KR101099571B1

KR101099571B1 - Vacuum gate valve

Info

Publication number: KR101099571B1
Application number: KR20100004442A
Authority: KR
Inventors: 김배진
Original assignee: 프리시스 주식회사
Priority date: 2010-01-18
Filing date: 2010-01-18
Publication date: 2011-12-28
Also published as: KR20110084729A

Abstract

The present invention relates to a vacuum gate valve, the vacuum gate valve according to a preferred embodiment of the present invention, the main fluid passage 110 connected to the process chamber and the vacuum pump is formed with both sides open, the inner sidewall The guide rail 120 is provided up and down along the length direction, the body 100 is formed therein the slide space 130; And, coupled to the lower end of the body 100, the cylinder 201, and A first having a piston 202 installed inside the cylinder 201 and an actuating rod 203 connected to the piston 202 to be operated up and down by compressed air flowing into the cylinder 201. An actuator 200; and a first flange 300 installed at one opening of the main fluid passage 100 and connected to the vacuum pump; and a process chamber installed at the other opening of the main fluid passage 100. A second flange 400 connected to the second flange 400 and installed on the first flange 300. A second actuator 310 which is advanced back and forth according to the inflow of compressed air; and a link member 500 connected to one side of the operation rod 203; and connected to the other side of the link member 500, A roller 610 is provided to operate in the slide space 130 along the guide rail 120, and enters between the first flange 300 and the second flange 400 so that the second actuator 310 of the second actuator 310 can be operated. Blade 600 for the main fluid passage 110 is sealed or open in accordance with the forward and backward movement; and the decompression formed on the second flange 400, the main fluid passage 110 is in communication with the interior of the body 100 A through-hole 700; and a check valve 810 installed in the reduced-pressure through-hole 700 to allow passage of fluid only from the inside of the body 100 to the main fluid passage 110; And a decompression room 800 in which the check valve is accommodated and in communication with the decompression hole.
According to the vacuum gate valve according to the present invention as described above, when the blade for sealing the process chamber in the standby state and the vacuum pump in the vacuum state, by controlling the pressure generated in the main fluid passage to reduce the amount of impact applied to the body. This can improve durability and reduce the amount of waste gas flowing into the body. Therefore, replacement or malfunction by the powder contained in the waste gas can be reduced compared to the conventional vacuum gate valve, which can significantly reduce the cost of maintenance. There are advantages to it.

Description

Vacuum gate valve

The present invention relates to a vacuum gate valve, and when the blade for sealing the process chamber in the standby state and the vacuum pump in the vacuum state, by controlling the pressure generated in the main fluid passage can reduce the amount of impact applied to the body durability Not only can this be improved, but the amount of waste gas introduced into the body can be reduced, so that replacement or malfunction by powder contained in the waste gas can be reduced compared to the conventional vacuum gate valve, which can dramatically reduce the cost of maintenance. It relates to a gate valve.

In general, since semiconductors require high precision, high cleanliness and special manufacturing techniques are required. For this reason, the semiconductor device is manufactured in a vacuum state that can completely block the contact of foreign matter contained in the air.

Therefore, the vacuum working area of the semiconductor manufacturing apparatus and the airtight technology also have a great influence on the quality of semiconductor products.

The semiconductor device manufacturing apparatus includes an exhaust pump and a gas processor for neutralizing the fluid gas in order to exhaust the fluid gas in the process chamber.

1 is a partial schematic view of such a semiconductor device manufacturing apparatus.

Between the process chamber 10 and the vacuum pump 20, a throttle valve 12 for adjusting the amount of exhaust gas and a gate valve 14 for opening and closing the passage of the exhaust gas are provided. In addition, a gate valve 40 is provided between the process chamber 10 and the vacuum pump 20 or between the vacuum pump 20 and the gas processor 30 to temporarily shut off the line.

The gate valve 40 serves to close some lines so that the lines can be checked while the lines are in operation.

One example conventionally used as such a gate valve is described.

Figure 2 is a plan view of a conventional gate valve, Figure 3 is a side cross-sectional view of the gate valve shown in FIG.

The gate valve 40 shown in this figure is of the main body portion 50 having a through hole 52 connected to each of the connection pipes 22 and 32 connected to the process chamber 10 and the vacuum pump 20 by flanged joints. The main body part is reciprocally slid by the slider part 60 extended to one side, the cylinder 70 provided in the opposite part of the main body part 50 of this slider part 60, and the drive shaft 72 connected with this cylinder. It consists of a blocking plate 80 for opening and closing the through hole 52 of 50).

The blocking plate 80 is provided with a groove along an edge thereof, and the groove 82 is provided with an o-ring 84 for sealing the body part.

However, in the conventional gate valve as described above, the powder contained in the air, which was in the vacuum state, is introduced into the main body by the difference in the pressure generated when the barrier plate is opened to switch from the vacuum state to the standby state. When stacked inside the main body, the opening and closing of the blocking plate is not made accurately, and eventually there was a fatal problem that impossible to maintain the vacuum state.

The present invention has been made to solve the above-described problems, an object of the present invention is to adjust the pressure generated in the main fluid passage during the opening of the blade to seal the process chamber and the vacuum pump in a vacuum state of the interior of the body Since the amount of waste gas introduced into the gas can be reduced, replacement or malfunction by the powder contained in the waste gas is reduced than that of the conventional vacuum gate valve, thereby significantly reducing the cost of maintenance and increasing the durability of the vacuum gate. To provide a valve.

In order to solve the above problems, the vacuum gate valve according to the present invention includes a main fluid passage 110 connected to a process chamber and a vacuum pump at both sides thereof, and a guide rail 120 is formed at an inner side wall thereof. It is provided up and down along the longitudinal direction, the body 100 is formed therein the slide space 130; And, coupled to the lower end of the body 100, the cylinder 201 and the inside of the cylinder 201 A first actuator 200 having a piston 202 installed therein and an operating rod 203 connected to the piston 202 and operated up and down by compressed air flowing into the cylinder 201; and A first flange 300 installed at one opening of the main fluid passage 100 and connected to the vacuum pump; and a second flange installed at the other opening of the main fluid passage 100 and connected to the process chamber. 400); And, installed on the first flange 300 in accordance with the inflow of compressed air A second actuator 310 which is moved back and forth; and a link member 500 having one side connected to the operation rod 203; and the guide rail 120 connected to the other side of the link member 500. A roller 610 is provided to operate in the slide space 130, and enters between the first flange 300 and the second flange 400 and moves forward and backward according to the movement of the second actuator 310. Blade 600 for the main fluid passage 110 to be sealed or open; And, Decompression through-hole 700 is formed in the second flange 400, provided to communicate with the interior of the body 100; And, A check valve 810 installed in the pressure reducing hole 700 to allow passage of fluid only from the inside of the body 100 to the main fluid passage 110; And a decompression room 800 in which the check valve is accommodated and in communication with the decompression hole.

In addition, the decompression through-hole (700) is provided between the pressure reducing through-hole (700) and the decompression room (800) so that air flowing from the inside of the body (100) is smoothly discharged into the main fluid passage (110). Rapid exhaust vent 900; characterized in that it further comprises.

In addition, the check valve 810 is installed in the decompression room 800, a cylindrical valve body 811 is provided with a vent hole 812 so that the decompression through-hole 700 and the body 100 is in communication. And; a clearance adjustment protrusion 813 protruding from an edge of a surface adjacent to the pressure reducing hole 700 among the outer circumferential surfaces of the valve body 811; and installed on the same surface as the clearance adjustment protrusion 813. Pin 814; And a clearance cover (815); and a check cover (816) installed on the pin (814) and selectively spaced apart from the valve body (811) by air flowing from the inside of the body (100). It features.

According to the present invention as described above, the durability of the impact on the body can be reduced by adjusting the pressure generated in the main fluid passage during opening of the blade sealing the process chamber in the standby state and the vacuum pump in the vacuum state Not only can this be improved, but the amount of waste gas introduced into the body can be reduced, so that replacement or malfunction by powder contained in the waste gas can be reduced than that of the conventional vacuum gate valve, thereby significantly reducing the cost of maintenance. There is this.

1 is a reference diagram illustrating a semiconductor device manufacturing apparatus;
2 is a plan view of a conventional vacuum gate valve,
3 is a side cross-sectional view of a conventional vacuum gate valve,
4 is an exploded perspective view of a vacuum gate valve according to a preferred embodiment of the present invention;
5 is a plan view of a vacuum gate valve according to a preferred embodiment of the present invention;
6 is a cross-sectional view taken along line AA of FIG.
7 is a detailed cross-sectional view of the check valve of the vacuum gate valve according to the preferred embodiment of the present invention;
8 is an exploded perspective view of a valve body of the check valve of the vacuum gate valve according to a preferred embodiment of the present invention in a partially cut state.

Hereinafter, with reference to the accompanying drawings, it will be described embodiments of the present invention. Like reference numerals in the drawings denote like elements. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the subject matter of the present invention.

Figure 4 is an exploded perspective view of a vacuum gate valve according to a preferred embodiment of the present invention, Figure 5 is a plan view of a vacuum gate valve according to a preferred embodiment of the present invention, Figure 6 is a cross-sectional view of Figure 5, Figure 7 of the present invention Detailed cross-sectional view of the check valve of the vacuum gate valve according to a preferred embodiment, Figure 8 is an exploded perspective view of the valve body of the check valve of the vacuum gate valve according to a preferred embodiment of the present invention partially cut.

Vacuum gate valve according to a preferred embodiment of the present invention, the body 100, the first actuator 200, the first flange 300, the second flange 400, the second actuator 310, the link member 500 ), A blade 600, a pressure reducing hole 700, a pressure reducing room 800 and a check valve 810, the main fluid passage 110, the guide rail 120, the slide space 130, the cylinder 201 ), Piston 202, actuating rod 203, roller 610, valve body 811, vent hole 812, play control projection 813, pin 814, play ring (815), check cover 816 and the rapid exhaust hole 900 may be further included.

Where the components of the present invention to be described later are installed in the body 100, such a body 100 is formed with a main fluid passage 110 to which a process chamber (not shown) and a vacuum pump (not shown) are connected. The main fluid passage 110 is manufactured so that both sides thereof are opened to communicate with each other.

In addition, the inner sidewall of the body 100, as shown in Figure 4, is provided with a guide rail 120 along the longitudinal direction, by the guide rail 120, the blade 600 to be described later is sliding, As described above, the sliding space 130 is provided inside the body 100 so that the blade 600 slides.

As shown in FIG. 4, the first actuator 200 is a member coupled to the lower end of the body 100. The first actuator 200 is a cylinder 201, as shown in FIG. 6. A piston 202 and an actuating rod 203 are included.

The piston 202 is a member actuated by compressed air provided and installed in the cylinder 201, and an actuating rod 203 is connected to the piston 202, and the actuating rod 203 is provided with a link member ( One side of 500 is connected.

The first flange 300 is a member installed in one of the openings of the main fluid passage 110 and is connected to a vacuum pump.

The first flange 300 as described above is provided with a second actuator 310 that serves to pressurize and seal the blade 600 to be described later while being advanced back and forth by the inflow of compressed air, thereby, the main fluid passage ( 110 allows the vacuum chamber in the standby state and the vacuum pump in the vacuum state to be spaces independent of each other.

The second actuator 310 is provided with a compressed air inlet through-hole 311 is provided with compressed air so that the sealing member is moved forward and backward, gasket 312 by the compressed air is provided to the compressed air inlet through hole (311) ) Is in close contact with the side surface of the blade 600 while moving forward and backward along the guide unit 313, accordingly, the blade 600 and the first flange 300, the blade 600 and the second flange 400 Is sealed.

The second flange 400 is a member installed at the other side of the main fluid passage 110, that is, the first flange 300, and is connected to a process chamber in which a semiconductor manufacturing process is performed.

The second flange 400 as described above has a decompression through-hole 700, a decompression room 800 communicated through the decompression through-hole 700, and the check valve 810 installed in the decompression room 800 Is provided, the check valve 810 is characterized in that the opening in the body 100, only the pressure in one direction of the second flange 400 or the main fluid passage 110, and vice versa.

As described above, the pressure reducing hole 700, the pressure reducing room 800, and the check valve 810 stand by the pressure difference between the atmospheric state and the vacuum state when the main fluid passage 110 is opened by the operation of the blade 600. Air in the state enters and controls the pressure.

Referring to the check valve 810 as described above in more detail, during the initial installation, the main fluid passage 110 and the body 100 inside the atmosphere (pressure) state, as described above, the main fluid passage 110 ) And the check valve 810 is not operated when the air pressure inside the body 100 is the same.

When the vacuum pump is operated in the standby state as described above, the main fluid passage 110 is switched to the vacuum state, and at this time, the inside of the body 100 is also switched to the vacuum state while the check valve 810 is opened.

Thereafter, the second actuator 310 is reversed and at the same time a space is formed between the first flange 300 and the second flange 400, the blade 600 enters the space, the entry of the blade 600 is After the completion of the second actuator 310, the main fluid passage 110 is divided into two independent spaces by pressing the blade while moving forward.

When the main fluid passage 110 is in the standby state because the inside of the body 100 is maintained in a vacuum state when the vacuum pump is not operated by the check valve 810 allowing the passage of fluid in one direction as described above. It is possible to prevent the inflow of the waste gas containing the powder into the body 100.

8, an exploded perspective view of a state in which the valve body 811 of the check valve 810 is partially cut is illustrated, and the check valve 810 includes a valve body 811, a vent hole 812, A pin 814, a play ring 815 and a check cover 816 are included.

The valve body 811 is formed in a cylindrical shape, the member is installed in the decompression room 800, the center of the valve body 811 is provided with a vent hole 812, the vent hole 812 is Air (waste gas) flowing from inside the body 700 serves to flow into the main fluid passage (110).

That is, the vent hole 812 is to allow the pressure-reducing through hole 700 and the body 100 communicate with each other.

In addition, a clearance adjustment protrusion 813, a pin 814, and a clearance o-ring 815 are provided on a surface adjacent to the pressure reducing hole 700 of the cylindrical valve body 811, that is, the flat surface.

The clearance adjustment protrusion 813 is formed at a corner portion of the surface adjacent to the valve body 811, and the clearance adjustment protrusion 813 is formed so that a space is formed between the valve body 811 and the pressure reducing hole 700. do.

In addition, a pin 814 and a play O-ring 815 are installed on the same surface on which the play adjustment protrusion 813 is formed, and the check cover 816 is installed on the pin 814, and the check cover 816 is the same. It is moved in the space formed by the play control projection 813.

In more detail, the check cover 816 passes air through the vent hole 812 while being selectively spaced or approached with the valve body 811 by the air flowing from the body 100. The check cover 816 is guided by a pin 814.

Meanwhile, the clearance o-ring 815 prevents the check cover 816 and the valve body 811 from being in surface contact so that the check cover 816 and the valve body 811 are spaced apart from each other, as shown in FIG. 7. Preferably, the clearance o-ring 815 has a diameter not larger than that of the check cover 816 so that the check cover 816 is supported by the air flowing from the inside of the body 100 to be spaced apart from the valve body 811. .

In addition, it may be good that the rapid exhaust hole 900 is formed in the decompression through-hole 700 so that the air flowing from the body 100 enters the main fluid passage 110 better.

The link member 500 is a member having one side connected to the operation rod 203 of the first actuator 200 described above. The link member 500 is compressed air provided to the first actuator 200. It is operated to move the blade 600 in the vertical direction.

The blade 600 is connected to the other side of the link member 500 and is a member for opening and closing the main fluid passage 110 while being operated up and down by the above-described drive of the first actuator 200, the body 100 described above It is operated in the sliding space 130 along the guide rail 120 of the) is entered between the first flange 300 and the second flange 400.

Meanwhile, the blade 600 as described above is pressurized by the second actuator 310 when compressed air flows into the second actuator 310 after entering between the first flange 300 and the second flange 400. While the blade 600 is fixed while the main fluid passage 110 is sealed.

In addition, when the pressurization by the second actuator 310 is released, the blade 600 releases the seal of the main fluid passage 110 and moves downward by the driving of the first actuator 200. ) Will open.

The best embodiments have been disclosed in the drawings and the specification. Herein, specific terms have been used, but they are used only for the purpose of illustrating the present invention and are not intended to limit the scope of the present invention as defined in the claims or the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

100-body 110-main fluid passage
120-Guide rail 130-slide space
200-first actuator 201-cylinder
202-piston 203-operating rod
300-first flange 310-second actuator
311 Compressed Air Inlet Through Hole 312 Gasket
313-guide unit
400-second flange
500-link member
600-blade 610-roller
700-Decompression through hole
800-decompression room 810-check valve
811 valve body 812 vent holes
813-Pin 814-Gap O-Ring
815-check cover
900-Express Exhaust Air

Claims

The main fluid passage 110 connected to the process chamber and the vacuum pump is formed with both sides opened, the guide rail 120 is provided on the inner side wall in the vertical direction, and the slide space 130 is formed therein. Body 100 is formed; and
Is coupled to the lower end of the body 100, the cylinder 201, the piston 202 is installed in the cylinder 201, and is connected to the piston 202 is introduced into the cylinder 201 A first actuator 200 having an operating rod 203 operated up and down by compressed air; and
A first flange 300 installed at one opening of the main fluid passage 100 and connected to the vacuum pump; and
A second flange 400 installed at the other opening of the main fluid passage 100 and connected to the process chamber; and
A second actuator 310 installed in the first flange 300 and advanced back and forth according to the inflow of compressed air; and
A link member 500 having one side connected to the operation rod 203; and
Is connected to the other side of the link member 500, the roller 610 is provided to operate in the slide space 130 along the guide rail 120, the first flange 300 and the second flange 400 A blade 600 which enters between the main fluid passages 110 and is sealed or opened as the second actuator 310 moves forward and backward.
A decompression through hole 700 formed in the second flange 400 and provided to communicate with the inside of the body 100; and
A check valve 810 installed in the pressure reducing hole 700 to allow passage of fluid only from the inside of the body 100 to the main fluid passage 110; And
The check valve is accommodated, vacuum decompression valve comprising a; decompression room (800) in communication with the pressure reducing through-hole.

The method according to claim 1,
The decompression through-hole 700 is provided between the decompression through-hole 700 and the decompression room 800 so that air flowing from the inside of the body 100 is smoothly discharged into the main fluid passage 110. 900, further comprising a vacuum gate valve.

The method of claim 1, wherein the check valve 810,
A cylindrical valve body 811 installed inside the decompression room 800 and having a vent hole 812 to communicate with the decompression through-hole 700 and the body 100; and
Spacing adjustment projection 813 is formed in the outer peripheral surface of the valve body 811 protruding to the edge of the surface adjacent to the pressure-sensitive through-hole 700; And
A pin 814 installed on the same surface as the clearance adjusting protrusion 813; And clearance o-ring 815; and
And a check cover (816) installed on the pin (814) to be selectively spaced apart from the valve body (811) by air flowing from the inside of the body (100).