TWI399271B - Industrial robot - Google Patents

Description

Industrial robot

The present invention relates to an industrial robot, and more particularly to an industrial robot used in a decompression environment such as a liquid crystal manufacturing apparatus or a semiconductor manufacturing apparatus.

For an industrial robot installed in a chamber under a reduced pressure environment (more specifically, in a vacuum environment), it is important to remove heat generated by a motor or the like attached to the inside of the industrial robot.

As a technique for removing heat generated by an industrial robot installed in a chamber (hereinafter sometimes referred to as a "vacuum chamber") in a reduced pressure environment, Patent Document 1 describes a cooling mechanism. The cooling gas is circulated in all parts inside the industrial robot in which heat dissipating components such as a plurality of motors are housed. The cooling mechanism shown in Fig. 1 of the document will be described using the symbols of the figure, and the supply of the cooling gas is via an electropneumatic regulator 35 and an operating valve 33 for converting an electrical signal into a pressure signal. The air supply device 31 is supplied from the lower portion of the industrial robot R. On the other hand, the discharge of the cooling gas is performed by the industrial robot from the exhaust port provided in the vicinity of the front end of the industrial robot R (the sixth axis system in FIG. 2 of this document 1) via the operation valve 34. The vacuum device 32 is used to force the exhaust gas to be discharged. As described above, the cooling medium is supplied from the lower portion (one end side) of the industrial robot R, and the cooling medium is discharged from the vicinity of the front end (the other end side) of the industrial robot R, whereby the cooling gas can be made inside the industrial robot R. All parts of the cycle.

[Patent Document 1] Japanese Patent Laid-Open No. Hei 5-84692 (paragraphs 0024 to 0025, Figs. 1, 2)

However, according to the study by the inventors of the present invention, it has been found that the cooling mechanism disclosed in Patent Document 1 is difficult to perform sufficient cooling. In addition, it has been found that, in particular, an industrial robot that rotatably connects a joint portion to transmit a rotational force of a drive source to generate a desired motion and rotate the arm portion, or an industrial robot that performs an arm reciprocating motion The above cooling problem is clearly produced.

For example, an industrial robot that performs a rotating operation has a technical requirement that a driving source (more specifically, a finger driving motor) for rotating an arm portion is disposed close to the arm portion, thereby realizing The purpose of rotating (rotating) is performed with higher precision. Of course, the same applies to the industrial robot that reciprocates the arm. At this time, since the arm of the industrial robot is installed in the vacuum chamber, the inside of the arm also becomes a vacuum (reduced environment) state. On the other hand, in order to cool the drive source, the storage chamber in which the drive source is stored needs to be filled with the atmosphere. However, if the drive source is to be placed close to the arm of the industrial robot, the storage chamber must also be placed in the vacuum chamber. Here, since the heat generated by the driving source cannot be transmitted by the air, it is difficult to dissipate heat into the vacuum chamber, and heat is likely to remain in the storage chamber. Therefore, there is a tendency that the driving source is insufficiently cooled. In other words, the heat dissipation of the drive source is performed by heat conduction between the metals and air conduction, and although air is present in the interior of the storage compartment in which the drive source is housed, the storage compartment is evacuated. Therefore, cooling by the air in the vacuum chamber cannot be expected. Further, when the arm portion is disposed close to the drive source, the drive source is often disposed in the upper portion of the storage chamber. Therefore, the heat generated from the driving source moves upward in the storage chamber and is likely to stay around the driving source.

In order to reduce the size of the industrial robot and reduce the size of the storage chamber, the problem of insufficient cooling of the above-mentioned driving source is more conspicuous. That is, the storage chamber becomes smaller, and accordingly, the heat generated from the driving source is more likely to remain in the storage chamber. Here, in order to reliably cool the drive source and cool the air in the storage room, it is necessary to increase the circulation amount of the cooling air. The above-mentioned circulation of a large amount of cooling air causes an increase in cooling cost.

Further, in the chamber under reduced pressure, as in the etching treatment used for the production of CVD (Chemical Vapor Deposition) or the use of a photoresist film used in the manufacture of ICs, etc., in the process of heat dissipation In addition to the heat dissipation of the drive source, there is also the effect of heat dissipation in the chamber. Therefore, it is more important to increase the cooling efficiency of the drive source.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an industrial robot which is installed in a chamber under a reduced pressure environment and which can be used for more efficient and reliable operation of the arm portion. The drive source is cooled.

In order to achieve the above object, the present inventors have conducted intensive studies and found that the local cooling mechanism for cooling the driving source constituting the main heat radiation source can solve the above problems, thereby completing the present invention.

In other words, the industrial robot is characterized in that it includes an arm portion and a storage chamber disposed in the vicinity of the arm portion and accommodating a driving source for operating the arm portion, and the arm portion and the storage chamber are provided. The chamber is provided with a local cooling mechanism for cooling the drive source in a chamber under a reduced pressure environment.

According to the present invention, since the local cooling mechanism for cooling the drive source is provided, it is possible to efficiently and inexpensively cool the drive source which is the main heat radiation source in the storage chamber and which is likely to accumulate heat.

Moreover, it is preferable that the industrial robot of the present invention has a plurality of the above-described arm portions, and each of the arm portions has a drive source and a local cooling mechanism.

According to the present invention, since the plurality of arms are provided, the flat member such as glass can be taken out from the processing apparatus in a short time.

Further, in the industrial robot according to the present invention, the local cooling mechanism preferably includes a cooling device formed by winding a heat pipe through which the compressed air can flow.

According to the invention, since the cooling means is formed by winding the heat pipe through which the compressed air flows, the heat exchange between the drive source and the cooling means is performed efficiently. Further, in the present invention, the tube used for cooling is referred to as a "heat pipe".

Moreover, in the case where the above-described cooling device is used, in order to allow the compressed air flowing through the heat pipe to flow out into the storage chamber, one end side of the heat pipe is opened in the storage chamber.

According to the invention, since one end side of the heat pipe is opened in the motor housing chamber, the compressed air is discharged from the one end side to the inside of the storage chamber, so that the entire storage chamber can be cooled.

Preferably, when the cooling device is used, the local cooling mechanism has a temperature detecting sensor, and the industrial robot has a control mechanism, and the control mechanism detects that the temperature around the driving source has reached the cooling start. At the required temperature, the compressed air starts to flow in the cooling device, and when the temperature detecting sensor detects that the temperature around the driving source has reached the industrial robot stopping temperature, the operation of the industrial robot is stopped.

According to the present invention, since the ambient temperature of the drive source can be detected to cause the compressed air to be executed/stopped and the operation of the industrial robot is stopped, the cooling cost can be kept low, and the operational safety of the industrial robot can be further improved. .

Moreover, it is preferable that the industrial robot of the present invention performs a CVD (Chemical Vapor Deposition) process or an etching process in a chamber under the reduced pressure environment.

According to the present invention, since heat is radiated during the CVD process or the etching process in the chamber, the temperature around the drive source is liable to become high, so that it is of great significance to perform concentrated cooling of the drive source.

Further, in the industrial robot of the present invention, the arm portion is preferably a rotatable arm portion or a reciprocable arm portion.

According to the invention, since the local cooling mechanism for the concentrated cooling drive source is provided in the storage chamber, the drive source can be easily disposed. Therefore, the construction of various types of arms can be realized.

According to the industrial robot of the present invention, it is possible to more reliably cool the drive source that operates the arm portion provided in the chamber under the reduced pressure environment. Further, the present invention provides an industrial robot which is efficient and has a low cooling cost.

Next, the best mode for carrying out the invention will be described based on the drawings. In addition, the industrial robot of the present invention is not limited to the following description and drawings within the scope of the technical features. In the following description, a motor (arm drive motor) that is generally used will be described as an example of a drive source. Of course, the drive source used in the present invention is not limited to a motor. In the case where the motor is taken as an example, the storage chamber in which the drive source is stored is referred to as a "motor storage chamber". Similarly, a portion in which the drive source is housed in the storage chamber is referred to as a "motor storage portion".

[First Embodiment]

Fig. 1 is a schematic plan view showing an industrial robot according to a first embodiment of the present invention. The industrial robot 1 shown in FIG. 1 is an arm rotation type industrial robot, and is configured by a rotatable arm portion 3 and a motor for accommodating an arm driving motor for rotating the arm portion 3. The storage chamber 4; and the base 2 supporting the arm portion 3 and the motor housing chamber 4.

The arm portion 3 includes a first arm 3a, a second arm 3b, and a hand 3c. Further, in FIG. 1, not shown, a joint portion is formed between the first arm 3a and the motor housing chamber 4, between the first arm 3a and the second arm 3b, and between the hand 3c and the second arm 3b. . The first arm 3a, the second arm 3b, and the hand 3c are rotatably coupled via the joint portions.

A flat member such as a glass substrate for liquid crystal is placed on the hand 3c. Then, the flat member placed on the hand 3c is conveyed by controlling the operation (rotation) of the first arm 3a, the second arm 3b, and the hand 3c.

As described above, the arm housing motor 4 (which is not shown in FIG. 1) for driving the arm portion 3 is housed in the motor housing chamber 4. Further, in the motor housing chamber 4, the arm driving motor is housed in the motor housing portion 5. A motor housing portion 5 is provided in the motor housing chamber 4 to reduce the size of the motor housing chamber 4 as a whole.

As shown in FIG. 1, the motor housing chamber 4 is disposed in the vicinity of the arm portion 3. Specifically, in FIG. 1, the motor housing chamber 4 is provided adjacent to the first arm 3a. Since the arm driving motor and the arm portion 3 housed in the motor housing chamber 4 are disposed close to each other, the rotation of the arm portion 3 can be easily performed more accurately. The rotation mechanism of the arm portion 3 will be described below.

The motor housing chamber 4 and the arm portion 3 are disposed in a vacuum chamber (not shown in FIG. 1). When the member to be conveyed by the hand 3c is a glass substrate for liquid crystal, it is usually etched in a vacuum chamber to prepare a photoresist, so that the temperature inside the vacuum chamber is liable to rise. Therefore, it is of great significance to use a local cooling mechanism that performs concentrated cooling of the arm driving motor.

The configuration of the vacuum chamber and the like will be described with reference to Figs. 2 and 3 . Fig. 2 is a schematic cross-sectional view showing the AA' plane of Fig. 1. Fig. 3 is a schematic cross-sectional view showing an enlarged view of a motor housing chamber (motor housing portion). Here, in FIGS. 2 and 3, the same elements as those in FIG. 1 are denoted by the same reference numerals. In addition, in the schematic cross-sectional views of FIGS. 2 and 3, in order to facilitate the understanding of the present invention, the details of the apparatus related to the motor housing chamber 4, the rotating mechanism of the hollow rotating shaft 14, and the upper and lower mechanisms, and the arm portion 3 are omitted. The details of the device related to the rotating mechanism. The above-described rotating mechanism and the upper and lower mechanisms can suitably use a mechanism well known to those skilled in the art.

As shown in FIG. 2, the arm portion 3 and the motor housing chamber 4 are disposed in the vacuum chamber 7, and the base 2 is disposed outside the vacuum chamber 7 (in the atmosphere). Thereby, not only the rotation accuracy of the arm portion 3 can be improved, but also the size of the unit provided in the vacuum chamber 7 in the industrial robot 1 can be made compact, and the vacuum chamber 7 can be easily and compactly designed.

The motor housing chamber 4 is provided on the hollow rotating shaft 14. In FIG. 2, description is omitted. In order to perform the vertical movement and the rotation operation of the arm portion 3 and the motor housing chamber 4, the hollow shaft 14 is provided with an up-and-down operation mechanism and a rotation mechanism. Since the above-described vertical movement mechanism and the rotation mechanism can use a mechanism well known to those skilled in the art, the description thereof is omitted here. Furthermore, the bellows 16 expands and contracts in response to the upward movement of the hollow shaft 14. Further, since the hollow rotating shaft 14 is provided separately from the susceptor 2, a gap is formed between the hollow rotating shaft 14 and the susceptor 2. The bearing 15 is provided at the lower two places above the gap. However, as shown in FIG. 2, in order not to leak air from the gap into the vacuum chamber 7, a magnetic seal 23 is provided at a portion sandwiched by the bearing 15. Thereby, the sealing property between the hollow rotating shaft 14 and the susceptor 2 can be ensured, so that the manufacturing in the vacuum chamber 7 is not hindered. Further, the upper and lower movements and rotations of the hollow rotating shaft 14 not only cause the motor housing chamber 4 but also the arm portion 3 to move up and down and rotate.

In the present embodiment, the motor housing chamber 4 is a region above the hollow rotating shaft 14 and the susceptor 2 and below the arm portion 3 (a region surrounded by a broken line portion in Fig. 2). The inside of the motor housing chamber 4 is filled with the atmosphere, and an arm driving motor 6 for rotating the arm portion 3 is provided. Specifically, the arm drive motor 6 is provided in the motor housing portion 5 of the motor housing chamber 4 . Further, around the arm drive motor 6 (around the body), a cooling device 9 (see FIG. 3) in which the aluminum tube 8 as a heat pipe is spirally wound is formed. The upper end 9a (one end side) of the aluminum pipe 8 constituting the cooling device 9 is opened inside the motor housing chamber 4. On the other hand, the lower end 9b (the other end) of the aluminum pipe 8 constituting the cooling device 9 is connected to a flexible resin pipe 25 (see Fig. 3). Further, the resin pipe 25 is connected to the solenoid valve 10 (see Fig. 2). Further, the solenoid valve 10 and the compressed air generating device (not shown in FIG. 2) outside the susceptor 2 are also connected by a flexible resin pipe 25. Furthermore, it is of course also possible to directly use the aluminum tube 8 instead of the flexible resin tube 25. On the other hand, even if it is a resin pipe, if it can ensure the heat exchange with the arm drive motor 6 to some extent, it can be used as a heat pipe.

The concentrated cooling of the arm drive motor 6 is performed as follows. In other words, the compressed air that has flowed in from the compressed air generating device (not shown in FIG. 2) provided outside the susceptor 2 rises toward the motor housing chamber 4 inside the resin tube 25. This compressed air flows spirally upward through the lower end 9b of the aluminum pipe 8 constituting the cooling device 9, and then flows upward from the upper end 9a of the aluminum pipe 8 constituting the cooling device 9 into the motor housing chamber 4. Here, since the compressed air flows through the aluminum pipe 8 of the cooling device 9, heat exchange is performed between the cooling device 9 and the arm drive motor 6. As a result, the arm drive motor 6 can be collectively cooled. Thereby, in the industrial robot 1 shown in FIG. 2, the local cooling mechanism has the cooling device 9 which circulates compressed air.

The compressed air that spirally flows upward in the aluminum pipe 8 constituting the cooling device 9 flows out from the upper end 9a of the aluminum pipe 8 constituting the cooling device 9 into the motor housing chamber 4. Then, the outflowing compressed air circulates inside the motor housing chamber 4, and then flows into the susceptor 2 (see FIG. 3). The air circulation inside the motor housing chamber 4 can easily ensure a lower temperature in the motor housing chamber 4.

The arrangement relationship between the arm drive motor 6 and the motor housing portion 5 is set as follows. In other words, in the motor storage chamber 4, the motor housing portion 5 in which the arm driving motor 6 is housed is preferably used from the top plate 5r of the motor housing portion 5 to the arm driving. The distance G from the upper end 6t of the motor is 1/10 or less of the height L of the motor housing portion 5. More specifically, it is preferable to design the above-described distance G to be 2 cm or less.

Thereby, the miniaturization of the motor storage chamber 4 can be achieved. However, since the top plate 5r of the motor housing portion 5 is close to the arm driving motor 6, the heat generated by the arm driving motor 6 tends to stay in the vicinity of the top plate 5r of the motor housing portion 5. As a result, the temperature of the arm drive motor 6 is easily increased. Therefore, it is more important to ensure the cooling of the arm drive motor 6, and it is more meaningful to perform the concentrated cooling by the cooling device 9.

On the other hand, the distance G from the top plate 5r of the motor housing portion 5 to the upper end 6t of the arm driving motor 6 is usually 1/40 or more of the height L of the motor housing portion 5 so that the arm driving motor 6 does not The top plate 5r of the motor housing portion is contacted. Specifically, the above distance G is usually 5 mm or more.

In addition, the "distance from the top plate of the motor housing portion to the upper end of the arm driving motor" means the distance from the minimum portion between the top plate 5r of the motor housing portion 5 and the upper end 6t of the arm driving motor 6. . In other words, in the industrial robot 1 of Fig. 3, since the top plate 5r of the motor housing portion 5 and the upper end 6t of the arm driving motor 6 are both flat, the above-described distance is fixed. However, in actual industrial robots, it is also considered that the top end of the motor housing portion and the upper end of the arm driving motor are not necessarily flat. At this time, the distance between the top plate of the motor housing portion and the upper end of the arm drive motor, which is the portion of the top of the motor housing portion that is closest to the upper end of the arm drive motor, is changed from the top plate of the motor housing portion to the arm drive. The distance from the upper end of the motor." In addition, the "height of the motor housing portion" refers to the maximum distance from the bottom surface of the motor housing chamber to the top plate in the region where the arm driving motor in the motor housing chamber is located.

Next, a control mechanism using the first and second temperature detecting sensors 12 and 13 as temperature detecting sensors will be described. As shown in FIG. 3, the pedestal 11 is provided in the arm drive motor 6. Further, the pedestal 11 is provided with a first temperature detecting sensor 12 for detecting the cooling start temperature and a second temperature detecting sensor 13 for detecting the stop temperature of the industrial robot 1. As shown in the figure, in order to accurately detect the temperature of the arm driving motor 6, the first temperature detecting sensor 12 and the second temperature detecting sensor 13 are disposed in the vicinity of the arm driving motor 6. By the first and second temperature detecting sensors 12 and 13 and the electromagnetic valve 10, it is possible to control the flow of compressed air to/from the cooling device 6 (cooling of the arm driving motor 6) and to operate the industrial robot 1. Stop the operation.

The control of causing the compressed air to execute/stop flowing to the cooling device 9 is performed as follows. First, when the first temperature detecting sensor 12 for detecting the cooling start temperature detects the cooling start necessary temperature (for example, 40 ° C), the electromagnetic valve 10 is opened, and the compressed air starts to flow into the cooling device 9. Thereby, heat exchange is performed between the arm drive motor 6 and the cooling device 9, so that the temperature of the arm drive motor 6 is lowered. When the first temperature detecting sensor 12 detects that the ambient temperature has become the cooling start necessary temperature (for example, 40 ° C) or less due to the cooling of the arm driving motor 6, the compressed air is cut by the action of the electromagnetic valve 10. The above operation can be performed only when the arm drive motor 6 needs to be cooled, so that the cooling cost can be reduced.

On the other hand, the forced stop of the industrial robot 1 is performed as follows. For example, it is also considered that when the compressed air generating device or the electromagnetic valve 10 malfunctions and the long-term use of the specification of the industrial robot 1 occurs, the arm driving motor 6 becomes high temperature (for example, a temperature exceeding 80 ° C). ), the industrial robot 1 is in a dangerous state. Therefore, in the industrial robot 1, when the high temperature (industrial robot stop temperature) is reached around the arm drive motor, and the second temperature detecting sensor 13 detects this, an error message is output to make the industrial robot The action of 1 is forcibly stopped. In the forced stop method of the industrial robot 1, there is a method in which the second temperature detecting sensor 13 detects the industrial robot stop temperature (for example, 80 ° C) and stops the industrial robot. Further, there is a method in which the entire operation of the industrial robot 1 is composed of several operation steps, and the industrial robot 1 keeps the industrial robot 1 constantly operating when performing one of the operation steps. Until the end of the operation step, the forced stop is performed thereafter. From the viewpoint of convenience in resetting the industrial robot 1, it is preferable to use the latter forced stop method.

The control flow of the control mechanisms using the first and second temperature detecting sensors 12, 13 will be described using FIG. 4 shows an execution/stop control operation for performing a cooling operation in response to the detection of the cooling start temperature by the first temperature detecting sensor 12, and an industrial robot in which the second temperature detecting sensor 13 detects the stop temperature of the industrial robot. A flow chart of a series of processes for forcing a stop action. Specifically, FIG. 4 shows the opening and closing of the solenoid valve 10 described above to allow compressed air to flow in. The beginning of the cooling action caused by the stop. Stop and the forced termination method of the industrial robot 1.

As shown in FIG. 4, after the operation of the industrial robot 1 is started, in step F1, the second temperature detecting sensor 13 detects whether the ambient temperature of the arm driving motor 6 has reached the industrial robot stopping temperature (for example, 80 ° C). ). As long as the second temperature detecting sensor 13 detects that the ambient temperature of the arm driving motor 6 is less than 80 ° C (as long as the second temperature detecting sensor 13 is OFF), the process proceeds to step F2. In step F2, the first temperature detecting sensor 12 detects whether or not the ambient temperature of the arm driving motor 6 has reached the cooling start necessary temperature (for example, 40 ° C). Here, as long as the first temperature detecting sensor 12 detects that the ambient temperature of the arm driving motor 6 is less than 40 ° C, the first temperature detecting sensor 12 is kept in an OFF state and is not cooled (the solenoid valve 10 is not provided). Turns off and becomes "cooling stop" status). On the other hand, when the first temperature detecting sensor 12 detects that the ambient temperature of the arm driving motor 6 reaches 40 ° C, the electromagnetic valve 10 is opened, the compressed air starts to flow into the cooling device 9, and the arm driving motor 6 starts to cool (" Cooling starts") state).

Thereafter, the process returns to step F1, and as long as the second temperature detecting sensor 13 detects that the ambient temperature of the arm driving motor 6 is less than 80 ° C, step F1 → step F2 → cooling start (continue) or cooling stop (stop state) is repeatedly executed. Continue) → Step F1.... In the case where the ambient temperature of the arm drive motor 6 is detected to be 40° C. or lower by the first temperature detecting sensor 12, the electromagnetic valve 10 is closed and the flow of the compressed air is cut off (the “cooling stop” state). On the other hand, the second temperature detecting sensor 13 detects that the ambient temperature of the arm driving motor 6 is 80 ° C in the step F1 in spite of the above-described cooling operation or the failure of the solenoid valve 10, etc. (Industrial robot) When the temperature is stopped, the second temperature detecting sensor 13 is also turned "ON", and the error information is output from the software of the industrial robot 1, so that the industrial robot 1 is forcibly stopped.

The rotation of the arm portion 3 by the arm drive motor 6 will be described below. Fig. 5 is a schematic cross-sectional view showing the motor housing chamber and the arm portion of Fig. 2 in an enlarged manner. In FIG. 5, the same symbols are used for the same elements as those in FIGS. 1, 2, and 3. In the schematic cross-sectional view of FIG. 5, the description of the specific elements other than the turning mechanism of the arm driving motor 6 and the first arm 3a (arm portion 3) is appropriately omitted for the purpose of facilitating understanding of the characteristic structure of the drawing.

As shown in FIG. 5, the timing pulley 17 is connected to the arm drive motor 6. On the other hand, the timing pulley 18 is also connected to the arm rotating shaft 21 via the arm driving speed reducer 20. The arm rotating shaft 21, the arm driving speed reducer 20, and the timing pulley 18 constitute a joint portion of the arm portion 3 (first arm 3a). Further, on the timing pulley 17 and the timing pulley 18, a timing belt 19 for transmitting the power of the arm drive motor 6 to the arm rotation shaft 21 side is provided.

The rotation of the arm portion 3 (the first arm 3a) is performed in the following manner. In other words, the driving force corresponding to the rotation of the arm driving motor 6 is transmitted to the timing pulley 18 and the arm driving speed reducer 20 via the timing pulley 17 and the timing belt 19. Since the arm drive speed reducer 20 is directly connected to the arm shaft 21, the above-described driving force is decelerated at a specific reduction ratio of the arm drive speed reducer 20, and then transmitted to the arm shaft 21. As a result, the arm shaft 21 is rotated. Thereby, the rotational force of the arm drive motor 6 is transmitted to the arm portion 3, and the arm portion 3 performs the intended operation.

Further, since the arm rotating shaft 21 is rotatable, a gap is formed between the arm rotating shaft 21 and the outer wall of the motor housing chamber 4 accordingly. The bearing 22 is provided in the upper and lower portions of the gap, but in order to prevent air from leaking into the vacuum chamber (not shown in FIG. 4) from the gap, the magnetic seal 24 is provided at a portion sandwiched by the bearing 22. Thereby, the sealing property between the arm rotating shaft 21 and the motor housing chamber 4 can be ensured, so that the manufacturing of the vacuum chamber is not hindered.

(Main effects of this embodiment)

According to the industrial robot 1 of the present embodiment, it is easy to find the following effects: (1) for example, it is easy to reduce drive connection components such as a shaft, a gear, and a pulley; and (2) the arm portion 3 and the arm as a drive source can be used. Since the drive motor 6 is disposed close to each other, the operation accuracy of the arm portion 3 can be improved, (3) the rigidity of the drive system is improved, and the speed is easily increased. (4) When the drive source is used as the arm drive motor 6, the number of connection parts is small. Inertia is small, easy to use a small motor, so the cost can be kept low; (5) The member for connecting the motor housing chamber 4 and other parts is only easy to be wiring, easy to disassemble and easy to carry out bellows, magnetic Replacement of regularly replaced parts such as seals; (6) Since the arm drive motor 6 has a high degree of freedom of arrangement, it is easy to easily realize various operation mechanisms of the arm unit 3.

[Second embodiment]

Next, other preferred embodiments of the industrial robot of the present invention will be described. Preferably, the industrial robot of the present invention has a plurality of arm portions, and each of the arm portions has a drive source (more specifically, an arm drive motor) and a local cooling mechanism. Fig. 6 shows a specific example of the industrial robot.

Fig. 6 shows a schematic plan view and a schematic side view of an industrial robot having two arms (two arms) type. Specifically, FIG. 6( a ) shows a schematic plan view of the dual-arm type industrial robot. Fig. 6(b) is a schematic side view showing the dual-arm type industrial robot of Fig. 6(a). In FIG. 6, the same elements as those in FIGS. 1, 2, 3, and 5 are denoted by the same reference numerals.

As shown in FIG. 6(a), the industrial robot 30 has two arm portions 3. Further, each arm has an arm driving motor (not shown in Fig. 5). Corresponding to each of the arm driving motors, two motor housing portions 5 accommodating the arm driving motors are provided in the motor housing chamber 4. With the above-described double-arm structure, a flat member such as glass can be taken out from the processing apparatus in a short time.

[Third embodiment]

In the first embodiment and the second embodiment described above, the rotatable type is used as the arm portion. However, in the present invention, the arm portion is not limited to the rotatable type. For example, a reciprocating sliding type can also be used as the arm portion. In the present embodiment, the sliding type arm portion is used. Specifically, in the present embodiment, the sliding type arm portion and the storage chamber for accommodating the driving source for reciprocating the arm portion are provided in the vacuum chamber.

An example of an industrial robot using a sliding arm portion, that is, a first arm having a workpiece holding portion for holding a workpiece and reciprocating, and a first arm connected to the first arm The second arm that reciprocates in the same direction of one arm constitutes the form of the arm. Further, the reciprocating motion of the arm portion is performed by providing a control device that prioritizes the operation of the first arm and moves the arm portion to a specific coordinate position. Further, as long as the driving source (for example, the motor) that moves the arm portion can be partially cooled, the high-precision operation of the arm portion can be ensured, and the driving source can be efficiently and reliably cooled.

The configuration other than the above-described arm portion may be basically the same as that of the first embodiment and the second embodiment described above, and the description thereof will be omitted.

[other]

The present invention has been described above using specific embodiments, but the present invention is not limited to the above embodiments. There are various application examples of the present invention, and several of them will be described below.

For example, the industrial robot of the present invention can also be used as a device for semiconductor manufacturing. Specifically, it can be used as an industrial robot that transports a semiconductor substrate. In the manufacturing process of the semiconductor, a film such as a ruthenium film is formed on the substrate by CVD (Chemical Vapor Deposition) treatment. Therefore, the temperature inside the vacuum chamber is liable to rise, so the use of the local cooling mechanism of the present invention is significant.

Further, in the above embodiment, an aluminum tube is used as the cooling means constituting the local cooling means. This system takes into account the thermal conductivity, rigidity and processing characteristics of aluminum. However, when the local cooling mechanism of the present invention is formed by a heat pipe, the raw material of the heat pipe is not limited to aluminum, and copper, brass, or the like may be used as a raw material other than aluminum.

Further, although the local cooling mechanism has been described as an example in which cooling air is used for cooling in the above embodiment, the cooling medium is not limited to air, and may be water or an antifreezing liquid. Further, as for the cooling device, not only the cooling device for spirally winding the heat pipe but also various types of cooling devices can be used. For example, it is also possible to use a cooling device in which a casing is added to the shape of a driving source (for example, a motor), such as a water-cooled engine.

[Industrial availability]

The industrial robot of the present invention is a very effective industrial robot, for example, in a decompression environment such as a liquid crystal manufacturing apparatus and a semiconductor manufacturing apparatus.

1, 30. . . Industrial robot

2. . . Pedestal

3. . . Arm

3a. . . First arm

3b. . . Second arm

3c. . . hand

3c1, 3c2, 3c3. . . Support column

4. . . Motor storage room

5. . . Motor storage part

5r. . . Top plate of motor storage part

6. . . Arm drive motor

6t. . . Upper end of arm drive motor

7. . . Vacuum chamber

8. . . Aluminum tube

9. . . Cooling device

10. . . The electromagnetic valve

11. . . Pedestal

12, 13. . . First and second temperature detecting sensors

14. . . Hollow shaft

15, 22. . . Bearing

16. . . Bellows

17, 18. . . Pulley

19. . . Timing belt

20. . . Arm drive reducer

twenty one. . . Arm shaft

23, 24. . . Magnetic seal

25. . . Resin tube

Fig. 1 is a schematic plan view showing an industrial robot according to a first embodiment of the present invention.

Fig. 2 is a schematic cross-sectional view showing the AA' plane of Fig. 1.

Fig. 3 is a schematic cross-sectional view showing an enlarged view of a motor housing chamber (motor housing portion).

4 shows an execution/stop control operation for performing a cooling operation in response to the detection of the cooling start temperature by the first temperature detecting sensor 12, and an industrial robot in which the second temperature detecting sensor 13 detects the stop temperature of the industrial robot. A flow chart of a series of processes for forcing a stop action.

Fig. 5 is a schematic cross-sectional view showing the motor housing chamber and the arm portion enlarged in Fig. 2;

6(a) and 6(b) are schematic plan views and schematic side views of an industrial robot having two arms (two arms) type.

3. . . Arm

5. . . Motor storage part

5r. . . Top plate of motor storage part

6. . . Arm drive motor

6t. . . Upper end of arm drive motor

8. . . Aluminum tube

9. . . Cooling device

9a. . . Upper end

9b. . . Lower end

11. . . Pedestal

12, 13. . . First and second temperature detecting sensors

G. . . distance

L. . . height

Claims (11)

An industrial robot comprising: an arm portion; and a storage chamber disposed in the vicinity of the arm portion and accommodating a drive source for operating the arm portion; wherein the arm portion and the storage chamber are disposed in a cavity under a reduced pressure environment a cooling device including a partial cooling mechanism for cooling the driving source; the local cooling mechanism includes a cooling device disposed around the driving source and circulating compressed air for cooling to a ceiling side of the storage chamber; The apparatus is disposed such that one end of the ceiling side is open, and the one end causes the compressed air to flow out into the storage compartment. An industrial robot according to claim 1, comprising a plurality of said arm portions, and each of said arm portions has a drive source and a local cooling mechanism. The industrial robot according to claim 1 or 2, wherein the cooling device is configured by winding a conduit around the drive source. The industrial robot according to claim 3, wherein the conduit is a heat pipe; and one end side of the heat pipe is opened in the storage chamber such that compressed air flowing through the heat pipe flows out into the storage chamber. The industrial robot of claim 3, wherein the local cooling mechanism has a temperature detecting sensor, and the industrial robot has a control mechanism, and the control mechanism is at the temperature When the temperature detecting sensor detects that the temperature around the driving source has reached the cooling start necessary temperature, the compressed air starts to circulate in the cooling device, and the temperature detecting sensor detects that the temperature around the driving source has reached the industrial robot stop. At the time of temperature, the operation of the above-described industrial robot is stopped. The industrial robot of claim 4, wherein the local cooling mechanism has a temperature detecting sensor, and the industrial robot has a control mechanism, wherein the temperature detecting sensor detects that the temperature around the driving source has reached a cooling start At the time of temperature, the compressed air starts to flow in the cooling device, and when the temperature detecting sensor detects that the temperature around the driving source has reached the industrial robot stopping temperature, the operation of the industrial robot is stopped. An industrial robot according to claim 1, wherein a CVD (Chemical Vapor Deposition) process or an etching process is performed in a chamber in the above-described reduced pressure environment. An industrial robot according to claim 1, wherein the arm portion is a rotatable arm portion or a reciprocable arm portion. The industrial robot according to claim 4, wherein the compressed air flows spirally upward through the lower end of the heat pipe and inside the heat pipe, and then flows out from the upper end of the heat pipe into the motor housing chamber. An industrial robot according to claim 5, wherein said temperature detecting sensor comprises means for detecting said cooling a first temperature detecting sensor for the indoor cooling start temperature, and a second temperature detecting sensor for detecting the stopping temperature of the industrial robot. The industrial robot of claim 6, wherein the temperature detecting sensor includes a first temperature detecting sensor for detecting a cooling start temperature of the storage chamber, and a detecting temperature of the industrial robot Two temperature detection sensor.