KR101758802B1

KR101758802B1 - Protection apparatus of gate valve

Info

Publication number: KR101758802B1
Application number: KR1020150123087A
Authority: KR
Inventors: 송성태
Original assignee: 주식회사 마이크로텍
Priority date: 2015-08-31
Filing date: 2015-08-31
Publication date: 2017-07-17
Also published as: KR20170025943A

Abstract

The present invention relates to a protection device for a gate valve, which comprises a valve body having a fluid passage formed therein, an opening / closing part provided to slide inside the valve body so as to open / close the fluid passage, And a sealing ring installed to move up and down around the outer periphery of the protector and the protector provided on the valve body so as to form a fluid passage, characterized in that the sealing ring includes a sealing ring do. Therefore, the present invention provides the protection ring of the closed portion to be raised and lowered around the outer periphery of the protector, thereby minimizing the portion of the protection ring exposed to the inner circumferential portion of the protector and preventing the drive failure of the protection ring by the deposition material, The present invention provides an effect that can be reduced.

Description

[0001] PROTECTION APPARATUS OF GATE VALVE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a gate valve protection device, and more particularly, to a gate valve protection device that smoothly performs opening and closing operations of a gate valve installed between a vacuum chamber and a vacuum pump.

Generally, when an operation such as a liquid crystal display (LCD) substrate or a semiconductor wafer is performed such as an etching process, a deposition process, a sputtering process, or a special coating process requiring a vacuum state such as a parallax coating process, To form a vacuum environment. In this case, it is important to set and maintain an appropriate degree of vacuum. What is absolutely necessary at this time is a vacuum gate valve.

The vacuum gate valve is located in the passage connecting the chamber and the pump and serves to maintain or release the vacuum state by opening and closing the passage. Such a vacuum gate valve normally keeps the airtightness of the chamber by sealing the passage connected to the chamber by the operation of one driving plate and one airtight plate.

Therefore, the sealing technique between the vacuum working area of the semiconductor manufacturing apparatus and the atmosphere also greatly affects the quality of the semiconductor product. Therefore, since a vacuum valve which is installed between the chamber in which the semiconductor device is integrated and the vacuum pump that sucks air in the chamber and which opens and closes the suction force of the vacuum pump to the chamber plays an important role, Is also becoming an important problem.

In particular, the fluid in the vacuum chamber discharged through the vacuum gate valve includes various by-products. Such by-products are continuously attached to the inner wall of the housing in which the opening and closing plate of the actuator for driving the opening / closing plate of the gate valve is slid when the fluid is discharged, thereby interfering with the forward / backward movement of the opening / closing plate. A sealing member was required.

However, since the sealing member is installed on the inner circumferential portion of the fluid passage of the gate valve and is exposed to the inner circumferential portion where the deposition material such as powder is adhered, an abnormality occurs in the lifting operation of the sealing member, There is a problem in that the airtightness of the gasket is deteriorated.

As a result, there has been a problem that the gate valve is frequently dismantled to be cleaned or cleaned, and there is a problem in that a processing failure in the processing process in the vacuum semiconductor equipment connected thereto is provided due to the opening and closing performance of the fluid passage and the sealing performance.

Korean Registered Patent No. 10-0717865 (May 14, 2007)

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art as described above, and it is an object of the present invention to minimize a portion of a protection ring exposed in an inner circumferential portion of a protector and to reduce a defective driving of a protection ring by a deposition material, And a gate valve for protecting the gate valve.

Another object of the present invention is to provide a gate valve protection device capable of narrowing the fluid passage of the closed portion to increase the flow rate of the fluid, thereby reducing the deposition amount deposited on the fluid passage.

It is another object of the present invention to provide a gate valve protection device capable of guiding the lifting and lowering of the protection ring and minimizing the exposed portion of the protection ring.

Another object of the present invention is to provide a gate valve protection device capable of improving airtightness of a fluid passage by an opening and closing part and a sealing part.

According to an aspect of the present invention, there is provided a valve apparatus including a valve body having a fluid passage formed therein, an opening / closing unit configured to slide inside the valve body to open / close the fluid passage, And a sealing portion (40) provided movably in a flow direction around the fluid passage so as to close the sliding space of the opening and closing portion (20), wherein the sealing portion (40) A protector provided on the valve body portion to form a valve body; And a protection ring installed to move up and down around the outer periphery of the protector.

The sealing part (40) of the present invention is further characterized by a flange provided upstream of the fluid passage of the protector. The protector of the present invention is characterized in that the fluid passage formed in the inner periphery is formed narrower toward the downstream in the flow direction.

The protector of the present invention is characterized in that a guide piece for guiding the lifting and lowering of the protection ring is formed in the downstream direction of the fluid passage. And a hermetic member is provided in the protector or the protection ring to maintain airtightness between the protector and the protection ring of the present invention.

As described above, according to the present invention, since the protection ring is raised and lowered around the outer circumference of the protector of the closed part, the protection ring exposed to the inner circumference of the protector is minimized, Thereby reducing the defective drive of the motor.

In addition, by providing a flange having a large size of inner circumference of protection at the upstream of the closed portion, the fluid passage of the closed portion is narrowly formed to increase the flow rate of the fluid, thereby reducing the amount of deposition deposited thereon.

Further, the guide piece is protruded downward at the lower portion of the protection, thereby providing an effect of guiding the lifting and lowering of the protection ring and minimizing the exposed portion of the protection ring.

Further, by providing a hermetic member between the protector and the protection ring to maintain airtightness, the airtightness of the fluid passage can be improved by the opening and closing portions and the sealing portion.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a gate valve protection apparatus according to an embodiment of the present invention; FIG.
2 is an exploded view showing a gate valve protection apparatus according to an embodiment of the present invention;
3 is a cross-sectional view illustrating a gate valve protection apparatus according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is an explanatory view showing a gate valve protection apparatus according to an embodiment of the present invention, FIG. 2 is an exploded view showing a gate valve protection apparatus according to an embodiment of the present invention, FIG. 3 is a cross- Sectional view showing a protection device for a gate valve according to an embodiment.

1 and 2, the gate valve protection device according to this embodiment includes a valve body 10, an opening / closing part 20, an opening / closing part 30, a sealing part 40, and a hermetic driving part 50, And a vacuum gate valve provided between the vacuum chamber and the vacuum pump for smoothly opening and closing the gate valve.

The valve body 10 is a box-shaped body member constituting a vacuum gate valve provided between the vacuum chamber and the vacuum pump and having a fluid passage formed therein. The body 11 includes a body 11, a body cover 12, a drive unit 13, And a drive cover (14).

The body 11 is formed in a rectangular box shape and a fluid passage 11a having an upper portion and a lower portion opened is formed at one side of the body 11 and a sliding space is formed in the upper portion of the fluid passage 11a in a direction perpendicular thereto have. In addition, a hermetic member such as an O-ring is provided around the lower portion of the fluid passage 11a of the body portion 11 to maintain airtightness.

The body cover 12 is coupled to an upper portion of the body 11 to close the upper portion of the body 11 and a lock engagement hole 12a is formed at one side thereof in communication with the fluid passage 11a of the body 11 .

The driving unit 13 is coupled to one side of the body 11 and supplies the air pressure or the hydraulic pressure of the driving source to the opening and closing drive part 30 and the hermetic driving part 50 to drive the closure part 20 and the closing part 40 Respectively.

The drive cover 14 is a cover member that covers the opening and closing drive unit 30 installed on the body cover 12 so as to be detachably attached to one side of the upper surface of the body cover 12, It is of course possible to provide a ventilation hole for discharging generated heat to the outside.

The drive cover 14 is provided at an upper portion of the opening and closing guide portion 30 to prevent foreign matter such as dust and contaminants from entering the opening and closing guide portion 30, thereby preventing the risk of malfunction.

The opening and closing part 20 includes opening and closing plates 21, a sliding block 22 and a sliding member 23 that are provided to slide inside the valve body 10 to open and close the fluid passage. The fluid passage 11a is opened and closed as the fluid moves back and forth into the sliding space of the fluid passage 10.

The opening and closing plate 21 is a flat plate member formed in a rectangular shape or a circular shape and is provided so as to cross perpendicularly to the fluid passage 11a so as to move back and forth so as to open and close the fluid passage 11a of the valve body portion 10.

The sliding block 22 is provided on both sides of the opening and closing plate 21 and guides the sliding of the opening and closing plate 21. The sliding block 22 is provided on both sides of the opening and closing plate 21 in the longitudinal direction, In the forward and rearward directions.

The sliding member 23 is a slider fixed to the lower surface and the outward side surface of the sliding block 22 to reduce sliding friction upon contact with the valve body 10 and may be a rolling member such as a roller bearing, And a fixing pin formed in hemispherical shape so as to be in point contact with the body 10.

It is preferable that at least two or more of the sliding members 23 are provided on the lower surface and the outward facing surface of the sliding block 22, respectively.

It goes without saying that the opening and closing part 20 may further include a spacer provided between the opening and closing plate 21 and the sliding block 22 to adjust the spacing distance therebetween.

It goes without saying that the opening and closing part 20 may further include a flange part for urging the opening and closing plate 21 in a direction perpendicular to the sliding direction so that the opening and closing plate 21 is brought into close contact with the fluid passage.

Such a resilient means is constituted by a coil spring, and a plurality of the resilient means are provided at the lower edge of the opening / closing plate 21 to give a upward lubrication force to the upward pressing force.

The actuator 30 is provided at an upper portion of the body cover 12 of the valve body 10 to drive the actuator 30 in the forward and backward directions and includes an actuator 31 and a link mechanism 32, And the like.

As the actuator 31, various driving means such as a cylinder, a linear motor, and the like may be used as a driving source for providing a sliding driving force to the opening / closing portion 20 through the link mechanism 32. [

The link mechanism 32 is a power transmitting member that switches the linear driving force of the actuator 31 to a rotational driving force by mechanical connection and slidably feeds the opening / closing plate 20 in the forward and backward directions by the rotational force.

2 and 3, the sealing portion 40 is a sealing means provided movably upward or downward along the flow direction around the fluid passage so as to close the sliding space of the opening and closing portion 20, and the protector 41 ), A protection ring 42, an upstream flange 43 and a downstream flange 44.

The protector 41 is a passage member provided in the valve body 10 so as to form a fluid passage. The protector 41 is formed in a rectangular or circular shape and has a communicating passage 41a communicating with the fluid passage 11a at its inner periphery And a hermetic driving part 50 is mounted on the lower edge and a fixing plate 41c is coupled to both sides.

A fitting hole 41b is formed downward around the upper portion of the communication path 41a of the protector 41 and the fitting hole 41b is formed at an equal interval around the outer circumference of the communication path 41a. An airtight member such as an O-ring is provided around the upper portion of the communication path 41a of the protector 41 to maintain airtightness between the protector 41 and the upstream flange 43.

The protector 41 is formed as a fluid passage formed in the inner periphery of the communication passage 41a and narrowed toward the downstream side in the flow direction. The protection ring 42 is in contact with the outer peripheral surface of the fluid passage at the downstream of the fluid passage And a guide piece 41d for guiding to ascend and descend is formed to protrude in the downstream direction.

The protector 41 is provided with a hermetic member such as an O-ring on the outer circumferential surface of the protector 41 so as to maintain the airtightness between the protection rings 42 and the protector 41 and the protection ring 42, Thereby maintaining the airtightness.

The protection ring 42 is a ring member which is installed to close and ascend around the outer periphery of the protector 41. The protection ring 42 opens and closes the sliding space as it ascends and descends in a direction parallel to the fluid passage 11a.

The protection ring 42 is provided at an upper portion of the opening and closing part 20 and has a communication passage 42a formed therein to communicate with the fluid passage 11a of the valve body 10, And the outer peripheral portion thereof is inserted and raised on the outer peripheral surface of the protector 41.

An airtight member such as an O-ring is provided around the inner periphery of the protection ring 42 to maintain the airtightness between the protection ring 42 and the protector 41, An airtight member such as an O-ring is also provided at the lower end of the valve body 10 to maintain the airtightness between the protection ring 42 and the valve body 10 and between the protection ring 42 and the opening and closing plate 21 .

The upstream flange 43 is a flange provided upstream of the fluid passage of the protector 41 and connected to the upper portion of the protector 41 and communicating with the fluid passage 11a of the valve body 10 43a are formed to facilitate connection between the vacuum chamber and the gate valve.

The downstream flange 44 is a flange provided downstream of the fluid passage of the protector 41 and is connected to the lower portion of the protector 41 and communicates with the fluid passage 11a of the valve body 10 44a are formed to facilitate connection between the vacuum pump and the gate valve.

The hermetic driving part 50 is a driving part which is installed in the driving body part 10 and drives the hermetic sealing part 40. One end part of the hermetic driving part 50 is coupled to a supporting plate formed outwardly around the outer periphery of the protection ring 42, And four actuators provided at corner portions of the protection ring 42 so as to move up and down. Needless to say, various actuating means such as a cylinder, a linear motor, and the like, which provide a linear driving force, may be used as the actuator of the hermetically-

As described above, according to the present invention, since the protection ring is raised and lowered around the outer periphery of the protector of the closed portion, the portion of the protection ring exposed to the inner peripheral portion of the protector is minimized, Thereby reducing the defective drive of the motor.

The present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. Therefore, the above embodiments are merely illustrative in all respects and should not be construed as limiting.

10: valve body part 20: opening / closing part
30: opening and closing port portion 40: sealing portion
50:

Claims

(20) slidably installed in the valve body (10) so as to open and close the fluid passage, and a valve body (10) A protection device for a gate valve comprising a sealing part (40) provided movably in a flow direction around a passage,
The sealing portion (40)
A protector mounted on the valve body portion to form the fluid passage; And
And a protection ring installed to move up and down around the outer periphery of the protector,
Wherein the protector is formed around the downstream of the fluid passage so that a guide piece that protrudes in a downstream direction to guide the protection ring in contact with the outer circumferential surface of the fluid passage so as to ascend and descend.

The method according to claim 1,
Wherein the sealing portion (40) further comprises a flange (42) provided upstream of the fluid passage of the protector.

The method according to claim 1,
Wherein the protector is formed so that the fluid passage formed in the inner periphery becomes narrower toward the downstream in the flow direction.

delete

The method according to claim 1,
And a hermetic member is provided in the protector or the protection ring so as to maintain airtightness between the protector and the protection ring.