝件，包括形成有封裝件於其中封裝件。
本發明因而揭露具有數個態樣。
一個態樣係本發明在多種有封裝件為其中的封裝件配置中提供了其於壓層的BGA與LGA封裝件的有效使用。
另一態樣則是本發明於繼續組裝前藉由驗證該基底封裝件係”良好的(known good)”而提升有封裝件於其中的封裝件裝置之製造良率。使用結合裸晶之基底封裝件較堆疊裸晶或堆疊封裝件更簡化該組裝製程。本發明亦致能新的有封裝件於其中的封裝件概念。
本發明之又一重要態樣係有用地支持與服務降低成本、簡化系統、以及增加效能之歷史趨勢。
本發明之這些及其它有用的態樣因而促進該技術之狀態到至少另一層次。
因此，本發明之在基底封裝件上具有晶粒之積體電路封裝系統的方法及裝置已揭露對製造有封裝件於其中的封裝件裝置提供了重要及迄今未知與達不到的解決方案、性能及功能態樣。所得的製程與配置係明確的、符合成本效益的、不複雜的、多方面適用及有效的，可採用已知的技術實行，因而立即適用於有效與經濟地製造有封裝件於其中的封裝件裝置，該等裝置係完全相容於習知的製程及技術。
儘管本發明已結合特定的最佳模式來作說明，然而可瞭解根據先前的說明許多替代物、修改及變化對在此技術領域具有通常技藝者會顯而易見。因此，本發明包括落於含在申請專利範圍之範疇內之所有此種替代物、修改、以及變化。所有於本文中迄今提到或顯示於附圖中的事項將以例示與非限制的意義詮釋。
100．．．基底封裝件
102．．．基板
104．．．頂表面
106．．．底表面
108．．．積體電路
110．．．接著劑
112．．．焊墊
114．．．第一焊線
116．．．接觸點
118．．．系統互連點
120．．．第一模壓化合物
122．．．基底封裝件
124．．．接著劑
126．．．裸晶
128．．．第二焊線
130．．．第二模壓化合物
204．．．加工表面
500．．．基底封裝件
502．．．基板
504．．．基板頂部
506．．．基板底部
508．．．覆晶晶粒
510．．．接觸墊
512．．．焊線
514．．．基板焊墊
516．．．模壓化合物
518．．．系統接觸點
520．．．系統互連點
600．．．基底封裝件
602．．．晶粒
604．．．焊線
606．．．模壓化合物
700．．．基底封裝件
702．．．基板
704．．．基板頂部
706．．．基板底部
708．．．積體電路
712．．．接觸點
902．．．基板
904．．．基板頂部
906．．．基板底部
908．．．基板焊墊
910．．．晶粒
912．．．焊線
914．．．模壓化合物
916．．．系統接觸點
918．．．系統互連點
1000．．．基底封裝件
1002．．．導腳
1004．．．導電結構材料
1006．．．晶粒
1008．．．焊線
1010．．．模壓化合物
1100．．．基底封裝件
1102．．．基板
1104．．．基板頂部
1106．．．基板底部
1108．．．積體電路
1202．．．網狀護背
1300．．．基底封裝件
1302．．．晶粒
1304．．．焊線
1306．．．模壓化合物
1400．．．基底封裝件
1402．．．晶粒
1404．．．焊線
1406．．．模壓化合物
1500．．．基底封裝件系統
1502、1504、1506、1508．．．方塊
第1圖係於本發明之實施例中，在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；第2圖係於本發明之實施例中，在基底封裝件上具有晶粒之積體電路封裝系統之基底封裝件之更詳細的剖面圖；第3圖係第2圖之基底封裝件之俯視圖；第4圖係第2圖之基底封裝件之底視圖；第5圖係利用第2圖之基底封裝件在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；第6圖係利用第2圖之基底封裝件在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；第7圖係以本發明之替代實施例之基底封裝件之剖面圖；第8圖係第7圖之基底封裝件之底視圖；第9圖係利用第7圖之基底封裝件，本發明之替代實施例之剖面圖；第10圖係利用第7圖之基底封裝件在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；第11圖係本發明之另一替代實施例之基底封裝件之剖面圖；第12圖係第11圖之基底封裝件之底視圖；第13圖係利用第11圖之基底封裝件在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；第14圖係利用第11圖之基底封裝件在基底封裝件上具有晶粒之積體電路封裝系統之剖面圖；以及第15圖係在本發明之實施例中，用以製造在基底封裝件上具有晶粒之積體電路封裝系統而於基底封裝件上具有晶粒之積體電路封裝系統之流程圖。
100．．．基底封裝件
102．．．基板
104．．．頂表面
106．．．底表面
108．．．積體電路
110．．．接著劑
112．．．焊墊
114．．．第一焊線
116．．．接觸點
118．．．系統互連點
120．．．第一模壓化合物
122．．．基底封裝件
124．．．接著劑
126．．．裸晶
128．．．第二焊線
130．．．第二模壓化合物

Claims (10)

  1. 一種用於在基底封裝件(100)上具有晶粒之積體電路封裝系統之系統(1500)，包括：形成基底封裝件(122)，包括：形成基板(102)，在該基板(102)上設置積體電路(108)，以模壓化合物(120)包覆該積體電路(108)以及該基板(102)，以及測試該基底封裝件(122)；將具有主動面及背面之裸晶(508)以該主動面附著至該基底封裝件(122)；將第二基板(502)附著至該裸晶(508)之該背面；將該裸晶(508)與該基板(102)電性連接；以及包覆該裸晶(508)與該基底封裝件(122)。
  2. 如申請專利範圍第1項之系統(1500)，復包括在該基底封裝件(122)上形成柵格陣列介面，其中，該柵格陣列包括在該基板(102)之底表面(106)上形成球體(118)或接點(land)(712)。
  3. 如申請專利範圍第1項之系統(1500)，其中，形成該基底封裝件(122)包括在該基板(102)之頂表面(104)上具有所有電性連接。
  4. 如申請專利範圍第1項之系統(1500)，復包括形成有導腳的封裝件，(leaded package)包括附著導腳(1002)至該基底封裝件(700)。
  5. 如申請專利範圍第1項之系統(1500)，復包括形成包含第二基板(502)之有封裝件於其中的封裝件(package-in-package)，使該基底封裝件設置於該封裝件上，其中，包覆該裸晶(508)與該基底封裝件(122)包括包覆該第二基板(502)之一部份。
  6. 一種用於在基底封裝件(100)上具有晶粒之積體電路封裝系統之系統，包括：基底封裝件(122)，包括：基板(102)，設置在該基板(102)上之積體電路(108)，該積體電路(108)及該基板(102)係以模壓化合物(120)包覆，以及該基底封裝件(122)係被測試；以主動面附著至該基底封裝件(122)之具有該主動面及背面之裸晶(508)；附著至該裸晶(508)之該背面之第二基板(502)；該裸晶(508)係電性連接至該基板(102)；以及該裸晶(508)及該基底封裝件(122)係被包覆。
  7. 如申請專利範圍第6項之系統，復包括形成於該基底封裝件(122)上的柵格陣列介面，其中，該柵格陣列包括形成於該基板(102)之底表面(106)上之球體(118)或接點(712)。
  8. 如申請專利範圍第6項之系統，其中，該基底封裝件(1100)包括在該基板(1102)之頂部(1104)上的所有電 性連接。
  9. 如申請專利範圍第6項之系統，復包含藉由具有附著至該基底封裝件(700)之導腳(1002)所形成之有導腳的封裝件。
  10. 如申請專利範圍第6項之系統，復包含具有第二基板(502)之有封裝件於其中的封裝件，使該基底封裝件(122)設置於該封裝件上，其中，該裸晶(508)及該基底封裝件(122)係被包覆包括該第二基板(502)之一部份被包覆。
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