KR20200028139A - Magnet coupling type gate valve system - Google Patents

Abstract

The present invention relates to a magnet coupling type gate valve system for moving a door by using a magnetic force, which comprises: a valve housing in which a passage is formed; a door for opening and closing the passage; and a door movement device for moving the door toward the passage. The door movement device can comprise: an internal magnetic material installed in the valve housing and interlocked with the door; an external magnetic material installed outside the valve housing and corresponding to the internal magnetic material; and a magnetic material back-and-forth movement device installed outside the valve housing and configured to move the external magnetic material forwards and backwards so that the internal magnetic material can be moved by the magnetic force.

Description

{Magnet coupling type gate valve system}

The present invention relates to a magnetic coupling type gate valve system, and more particularly, to a magnetic coupling type gate valve system for moving a door using magnetic force.

In general, the chamber is an industrial facility facility used to manufacture advanced semiconductor devices, display devices, or other medical devices, such as semiconductor chips, wafers, LCD panels, and OLED panels, which require a vacuum or high-clean working environment. The gate valve attached to the chamber serves as a doorway for the chamber, and is a type of device that opens a door to move a semiconductor chip or wafer into the chamber space and closes the door again to maintain an airtight state in the chamber.

Meanwhile, such a conventional gate valve generally uses a motor or a cylinder as a driving device, and uses a bellows tube or an O-ring to keep the internal environment of the gate valve clean from driving devices such as a motor or a cylinder. Although the airtightness was maintained, these bellows pipes and O-rings also had problems that foreign substances could be generated due to aging of the components after long-term use.

As a conventional technique to solve this, as disclosed in Japanese Patent Application No. 1993-350099, a permanent magnet is installed inside the gate valve, and the door is moved up and down in a non-contact manner using an electromagnet corresponding thereto. Technology that can be developed has been developed.

However, such a conventional non-contact door moving technology using a permanent magnet and an electromagnet is difficult to generate a strong magnetic force due to a relatively low magnetic force efficiency of the electromagnet compared to the permanent magnet, and the electromagnet is required for parts such as a core, coil, power supply or control unit. There were problems that were not suitable for the installation space of a very narrow gate valve between the chamber and the chamber because the installation cost is increased because the number is too large and the volume occupied is also large.

The idea of the present invention is to solve these problems, it is possible to easily increase the magnetic force by increasing the number and arrangement of permanent magnets, the number of parts or the electromagnet control process is unnecessary, greatly reducing the installation cost and installation space There is a magnet coupling type gate valve that increases space utilization by using the side and top surfaces of the valve housing and greatly improves the internal cleanliness of the valve housing by using the magnet coupling not only in the elevation operation but also in the door opening and closing operation. In providing a system. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

A magnet coupling type gate valve system according to the spirit of the present invention for solving the above problems includes: a valve housing in which a passage is formed; A door that opens and closes the passage; And a door moving device for moving the door in the passage direction, wherein the door moving device includes: an internal magnetic body installed in the valve housing and interlocked with the door; An external magnetic body installed outside the valve housing and corresponding to the internal magnetic body; And it is installed on the outside of the valve housing, the magnetic body forward and backward device for moving the external magnetic body forward and backward so that the internal magnetic body can be moved by a magnetic force.

Further, according to the present invention, the door may be an L motion door that is primarily moved in the first direction from the standby position to the passage opposite position, and is secondly moved in the second direction from the passage opposite position to the passage closed position. .

Further, according to the present invention, in the door moving device, a cylinder operated by a working fluid line may be installed between the first moving head portion and the door so that the door can be moved secondarily.

In addition, according to the present invention, the door moving device further comprises a magnetic body rotating device for the door to move the secondary; the magnetic body rotating device is connected to a pinion gear engaged with a rack gear installed in the door An external rotating magnetic body which is magnet-coupled with the internal rotating magnetic body to rotate the internal rotating magnetic body, and is installed outside the valve housing; And a rotating actuator that rotates the external rotating magnetic body.

In addition, according to the present invention, a door replacement area in which a plurality of doors can wait is formed on one side of the valve housing, and the door is detachably installed from the head so that the door can be replaced inside the valve housing. You can.

In addition, according to the present invention, the magnetic material forward and backward device includes a first magnetic material forward and backward device through which the door is primarily moved, and the first magnetic material forward and backward device comprises: a first in which the external magnetic material is installed. Movable table; A first guide member formed on the first surface so that the first movable table may linearly move along a first surface of the valve housing; And a first forward-backward actuator that moves the first movable platform forward and backward so that the door can be moved first.

In addition, according to the present invention, the magnetic material forward and backward device includes a second magnetic material forward and backward device for the door to move the secondary; the second magnetic material forward and backward device is a second in which the external magnetic material is installed Movable table; A second guide member formed on the second surface so that the second movable table may linearly move along the second surface of the valve housing; And a second forward and backward actuator that moves the second movable platform forward and backward so that the door can be moved to the secondary.

In addition, according to the present invention, the door moving device, the door guide device is installed inside the valve housing, guiding the door or the head portion where the door is installed; may further include.

In addition, according to the present invention, the door guide device comprises: a first door guide device for first guiding the door in a first direction from a standby position to a position opposite the passage; And a second door guide device for secondarily guiding the door from the position opposite the passage to the closed position of the passage in a second direction.

Further, according to the present invention, the door moving device may further include a return magnetic body capable of returning the door to a ready position when the inner magnetic body is moved away from the outer magnetic body.

Also, according to the present invention, the inner magnetic body or the outer magnetic body may be a permanent magnet array in which a plurality of M rows are arranged in N rows and N columns so as to strengthen the magnetic force.

In addition, the magnet coupling type gate valve system according to the present invention may further include an identification device capable of identifying identification information of the door so that operation is allowed only when matching identification information.

According to some embodiments of the present invention made as described above, the permanent magnet and the permanent magnet can be magnetically coupled to transfer the door in a non-contact manner, and at the same time, the number and arrangement of the permanent magnets can be increased to easily increase the magnetic force. , No need for the number of parts or the electromagnet control process, which can greatly reduce the equipment cost and installation space, increase the space utilization by using the side and top surfaces of the valve housing, and open and close as well as the operation of elevating (primary movement) Secondary movement) also has the effect of greatly improving the internal cleanliness of the valve housing by using a magnet coupling. Of course, the scope of the present invention is not limited by these effects.

1 is a side cross-sectional view showing a magnet coupling type gate valve system according to some embodiments of the present invention.
FIG. 2 is a front view showing the door of the magnet coupling type gate valve system of FIG. 1.
3 is a side cross-sectional view illustrating a door and magnetic rotating device of a magnet coupling type gate valve system according to some other embodiments of the present invention.
FIG. 4 is a perspective view showing a magnetic body rotating device of the magnet coupling type gate valve system of FIG. 3.
5 is a side cross-sectional view showing a magnet coupling type gate valve system according to some other embodiments of the present invention.
6 is a side cross-sectional view showing a magnet coupling type gate valve system according to some other embodiments of the present invention.
7 is a side cross-sectional view showing a magnet coupling type gate valve system according to some other embodiments of the present invention.
8 is a flowchart illustrating an example of a door identification process of the magnet coupling type gate valve system of FIG. 7.
9 is a flowchart illustrating another example of a door identification process of the magnet coupling type gate valve system of FIG. 7.
10 is a side cross-sectional view showing a door closed state of a magnet coupling type gate valve system according to some other embodiments of the present invention.
FIG. 11 is a side cross-sectional view showing a door open state of the magnet coupling type gate valve system of FIG. 10.
12 is a front view showing the magnet coupling type gate valve system of FIG. 11;
FIG. 13 is a perspective view showing the magnet coupling type gate valve system of FIG. 10.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those of ordinary skill in the art, and the following embodiments can be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terminology used herein is used to describe a specific embodiment and is not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and / or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and / or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and / or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on the manufacturing technology and / or tolerance, deformations of the illustrated shape can be expected. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, the magnetic coupling type gate valve systems 100 to 600 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a side cross-sectional view showing a magnet coupling type gate valve system 100 according to some embodiments of the present invention, and FIG. 2 is a door 20 of the magnet coupling type gate valve system 100 of FIG. 1. It is a front view.

First, as shown in Figures 1 and 2, the magnet coupling type gate valve system 100 according to some embodiments of the present invention, the valve housing 10, the door 20 and the door moving device largely It may include (30).

For example, the valve housing 10 is a hollow box-shaped structure as a whole, and at least one passage 10a may be formed.

Here, the valve housing 10 has one or both sides of the passage 10a so that various objects such as a semiconductor chip, a wafer, an LCD panel, an OLED panel, and other high-tech semiconductor devices, display devices, and other medical devices can enter and exit. It may be a structure to be formed.

The valve housing 10 may support the door 20 and the door moving device 30 described above, and may be a structure having sufficient strength and durability to be connected to various chambers. However, the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and a wide variety of types and types of passages or valve housings may be applied.

In addition, for example, as shown in FIGS. 1 and 2, the door 20 is a valve body in which a sealing member S is installed to block the passage 10a, and the door 20 is It may be formed according to the shape of the passage 10a to correspond to the shape of the passage 10a. Here, the sealing member S may be a sealing member such as an O-ring or gasket for airtightness.

Such, the door 20 is shown for the purpose of understanding, and is not limited to the drawings, and can be applied in various ways, such as being installed in various numbers or additionally installing various sealing members, various joints, or hinge structures.

In addition, as shown in FIGS. 1 and 2, the door moving device 30 is a device for moving the door 20 in the passage direction, using magnetic force outside the valve housing 10. It may be a non-contact magnetic device capable of moving the door 20.

More specifically, for example, as shown in FIG. 1, the door moving device 30 is installed inside the valve housing 10 and interlocked with the internal magnetic body 31 interlocked with the door 20. , Installed on the outside of the valve housing 10, the outer magnetic body 32 corresponding to the inner magnetic body 31 and the outer side of the valve housing 10, the inner magnetic body 31 by magnetic force A magnetic body forward and backward device 33 for moving the external magnetic body 32 back and forth so as to be moved may be included.

At this time, the inner magnetic body 31 and the outer magnetic body 32 may be both super-strong permanent magnets in order to strengthen the magnetic force.

In addition, the inner magnetic body 31 and the outer magnetic body 32 may be applied with a permanent magnet array (MA) of FIG. 12, which will be described later, in which a plurality of M rows are arranged in N rows so as to enhance magnetic force.

Here, as shown in FIG. 1, the door 20 is first moved (lifting operation) in the first direction from the standby position to the passage opposite position, and in the second direction from the passage opposite position to the passage closing position. It may be a second motion (opening and closing operation) L motion door.

However, the door 20 is not necessarily limited to the L motion operation, and can be applied to a T motion operation in which two L motion doors are installed on both sides.

To this end, the door moving device 30 is connected to the working fluid line L between the head part H and the door 20 which is primarily moved so that the door 20 can be moved secondarily. A cylinder 34 operated by may be installed.

In addition, for example, as shown in Figure 1, the door moving device 30 is installed inside the valve housing 10, the door 20 or the head 20 is installed head portion (H) ), Which may further include a door guide device 40 for guiding, the door guide device 40 is a guide rod for first guiding the door 20 in a first direction from a standby position to a passage opposite position. Or a first door guide device 41 such as a rail.

Accordingly, as illustrated in FIG. 1, when the magnetic material forward / backward device 33 moves up and down the external magnetic material 32, the internal magnetic body 31 coupled with the magnet is magnetically driven to the first door guide device. While moving up and down along 41, the door 20 may be primarily moved (lifting operation).

Subsequently, as shown in FIG. 1, the door 20 is moved in the direction of the passage 10a by the cylinder 34 operated by the fluid pressure of the working fluid line L (opening and closing operation). ) While opening and closing the door 20.

Therefore, the inner magnetic body 31 also uses a super-strong permanent magnet, and the outer magnetic body 32 also uses a super-strong permanent magnet, so that the door 10 can be transferred in a non-contact manner with strong magnetic force at the same time. By increasing the number and arrangement of the permanent magnets, the magnetic force can be easily increased, and the number of parts or the electromagnet control process is unnecessary, thereby greatly reducing the facility cost and installation space, and using the side surface of the valve housing 10 Space utilization can be increased.

On the other hand, as shown in Figure 2, the door 20 may be moved secondary by four cylinders 34 operated simultaneously by the fluid pressure of the working fluid line (L). However, the number and shape of such cylinders are not necessarily limited to the drawings.

3 is a side cross-sectional view showing a door 20 and a magnetic body rotating device 35 of a magnet coupling type gate valve system 200 according to some other embodiments of the present invention, and FIG. 4 is a magnet coupling of FIG. 3 It is a perspective view showing the magnetic body rotating device 35 of the type gate valve system 200.

3 and 4, the magnet coupling type gate valve system 200 according to some other embodiments of the present invention, the door moving device 30, the door 20 is the 2 It may further include a magnetic body rotating device 35 for moving the vehicle (opening and closing operation).

3 and 4, the magnetic body rotating device 35 is an internal rotational magnetic body (M1) connected to a pinion gear (G2) meshing with a rack gear (G1) installed in the door (20). And, the inner rotating magnetic body (M1) and the magnet is coupled to rotate the inner rotating magnetic body (M1), the outer rotating magnetic body (M2) and the outer rotating type is installed on the outside of the valve housing (10) It may include a rotating actuator 351 for rotating the magnetic body (M2).

Therefore, the external rotating magnetic body M2 is also installed on the outside of the valve housing 10 as in the external magnetic body 22 described above, as shown in FIGS. 3 and 4, first, a motor, etc. When the external rotating magnetic body M2 is rotated forward or reverse by using the rotary actuator 351, the internal rotating magnetic body M1 is rotated or reverse rotated by magnetic force, and the internal rotating magnetic body ( While the pinion gear G2 rotated together with M1) is rotated forward or reverse, the door 20 may be secondly moved (open / closed) together with the rack gear G1.

Therefore, the space utilization is increased by using the side surfaces (the first surface) and the top surface (the second surface) of the valve housing 10, and the magnet is also used in the opening and closing (secondary movement) operation as well as the vertical movement (primary movement). Coupling can be used to significantly improve the internal cleanliness of the valve housing.

5 is a side cross-sectional view illustrating a magnet coupling type gate valve system 300 according to some other embodiments of the present invention.

As shown in FIG. 5, in the magnet coupling type gate valve system 300 according to some other embodiments of the present invention, a plurality of doors 20 may wait on one side of the valve housing 10. The door replacement area A is formed, and the door 20 may be detachably installed from the head portion H so that the door can be replaced inside the valve housing 10. Here, although not shown, a separate cover may be installed on the outside of the side or the front of the door replacement area (A).

Accordingly, when the life of the door 20 is reached, the door 20 is replaced without breaking the vacuum inside the valve housing 10 by replacing it with a new door 20 waiting in the door replacement area A can do. As a replacement method, a wide variety of methods such as a forced biting method or a sliding method can be applied.

6 is a side cross-sectional view illustrating a magnet coupling type gate valve system 400 according to some other embodiments of the present invention.

For example, as shown in Figure 6, the magnet coupling type gate valve system 400 according to some other embodiments of the present invention, the second directional movement device 50 or the head portion (H) The isolation member 60 may be further installed.

The isolation member 60 has a flat plate structure, and when the isolation member 60 is moved to the door replacement area A, the door replacement area A can be isolated.

More specifically, for example, as shown in Figure 6, the isolation member 60, the isolation plate is formed to correspond to the side of the protruding wall portion protruding horizontally in the shape of a ring inside the valve housing 10 ( 61).

That is, in the isolation member 60, the side surface of the isolation member 60 is in close contact with the side surface of the protruding wall portion W to isolate the door replacement area A.

At this time, while maintaining the overall vacuum of the valve housing 10, only the door replacement area (A) can release the vacuum so that the door (20) on the contact surface of the protrusion wall (W) or the isolation plate (61) A second sealing member S2 that is separate from the first sealing member S1 installed in may be installed. Here, the second sealing member S2 may be a sealing member such as an O-ring or gasket for airtightness.

More specifically, for example, as shown in Figure 6, the door replacement area (A), the first valve (V1) is installed, the inner vacuum line (71) connected to the housing vacuum area (B) and A second valve V2 is installed, and a vacuum release line 72 connected to an external atmospheric or clean air supply source can be connected.

Therefore, as illustrated in FIG. 6, after the isolation member 60 isolates the door replacement area A, the second valve V2 that receives the vacuum pressure release control signal by the control unit 70. When the vacuum release line 72 is opened, the vacuum pressure of the door replacement area A is released, and the cover C to be described later is opened to open the door C through the door replacement opening H. Can be replaced.

At this time, the door replacement area A is in an isolated state, and the housing vacuum area B can maintain a vacuum state.

Subsequently, as shown in FIG. 6, after the door 20 is replaced, the first valve V2 that covers the cover C and receives a vacuum pressure control signal by the control unit 70 is applied. When the vacuum release line 72 is closed, while the first valve V1 opens the internal vacuum line 71, the door replacement area A communicates with the housing vacuum area B. As a result, vacuum pressures of the same pressure may be formed, and through this, normal door opening and closing operation in a vacuum environment is possible.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

7 is a side cross-sectional view illustrating a magnet coupling type gate valve system 500 in accordance with some other embodiments of the present invention.

For example, as illustrated in FIG. 7, in the door replacement area A, a third valve V3 is installed and an external vacuum line 73 and a fourth valve V4 connected to an external pump PUMP. ) Is installed, and a vacuum release line 74 connected to an external atmospheric or clean air supply source may be connected.

Therefore, as illustrated in FIG. 7, after the isolation member 60 isolates the door replacement area A, the fourth valve V2 that receives the vacuum pressure release control signal by the control unit 70. When the vacuum release line 74 is opened, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door C through the door replacement opening H. Can be replaced.

At this time, the door replacement area A is in an isolated state, and the housing vacuum area B can maintain a vacuum state.

Subsequently, as illustrated in FIG. 7, after the door 20 is replaced, the fourth valve V4 that covers the cover C and receives a vacuum pressure control signal by the control unit 70 is applied. When the vacuum release line 74 is closed, while the third valve V3 opens the external vacuum line 71, the door replacement area A is vacuumed by the pump PUMP. This can be formed, and through this, normal door opening and closing operation in a vacuum environment is possible.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

In addition, although not shown, the door replacement area A may be provided with various connection lines, such as an inert gas supply line supplying inert gas from an inert gas supply source, and a clean air supply line supplying clean air from a clean air supply source. have.

Accordingly, the door replacement area A may be selectively connected to the inside or the outside to form a vacuum, or an inert gas such as nitrogen gas or clean air may be supplied. In addition, various pressure gauges, thermometers, temperature control devices such as heaters and cooling devices, etc. may be additionally installed.

In addition, for example, as shown in FIG. 7, a door replacement opening H is formed in the valve housing 10 corresponding to the door replacement area A, and a cover is provided in the door replacement opening H (C) can be installed. In addition, various types of openings H may be formed on all surfaces of the valve housing 10 to facilitate replacement of the door 20.

Meanwhile, the door 20 may be detachably installed using a fixture or jig such as a bolt, a nut, or a screw. In addition, various fastening doors, such as, for example, an interference engagement groove, an interference engagement protrusion, a snap button, or a magnet, may be applied.

In addition, the cover (C) may also be applied to various types of covers such as a lid, a foldable door, a cap, a shell, etc., in which various O-rings are installed and fixed detachably by a fastener.

8 is a flowchart illustrating an example of a door identification process of the magnet coupling type gate valve system 500 of FIG. 7.

7 and 8, the magnet coupling type gate valve system 500 of the present invention according to the present invention can identify the identification information of the door so that operation is allowed only when matching identification information. As it may further include an identification device, more specifically, for example, as illustrated in FIG. 7, the identification device may recognize an RFID tag (RT) installed in the door 20. When the identification information is received from the RFID sensor RS and the RFID sensor RS installed in a portion corresponding to the valve housing 10 or the RFID tag RT, normal operation of the equipment is allowed only when matching the identification information. , Otherwise, it may be an RFID identification control unit 80 to stop the operation of the equipment.

Therefore, as illustrated in FIG. 8, when the sealing plate SP of the door 20 is replaced, when the RFID sensor RS of the identification device recognizes the RFID tag RT and detects identification information ( S11), if the RFID identification control unit 80 determines whether to match (S12), if it is matched, normal operation is allowed or replacement of the door 20 is allowed (S13), and if not, operation is performed An improper command or a determination that the door 20 cannot be replaced may be made.

Therefore, it is possible to replace only the genuine door 20 that has been officially given identification information, thereby increasing the safety of the equipment, and to prevent malfunction or illegal use in advance.

9 is a flowchart illustrating another example of a door identification process of the magnet coupling type gate valve system 500 of FIG. 7.

7 to 9, more specifically, for example, when starting the exchange processor, the door replacement area A is sealed, and the door replacement area A is switched to a standby state in vacuum, When exchanging the door by opening the cover C, if the RFID sensor RS recognizes the RFID tag RT as genuine, the cover C of the door replacement area A is closed. Thereafter, the door replacement area A is converted into a vacuum to complete a normal exchange processor, or when it is not determined to be genuine, a visual or audible non-genuine error message is output, and the door replacement area A is atmospheric pressure. Abnormal operation can be terminated in a state. However, it is not necessarily limited to this.

10 is a side cross-sectional view showing a door closed state of a magnet coupling type gate valve system 600 according to some other embodiments of the present invention, and FIG. 11 is a magnet coupling type gate valve system 600 of FIG. 10 12 is a front sectional view showing the door open state, FIG. 12 is a front view showing the magnet coupling type gate valve system 600 of FIG. 11, and FIG. 13 is a perspective view showing the magnet coupling type gate valve system 600 of FIG. to be.

10 to 13, the magnetic material forward and backward device 33 of the magnet coupling type gate valve system 600 according to some other embodiments of the present invention, the door 20 is the 1 The first magnetic material reversing device 33-1 for moving the vehicle and the magnetic material reversing device 33 may include a second magnetic material reversing device 33-2 for the door 20 to move the secondary. You can.

More specifically, for example, as illustrated in FIGS. 10 to 13, the first magnetic body forward and backward device 33-1 includes a first movable table 33-11 in which the external magnetic body 32 is installed. , The first guide member (33-12) and the door (20) formed on the first surface so that the first movable table (33-11) can linearly move along the first surface of the valve housing (10) It may include a first forward and backward actuator (33-13) for moving the first movable base (33-11) so that the first movement.

In addition, for example, as shown in FIGS. 10 to 13, the second magnetic body forward and backward device 33-2 includes a second movable table 33-21 in which the external magnetic body 32 is installed, and the The second guide member 33-22 and the door 20 formed on the second surface so that the second movable table 33-21 can linearly move along the second surface of the valve housing 10 are the It may include a second forward and backward actuator (33-23) for moving the second movable base (33-21) forward and backward so that it can be moved secondary.

Here, as shown in Figure 10, the door moving device 30 is installed inside the valve housing 10, the door 20 or the head portion 20 is installed head (H) is installed Further comprising a guide door guide device 40, the door guide device 40, the first door guide device for guiding the door 20 in the first direction from the standby position to the opposite position of the passage (first door guide device) 41) and a second door guiding device 42 for secondarily guiding the door 20 from the position opposite the passage to the passage closing position in the second direction.

Therefore, as shown in FIG. 10, in the state in which the door 20 closes the passage 10a, the first magnetic material forward and backward device 33-1 is in an elevated state, and the second magnetic material The forward-backward device 33-2 may be in an advanced state.

Subsequently, as illustrated in FIG. 11, when the second magnetic material forward / backward device 33-2 reverses the external magnetic material 32, the internal magnetic material 31 installed in the upper extension of the door 20 is Can be reversed.

Subsequently, when the first magnetic material forward / backward device 33-1 descends the external magnetic material 32, the internal magnetic body 31 coupled with the magnet is along the first door guide device 41 by magnetic force. The door 20 may be moved while descending.

Here, the door moving device 30 further includes a return magnetic body 36 capable of returning the door 20 to a ready position when the inner magnetic body 31 is moved away from the outer magnetic body 32. The internal magnetic body 31 installed in the door 20 may be smoothly returned.

Meanwhile, as illustrated in FIG. 12, the inner magnetic body 31 or the outer magnetic body 32 may be a permanent magnet array MA in which a plurality of M rows are arranged in N rows and N columns to enhance magnetic force.

Therefore, the inner magnetic body 31, which is a permanent magnet, and the outer magnetic body 32, which is also a permanent magnet, can be magnetically coupled with the wall of the valve housing 10 therebetween to transfer the door 20 in a non-contact manner. At the same time, it is possible to easily increase the magnetic force by increasing the number and arrangement of permanent magnets.

In addition, as shown in FIG. 13, since side and top surfaces of the valve housing 10 can be utilized, facility cost and installation space can be greatly reduced, and space utilization can be improved.

Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: valve housing
10a: passage
20: door
S: sealing member
30: door shifter
31: internal magnetic body
32: external magnetic material
33: magnetic material forward and backward device
33-1: First magnetic material forward and backward device
33-11: 1st movable platform
33-12: First guide member
33-13: 1st forward and backward actuator
33-2: Second magnetic material forward and backward device
33-21: 2nd movable platform
33-22: Second guide member
33-23: 2nd forward and backward actuator
H: Head
L: working fluid line
34: cylinder
35: magnetic material rotating device
G1: Rack gear
G2: Pinion gear
M1: internal rotating magnetic body
M2: External rotating magnetic body
351: rotary actuator
A: Door replacement area
H: Head
40: door guide device
41: first door guide device
42: second door guide device
36: return magnetic body
MA: permanent magnet array
100-600: Magnetic coupling type gate valve system

Claims (12)

A valve housing in which a passage is formed;
A door that opens and closes the passage; And
Includes; a door moving device for moving the door in the passage direction,
The door moving device,
An internal magnetic body installed inside the valve housing and interlocking with the door;
An external magnetic body installed outside the valve housing and corresponding to the internal magnetic body; And
A magnetic body forward and backward device installed on the outside of the valve housing and moving the external magnetic body back and forth so that the internal magnetic body can be moved by magnetic force;
Including, a magnetic coupling type gate valve system. According to claim 1,
The door is a magnet coupling type gate valve system, which is an L motion door that is primarily moved in a first direction from a standby position to a passage opposite position, and is secondly moved in a second direction from the passage opposite position to a passage closed position. According to claim 2,
The door moving device is a magnet coupling type gate valve system in which a cylinder operated by a working fluid line is installed between the head part and the door that is primarily moved so that the door can be secondly moved. The method of claim 3,
The door moving device further comprises a magnetic body rotating device for the door to move the secondary;
The magnetic material rotating device,
An external rotating magnetic body which is magnet-coupled with an internal rotating magnetic body connected to a pinion gear meshed with the rack gear installed in the door to rotate the internal rotating magnetic body, and is installed outside the valve housing; And
A rotating actuator rotating the external rotating magnetic body;
Including, a magnetic coupling type gate valve system. According to claim 1,
A magnet coupling type gate valve is formed on one side of the valve housing to form a door replacement area in which a plurality of doors can wait, and the door is detachably installed from the head so that the door can be replaced inside the valve housing. system. According to claim 2,
The magnetic material forward and backward device includes a first magnetic material forward and backward device for the door to move the primary.
The first magnetic material forward and backward device,
A first movable table on which the external magnetic body is installed;
A first guide member formed on the first surface so that the first movable table may linearly move along a first surface of the valve housing; And
A first forward and backward actuator for moving the first movable platform forward and backward so that the door can be moved first;
Including, a magnetic coupling type gate valve system. The method of claim 6,
The magnetic material forward and backward device includes a second magnetic material forward and backward device for the door to move the secondary.
The second magnetic material forward and backward device,
A second movable table on which the external magnetic body is installed;
A second guide member formed on the second surface so that the second movable table may linearly move along the second surface of the valve housing; And
A second forward and backward actuator for moving the second movable table forward and backward so that the door can be moved to the secondary;
Including, a magnetic coupling type gate valve system. According to claim 1,
The door moving device,
A door guide device installed inside the valve housing and guiding the door or a head part in which the door is installed;
Further comprising, a magnet coupling type gate valve system. The method of claim 8,
The door guide device,
A first door guiding device for guiding the door in a first direction from a standby position to a position opposite the passage; And
A second door guide device for secondarily guiding the door in a second direction from the passage facing position to the passage closing position;
Including, a magnetic coupling type gate valve system. According to claim 1,
The door moving device,
A return magnetic body capable of returning the door to the ready position when the inner magnetic body is moved away from the outer magnetic body;
Further comprising, a magnet coupling type gate valve system. According to claim 1,
The inner magnetic body or the outer magnetic body is a magnet coupling type gate valve system, wherein a plurality of permanent magnet arrays are arranged in M rows and N columns to enhance magnetic force. According to claim 1,
An identification device capable of identifying identification information of the door so that operation is allowed only when matching identification information;
Further comprising, a magnet coupling type gate valve system.

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